Very Large Scale Integration (VLSI)

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Very Large Scale Integration(VLSI)Lecture 1Dr. Ahmed H. MadianAh madian@hotmail.comDr. Ahmed H. Madian-VLSI1

Course outline Overview of VLSITechnologies for Micro- and NanostructuresLow-Voltage and power designSynchronous and Asynchronous Circuit DesignArchitectures for VLSI ApplicationsTest and Measurement Techniques for VLSICircuitsDr. Ahmed H. Madian-VLSI2

What is VLSI? VLSI stands for (Very Large Scale Integratedcircuits)Craver Mead of Caltech pioneered the filed of VLSIin the 1970’s.Digital electronic integrated circuits could beviewed as a set of geometrical patterns on thesurface of a silicon chip.Complexity could thus be dealt with using theconcept of repeated patterns that were fittedtogether in structured manner.Dr. Ahmed H. Madian-VLSI3

VLSI History Jack Kilby, working at Texas Instruments, first dreamed up the idea of amonolithic “integrated circuit” in July 1959. By the end of the year, he hadconstructed several examples, including the flip-flop shown in the patentdrawing above. Components are connected by hand-soldered wires andisolated by “shaping” and pn diodes used as resistors.Dr. Ahmed H. Madian-VLSI4

VLSI History (cont.) 1961: TI and Fairchild introduced the first logic IC’s (cost 50 in quantity!). This is a dual flip-flop with 4 transistors.1963: Densities and yields are improving. This circuit hasfour flip flops.In 1970, making good on its promise to itsinvestors Intel starts selling a 1K bit RAM,the 1103.Dr. Ahmed H. Madian-VLSI5

VLSI History (cont.) Introduced in 1972, the 8008 had 3,500transistors supporting a byte-wide datapath. Despite its limitations, the 8008was the first microprocessor capable ofplaying the role of computer CPU asdemonstrated on the cover of the July‘74 issue of Radio-Electronics.Dr. Ahmed H. Madian-VLSI6

Today Many disciplines havecontributed to the currentVLSI designs: solid-state physicsmaterials sciencelithography and fabdevice modelingarchitecturealgorithmsCAD toolscircuit design & layoutDr. Ahmed H. Madian-VLSI7

Chip ComplexityChip classification according to number of active elements and minimal feature size:Dr. Ahmed H. Madian-VLSI8

VLSI Chip Types Full customEvery circuit is custom designedApplication-specific integrated circuits(ASICS) Design is created using astandard CAD tools without the need tointeract with the silicon structureSemi-customIn between of full-custom and ASIC-typecircuits. The majority of the chip is designedusing a primitive predefined cells (standardcells) from library as building blocks.Dr. Ahmed H. Madian-VLSI9

Top design levelDesignhierarchyoverviewbottom design levelSystem specificationsInitial conceptAbstract High-level modelVHDL, Verilog, HDLSystem designand verificationLogic synthesisLogic designand verificationCircuit designCMOS designand verificationphysical designManufacturingFinishedVLSIchipDr. Ahmed H.Madian-VLSISilicon logic designand verificationMass production,testing andpackagingMarketing10

Top design levelVLSIDesignbottom design levelSystem specificationsInitial conceptAbstract High-level modelVHDL, Verilog, HDLSystem designand verificationLogic synthesisLogic designand verificationCircuit designCMOS designand verificationphysical designManufacturingFinishedVLSIchipDr. Ahmed H.Madian-VLSISilicon logic designand verificationMass production,testing andpackagingMarketing11

Physical design CMOS ICs are electronic switchingnetworks that are created on small area ofsilicon wafer using complex set of physicaland chemical processes.A primary task for VLSI designer is totranslate circuit schematics into siliconform (this process is called physical design)Dr. Ahmed H. Madian-VLSI12

Design Examples VLSI Draw the CMOS realization and the layout oflogic functionf a b. c Colors of layerspolysilicon (gates): RedDoped n /p (active) : GreenN-Well: YellowMetal 1: BLUEMetal 2: GreyContacts: Black X’sDr. Ahmed H. Madian-VLSI13

