ECE606: Solid State Devices Lecture 1

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Network for Computational Nanotechnology (NCN)Purdue, Norfolk State, Northwestern, UC Berkeley, Univ. of Illinois, UTEPECE606: Solid State DevicesLecture 1Gerhard Klimeckgekco@purdue.eduKlimeck – ECE606 Fall 2012 – notes adopted from AlamYour Instructor and Teaching Assistants Gerhard Klimeck» Prof. at Purdue for 8 years» Principal at NASA/JPL, 6 years» Texas Instruments, 4 years» Over 340 papers ondevices/physics Parijat Sengupta» 5th year graduate student Yaohua Tan» 5th year graduate student Matthias Yui-Hong Tan» 3rd year graduate student Yuling Hsueh» 2nd year graduate studentKlimeck – ECE606 Fall 2012 – notes adopted from Alam2

Network for Computational Nanotechnology (NCN)Purdue, Norfolk State, Northwestern, UC Berkeley, Univ. of Illinois, UTEPECE606: Solid State DevicesLecture 1Gerhard Klimeckgekco@purdue.eduKlimeck – ECE606 Fall 2012 – notes adopted from AlamCourse InformationBooks Advanced Semiconductor Fundamentals (QM, SM, Transport)first 5 weeks Semiconductor Device Fundamentals (Diode, Bipolar, MOSFET)Weeks 6-15HW/Exams HW (9 HW, all will be graded; solutions will be provided;distributed every Tuesday, due at the beginning of the lecture 3 exams ( 5 weeks apart)Website http://cobweb.ecn.purdue.edu/ ee606/ https://blackboard.purdue.edu (grades and optional notes) https://nanohub.org/resources/5749 (full course on-line from Spring 2009)Office hours Klimeck:1:30-2:30 Tue@EE 323, Thu 4:30pm-5:30pm@EE323Klimeck – ECE606 Fall 2012 – notes adopted from Alam4

Your Purdue ResourcesKlimeck Leads the Network forComputationalNanotechnology (NCN) NCN hosts nanoHUB.org 230,000 users 172 countries 15 professional staff 5 other universities 3,000 resources on lineAlso THIS WHOLE coursenanohub.org/resources/5749Or search for “nanohub 606”Klimeck – ECE606 Fall 2012 – notes adopted from Alam5Outline Course information Motivation for the course Current flow in semiconductors Types of material systems Classification of crystals» Bravais Lattices» Packing Densities» Common crystals - Non-primitive cells NaCl, GaAs, CdS» Surfaces Reference: Vol. 6, Ch. 1 Helpful software: Crystal Viewer in ABACUS tool at nanohub.orgKlimeck – ECE606 Fall 2012 – notes adopted from Alam6

Relative Manufacturing Cost per Component1965 Gordon Moore Moore’’s Lawhttp://www.intel.com/technology/mooreslawNumber of Components per Integrated CircuitKlimeck – ECE606 Fall 2012 – notes adopted from AlamMoore’’s Lawa Self-Fulfilling Prophesy x.htmKlimeck – ECE606 Fall 2012 – notes adopted from Alam

Technical Developments to enable Moore’’s LawRobert Chau (Intel), 2004 Industry plans have a 5-10 year horizon Industry has been on time: 32nm node predicted in 2004 and announced 2009Klimeck– ECE606Fall 2012 – notesadopted fromAlam There areNOtechnicallyviablesolutionsbeyond 2015Device Sizes and Transport ConceptsMacroscopicdimensionsLaw of Equilibrium:Non-EquilibriumQuantumρ exp ( (H µN) /kT )StatisticalMechanicsAtomicdimensionsDrift ATORVDVGKlimeck – ECE606 Fall2012 – notesSupriyoDattaadopted from AlamIVDµ2HΣ2

Heat becoming an unmanageable problemKlimeck – ECE606 Fall 2012 – notes adopted from AlamGrand Challenges in ElectronicsVacuumTubesBipolarMOSFETNow ?SpintronicsBio SensorsDisplays until now19401960Klimeck – ECE606 Fall 2012 – notes adopted from Alam?MOS19802000202012

