Triboelectric Rotary Motion Sensor For Industrial-Grade .

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sensorsArticleTriboelectric Rotary Motion Sensor for Industrial-Grade Speedand Angle MonitoringXiaosong Zhang 1,2 , Qi Gao 1 , Qiang Gao 1,2 , Xin Yu 1,3 , Tinghai Cheng 1,2,4, *12345* Citation: Zhang, X.; Gao, Q.; Gao, Q.;Yu, X.; Cheng, T.; Wang, Z.L.Triboelectric Rotary Motion Sensorfor Industrial-Grade Speed and AngleMonitoring. Sensors 2021, 21, 1713.https://doi.org/10.3390/s21051713and Zhong Lin Wang 1,4,5Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 101400, China;2201901027@stu.ccut.edu.cn (X.Z.); gaoqi@binn.cas.cn (Q.G.); 2201801004@stu.ccut.edu.cn (Q.G.);yuxinnick@ccut.edu.cn (X.Y.); zhong.wang@mse.gatech.edu (Z.L.W.)School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, ChinaSchool of Electrical and Electronic Engineering, Changchun University of Technology,Changchun 130012, ChinaCUSPEA Institute of Technology, Wenzhou 325024, ChinaSchool of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0245, USACorrespondence: chengtinghai@binn.cas.cnAbstract: Mechanical motion sensing and monitoring is an important component in the field ofindustrial automation. Rotary motion is one of the most basic forms of mechanical motion, so it is ofgreat significance for the development of the entire industry to realize rotary motion state monitoring.In this paper, a triboelectric rotary motion sensor (TRMS) with variable amplitude differential hybridelectrodes is proposed, and an integrated monitoring system (IMS) is designed to realize real-timemonitoring of industrial-grade rotary motion state. First, the operating principle and monitoringcharacteristics are studied. The experiment results indicate that the TRMS can achieve rotation speedmeasurement in the range of 10–1000 rpm with good linearity, and the error rate of rotation speed isless than 0.8%. Besides, the TRMS has an angle monitoring range of 360 and its resolution is 1.5 inbidirectional rotation. Finally, the applications of the designed TRMS and IMS prove the feasibility ofself-powered rotary motion monitoring. This work further promotes the development of triboelectricsensors (TESs) in industrial application.Keywords: triboelectric sensors; rotary motion; hybrid electrodes; integrated monitoring system;industrial applicationAcademic Editor: Roberto TetiReceived: 3 February 2021Accepted: 18 February 2021Published: 2 March 2021Publisher’s Note: MDPI stays neutralwith regard to jurisdictional claims inpublished maps and institutional affiliations.Copyright: 2021 by the authors.Licensee MDPI, Basel, Switzerland.This article is an open access articledistributed under the terms andconditions of the Creative CommonsAttribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).1. IntroductionSensor technology is one of three central pillars in modern information technology [1,2]and is applied widely in the fields of industrial automation, automotive electronics, andcommunication technology [3–5]. It has become an indispensable criterion for measuringthe development of scientific research and industrial manufacturing. Among all kinds ofmechanical motions, rotary motion is one of the most basic forms in the field of industrialautomation, which has always been the research hotspot in the fields of science andengineering applications [6–8]. The traditional sensing technologies for rotary motionmainly include optoelectronic transformation [9,10], electromagnetic induction [11], andelectrical effects [12]. Moreover, with the continuous improvement of the level of industrialautomation and manufacturing requirements, passive sensor technology with self-poweredfunction has attracted more and more attention from researchers all over the world [13–15].The triboelectric nanogenerator (TENG, also called the Wang generator [16]), firstproposed by Wang Group in 2012, provided a new approach of converting mechanicalenergy into electricity [17–19]. The output signal of TENGs can well reflect the change ofmechanical excitation, and TENG has good adaptability to various forms of mechanicalmotion, thus it is considered to be the potential solution of self-powered sensing [20–24].In recent years, researchers have realized a preliminary exploration of rotation sensingSensors 2021, 21, 1713. com/journal/sensors

