Last Week’s Material, This Week’s And Next Week’s Material
569 Spring 2013MEMS 3 CreditsClass Time: Tuesday and Thursday 5:30 to 6:45 in Room B101Instructor: Prof. George Collins, Email: gcollins@engr.colostate.eduText Book: Web site for the 569 chosen s website: 1200 pages of my notes are found athttp://www.engr.colostate.edu/ECE569Completion of all group based HW, exams, pop quizzes, and talks/ papers must bedelivered by the deadline by email attachment sending to both me and to thegraders email by the group leader designated.I will send out a weekly memo reminding you of: last week’s material, this week’sand next week’s material detailing:1. What prior assignment is due that coming week (e.g. Pop Quiz, ChapterHW, upcoming talks etc). In general the Pop Quiz is due the followingweek it was assigned.2. What’s newly assigned that coming week and future due dates for allnew assignments. Due dates for exams and HW are given below in thesyllabus.ECE 569 WEEKLY HOMEWORK ASSIGNMENTS: 2points each, with ONLY 5 out of9 sets required that’s a total of 10 points are due weekly as announced in weeklymemo. HW is heavy at the start of the semester ( e.g. HW#1) and HW assignmentsstop by week 8 of the semester to allow time for final talks and papers. HW # 1 isan opportunity to search for your material for both talks # 1 and #2—please use itas such.All that said, the emphasis of the 569 MEMS course is learning not grades. Even ifyou do not become a MEMS designer, this course will be valuable backgroundwhen specifying a MEMS sensor part in your engineering job, such as anaccelerometer, gyroscope, lab on a chip or pressure sensor in a system designyour company is working on.Following is a detailed 15 page description of everything you want to know aboutthe 569 course itself. Sorry it takes that long but it tries to anticipate ALL yourquestions and beyond.OVERVIEW OF MEMS Topics in this CourseThis is an elective second semester junior or senior elective class and an electivefirst year graduate course. It will be run similar to an honors class withindependent learning the emphasis throughout. I view MEMS learning as a wide1
horizontal line of breadth followed by 4-6 fertile and specific MEMS applications ofgreat depth including commercial vendors of the same MEMS parts compared.In short the course starts with a wide horizontal line of knowledge “an inch deepand miles wide” and then proceeds to a vertical drill down very deep into a fewtopics “an inch wide and a mile deep”. Special emphasis is on Bio-MEMSapplications from oxygen sensors, glucose and blood pressure monitors to ink jetprinting of tissues and bio chips that allow individual human DNA analysis forunder 1000. This in term allows personalized medicine and drug choices.In your two group talks you get to drill down too on subjects of current interest,using the text, my notes, internet searches company websites, and your hardwork. When all groups investigate the same topic, you get “schooled” onpresentation skills and the topic itself at the same time. So we require ALL talks tobe on the same topic, unless your group receives special permission in advance.We will always find more function for less cost by employing MEMS that includessensors, signal processing and wireless I/O, all on one systems MEMS chip. Thisbrings up the four letter word “cost”. That is these chip based MEMS systemscost only 1/1000 of their large scale counterparts, yet have equal or improvedperformance. As a consequence this commercial field is growing at over 45 % peryear. With smart cell phones, tablets and ultrabooks replacing up to 42% of thePC consumption by 2015, MEMS device integration could see major growthMEMS written materials available to studentsI.Required Text – “Microsystem Design” by Steve Senturia published byKluwer ISBN # 0-7923-7246-8.II.Collins Weekly Lecture notes will be on the 569 Website ( see versionson 569 website-download them and read carefully BEFORE CLASS. It isthe student’s duty to “slow down” the lectures by asking manyquestions—the web has 1.5 GBytes of my ovweekly take-home POPQuizzes.2