Outline of the CourseDevice-specificsystem designFoundationin PhysicsApplication specific Physical Principledevice operation of device operationEE606TFT forDisplaysQuantumMechanics StatisticalMechanicsResistors (5 wk)CMOS-basedCircuits for µPDiodes (3 wk)Bipolar (3 wk)LASERS forDisk DrivesMOSFETs ( 3 wks)MEMS forRead headsKlimeck – ECE606 Fall 2012 – notes adopted from AlamTransportEquations13Relation to Other MN-Area CoursesDevice-specificsystem designEE 695F:RF DesignEE 695E:OptosystemApplication specificdevice operationEE 654:Advanced Semi Dev.Physical Principle ofdevice OperationEE 606:EE 604Basic Semi Dev.EM, MagneticsEE 656:Semi-TransportFoundationEE 612:VLSI DevicesEE 520:Bio-SystemsEE 659:Quantum TransportFinite Element,Molecular Dynamics,Monte CarloKlimeck – ECE606 Fall 2012 – notes adopted from AlamBME 695A:Bio-system DesignPHYS 570B :Bio-physicsCharacterizationECE 557:Fabrication14

Motivation and Importance of 606 Define “the language”» Specialty area in ECE: MN - Micro – Nano – Electronics» Bridge different communities, Electrical Engineering, Physics Fundamentals of Semiconductor Devices» How to “think” about electrons in a semiconductor» Foundation of typical job interviews – technical interviews will typically not go into more detail Probe the fundamental understanding of electronic behavior in Semiconductor Your entry into a technical job in Semiconductor Industry» Required knowledge in the MN area Qualifying Exam Your entry into the PhD program in the MN areaKlimeck – ECE606 Fall 2012 – notes adopted from Alam15Outline Course information Motivation for the course Current flow in semiconductors Types of material systems Classification of crystals» Bravais Lattices» Packing Densities» Common crystals - Non-primitive cells NaCl, GaAs, CdS» Surfaces Reference: Vol. 6, Ch. 1 Helpful software: Crystal Viewer in ABACUS tool at nanohub.orgKlimeck – ECE606 Fall 2012 – notes adopted from Alam16

Current FlowThrough Semiconductors (5 weeks)IVI G V q n v ACarrierDepends on chemical composition,Densitycrystal structure, temperature, doping, etc.Could be tabulated for “known” materialsNeed a theory for engineering of new devices/materialsvelocityQuantum Mechanics Equilibrium Statistical Mechanics Encapsulated into concepts of effective massesand occupation factors (Ch. 1-4)Transport with scattering, non-equilibrium Statistical Mechanics Encapsulated into drift-diffusion equation withrecombination-generation (Ch. 5 & 6)Klimeck – ECE606 Fall 2012 – notes adopted from Alam17Computing Carrier-Density and VelocityAtomic composition- number of electrons per atomArrangement of atoms- not all electrons are available for conductionFor Periodic Arrays- simplification for computation Concept of Unit Cells Simple 3-D Unit CellsKlimeck – ECE606 Fall 2012 – notes adopted from Alam18

Outline Course information Motivation for the course Current flow in semiconductors Types of material systems Classification of crystals» Bravais Lattices» Packing Densities» Common crystals - Non-primitive cells NaCl, GaAs, CdS» Surfaces Reference: Vol. 6, Ch. 1 Helpful software: Crystal Viewer in ABACUS tool at nanohub.orgKlimeck – ECE606 Fall 2012 – notes adopted from Alam19Elemental andCompound SemiconductorsSi: 260billion industryElemental (e.g., Si, Ge, C)CompoundSiGe: stressorsIV-IV: Si-Ge, Si-CSiC: radiationIII-V: InP, GaAs,Lasers/detectors(InxGa 1-x)(AsyP 1-y) expensiveII-VI: CdTeFar IR detectorsSoft and difficultIV-VI: PbSFirst semiconductor diodesVery soft and difficultNot all combinations possible:lattice mismatch, room temp. instability, etc. are concernsKlimeck – ECE606 Fall 2012 – notes adopted from Alam20

