Piezoelectric Ceramic Products - PI USA
PiezoelectricCeramic ProductsFUNDAMENTALS, CHARACTERISTICS AND TIONPIEZO TECHNOLOGY
ContentsPI Ceramic – Leaders in Piezoelectric Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3Product Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6Fundamentals of Piezo TechnologyPiezoelectric Effect and Piezo Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8Electromechanics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10Dynamic Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Piezo Ceramics – Materials, Components, ProductsMaterial Properties and Classification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Soft and Hard Piezo Ceramics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Lead-Free Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16Material Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Temperature Dependence of the Coefficients . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Manufacturing TechnologyPressing Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Co-firing, Tape Technology, Multilayer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Flexibility in Shape and Design. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24PICMA Multilayer Actuators with Long Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Metallization and Assembling Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26Piezo Ceramic Components: Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Testing Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30Integrated Components, Sub-Assemblies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31ApplicationsApplication Examples for Piezoceramic Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32Pumping and Dosing Techniques with Piezo Drives. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33Ultrasound Applications in Medical Engineering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34Ultrasonic Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35Piezoelectric Actuators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37Vibration Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39Adaptronics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40Energy from Vibration – Energy Harvesting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40Ultrasonic Machining of Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41Sonar Technology and Hydroacoustics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41PI Milestones . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 422ImprintPI Ceramic GmbH, Lindenstrasse, 07589 Lederhose, GermanyRegistration: HRB 203.582, Jena local courtVAT no.: DE 155932487Executive board: Albrecht Otto, Dr. Peter Schittenhelm, Dr. Karl SpannerPhone 49 36604-882-0, Fax 49-36604-882-4109info@piceramic.com, www.piceramic.comAlthough the information in this document has been compiled with the greatest care, errors cannot be ruled outcompletely. Therefore, we cannot guarantee for the information being complete, correct and up to date. Illustrations may differ from the original and are not binding. PI reserves the right to supplement or change the informationprovided without prior notice. All contents, including texts, graphics, data etc., as well as their layout, are subject tocopyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to awritten permission of PI. The following company names and brands are registered trademarks of Physik Instrumente(PI) GmbH & Co. KG : PI , PIC , NanoCube , PICMA , PILine , NEXLINE , PiezoWalk , NEXACT , Picoactuator , PInano , PIMag . The following company names or brands are the registered trademarks of their owners: µManager,LabVIEW, Leica, Linux, MATLAB, MetaMorph, Microsoft, National Instruments, Nikon, Olympus, Windows, Zeiss.W W W. P I C E R A M I C . C O M
PI CeramicLEADERS IN PIEZOELECTRIC TECHNOLOGYPI Ceramic is one of the world’s market leaders for piezoelectric actuators and sensors. PICeramic provides everything related to piezoceramics, from the material and componentsright through to the complete integration.PI Ceramic provides system solutions forresearch and industry in all high-tech markets including medical engineering, mechanical engineering and automobile manufacture, or semiconductor technology.Core Competencesof PI CeramicMaterials Research and DevelopmentPI Ceramic develops all its piezoceramicmaterials itself. To this end PI Ceramic maintains its own laboratories, prototype manufacture as well as measurement and testingstations. Moreover, PI Ceramic works withleading universities and research institutionsat home and abroad in the field of piezoelectricity.Flexible ProductionIn addition to the broad spectrum of standardproducts, the fastest possible realization ofcustomer-specific requirements is a top priority. Our pressing and multilayer technologyenables us to shape products with a shortlead time. We are able to manufacture individual prototypes as well as high-volumeproduction runs. All processing steps areundertaken in-house and are subject to continuous controls, a process which ensuresquality and adherence to deadlines.Certified QualitySince 1997, PI Ceramic has been