Web site for the 569 chosen texthttp://web.mit.edu/microsystem-design/www/The supplemental reference texts for this course are:1. “The MEMS Handbook ” Edited by Mohamed Gad-el-Hak CRC Press ISBN0-8493-0077-0 (2002)When I refer in class schedule or lecture supplemental reading to Text 1Chapter 5, I mean “the MEMS Handbook” Ch 5 etc2. “Fundamentals of Micro Fabrication” by Marc Madou CRC Press ISBN 08493-0826-7There ARE hundreds of Internet sites on MEMS: some excellent ones are:3
Some illustrative websites are illustrated below. I list BOTH background andApplication TOPICS for you to study and employ in your two semesterprojects.Magnificent Seven Useful University Websites for yourCase study presentations, weekly Pop Quizzes andMEMS topic ureNotes/http://www.enme.ucalgary.ca/ spiewaks/ENMF 529 UNIX/15 syllabus/*07 syllabmain 4/Lecture/http://www.ee.ucla.edu/ wu/ee250b/course outline1.htmhttp://www.eng.utah.edu/ gale/mems class.htmhttp://www.latech.edu/tech/engr/bme/gale E ARE OTHER MEMS sources as well, besides those above, for “the inchwide a mile deep” part of the drill down portion of the course --good MEMS infohunting is rewarded by going to company websites like Analog Devices or TI forthe accelerometer or micromirror product line. Texas Instruments website givesoverwhelming details on their 2 million movable mirrors on a chip. Honeywell andMotorola have websites that describe their line of MEMS pressure sensors.See six brief video overviews to introduce MEMS to the novice:1.http://www.youtube.com/watch?v ZuE4oVrtEQY&feature player embedded2.http://www.youtube.com/watch?feature player embedded&v h0cn1PovhrQ#!3. http://www.memx.com/movie gallery.htm4.http://www.youtube.com/watch?v lAI5rLnnCBE4
The fourth one seems spooky to all but bio-engineers, as it involvesMEMS scaffolds over which human cells, for example, can grow. Be sureto see the hairless mouse with a human ear growing on its back for laterattachment to a human missing an ear—bio MEMS engineering hasfactories you cannot imagine engineers to be associated with.5.6.The fifth takes you on a dimension tour of the entire universe of objectsknown to 73968Finally a 3-d printer can make macro wrenches or MEMS microwrenches ( for use in quantum mechanics ?) Indeed we will cover MEMS atomicforce cantilever microscopes that can “see” individual atoms): Seehttp://www.youtube.com/watch?v ZboxMsSz5Aw&feature youtube gdataplayerAfter the wide introduction in weeks 1 to 4 and TALK # 1 in weeks 5 and 6 we thendrill down in depth from week 7 till the end of the course, with MEMS commercialapplications including:1. MEMS based 3-d accelerometers and 3-d gyroscopesUltra books and tablet computers both need MEMS acceleration and gyrosensors for swipe and tap commands.2. Pressure sensors and capacitive/ resistive touch screens for cell phonesand tablets3. Ink jet heads for printing paper but more importantly electronic antennaand interconnect traces on PCB’s and for tissue printing of artificial organs ( yikessuch organs are already being made and sold)4. Cell Phones sell 2 billion a year and are heavy users of MEMS: HDprojection displays located in a cell phone for projecting larger screen visuals likemovies or TV, MEMS RF antennas , high Q mechanical GHz filters for cell phonetransceivers and stereo microphones/speakers on a chip for cell phone audio5.Laboratory on a chip for medical analysis of bodily fluids and gases, thatgive diagnostics in minutes not days.6.Human Genome DNA analysis on a microchip that allows your completegenome for under 10007.Many more applications time permitting.We will always find more function for less cost by employing MEMS technologythat includes sensors, signal processing and often wireless I/O to connect the5