CMOS RealizationVDDbcafbacDr. Ahmed H. Madian-VLSI14

Logic function LayoutVDDN-WellbPFETcP afbaNFETN cDr. Ahmed H. Madian-VLSI15

Logic function LayoutVDDVDDN-WellcPFETXbXbacXafbaNFETcDr. Ahmed H. Madian-VLSI16

Logic function LayoutVDDVDDN-WellbcPFETXXbaXcXafbfaNFETXXXcGNDDr. Ahmed H. Madian-VLSI17

Layout Rules Layout rules are the common language between design andprocess engineersconservative rules absorb process disturbances and variationslayout rules must be respected by the designerlayout rules reflect the limits of a process, they describe: minimal distance, overlapminimal width (e.x. channel length, λ)layout readability is improved using colors: ct, viablueredgreenyellowbrownblackDr. Ahmed H. Madian-VLSI18

LayoutDr. Ahmed H. Madian-VLSI19

Stick Diagram stick diagrams aretechnology independentno layout rules need tobe knownmask layout may begenerated automaticallyDr. Ahmed H. Madian-VLSI20

Digital Layout: horizontal or verticalgates? Vertical gates Good for circuits where fetssizes are similar and eachgate has limited fanout. Bestchoice for multiple input staticgates and for datapaths.Horizontal gates Good for circuits where long and shortfets are needed or where nodes mustcontrol many fets. Often used inmultiple-output complex gates (e.g,sum/carry circuits).Dr. Ahmed H. Madian-VLSI21

Eliminating GapsDr. Ahmed H. Madian-VLSI22

Complex CMOS Gates compactlayout. Euler Rule: Generate an n-graph by replacing the nfet blockwith vertices for nodes and edges for fetsGenerate a dual p-graphFind a sequence containing all edges in the ngraph. This sequence is called Euler n-path.Generate an Euler p-path with the same labelingas the Euler n-path. If not possible start again.The labeling sequence of the 2 Euler paths are thegate sequence of the single row nfet/pfet CMOSgate.Dr. Ahmed H. Madian-VLSI23

Example Draw the most compact layout for thefollowing logic function using Euler’s rule.F A.(B C)Dr. Ahmed H. Madian-VLSI24

SolutionVDDFACN1ABFAN2CN2VDDCN1BFBGNDGNDDr. Ahmed H. Madian-VLSIA B C25

Layout of ExampleA B CABCDr. Ahmed H. Madian-VLSI26

Design Rules Why we need design rules? We can specify the design rules using someconvenient units, e.g., microns but what happens ifwe want to manufacture the chip using differentmanufacturers? use an abstract unit, the lambda ( ), and scale the designto the appropriate actual dimensions when the chip is to bemanufactured.Each piece of fabrication equipment used in the ICmanufacturing process has limited accuracy.So, we need rules to ensure that the inaccuracy inthe fabrication will not result in malfunction IC.Dr. Ahmed H. Madian-VLSI27

Lambda Rule Design rules based on single parameter, λSimple for the designerWide acceptanceProvide feature size independent way of setting out maskIf design rules are obeyed, masks will produce workingcircuitsMinimum feature size is defined as 2 λUsed to preserve topological features on a chipPrevents shorting, opens, contacts from slipping out of areato be contactedDr. Ahmed H. Madian-VLSI28

Lambda-based Rules One lambda (λ) one half ofthe “minimum” maskdimension, typically the lengthof a transistor channel. Thiscan be used to derive designrules and to estimate minimumdimensions of a junction areaand perimeter before atransistor has to be laid out.Dr. Ahmed H. Madian-VLSI29

Lambda-based Rules, why? probably okay for retargeting between “similar”processes, e.g., when later process is a simple“shrink” of the earlier process. Some 0.35μmprocesses are shrinks of an earlier 0.5μm process.Can be useful for “fabless” semiconductorcompanies.most industrial designs use micron rules to getthe extra space efficiency. Cost of retargeting byhand is acceptable for a successful product, butusually it’s time for a redesign anyway.Dr. Ahmed H. Madian-VLSI30

Design Rules wpA set of geometrical specifications that dictate the design ofthe layout masks.It provides numerical values for minimum dimensions, linespacing, and other geometrical quantities that are derivedfrom the limits of a specific processing line.This rules must be followed to ensure functional structureson the fabricated chip.Poly (gate)Sp-pwpPoly (gate)Wp min. width of a polysiliconlineSp-p min. poly-to-poly spacingDr. Ahmed H. Madian-VLSI31