Arrangement of Atoms:orientation vs. positionsolid crystalsplastic crystalsspecific positionrandom orientationspecific positionspecific orientationliquidliquid crystalsrandom positionspecific orientationrandom positionrandom orientation21Klimeck – ECE606 Fall 2012 – notes adopted from AlamArrangement of AtomsCross section of a MOSFETPoly-crystallineThin FilmTransistorsAmorphousOxidesWhy ?Perfectly arranged Si Crystal CrystallineDefinition ?Quantitative definition: Correlation spectrum and diffraction patternModern solid state devices use all forms these forms of materialsFocus on Crystals first – relatively simpleTransfer knowledge of electronic behavior in crystals to other materialsKlimeck – ECE606 Fall 2012 – notes adopted from Alam22

Outline Course information Motivation for the course Current flow in semiconductors Types of material systems Classification of crystals» Bravais Lattices» Packing Densities» Common crystals - Non-primitive cells NaCl, GaAs, CdS» Surfaces Reference: Vol. 6, Ch. 1 Helpful software: Crystal Viewer in ABACUS tool at nanohub.orgKlimeck – ECE606 Fall 2012 – notes adopted from Alam23Unit cell of a Periodic Lattice“Infinitely” extended2D shown3D same concepts NA 6 x 1023/mol Can NEVER solvethis, even on thelargest computer Simplify to arepeated (small) cell Unit cells are not uniqueUnit cells can be Primitive or Non-primitiveProperty of ONE CELL defines the property of the solidKlimeck – ECE606 Fall 2012 – notes adopted from Alam24

How to define ONE primitive cell?Wigner-Seitz Primitive Cell Choose a reference atom Connect to all its neighborsby straight lines Draw lines (in 2D) or planes(in 3D) normal to and at themidpoints of lines drawn in step 2 Smallest volume enclosed isthe Wigner-Seitz primitive cellWigner-Seitz cell is ONE definition of a Unit Cellthat always worksThere are other ways of construction!Klimeck – ECE606 Fall 2012 – notes adopted from Alam25Geometry of Lattice PointsIn a Bravais lattice, every point in the lattice can be “reached” by integertranslation of unit vectors every point has the same environment as every other point(same number of neighbors, next neighbors, )bNon-Bravais latticeaBravais latticewith a basis R ha kbKlimeck – ECE606 Fall 2012 – notes adopted from Alam26

Unit Cells in One-dimensional CrystalsThere is exactly ONE primitive unit cell in a 1D systemNo system truly 1-D, but . 1D properties dominate behavior in some material e.g.: polymers, DNA, 1D heterostructures (lasers, RTDs) Can often be solved analytically, many properties have 2D/3D analogsPolyacetylenePPPKlimeck – ECE606 Fall 2012 – notes adopted from Alam27Periodic Lattice in 2D (5-types)Parallelogrammic orobliquerectangularhexagonalCentered rectangularor rhombic or triangular2 atoms per unit cell!squareOriginal image from: /2d-bravais.svgKlimeck – ECE606 Fall 2012 – notes adopted from Alam

Not a Bravais Lattice A and B do not haveidentical environmentsAThis is a Graphene sheet whichhas recently been isolated fromGraphite by adhesive tapestamping.Ref. Novoselov, Geim, et al.Nature, 438, 197, 2005.BConversion into a Bravais lattice:-Combine A and B int a single basis-Obtain a rhombic Bravais latticeOriginal image from: http://en.wikipedia.org/wiki/File:Rhombic Lattice.svgKlimeck – ECE606 Fall 2012 – notes adopted from Alam29Not a Bravais Lattice, but Escher TilingKepler Tiling .but these can be converted into Bravais latticeKlimeck – ECE606 Fall 2012 – notes adopted from Alam30