sensor to the network. This brings up the four letter word “cost”. That is thesechip based MEMS systems cost only 1/1000 of their large scale counterparts, yethave equal or improved performance. As a consequence this commercial field isgrowing at over 45 % per year. With smart cell phones, tablets and ultrabooksreplacing up to 42% of the PC consumption by 2015, MEMS device integrationcould see major growth.EXAM # 1We start the course with a take home exam that reviews dynamic responseof linear second order systems, so that we understand both electrical andmechanical resonances at GHz frequencies, step responses with low andhigh “Q” and the mapping of R-L-C to B-K-M. Surprise, MEMS mechanicalstructures can resonate at GHz and with higher “Q” than electricalresonances because M can shrink and B can go to zero. Details are givenin the course lectures. TAKE HOME EXAM #1 Due Week Three: AGroup EffortTo start the semester I give a GROUP take home Exam # 1 based oncomparing m-b-k differential equations to L-R-C differential equations, due thethird week of class. This shows the commonality of the mathematicaldescriptions, from a strictly mathematical view, the mechanical and electricalsystems of LINEAR differential equations are. I am then able to illustrate to allstudents the common concept of “through” versus “across” variables in electromechanical systems such as accelerometers and gyroscopes as well as atomicforce cantilevers. Thereby we build model of electromechanically systems, suchas “FBAR” film bulk acoustic resonators or mechanical filters , employed in cellphone transceivers,with center frequencies at GHz and “Q’s” 105. Avago in FTCis a world leader in FBAR sales.GradingA medley of scores is involved in the final grade including WEEKLY POPquizzes; class participation, extra credit assignments, take home exams as well astwo class presentations and two papers. We will emphasize group effortswith teams of students handing in weekly HW sets and takehome POP quizzes. PLEASE FORM a GROUP ASAP in the first week of thesemester, for group HW, group Pop QUIZZES and for group class presentationsas described in detail below. Do not be shy about reforming groups if needed tobetter showcase your efforts or to prevent laggards from being unfairly rewardedfor group work in which they are not contributing. Your own group membersMUST police this. I can help, if necessary, in a confidential manner.Completion of all group based HW, exams, pop quizzes, and talks/ papers must bedelivered by the deadline by email attachment sending to both me and to thegraders email by the group leader designated.6
ADVICE FOR grade SUCCESS IN 465: The grading is scored asfollows:1. Group Take Home Exam # 1 due week # 3: 10 % of grade.Entirely a group effort.2. Homework assignments will comprise 10% of the grade. Again entirely agroup effort. Do only 5/10 assignments—do NOT DO MORE THAN 5assignments. ALL Homework Sets are outlined in detail in the last pagesof this handout. You need complete only five of ten569 HW assignmentseach worth 2 points for a total of 10 points.EE’s and ME’s may well choose different HW assignments. By week 10 ALLHW assignments will be finished. This also allows extra time for industrialstudents and others who have other obligations some weeks. A list ofproblems from the text is at the end of this handout. REMEMBER IS A GROUPEFFORT. I suggest you do the first 4 HW assignments, later do one thatinterests you, so that you are then free to work on the pop quizzes, papers andgroup presentations later in the semester.In HW # 1 and # 2 you will as a GROUP search the web and find RELEVANTMEMS websites from: Universities, companies, National Laboratories andREVIEW papers published in REVIEWED engineering and Science journals aswell as in the professional magazines written for the general audiencedescribing MEMS devices and applications.Try your best to overlap this web search task with your TWO MEMSpresentation/paper goals for weeks 5- 6 and weeks 12-13. Get a head start onyour group talk # 1 on Microfluidics and talk # 2 entirely of the group’s choiceby doing MORE than required and handing it in as extra credit. Focus early onmicro fluidics background research for talk # 1 and later topics of interest toyour group for talk # 2.Talk #1/Paper #1 on micro fluidics will count for 20%, both individual and group effortswill be counted in the talk # 1 grade. 15 % on the in class talk using PPT slides and 5%for paper in Word , so identify your individual contributions.Oral talk #1 will be for 45 minutes (roughly 40- 55 power point slides) and will havea companion paper written in word (double spaced) of length 25 pages includingreferences in IEEE format. PPT talks are such that only your slides do not stink,just other peoples do. Remember PPT talks are like Karaoke—everybody clapsafter the talk, but often it was not that good. I hope you learn how to do better bydoing it or seeing it done by others. Talk # 1 is a fixed topic for ALL groups forthis reason, MEMS Microfluidics so ALL students will talk about the same generaltopic to see how their talk compares to others, to learn presentation skills by bothagain both listening and looking at others PPT slides as well as preparing theirown .7