certifiedaccording to the ISO 9001 standard, wherethe emphasis is not only on product quality but primarily on the expectations of thecustomer and his satisfaction. PI Ceramicis also certified according to the ISO 14001(environmental management) and OHSAS18001 (occupational safety) standards,which taken together, form an IntegratedManagement System (IMS). PI Ceramic isa subsidiary of Physik Instrumente (PI) anddevelops and produces all piezo actuators forPI’s nanopositioning systems. The drives forPILine ultrasonic piezomotors and NEXLINE high-load stepping drives also originate fromPI Ceramic.Standard piezo components for actuators,ultrasonic and sensorapplicationsSystem solutionsManufacturing of piezoelectric components ofup to several millionunits per yearDevelopment ofcustom-engineeredsolutionsHigh degree of flexibility in the engineeringprocess, short leadtimes, manufacture ofindividual units andvery small quantitiesAll key technologiesand state-of-the-artequipment for ceramicproduction in-houseCertified in accordancewith ISO 9001,ISO 14001 and OHSAS18001Company building of PI Ceramic in Lederhose, Thuringia, Germany.3PIEZO TECHNOLOGY
Reliability and Close Contact with our CustomersOUR MISSIONPI Ceramic providesPiezoceramic materials(PZT)PiezoceramiccomponentsCustomized and application-specific ultrasonictransducers/transducersPICMA monolithicmultilayer piezo actuatorsMiniature piezo actuatorsPICMA multilayerbender actuatorsPICA high-load piezoactuatorPT Tube piezo actuatorsPreloaded actuatorswith casingPiezocomposites –DuraAct patchtransducersOur aim is to maintain high, tested quality for both our standard products and forcustom-engineered components. We wantyou, our customers, to be satisfied with theperformance of our products. At PI Ceramic,customer service starts with an initial informative discussion and extends far beyondthe shipping of the products.Advice from Piezo SpecialistsYou want to solve complex problems – wewon’t leave you to your own devices. Weuse our years of experience in planning,developing, designing and the productionof individual solutions to accompany youfrom the initial idea to the finished product.We take the time necessary for a detailedunderstanding of the issues and work outa comprehensive and optimum solution atan early stage with either existing or newtechnologies.4W W W. P I C E R A M I C . C O MAfter-Sales ServiceEven after the sale has been completed,our specialists are available to you and canadvise you on system upgrades or technicalissues. This is how we at PI Ceramic achieveour objective: Long-lasting business relations and a trusting communication withcustomers and suppliers, both of whichare more important than any short-termsuccess.PI Ceramic supplies piezo-ceramic solutionsto all important high-tech markets:Industrial automationSemiconductor industryMedical engineeringMechanical and precision engineeringAviation and aerospaceAutomotive industryTelecommunications
Experience and Know-HowSTATE-OF-THE-ART MANUFACTURING TECHNOLOGYDeveloping and manufacturing piezoceramic components are very complex processes.PI Ceramic has many years of experience inthis field and has developed sophisticatedmanufacturing methods. Its machines andequipment are state of the art.Rapid PrototypingThe requirements are realized quickly andflexibly in close liaison with the customer.Prototypes and small production runs ofcustom-engineered piezo components areavailable after very short processing times.The manufacturing conditions, i.e. thecomposition of the material or the sinteringtemperature, for example, are individuallyadjusted to the ceramic material in order toachieve optimum material parameters.Precision Machining TechnologyPI Ceramic uses machining techniques fromthe semiconductor industry to machine thesensitive piezoceramic elements with aparticularly high degree of precision. Special milling machines accurately shape thecomponents when they are still in the “greenstate“, i.e. before they are sintered. Sinteredceramic blocks are machined with precisionsaws like the ones used to separate individual wafers. Very fine holes, structuredceramic surfaces, even complex, threedimensional contours can be produced.Automated Series Production –Advantage for OEM CustomersAn industrial application often requires largequantities of custom-engineered components. At PI Ceramic, the transition to largeproduction runs can be achieved in a reliableand low-cost way while maintaining the highquality of the products. PI Ceramic has the capacity to produce and process medium-sizedand large production runs in linked automated lines. Automatic screen printers and thelatest PVD units are used to metallize theceramic parts.Automated processes optimize throughput5PIEZO TECHNOLOGY
Product OverviewIN-HOUSE DEVELOPMENT AND PRODUCTIONPiezoelectric ComponentsVarious different versions in many different geometries such as disks, plates,tubes, customized shapesHigh resonant frequencies to 20 MHzOEM AdaptationsPiezo transducers for ultrasonicapplicationsAssembly of complete transducercomponents2D or line arraysDuraAct Piezo Patch TransducersActuator or sensor, structural healthmonitoringBendable and robust, preloaded due tolaminationControl Electronics6W W W. P I C E R A M I C . C O MDifferent performance classesOEM modules and benchtop devices