Sensors 2021, 21, 17132 of 11and monitoring [25–29]. For instance, Xie et al. integrated a triboelectric sensor into abearing to achieve rotational speed monitoring of shaft components and applied the sensorto the industrial application [30]. Wang et al. proposed a highly sensitive triboelectricself-powered angle sensor used in the fields of robotic arms and personalized medicalcare, which has the advantages of high resolution, lightweight, and thin thickness [31].Previous studies are valuable for the development of triboelectric sensors (TESs) [32–35].Furthermore, to achieve a comprehensive description of the basic state of the rotary motionin the industrial field, it is essential to monitor multiple rotation parameters simultaneouslyby TESs. On this basis, a systematic and integrated assembly can further promote thepractical application of TESs in industrial application.Here, we propose a triboelectric rotary motion sensor (TRMS) with variable amplitudedifferential hybrid electrodes. The hybrid electrodes comprise a variable amplitude electrode and a differential electrode. The rotation speed and direction can be analyzed throughthe change of amplitude and period of the A-phase electrical signals generated by thevariable amplitude electrode. Moreover, the B-phase sine electrical signals generated by thedifferential electrode can further improve the sensor’s resolution. To verify the feasibility ofthe TRMS, a series of experiments are carried out to evaluate the monitoring characteristicsof the sensor. In the speed range of 10–1000 rpm and the angle range of 360 , the TRMS canmeet the basic requirements of the sensor signal monitoring, and has an angle monitoringwith a resolution of 1.5 in both clockwise (CW) and counterclockwise (CCW) rotation.Compared with commercial encoders, the TRMS can achieve good linearity and a low errorrate. Based on the industrial applications of the designed integrated monitoring system(IMS), this work can realize real-time monitoring of industrial-grade rotary motion state,and be considered as possessing good prospects for industrial application.2. Materials and MethodsThe basic structure of the TRMS is illustrated schematically in Figure 1a, and theprototype is mainly composed of a rotor, a stator, a shaft, and a shell. The rotor consistsof a layer of polytetrafluoroethylene (PTFE) film, a printed circuit board (PCB), a silicagel gasket, a turntable, and an adjustment mechanism made of aluminum alloy (AL7075).The stator consists of a silica gel gasket and a PCB. The PCB comprises a layer of copperelectrodes with different shapes (thickness 35 µm) and a bakelite disk (thickness 1 mm)through established PCB production technology. A layer of PTFE with a thickness of80 µm is attached to the surface of the copper electrodes of the rotor. To improve the spaceutilization and output power of the sensor, each group of variable amplitude electrodesof the stator corresponds to one electrode of the rotor in the A-phase, and each pair ofdifferential electrodes in the stator corresponds to one electrode of the rotor in the B-phase.To better transmit torque, the turntable is used to connect the shaft and the PCB. Besides,the adjustment mechanism of the rotor and the silica-gel gasket can allow the rotor and thestator to more fully come into contact. The rotor and the stator consist of a TENG module,which converts external rotary mechanical energy into electricity based on the coupling ofthe triboelectric effect and electrostatic induction.As shown in Figure 1b, the electrodes of the TENG module are divided into twophases: A-phase and B-phase. For the convenience of observation, the interdigital electrodeinterval θ is set as 20 . The stator copper electrodes of A-phase and B-phase are two groupsof annular-arranged interdigital electrodes. In the A-phase, every two electrodes of thestator with the same size form a pair of interdigital electrodes. However, the length ofeach pair of adjacent interdigital electrodes is different. As the absolute value of the outputsignal is proportional to the friction area, the amplitude of adjacent periodical signalsoutput by the A-phase is variable. When the rotation direction is recognized by the variableamplitude electrical signals, the sensor needs to output at least three period electricalsignals with different amplitude. Therefore, every three pairs of interdigital electrodes ofthe A-phase are set as a group of circulating electrodes. Besides, the B-phase electrodes ofthe stator are a group of differential interdigital electrodes with the same electrode interval