Please first give a broad overview of microfluidics, then drill down on one or twospecific sub- topics only in detail and give commercial companies working in thatarea and their product specifications.3.Talk #2/Paper #2 will count for 30%, 25 % on the in class talk using PPTslides and 5% for paper in Word.4.Your group picks a MEMS topic. The first four weeks of lectures will expose you to thevariety of possible talk # 2 topics in MEMS, via an overview survey of present MEMSapplications during the first eight lectures. This is the “mile wide an inch deep” part of thecourse or the horizontal section of the course “T” of knowledge structure. —be sure toattend these early lectures and pay attention if something ignites your interest andchoose it for your group’s talk #2 as early as week 4.Both individual and group effort will be scored in the talk # 2 grades, so identify yourcontributions. Oral talk #2 will be for 45 minutes (roughly 40- 55 power point slides)and will have a companion paper written in word (double spaced) of length 25pages including references in IEEE format.Please first give a broad overview of your chosen topic, then drill down on one ortwo specific sub- topics only in detail and give commercial companies working inthat area and their product specifications.5. I count 40% for weekly class pop quizzes, which are ALL of take –homevariety. Entirely a group and not an individual effort. WEEKLY Take HomePOP QUIZZES will count for 40 points (10-pop quizzes). This is a drill deepexercise using my notes, manufacturer’s application notes from MEMSvendors and papers from the MEMS literature.6. 10% of the grade will be for in class individual participation.Folks who interrupt class lectures with quality MEMS questions orimportant comments will earn these class participation points. I lovequestions from the class. You are paying to be taught and I am being paidto teach so ask lots of questions. Do not act like a potted plant in class.7. Extra credit GROUP assignments will offered weekly to earn up to another10 points on your final grade8. In addition I will give up to 10 extra points on the final grade for anapproved special GROUP project to improve the course in future years(See me and we will write a contract togetherYES the total is possibly 100 % and final grades will becurved as described below.Our approach will be more traditional with both and - letter grades to achieve a sliding curve and a distribution of grades. . In anideal statistical world we would seek in a class grade distribution as follows.8
A-F with plus minus 465 GRADING SUMMARYLetter grades for ECE 569 are on an F to A scale with plus minus fine tuning on allletter grades. 95 A 85 B 75 C 65 D 65 FThere will be no final exam. All that said, the emphasis of the course is learningnot grades. Even if you do not become a MEMS designer, this course will bevaluable background when specifying a MEMS sensor part in your engineeringjob, such as an accelerometer, gyroscope, lab on a chip or pressure sensor in asystem design.Extra Credit Starter:For a 2/10 portion of your 10 points of class participation or the extra creditpoints as well, YOU or your group find a MEMS website or comparable to onesabove, tell why it supplements or complements the class in 3-4 pages of text withfigures with specific information and send to me by email so I can check it out andgive you appropriate extra points. If you do a bang up job and document it will berewarded.Realize that up to date in class or weekly email announcements alwayssupersede this preliminary guide.OVERVIEW OF For the first 8 MEMS Lectures “ the mile wideand an inch deep” lectures:We will cover a wide spectrum of MEMS applications with information “a mile wideand an inch deep”. This gives a broad background of commercial MEMS deviceswhich ALREADY sell billions of devices per year. It also allows the class to pickand choose applications they wish to see developed in detail. PLEASE askquestions in class to slow down the speed of lectures—I do not want you to feelyou are trying to drink from a firehouse. I also do not you acting like a pottedplant—so be active and ask questions—“ you are paying and I am being paid”9