PICMA Multilayer Piezo ActuatorsLow piezo voltage to 120 VHigh stiffnessTravel ranges to 100 µmPICA High-Load ActuatorsTravel ranges to 300 µmForces to 100 kNPICMA Multilayer Bending ActuatorsBidirectional displacement to 2 mmLow operating voltage to 60 VContractors, variable contoursPiezo Actuators withCustomized EquipmentFor use in a harsh environmentPosition and temperature monitoringFor cryogenic temperatures7PIEZO TECHNOLOGY
LPolarisationaxisC1(Z)3L16PImpendanz Z oLC05Piezoelectric Effect and Piezo Technology2(Y)R14Piezoelectric Ceramics Piezoelectric materials convert electrical energy into mechanical energy and vice versa.The piezoelectric effect is now used in manyeveryday products such as lighters, loudspeakers and signal transducers. Piezo actuator technology has also gained acceptancein automotive technology, because piezocontrolled injection valves in combustionengines reduce the transition times and significantly improve the smoothness and exhaustgas quality.––– –––– –––– – – – ––––– – – – – –– – – – – The word “piezo“ is derived from the Greekword for pressure. In 1880 Jacques and Pierre Curie discovered that pressuregenerates Lelectrical charges in a number of crystalsfnsuch as Quartz and Tourmaline; they calledO2this phenomenon the “piezoelectric effect“.PbLater they noticed that electrical fields canTi, Zrdeform piezoelectric materials. This effect isFig. 1.called the “inverse piezoelectric effect“. The(1) Unit cell with symmetrical,0 with piezoindustrial breakthrough camecubic Perovskite d1(r) T TRadialschwingungFrequenz fthat Barium Titanate assumes piezoelectric-Ps(2) Tetragonally distorted unitcharacteristics on a useful scale when ancell, T Telectric field is applied. Pr with PolycrystallineStructurePsAt temperatures below the Curie temperature, the lattice structure of the PZT crystallites becomes deformed and asymmetric.-EcThis bringsabout the formation of dipolesand the rhombohedral andEctetragonalcryE kV/cmVstallitephases which are of interest for piezo technology. The ceramic exhibits spontaneous polarization-Pr (see Fig. 1). Above theCurie temperature the piezoceramic materialloses its piezoelectric properties.–– –––CDickenschwingung –– C– – 3– – From the Physical Effect to Industrial Usefm– –(2)The piezoelectric effect of natural monocrystalline materials such as Quartz, Tourmaline and Seignette salt is relatively small.Polycrystalline ferroelectric ceramics such asBarium Titanate (BaTiO3) and Lead ZirconateTitanate (PZT) exhibit larger displacementsor induce larger electric voltages. PZT piezo ceramic materials are available in manymodificationsand are mostwidely used(1)(2)(3)for actuator or sensor applications. Specialdopings of the PZT ceramics with e.g. Ni, Bi,Sb, Nb ions make it possible to specificallyoptimize piezoelectricand dielectric parameP C/m2ters. (1) (X)1 ODDPTHODDirect Piezoelectric EffectMechanical stresses arisingas the result3of an external force that act on the piezoelectric body induce displacements1 of theelectrical dipoles. This generates an elec2tric field, which produces a correspondingelectric voltage. This direct piezoelectriceffect is also called the sensor or generatoreffect.3 3(r)U–1Inverse Piezoelectric Effect3THWhen an electricvoltage 6is applied to an TH52unrestrained piezoceramic component itbrings about a geometric deformation. TheIDmovement achieved is aP function of theLpolarity, of the voltageapplied and theLängsschwingungdirection of the polarization in the device.The application of an AC voltage produDickenschwingungces an oscillation,i.e. a periodic change ofthe geometry, for example the increase orreduction of the diameter of a disk. If thebody is clamped, i.e. free deformation isconstrained, a mechanical stress or forceis generated. This effect is frequently alsocalled Lthe actuator or motor adialschwingungW W W. P I C E R A M I C . C O MTHW31(r)
axisC1(Z)3L1 oLC06P5 L2(Y)Polarisationaxis(X)R141C1fm(Z)3L12(Y)R1which is degraded again when the mechanical, thermal and electrical limit values ofthe material are exceeded (see Fig. 3). Theceramic now exhibits piezoelectric properties and will change dimensions whenan electric voltage is applied. Some PZTceramics must be poled at an elevated temperature.––––Fre– –––– –––– – –– – –– – – – ––– – – – – –– – –––– When the permissible operating temperature is exceeded, the polarized ceramicdepolarizes. The degree of depolarization isdepending on the Curie temperature of thematerial.(1)(2)––– –One effect of the spontaneous polarizationis that the discrete PZT crystallites becomepiezoelectric. Groups of unit cells with thesame(1)orientation are called ferroelectricdomains. Because of the random distribution of the domain (2)orientations in the ceramic material no macroscopic piezoelectricbe havior is observable. Due to the ferroelectric nature of the material, it is possible toforce permanent reorientation and alignmentof the different domains using a strong electric field.This process is called poling (see(2)Fig. 2).