“How Little We Know, How Eager We Are To Learn, BUT COME .

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“How little we know, how eager we are to learn, BUT COME ON A 17 page SYLLABUS?”YES as all aspects of the course are covered hereinSpring 2017 from Jan 17 to 4 May569 Spring 2017MEMS SURVEY COURSE 3 CreditsSEE CSU 2017 Calendar http://www.calendar.colostate.edu/Table of Contents Introduction . 1 General 569 course information is found on pages . 2 TEXTBOOK, CLASS NOTES and WEBSITES . 2 GUIDE to getting maximum value from class lectures: . 41. Homework Grading . 52. Take Home Exam . 53. Group Talks . 54. Pop Quizzes . 85. UP TO 20 % of final grade in two parts . 86. A-F with plus minus 569 GRADING SUMMARY . 8 OVERVIEW OF MEMS Topics in 569 Survey Course: . 10 DETAILED COURSE DESCRIPTION . 12 569 Grading Breakdown Revisited . 135 OVERVIEW OF MEMS Lectures . Error! Bookmark not defined.16WEEKLY TENTATIVE SCHEDULE . 1417-18Introduction to 569 an overview or survey course on MEMS ( many topics in shallowcoverage and a 7 in depth)The goal of this overly detailed memo is to let students know in a clear, plain and intelligiblemanner what is expected in 569 as regards GROUP and individual grading, due dates ofassignments and the importance of the two GROUP talks and WORD papers during thesemester. This is SURVEY course for MEMS (Micro electromechanical systems andmicrofluidics. As such it is broad in sweep (blood markers and DNA analysis on a chip) with indepth portions in the second half of the course for 7 commercial MEMS systems.Weekly memos will be uploaded on Canvas reminding you all of last week’s material, thisweek’s due dates and next week’s material repeating from the syllabus in small chunks:1. What we did last week2. What prior assignment is due that coming week (e.g. Pop Quiz, Chapter HW, upcomingtalks etc.). In general the Pop Quiz is due the following week Thur. that it was assigned,whereas the HW is due, the following week Tues.3.I will also detail what’s newly assigned for that coming week and future due dates as wellfor all new assignments. Due dates for exams and HW are given below in the syllabus.Please contact myself or the grader if the grading is not accomplished in a timely manner.I seek to give students a chance to discern and make judgements about MEMS truthversus MEMS facts in the book, the internet and Collins lectures.The role of MEMS in the IoT (Internet of things) is emphasized where each MEMS sensorhas an IP address. For example, MEMS personal sensor networks equipped with wirelesscommunication for body area networks for fitness or health. Illustrative health sensing1

data include MEMS to monitor: your heart beat and any irregularities, blood oxygen, stepstaken each day, etc. Similar IoT networks of MEMS sensors for office building wide arealighting HVAC networks as well as smart roads for traffic control. All employ MEMSsensors for SCADA data collection, which is analyzed on the cloud by IT( informationtechnology) algorithms/ AI programs to parse the data and to achieve: more systemproductivity or efficiency, less system operation costs, pro-active system componentmaintenance to reduce system down time and increase system reliability as well as in thefuture allow real-time decision making by computers.Class Time: Tuesday and Thursday 5:30 to 6:45.in Engineering E 203Instructor: Prof. George Collins, Email: gcollins@engr.colostate.eduGRADER: TBA :Instructor PhilosophyECE Students are the most important people at CSU.Not dependent on faculty.Faculty is dependent on them.Not an interruption of our work.They are the purpose of being at CSU.Students are doing us a favor when they come to our office.We are not doing them a favor by serving them.Students are part of our business, not outsiders.Not just a CSU ID number.They are flesh and blood human beings with feelings and emotions.Students come to us with their needs and wants.It is our job to address them with courteous and attentive treatment.Students are the life blood of this and every university.Without them we would close our doors.DON’T EVER FORGET THIS!General Instructions for Assignments:All Homework assignments and pop quizzes will be uploaded on Canvas or directly to the grader. Alwaysask the grader ONLY and not Collins for an update on your CANVAS grades in 569 to date.Send to instructor:gcollins@engr.colostate.edu as email attachments: only Corrected GROUPPPT slides and GROUP WORD papers from both talks # 1 and #2 and ALL extra creditworkText, CLASS NOTES and WEBSITESRequired Text – “Microsystem Design” by Steve Senturia published by Kluwer ISBN # 0-7923-7246-8.Web site for the 569 chosen texthttp://web.mit.edu/microsystem-design/www/2