Design Rules Classified into four maintypes wpwpMin. width to avoid breaksMin. spacing to avoidshortsMin. surroundMin. extensionoxideActivecontactcutoxideSa-acN P-substrateoxideoxidePoly (gate)N Sp-pP-substratePoly (gate)Dr. Ahmed H. Madian-VLSI32

Design Rules Min. extension to ensurecomplete overlapsdpoDrain-sourceshortDr. Ahmed H. Madian-VLSI33

Design Rules (cont.) Most foundry allows submission of designs usingsimpler set of design rules that can be easily scaled todifferent processes.These are called “lambda design rules” that has unitsof µm.All distance and widths and spacing are written asvalue m , where m is scaling multiplier.for ex.: w 3 , s 4 If the factory will use technology 0.15 µmw 0.45 µm, s 0.6 µmDr. Ahmed H. Madian-VLSI34

Design Rules The masking sequence was established as: P-type substratenWellActivePolypSelectnSelectActive contactPoly contactMetal1ViaMetal2OverglassDr. Ahmed H. Madian-VLSI35

DR for N-Wells Required for pFET Snw-nwWnw-nwN-WellSnw-nwN-WellP-substratewnw-nwDr. Ahmed H. Madian-VLSIwnw-nw36

DR for Active Areas Silicon devices are built on active areas of thesubstrate FOXWa min width of active featureSa-a min. edge-to-edge spacing of active mask polygonActiveActiveSilicon substrateWaSa-aDr. Ahmed H. Madian-VLSI37

DR for Doped silicon (n ) FOXWa min width of an active areasa-n min. active-to-nSelect spacingActiveActiveN N Sa-nwaSilicon substrateSa-nDr. Ahmed H. Madian-VLSI38

DR for Doped silicon (P )Wa min width of an active areasa-p min. active-to-nSelect spacingSa-nw min. p to nWell spacing P SelectFOXSp-nwP SelectActivewaP N-wellSilicon substrateSa-nSa-nSp-nwDr. Ahmed H. Madian-VLSIActive39

MOSFETs MOSFET structure exists every time a poly gate line completelycrosses an n or p regionDRs for poly features are Wp min. poly width of a poly line dpo min. extension of poly beyond ActivePolywpLN Sp-pN N N N P substratedpoDr. Ahmed H. Madian-VLSI40

DR for Active contact Active contact is a cut in the oxide that allows the first layer ofmetal to contact as active n or p region. Sa-ac min. spacing between active and active contactdac,v vertical size of the contactdac,h horizontal size of the contactActive contactN P N-wellP-substrateSa-acdac,vdac,hDr. Ahmed H. Madian-VLSI41

DR for Metal1 Metal1 is applied to the wafer after oxide. It is used as interconnectfor signals and also for power supply distribution. Wm1 min. width of Metal1 lineSm1-ac min. spacing from Metal1 to Active ContactSm1-acMetal 1wm1N P-substrateDr. Ahmed H. Madian-VLSI42

DR Vias and higher level Metals Vias is a cut in the oxide layers to contact between twometals.wm2Metal2metal2dvViaMetal 1metal1Sv-m2Sv-m1N P-substrateSm2-m2Dr. Ahmed H. Madian-VLSIVia43

Layout Design Rules summaryDr. Ahmed H. Madian-VLSI

Layout Design Rules (cont.) Transistor dimensions are in W/L ratio NFETs are usually twice the width PFETs are usually twice the width of NFETs Holes move more slowly than electrons (must be wider to deliver samecurrent)Dr. Ahmed H. Madian-VLSI

Layout example3-input NANDDr. Ahmed H. Madian-VLSI46

VLSI layout libraryLayoutDr. Ahmed H. Madian-VLSI47

1st assignmentIt’s required to draw the layout of: Inverter 4 input NAND gate 4 input NOR gate 3 input XOR gateaccording to the Design rules given in the lecture due datenext lecture.(use layout tool submission will be soft copy and hardcopy)Dr. Ahmed H. Madian-VLSI48

Dr. Ahmed H. Madian-VLSI 3 What is VLSI? VLSI stands for (Very Large Scale Integrated circuits) Craver Mead of Caltech pioneered the filed of VLSI in the 1970’s. Digital electronic integrated circuits could be viewed as a set

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