–1(1)(2)––– – –– (3)– – – – – – – –––––– – – –P C/m2An electric field of sufficient strength canreverse the polarization direction (see Fig.4). The link between mechanical and electriP C/m2cal parameters is of crucial significance forthe widespread technical utilization of piezoPceramics.PsPrFig. 2. Electric dipoles indomains:(1) unpolarized,ferroelectric ceramic,– –-Ec(2) duringand–P –– s(3) after the poling(piezoelectric ceramic). EcE kV––r–3 –PbThe poling process resultsin a remnantTi, Zrpolarization P r which coincides with aremnant expansion of the material and O2Polarization of the Piezoceramics (3)– – Ferroelectric Domain Structure(X)Impendanz Z54 oP(1) O2 Ps––Radialschwingung -Ps –-Ps–PrDickenschwingung– – –S31(r)– -EcP–RadialschwingungTi, Zr-Pr–1(r)Pb LC06 EcE . 3. The butterfly curve shows the typicaldeformation of a ferroelectric “soft“ piezo ceramicmaterial when a bipolar voltage is applied.The displacement of the ceramic here is basedexclusively on solid state effects, such as the alignment of the dipoles. The motion producedis therefore frictionless and non-wearing.3-Pr2Dickenschwingung1(r)1Fig. 4. An opposing electric field will only3depolarize the material if it exceedsthe6THcoercivity strength Ec. A further increase in the51opposingfield leads to2repolarization, but inthe opposite ialschwingungPIEZO TECHNOLOGY
ElectromechanicsF U N D A M E N TA L E Q U AT I O N S A N D P I E Z O E L E C T R I C C O E F F I C I E N T Selectric flux density,or dielectricdisplacementTmechanical stressEelectric fieldSmechanical straindpiezoelectric chargecoefficientεT dielectric permittivity(for T constant)sationxissE elastic coefficient(for E constant)6P52(Y)(X)14Fig. 5. Orthogonalcoordinate system todescribe the propertiesof a poled piezoelectricceramic. The polarizationvector is parallel to the3 (Z)-axis.ε33Tpermittivity value in the polarization direction when an electric field isapplied parallel to the direction of thepolarity (direction 3), under conditionsof constant mechanical stress (T 0:“free“ permittivity).ε11Spermittivity if the electric field anddielectric displacement are in direction 1 at constant deformation (S 0:“clamped“ permittivity).D d T εT ES sE T d EThese relationships apply only to small electrical and mechanical amplitudes, so-calledsmall signal values. Within this
PI Ceramic provides system solutions for research and industry in all high-tech mar-kets including medical engineering, mechan - ical engineering and automobile manufac - ture, or semiconductor technology. Materials Research and Development PI Ceramic develops all its piezoceramic materials itself. To this end PI Ceramic main-
composite laminated piezoelectric plates. Raju and Rao [8] presented the effects of size and location of piezoelectric actuators on the cross-ply laminated composite plates excited by piezoelectric actuators. Sawarkaret al. [9] developed the Semi-analytical solutions for static analysis of piezoelectric laminates.
sliding velocity. Friction coefficients are very high for the ceramic/ceramic pair beginning at 0.60 -4-0.10 (very erratic) at room temperature and steadily increasing with temperature to above 1.0 at 900 C. The friction coefficient for the ceramic/metal pair is about the same as that of the ceramic/ceramic pair at
installed piezoelectric materials in its dance floor to turn patrons' moves into electricity that is used to change the color of the floor's surface. After Club Watt, the piezoelectric floors kept coming. A Tokyo railway station installed a piezoelectric floor
Alternative Resources for Renewable Energy: Piezoelectric and Photovoltaic Smart Structures 265 piezoelectric devices equals to US 10.6 billion and a high growth is expected over a 5-year period and to reach a value of US 19.5 billion by 2012. Energy harvesting applications for piezoelectric devices is less than 10% however it can
Murata, as a forerunner in the piezoelectric ceramic industry, offers an extensive range of products with piezoelectric applications. Product applications for piezoelectric ceramics include the following categories : Murata has and is continuing to direct extensive research development efforts to the entire range of applications of
D2610 Inlay, Porcelain/Ceramic - 1 Surf 225 D2620 Inlay, Porcelain/Ceramic - 2 Surf 225 D2630 Inlay, Porcelain/Ceramic - 3 or More Surf 225 D2642 Onlay, Porcelain/Ceramic - 2 Surf 240 D2643 Onlay, Porcelain/Ceramic - 3 Surf 240 D2644 Onlay, Porcelain/Ceramic - 4 or
Natural ceramic raw materials and their properties. Characterization of ceramic powders. 4. Week Natural ceramic raw materials and their properties. 5. Week Advanced ceramics. Classification and applications of advanced ceramics. 6. Week 1. Midterm Exam 7. Week Advanced ceramic powder synthesis. Characterization of ceramic powders. 8.
Petitioner-Appellee Albert Woodfox once again before this Courtis in connection with his federal habeas petition.The district c ourt had originally granted Woodfox federal habeas relief on the basis of ineffective assistance of counsel, but weheld that the district court erred in light of the deferential review affordedto state courts under the Antiterrorism and Effective Death Penalty Act of .