Collins Weekly Lecture notes will be on the 569 Website (see versions on 569 websitedownload them and read carefully BEFORE CLASS. It is the student’s duty to “slow down”the lectures by asking many questions—the web has over 1200 pages of my weekly noteson MEMS TOPICS for your perusalThe supplemental reference texts for this course are:1. “The MEMS Handbook ” Edited by Mohamed Gad-el-Hak CRC Press ISBN 0-84930077-0 (2002)When I refer in class schedule or lecture supplemental reading to Text 1 Chapter 5, Imean “the MEMS Handbook” Ch 5 etc.2. “Fundamentals of Micro Fabrication” by Marc Madou CRC Press ISBN 0-8493There ARE hundreds of Internet sites and some illustrative websites are given below. I listBOTH background and Application TOPICS for you to study and employ in your twosemester projects.Some Selected WEB RESOURCES BEYOND TEXT AND MY 569 NOTESGREAT WEBSITE FOR ALL 569 STUDENTS: www.memsnet.org has sections on thefollowing:Beginners Guide, What is MEMS, IC Process Steps in MEMS, Jobs in MEMSMagnificent University Websites for your Case study presentations, weekly Pop Quizzesand MEMS topic papers:“Turn off You Tube and Netflix and Let the MEMS video binging begin”Here you can drill down to find a topic for talk # 2. More in depth talks on MEMSdiagnostics and treatment employing Body Area Networks are also possible, such as theartificial tureNotes/http://www.enme.ucalgary.ca/ spiewaks/ENMF 529 UNIX/15 syllabus/*07 syllab main 4/Lecture/http://www.ee.ucla.edu/ wu/ee250b/course outline1.htmhttp://www.eng.utah.edu/ gale/mems class.htm3

http://www.latech.edu/tech/engr/bme/gale ://home.earthlink.net/ trimmerw/mems/Stroud Dbase.htmlTHERE ARE OTHER MEMS sources as well, besides those above, for “the inch wide amile deep” part of the drill down portion of the course --good MEMS info hunting isrewarded by going to company websites like Analog Devices, Invasense , or TI for theaccelerometer or micro mirror product lines. Texas Instruments website givesoverwhelming details on their 2 million movable mirrors on a chip. Honeywell andMotorola have websites that describe their line of MEMS pressure sensors. “Turn off Utube and Netflix and Let the MEMS video binging begin”See six brief video overviews to introduce MEMS to the novice:1. http://www.youtube.com/watch?v ZuE4oVrtEQY&feature player embedded2. http://www.youtube.com/watch?feature player embedded&v h0cn1PovhrQ#!3. http://www.memx.com/movie gallery.htmhttp://www.youtube.com/watch?v lAI5rLnnCBEThe fourth one seems spooky to all but bio-engineers, as it involves MEMS scaffolds overwhich human cells, for example, can grow. Be sure to see the hairless mouse with ahuman ear growing on its back for later attachment to a human missing an ear. Presentlythis has progresses to growing noses and ears on human flesh—bio MEMS engineeringhas factories you cannot imagine MEMS engineers to be associated with.4.5.6.7.The fifth takes you on a dimension tour of the entire universe of objects known 15573968A 3-d printer can make 3-D mechanical and electrical parts as well as attempt to makehuman organs. We will also cover MEMS atomic force cantilever microscopes that can m/watch?v ZboxMsSz5Aw&feature youtube gdata playerYOUR 569 Group---can for extra credit add one or more GREAT websites sendyour choice and why to George Collins only569 MEMS SURVEY COURSE: LECTURE tate.edu/ECE569my569classnotesarefoundatTo access the ECE 569 web notes you must use:Username: StudentPassword: Power! GUIDE to getting maximum value from class lectures:Listen and take minimal notes in class – but interrupt the lecture flow often with cogent questions.Be shameless; never be like a potted plant during lectures. Use lectures to get a wider angle viewof MEMS ISSUES.4