Sensors 2021, 21, x FOR PEER REVIEWSensors 2021, 21, 17133 of 113 of 11three period electrical signals with different amplitude. Therefore, every three pairs ofinterdigital electrodes of the A-phase are set as a group of circulating electrodes. Besides,the B-phase electrodes of the stator are a group of differential interdigital electrodes withthesameelectrodeintervaltheas signalthe A-phase.the signalphases correspondingtoas theA-phase.Further,phases Further,correspondingto A-phaseand B-phase areA-phaseareshifteddirection,by θ/2 alongdirection,can doubleshifted byandθ/2B-phasealong therotationwhichthecanrotationdouble thesensor’swhichresolution.Whenthe sensor’snumber ofdifferentialelectrodegroups increases,the sensor’sresolutioncan be furthertheresolution.Whenthe numberof differentialelectrodegroups increases,theelevated.resolutionIt is worththat theA-phaseof therotorare evenlydividedsensor’scannotingbe furtherelevated.It iselectrodesworth notingthatthe A-phaseelectrodesintoelectrodesaccordingto thechangein the lengthof a setof statorvariableofthethreerotorcopperare evenlydividedinto threecopperelectrodesaccordingto thechangein theamplitudewhichcan effectivelythe interferencethe amplitudechangelengthof aelectrodes,set of statorvariableamplitudereduceelectrodes,which cantoeffectivelyreducetheof the electricalsignal.interferenceto theamplitude change of the electrical signal.Figure 1c,d1c,d showshow photographsphotographs ofof thethe assembledassembled TRMS.TRMS. TheThe interdigitalinterdigital electrodeelectrodeFigureinterval θθ isis processedprocessed toto 3 3 underunder thethe premisepremise ofof manufacturingmanufacturing accuracy.accuracy. Therefore,Therefore, thetheinterval . The PCBs of the rotor and stator are shown inresolutionoftheprototypecanreach1.5resolution of the prototype can reach 1.5 . The PCBs of the rotor and stator are shown inFigure 1e,f,1e,f, respectively.respectively.FigureFigureFigure 1.1. StructuralStructural designdesign ofof thethe triboelectrictriboelectric rotaryrotary motionmotion sensorsensor (TRMS).(TRMS). (a)(a) SchematicSchematic structurestructure ofof thethe TRMS.TRMS. (b)(b)Relativepositionplacementoftheelectrodes(θ 20 )inthestatorandrotor.(c,d)Photographoftheassembled Relative position placement of the electrodes (θ 20 ) in the stator and rotor. (c,d) Photograph of the assembledTRMS.TRMS.(e)(e)Photograph of the printed circuit board (PCB) of the rotor. (f) Photographs of front and back of the PCB (θ 3 ) of thePhotograph of the printed circuit board (PCB) of the rotor. (f) Photographs of front and back of the PCB (θ 3 ) of the statorstator (scale bar: 1 cm). PTFE, polytetrafluoroethylene.(scale bar: 1 cm). PTFE, polytetrafluoroethylene.TheThe mechanicalmechanical energyenergy inin thethe TRMSTRMS comescomes fromfrom thethe synchronoussynchronous rotaryrotary motionmotion edbytheelectricalsignalthe rotor, so the external rotary motion can be monitored by the electrical signal generatedgeneratedby therotor iscontactin slidingwithtothestatorto createelectricalby the TRMS.TheTRMS.rotor isThein slidingwithcontactthe statorcreateelectricalsignalswithsignalswith simultaneously.two phases simultaneously.Taking theB-phaseas antheprincipleoperatingtwo phasesTaking the B-phaseas anexample,theexample,operatingofprincipleof ricalthesignalsis shownin isFigure2a.in Figure 2a.Whenthe coppercopper electrodeselectrodes (E(E11,, EE22,, andWhen thethe rotorrotor slidesslides byby externalexternal rotary,rotary, theand EE33)) inin ertheactionofthetriboelectriceffect.rotor and stator will generate positive charges under the action of the triboelectric effect.Owingto e PTFEfilmgeneratewill generateOwing totriboelectricpolarities,the PTFEfilm willnegativenegativecharges.charges.The electrodeof EtheE1 alignedis whollyalignedwith theofelectrodestatorE2The electrodeof the rotorwhollywiththe electrodethe statorofE2the(statei). As1 isrotor(statei). AstheisPTFEfilmpastedon theofelectrodesof therotor, chargesthe positiveofthe PTFEfilmpastedonistheelectrodesthe rotor, thepositiveof thechargeselectrodetheelectrodearesumequalto thesum ofthe negativechargesofonsurfaceof thePTFEE1 areequal toE1theof thenegativechargeson the surfacethethePTFEand theelectrodeE2 . There is no charge transfer between the interdigital electrodes in the stator due to theelectrostatic equilibrium. When the electrode E1 slides from the corresponding position of

