Excess Tools Part List & Accessories Declaration Form

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Excess Tools Part List & Accessories Declaration FormTool ID: DRTP-01a. GeneralCatDescriptionApplied MaterialsVendor / SupplierCENTURAModelIMPLANT ANNEALProcessVintage (Year of Manufacture)1999Serial No.R573Asset DescriptionAMAT CENT XE RTP RTPSoftware VersionCIMB6.50Linkedb. Hardware Configuration (Fab)CatMain SystemDescriptionAMAT CENTURA 1.X CONFIGURABLE MAINFRAMEQty / Units1Status,tick if ok[ ]SMIF SystemAsyst LPT22002PHandler SystemHP robot with single reduced contact quartz blade1PProcess ChmsXE process chamber (Chm A & B)2POthers(Pls specify if any)System Controller with built in AC PowerDistribution Box1PQty / UnitsStatus,tick if ok[ ]Loadlock pump (AA20)1Bay Voltex chiller1PPPc. Hardware Configuration (Subfab / Auxilliary Units)Sub Accessories / Auxilliary Unitsd. Missing/Faulty Parts / Accesorries List & Estimated Value(If NO missing/faulty parts/accessories please indicate NA)DescriptionNATotal Estimated USDQty / Units

TOOL PHOTOS (Photos must make sense to show all the major parts intact)Tool ID: DRTP-01a. GeneralDescriptionEqpt IDPhotosVendor / Supplier / Model

b. Hardware Configuration (Fab)DescriptionPhotosMain SystemSMIF SystemHandler SystemProcess ChmsOthers(Pls specify if any)

c. Hardware Configuration (Subfab / Auxilliary Units)DescriptionLoadlock pump (AA20)PhotosBay Voltex chillerd. Missing Parts [photos showing major missing parts]DescriptionPhotos

Equipment ConfigurationVendor: Applied usProdSoftware VersionB6.50CIMLinkedLLAYes-SerialLLA Loader Maker / ModelLLBLLB Loader Maker / ModelMainframeMainframe TypePlating TypeMainframe SkinsConfigurationASYST / LPT2200CENTURA DIVISIONALTOXICELECTROLESS NICKEL PLATINGYESCHM BXE ATMCHM CNACHM DSSCOOLCHM ENACHM FSSCOOLWide BodyLoad Lock Cycle PurgeYesLoad Lock Auto RotationYesLoad Lock Integrated Cassette SensorYesOTF (Before Enter chm/cooldown)RobotRobot Speed w-wfr / No wfr (steps)Edge-RingWWMYes / EnableHP30000 / 600000200-36118Rotation Speed w-wfr / No wfr (rpm)90 / 20Process Chamber PCV Model (MKS)253B-16182Xfer Chamber PCV Model (MKS)253B-11203Standby Online Pressure ( Torr )780LLA & LLB Manometer Type ( Torr )1000 & 1000LLA & LLB Manometer Model (MKS)124AA-01000BBTransfer Chm Manometer Type ( Torr )1000Transfer Chm Manometer Model (MKS)124AA-01000BBProcess Chm Manometer Type ( Torr )1000Process Chm Manometer Model (MKS)624A13TBCPressure Control ModeReflector Plate (Normal / BPSG)O2 analyzer (one per chm)PIDBPSG (0010-03524)AMETEK CG1100Rotation Assembly0010-19534Temperature Probe0010-15563SCR / LampProcessYes-SerialXE ATMWafer Mapping Mode0190-03485 / 0190-36349CHM AImplant RTACHM BImplant RTACHM CNACHM DNAPump VendorPump / Abatement / HeatExchangerASYST / LPT2200CHM ALoad Lock TypePump Model ( LL / Xfer / Process Chm)EbaraAA20N / NA / NAPump Serial NumberYesPump labelingYesPump Cooling H2O(L / Min.)6.0Scrubber / Burn BoxHeat ExchangerHeat Exchanger Maker / ModelYes / NoYesBay VoltexHeat Exchanger Serial No.YesHeat Exchanger Temp. Setpt (DegC)22.0Heat Exchanger CoolantRO2Process GasRTO / RTP MFC*DRTP-01Size / Brand / Model / NC or NON2-PURGE10SLPM / MILLIPORE / 2900 SERIES / NOO2-BIG10SLPM / MILLIPORE / 2900 SERIES / NCO2-SMALL1SLPM / MILLIPORE / 2900 SERIES / NCN2-PROCESS20SLPM / MILLIPORE / 2900 SERIES / NCNH310SLPM / MILLIPORE / 2900 SERIES / NCBottom Purge - N220SLPM / MILLIPORE / 2900 SERIES / NC

O2 analyzer (one per chm) AMETEK CG1100 Rotation Assembly 0010-19534 Temperature Probe 0010-15563 SCR / Lamp 0190-03485 / 0190-36349 CHM A Implant RTA CHM B Implant RTA CHM C NA CHM D NA Pump Vendor Ebara Pump Model ( LL / Xfer / Process Chm) AA20N / NA / NA Pump Serial Number Yes Pump labeli

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