Enjoy the wonder of MEMS and body area networks for the next generation of health careemploying body vital sign MEMS sensors. The sensors report to your cell phone or smart watchand also to the web for diagnostics from expert systems. This can be the subject for BOTHGROUP talks # 1 and 2.ALL OF THIS MATERIAL IS TENTATIVE AND SUBJECT TO CHANGE. Changes occur in569 CLASS ANNOUNCEMENTS and 569 weekly memos sent to all students throughoutTHE SEMESTER, which supersede this preliminary syllabus document.Quick and CRUDE Guide through the 569 grade minefield:1. Homework Grading(10 % of grade) Do ONLY Five HW assignments of the 10 listed. Completion of allgroup based HW must be delivered by the deadline via uploading HW attachmentto CANVAS by the group leader designated or send directly to grader. (Onesubmission per group)2. Take Home Exam(10 % of grade) Take Home Group EXAM # 1 (10 % of final grade) verifies you knowthe second order DEQ solutions in both time and frequency domains, for both R-L-Cnetworks and M-B-K systems. Key is the concept of resonance and quality factor.Mechanical systems have in vacuum have B 0 which is equivalent to R 0 in electricalsystems. Hence, the high Q achieved in MEMS mechanical or acoustic oscillators withPPM frequency stability even at GHz operating frequencies.3. Two Group Talks (50% of grade divides as follows: Group Talk # 1(20 %) and Talk # 2(30%). One is at the beginning of the course and one is at the end of the course.Group talks test your ability to search the World Wide Web, on specific MEMS topics togo beyond lecture and book learning. It also gives opportunity to learn from your own andothers’ PPT presentations how to present better talks. Again this is a skill highly valued inindustry and we all can learn. In both talks include the dark side of SCADA data andhacking of SCADA systems as well as hacking of GE “Predix”, the illustrative cloudanalysis system that melds IoT data and IT algorithms.In 569 talks Show briefly How Cybercriminals Target the Physical SCADA Data and the cloud AI programsDigital remote monitoring platforms offer many benefits, but can also open the door to cybersecurity threats. Address the risks, covering:- Cyber security concerns for data center remote monitoring platforms- Key steps to keep data private and infrastructure systems secure from hackers- Practices of a secure development lifecycle- Recommended design attributes and best practices for the a cloud-based monitoring platform5

Talk # 1 is at the beginning of the course. Grade breakdown (15% for PPT talk and 5%for Word paper) is on microfluidics for emerging medical diagnostics in drug stores oroutside medical labs. Theranos was a leader in the field of instant blood analysis, but hasencountered major problems. So, as outlined in class Theranos illustrates the saying“second mouse will get this instant blood analysis on a chip cheese”. I list below threeother contenders.1. Seventh Sense Biosystems2. Spot on Sciences3. HemoLink4. YOUR GROUP FIND OTHERS like Philips medicalA second topic could be Employing Body Area Networks of MEMS wireless sensorsand cell phone/ watch or body attached data collectors for sports, medical orenhanced personal awareness.Penn State’s Michael Alley has an excellent talk on PPT presentations located both on YouTubeand on www.the-scientist.com. Your technical presentations will be GROUP efforts to simulateyour next environment—industry or graduate school. This group effort is purposeful to getstudents familiar with the team efforts that they will SOON encounter in industry. For group effortsMicrosoft has versions of Word and Power Point that reside on servers at Microsoft—@ officelive.com—moreover this allows MULTIPLE users to log on and work on the SAME documenttogether.Grading Talk # 1Individual Portions of the PPT Presentation for talk # 1 is graded as follows out of 15total:1. TECHNICAL ACCURACY 9/152. PPT Slide ORGANIZATION 3/53. CLARITY OF MATERIAL-SHORT LIST OF TOPICS, IN DEPTH COVERAGE,BETTER THAN MANY TOPICS VERY SHALLOW DOVERAGE 1/154. PROPER SPELLING, GRAMMAR, REFERENCES 1/155. FOLLOWING THE MEMOS ON TOPICS TO BE COVERED 1/15GROUP WORD PAPER FOR BOTH TALK #1 and Talk # 2 IS GRADED OUT OF 5 ASFOLLOWS:1. TECHNICAL ACCURACY 3/52. PAPER ORGANIZATION 1/53. CLARITY OF MATERIAL-SHORT LIST OF TOPICS IN DEPTH COVERAGE BETTERTHAN MANY TOPICS VERY SHALLOW DOVERAGE .5/54. PROPER SPELLING GRAMMAR REFERENCES .5/55. FOLLOWING THE MEMOS ON TOPICS TO BE COVERED .5/5The combination of MEMS sensors and MEMS drug dispensers can also be extended toan artificial pancreas, which is already sold for diabetics by Medtronic that illustrates allthe wider possibilities of “body area medical networks of sensors and actuators” and wewill cover this in class but talk #2 can also revisit this after I set the stage .6