Sensors 2021, 21, x FOR PEER REVIEWSensors 2021, 21, 17134 of 114 of 11and the electrode E2. There is no charge transfer between the interdigital electrodes in thestator due to the electrostatic equilibrium. When the electrode E1 slides from thecorrespondingposition of2 to electrode E3 (state ii to state iii), the originalelectrode E2 to electrodeE3 electrode(state ii toEstateiii), the original electrostatic equilibrium will beelectrostaticequilibriumwillbedestroyed.the actionof electrostaticinduction,willandestroyed. Under the action of electrostaticUnderinduction,an electricpotential edbetweentheinterdigitalelectrodesinthebe generated between the interdigital electrodes in the stator, which will cause electrons tostator,which willcause electronsto flowinterdigitalelectrodes ofthe statorflow betweenthe interdigitalelectrodesof betweenthe statortheto forma new tand causing the external load to form a transient current. Once the electrode E1 completelycurrent.the electrodeE1 iv),completelyoverlapselectrodeto Ethe3 (state iv), all theoverlapsOncethe electrodeE3 (stateall the electronsarethetransferredelectrode E3 , andelectronsaretransferredtotheelectrodeE3, and the electrostatic equilibrium between thethe electrostatic equilibrium between the interdigital electrodes of the stator is reachedinterdigitalthe statorreached signalagain. generationThis is the halfcycle Similarly,of the electricalagain. Thiselectrodesis the halfofcycleof nswillthe rotor continues to slide, the electrons will flow back from electrode E3 toelectrodeE2 .flowback fromelectrodecurrentE3 to electrodeE2. ,an alternatingsignal is uring the continuous relative sliding of the slider.of the slider.Figurerotaryprocessof theTRMSin strateillustratea acyclecyclerotaryprocessof theTRMSin onresultsofthepotentialdistributionsusingtion directions and finite element simulation results of the potential distributions sareare shownshown inin FigureFigure 2b(ii),c(ii).2b(ii),c(ii).Figure 2.2. OperatingOperating principleprincipleofof thethe TRMS.TRMS. (a)(a) TheThe workingworking principleprinciple ofof generatinggenerating thethe electricalelectrical signals.signals. ributionsdistributionsofofthetheTRMSTRMSandand thethe sketchessketches ofof signalsignal generationgenerationprocessesprocessesunderunder thethedifferentcounterclockwise.different rotationrotation directions.directions. CW,CW, clockwise;clockwise; CCW,CCW, ristics3.1.Inthethe electricalelectrical measurementmeasurement processTRMSis signalby a commercial motor at specified rotation speeds. To meet the requirements for theprocessedby the bymicrocontrollerunit (MCU)ensureauthenticityof the analyzedsignalprocessedthe microcontrollerunit and(MCU)andtheensurethe authenticityof MS.Amongthem,the them,resistanceanalyzed signal, a voltage divider circuit is connected to the TRMS. Amongtherelationship of the voltage divider circuit is R1 R2 . Resistances of the loads R1 and R2 ofthe voltage divider circuit are selected as 200 MΩ and 0.1 MΩ, respectively. To carry out

Sensors 2021, 21, x FOR PEER REVIEWSensors 2021, 21, 17135 of 115 of 11resistance relationship of the voltage divider circuit is R1 R2. Resistances of the loads R1and R2 of the voltage divider circuit are selected as 200 MΩ and 0.1 MΩ, respectively. Tocarry out the experiment and application of the TRMS, the electrical signals after passingthroughthe voltagedivider circuitcanbe acquired,processed,by twothe experimentand applicationof theTRMS,the electricalsignalsandafteranalyzedpassing throughdifferentsystems.Figure3a canillustratesthe schematicsof thesystemIMSthe voltagedividercircuitbe acquired,processed,andexperimentanalyzed bytwo anddifferentofthe signalsthroughasystems.Figure3a illustratesschematicsof theacquiresexperimentsystemand IMSof thedataacquisitioncard The(NI experimentUSB-6210) andusesNI LabVIEWsoftwareto alsignals througha dataelectricalsignals.Therelevant andinformationsuch as softwarethe rotationspeed,theangle,andacquisitioncard (NIUSB-6210)uses NI LabVIEWto processelectricalsignals. Therelevant informationsuchisasobtainedthe rotationspeed, angle,directionof externaldirectionof externalrotary motionby analyzingtheandelectricalsignalsandrotary displayingmotion is obtainedelectricalTosignalsdisplayingthem ofonfinallythem efinallyintegratedapplicationthe ltheworkingstates,the IMS ofusesan MCUforelectricalin actualworking states,the IMSusesan ) processing,is used toand analysis.A liquidcrystalspeed,displayangle,(LCD)andis usedto visuallythe rotationspeed,visuallydisplaythe rotationdirectionof thedisplayrotary processedbytheMCU.by the ifferentrotationrotationspeeds.speeds. ,andA&B-phases.(c)and integrated monitoring system (IMS) of the TRMS. (b) The CW rotation: A-phase,

Sensor technology is one of three central pillars in modern information technology [1,2] and is applied widely in the fields of industrial automation, automotive electronics, and communication technology [3–5]. It has become an indispensable criterion for measuring the development of scientifi

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