In a broad SURVEY COURSE such as this, group student presentations andpapers are most important for both DEEP learning and for grades. As for“senioritis” your final grade will be determined by week 13 of the semester andthe last two weeks of the semester we will cover advanced bio-MEMS for DNAdiagnostics on a MEMS chip and treatment using MEMS chips. Medical sensorsand MEMS based treatment a very new and fast growing application of MEMS. Sothis portion has lots of opportunity for extra credit.More Details on TWO CLASS GROUP PPT BASED PRESENTATIONS ANDASSOCIATED WORD PAPERSAs TWO in class group talks and papers play such a big role in learning andgrades I cover this next in more detail. The two group talks I assign and associated grouppapers are distinct with different requirements and different due dates.The course therefore emphasizes practice in both ORAL presentations in PPT and report writingin WORD using IEEE standard referencing of all sources. Penn State’s Michael Alley has anexcellent talk on PPT presentations located both on YouTube and on www.the-scientist.com.Your technical presentations will be GROUP efforts to simulate your next environment—industryor graduate school. This group effort is purposeful to get students familiar with the team effortsthat they will SOON encounter in industry. For group efforts Microsoft has versions of Word andPower Point that reside on servers at Microsoft—@ office live.com—moreover this allowsMULTIPLE users to log on and work on the SAME document together.GROUP TALK # 1 and Paper # 1: “ Micro Fluidics” for all Groups.Talk # 1 is given in weeks 5-6 of the semester. MEMS Microfluidics and applications toLOWER COST and FASTER medical diagnostics is the single allowed topic so ALLstudents will talk about the same topic. , but different aspects come out in a broad topiclike this. MEMS in Micro Fluidics---Lab on a chip for chemical, DNA or medical fluidsdiagnostics, Micro fluidics is used for both sample preparation, movement of reagents andbioassay. Liquid chromatography ( LC) coupled with mass spectroscopy (LC MS) is moresensitive and discriminates better between species. LC-MS ( mass spectroscopy) is a bigbusiness and the front end LC is done on a microfluidic chip which Agilent sellscommercially. See the compa
1. “The MEMS Handbook ” Edited by Mohamed Gad-el-Hak CRC Press ISBN 0-8493-0077-0 (2002) When I refer in class schedule or lecture supplemental reading to Text 1 Chapter 5, I mean “the MEMS Handbook” Ch 5 etc . 2. “Fundamentals of Micro Fabrication” by Marc Madou CRC Press ISBN 0-8493-0826-7
(prorated 13/week) week 1 & 2 156 week 3 130 week 4 117 week 5 104 week 6 91 week 7 78 week 8 65 week 9 52 week 10 39 week 11 26 week 12 13 17-WEEK SERIES* JOIN IN MEMBER PAYS (prorated 10.94/week) week 1 & 2 186.00 week 3 164.10 week 4 153.16 week 5 142.22 week 6 131.28 week 7 120.34
Week 3: Spotlight 21 Week 4 : Worksheet 22 Week 4: Spotlight 23 Week 5 : Worksheet 24 Week 5: Spotlight 25 Week 6 : Worksheet 26 Week 6: Spotlight 27 Week 7 : Worksheet 28 Week 7: Spotlight 29 Week 8 : Worksheet 30 Week 8: Spotlight 31 Week 9 : Worksheet 32 Week 9: Spotlight 33 Week 10 : Worksheet 34 Week 10: Spotlight 35 Week 11 : Worksheet 36 .
28 Solving and Graphing Inequalities 29 Function and Arrow Notation 8th Week 9th Week DECEMBER REVIEW TEST WEEK 7,8 and 9 10th Week OCTOBER 2nd Week 3rd Week REVIEW TEST WEEK 1,2 and 3 4th Week 5th Week NOVEMBER 6th Week REVIEW TEST WEEK 4,5 and 6 7th Week IMP 10TH GRADE MATH SCOPE AND SEQUENCE 1st Week
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