Not a Bravais Lattice and Ancient TilesPenrose TilesTwo different unit cells in random order these CANNOT be transformed to Bravais latticeex. Aluminum-Manganese compounds, non-sticky coats31Klimeck – ECE606 Fall 2012 – notes adopted from AlamBravais lattice in 3D Body centeredFFace centeredCSingle face centeredKlimeck – ECE606 Fall 2012 – notes adopted from Alam32

Duplicated Bravais LatticeUnlucky Frankenheim (1842)counted 15 unit cells!Bravais pointed out that2 cells were duplicatedTetragonal body centeredTetragonal face centeredAACAcccTetragonal FC Tetragonal BCKlimeck – ECE606 Fall 2012 – notes adopted from Alam333 Dominant Bravais edralHexagonalMonoclinicPCubic conceptionally simple,but experimentally very unusualPolonium84I70-75% of all naturalcrystalline materialsFCKlimeck – ECE606 Fall 2012 – notes adopted from Alam34

Outline Course information Motivation for the course Current flow in semiconductors Types of material systems Classification of crystals» Bravais Lattices» Packing Densities» Common crystals - Non-primitive cells NaCl, GaAs, CdS» Surfaces Reference: Vol. 6, Ch. 1 Helpful software: Crystal Viewer in ABACUS tool at nanohub.orgKlimeck – ECE606 Fall 2012 – notes adopted from Alam35Simple Cubic Cubic Lattice:Number of atomsPoints per cell 1/8 points/corner x 8 corners 1 Point/cell(depends on definition of cell)aNumber density (1/a3) points/cm3(does not depend on cell definition)Klimeck – ECE606 Fall 2012 – notes adopted from Alam

Simple Cubic Cubic Lattice:Packing DensityPacking density volume filled/total volumeR a/2maximum radius3V (4/3)πR Volume of a sphereP (1/8)x(4/3)πR3 x (8 corners) /a3a π/6 52%(about HALF of the volume is EMPTY)Typical for crystals and amorphousmaterialsRa(does not depend on cell definition)Klimeck – ECE606 Fall 2012 – notes adopted from AlamSimple Cubic Cubic Lattice:Areal DensitySurfaces are critical in semiconductors:-Vertical stacking of materials misalignment dangling bonds loose electrons Different surface chemistryAreal Density (1/4 per corner) x (4 corners)/a2 1/a2 cm-2Areal density (face diagonal) (1/4 points/corner) x (4 corners)/ 2a2 cm-2 0.7/a2 cm-2Klimeck – ECE606 Fall 2012 – notes adopted from Alam

BCC and FCC latticesPoints per cell 1/8 x 8 @corners 1@inside 2Points per cell 1/8 x 8 @corners 1/2 x 6 @faces 4Klimeck – ECE606 Fall 2012 – notes adopted from AlamHexagonal Closed-PackedPoints per cell1/2 x 2 @faces 11/2x1/3 x 12 @corners 23 points/cellKlimeck – ECE606 Fall 2012 – notes adopted from Alam

Outline Course information Motivation for the course Current flow in semiconductors Types of material systems Classification of crystals» Bravais Lattices» Packing Densities» Common crystals - Non-primitive cells NaCl, GaAs, CdS» Surfaces Reference: Vol. 6, Ch. 1 Helpful software: Crystal Viewer in ABACUS tool at nanohub.orgKlimeck – ECE606 Fall 2012 – notes adopted from Alam41Most Materials are not in a simple Bravais LatticeGeometry of Lattice PointsIn a Bravais lattice, every point has the same environment asevery other point (same number of neighbors, next neighbors, )bNon-Bravais latticeaBravais latticewith a basisR ha kbKlimeck – ECE606 Fall 2012 – notes adopted from Alam