Presentations Steve Jobs StyleWhen you give a presentation, you face at least two hurdles.First, you need to sell yourself as a credible spokesperson on your topic. Audiences need tobelieve in you-and that's hard enough. Second, you need to sell your ideas so that people comeaway inspired, persuaded and enlightened. Steve Jobs did both-with incredible skill. Widelyconsidered one of the most gifted presenters ever, Jobs understood how to deliver memorablespeeches in a seemingly effortless, engaging manner. His conversational tone, simple yetcompelling word choice and masterful use of slides and other props helped reinforce his messagein winning ways. When all groups investigate the same topic, you get “schooled” on presentationskills and the topic itself at the same time by your fellow students. That is you can compare yourefforts to others in your class, and learn from BOTH positive and negative example as well from theinstructor. So I require talk# 1 to be on the same topic, unless your group receives special permissionin advance. Talk # 2 is a MEMS topic chosen by each group based on their interest. It’s OK to redo aMEMS topic I covered in class for talk # 2, but you need to go into greater detail.You'll learn how to develop key skills, including how to: Integrate Aristotle's "Big Three"-logos/ethos/pathos-to win over audiences. Learnhow to blend logic, credibility and emotion to enliven your remarks. Convey big ideas or central themes via multiple channels. From audience giveawaysto props to slides, apply the Steve Jobs approach and align all available tools to drivehome key points so that people cannot help but remember them-and buy into them. Think in threes. To explain complex processes (from chemical reactions to financialformulas), learn to cluster your main points in threes. Your audiences will thank you. Use bluntness and directness. Rather than drop hints or dance around controversialpositions just follow Steve Jobs' example and state your case boldly and succinctly. Embrace simple language. If you need to explain complex ideas, you must speak incomplex terms. Right? Well, Steve Jobs was a master at communicating complicatedconcepts in unmistakably clear words. Develop tools to translate your speech into plainEnglish that's compelling and hard for anyone-of any background or educational level-toignore. Start staff meetings with an edge. Steve Jobs did not begin staff meetings with touchyfeely happy talk. Instead, he often provoked people or expressed disappointment in someaspect of the team's performance. But by the end of the meeting, everyone left in apositive frame of mind-inspired and validated. Find out how Jobs pulled that off.As TWO in class group talks and papers play such a big role in learning and in the 569 grades Icover this next in more detail below and provide guidance. The two group talks I assign andassociated group papers are distinct with different requirements and different due dates. The7

course therefore emphasizes practice in both ORAL presentations in PPT and report writing inWORD using IEEE standard referencing of all sources.Talk # 2 at the end of the course ( 30 % total grade : 25 % for PPT talk and 5% for WORDpaper) in 569 is entirely the choice of the student group such as extending Body AreaNetwork of sensors for sports, medical or enhanced awareness that I presented in class.Or the commercial MEMS systems for: pressure ,acceleration, rotation, 3-D printers,MEMSfilters and oscillators etc. etc covered in classIndividual Portions of the PPT Presentation for talk # 2 is graded as follows out of25 total:TECHNICAL ACCURACY 17/252. PPT Slide ORGANIZATION 3/253. CLARITY OF MATERIAL-SHORT LIST OF TOPICS IN DEPTH COVERAGEBETTER THAN MANY TOPICS VERY SHALLOW DOVERAGE 2/254. PROPER SPELLING GRAMMAR REFERENCES 1/255. FOLLOWING THE MEMOS ON TOPICS TO BE COVERED 2/25GROUP WORD PAPER FOR Talk # 2 IS GRADED OUT OF 5 AS FOLLOWS:1. TECHNICAL ACCURACY 3/52. PAPER ORGANIZATION 1/53. CLARITY OF MATERIAL-SHORT LIST OF TOPICS IN DEPTH COVERAGEBETTER THAN MANY TOPICS VERY SHALLOW DOVERAGE .5/54. PROPER SPELLING GRAMMAR REFERENCES .5/5Practice makes perfect. Kaizen is a Japanese word for ‘continual improvement’ and iscommon in manufacturing as pioneered by Toyota. Presentation skills too can be honedthrough repetition, listening to talks and critique of our own talks.4. Pop Quizzes(30 % of grade) Ten weekly pop quizzes but you need only complete 5/ 10 pop quizzesnot all 10. Picking up on main points only in lectures and weekly memos saves spendingtoo much time looking up commercial MEMS vendor websites and extracting productspecifications and COST information. However, frankly this ability to read data sheets is akey future job skill, when looking for MEMS or indeed any electronic component, for abigger job involving many components beyond MEMS parts as well.5. Extra Credit points UP TO 10 % of final grade in two partsa. Extra credit assignments (up to 5% due ONE WEEK AFTER ASSIGNED) andb. Class participation (up to 5 %). Both show your commitments to learn MEMSmaterials outside the class room by bringing your

Due dates for exams and HW are given below in the syllabus. Please contact myself or the grader if the grading is not accomplished in a timely manner. I seek to give students a chance to discern and make judgements about truth MEMS

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