43Klimeck – ECE606 Fall 2012 – notes adopted from AlamRock-Salt as FCC latticeNaCl is normal household cooking saltWe see the crystals every day – what is the crystal structure?At first glance it looks like a simple cubic cell one atom on each corner But they are different not a Bravais lattice a basisof 2 atomsarranged inFCCFor more discussion, see Kittel and Ashcroft/MerminKlimeck – ECE606 Fall 2012 – notes adopted from Alam

Zinc-Blende Lattice for GaAsAtoms/cell (1/8)x8 (1/2)x6 4 8Tetrahedral structureKlimeck – ECE606 Fall 2012 – notes adopted from AlamGaAs Crystal Plotted in Crystal ViewerKlimeck – ECE606 Fall 2012 – notes adopted from Alam

GaAs Crystal Without BondsKlimeck – ECE606 Fall 2012 – notes adopted from AlamGaAs Crystal Just One SpeciesKlimeck – ECE606 Fall 2012 – notes adopted from Alam

GaAs Crystal Just One SpeciesFocus on FewKlimeck – ECE606 Fall 2012 – notes adopted from AlamGaAs Crystal Just One SpeciesFocus on Few – Take out a FewKlimeck – ECE606 Fall 2012 – notes adopted from Alam

GaAs Crystal Just One SpeciesA FCC Cell! FCC cell – 4 atoms per unit cellKlimeck – ECE606 Fall 2012 – notes adopted from AlamGaAs Crystal Just One SpeciesA FCC Cell! FCC cell – 4 atoms per unit cellKlimeck – ECE606 Fall 2012 – notes adopted from Alam

GaAs Crystal Both Species FCC cell – 4 atoms per unit cell – brown speciesKlimeck – ECE606 Fall 2012 – notes adopted from AlamGaAs Crystal Both Species FCC cell – 4 atoms per unit cell – brown species Focus on a few of the “blue species”Klimeck – ECE606 Fall 2012 – notes adopted from Alam

GaAs Crystal Both Species FCC cell – 4 atoms per unit cell – brown species FCC cell – 4 atoms per unit cell – purple speciesKlimeck – ECE606 Fall 2012 – notes adopted from AlamGaAs Crystal Both Species FCC cell – 4 atoms per unit cell – brown species FCC cell – 4 atoms per unit cell – purple speciesKlimeck – ECE606 Fall 2012 – notes adopted from Alam

GaAs Crystal Both Species FCC cell – 4 atoms per unit cell – brown species FCC cell – 4 atoms per unit cell – purple speciesKlimeck – ECE606 Fall 2012 – notes adopted from AlamGaAs Crystal – 2 FCC Zincblende – 2 FCC bases – separated by [¼ ¼ ¼]Klimeck – ECE606 Fall 2012 – notes adopted from Alam

Diamond FCC Lattice for Silicon Zincblende – GaAs - 2 FCC bases – separated by [¼ ¼ ¼] Diamond – Si - 2 FCC bases – separated by [¼ ¼ ¼]Klimeck – ECE606 Fall 2012 – notes adopted from AlamHexagonal Closed-Packed for CdSFocus on (Cd) (Cd) atoms/cell (1/6)x12 (1/2)x2 3 6Klimeck – ECE606 Fall 2012 – notes adopted from Alam

Outline Course information Motivation for the course Current flow in semiconductors Types of material systems Classification of crystals» Bravais Lattices» Packing Densities» Common crystals - Non-primitive cells NaCl, GaAs, CdS» Surfaces Reference: Vol. 6, Ch. 1 Helpful software: Crystal Viewer in ABACUS tool at nanohub.orgKlimeck – ECE606 Fall 2012 – notes adopted from Alam61

Purdue, Norfolk State, Northwestern, UC Berkeley, Univ. of Illinois, UTEP ECE606: Solid State Devices Lecture 1 Gerhard Klimeck gekco@purdue.edu Klimeck –ECE606 Fall 2012 –notes adopted from Alam Your Instructor and Teaching Assistants Gerhard Klimeck »Prof. at Purdue for 8 years »Principal at NASA/JPL, 6 years »Texas Instruments, 4 .

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