MKS G-Series Mass Flow Controllers Instruction Manual
1046210-001, Rev AJanuary, 2013MKS G-SeriesDigitalMass Flow ControllersInstruction Manual
WARRANTYG-Series Mass Flow ControllersMKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipmentdescribed above (the “equipment”) manufactured by MKS shall be free from defects in materials andworkmanship.For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKSwill, at its option, either repair or replace any part which is defective in materials or workmanship withoutcharge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for anybreach of MKS of this warranty.The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective bythe purchaser, shall make specific written arrangements with respect to the responsibility for shipping theequipment and handling any other incidental charges with the MKS Sales Representative or distributor fromwhich the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS homeoffice in Andover, Massachusetts, USA.This warranty does not apply to any equipment which has not been installed and used in accordance with thespecifications recommended by MKS for the proper and normal use of the equipment. MKS shall not beliable under any circumstances for indirect, special, consequential, or incidental damages in connection with,or arising out of, the sale, performance, or use of the equipment covered by this warranty.MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6 to12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration itis considered normal preventative maintenance not covered by any warranty.THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED ORIMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIEDWARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINSTINFRINGEMENT OF ANY PATENT.
Copyright 2013 by MKS Instruments, Inc.All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,electronic or mechanical, including photocopying and recording, or by any information storage or retrievalsystem, except as may be expressly permitted in writing by MKS Instruments, Inc.Printed in the United States of AmericaBaratron and Mass-Flo are registered trademarks of MKS Instruments, Inc., Andover, MADeviceNet is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FLElgiloy is a registered trademark of Elgiloy Specialty Metals, Elgin, ILTeflon is a registered trademark of E.I. du Pont de Nemours and Company, Wilmington, DESwagelok and VCR are registered trademarks of Swagelok Marketing Company, Solon, OHProtected by U. S. Patents 5314164 and 5461913 and other Patents and Patents Pending
Table of ContentsTable of ContentsList of References . vMass Flow Device Safety Information . 1Symbols Used in This Instruction Manual . 1Symbols Found on the Unit . 1Safety Procedures and Precautions . 1Sicherheitshinweise für das Massenflussgerät. 3In dieser Betriebsanleitung vorkommende Symbole . 3Erklärung der am Gerät angebrachten Symbole . 3Sicherheitsvorschriften und Vorsichtsmaßnahmen . 3Informations de sécurité pour appareils de mesure/contrôle de débit massique . 5Symboles utilisés dans ce manuel d'utilisation . 5Symboles figurant sur l'unité . 5Mesures de sécurité et précautions . 5Medidas de seguridad del dispositivo de flujo de masa . 7Símbolos usados en este manual de instrucciones . 7Símbolos hallados en la unidad . 7Procedimientos y precauciones de seguridad . 7マスフロー機器の安全に関する情報 . 9本取扱説明書のマーク . 9本機器のマーク . 9安全対策について . 10질량 유량 장치 안전 정보. 13본 지침 매뉴얼에 사용되는 기호들 . 13장치에 표시된 기호들 . 13안전 절차 및 예방조치 . 14Chapter One: General Information . 17Introduction . 17How This Manual is Organized . 18Customer Support . 19Chapter Two: Overview . 21General Information . 21How the MFC Works . 22Operation of the MFC with Gases other than Nitrogen . 22Chapter Three: Installation and Configuration . 24Unpacking . 24Product Location and Requirements. 25Product Dimensions . 25GE50A and GM50A – See Appendix C . 25GV50A – See Appendix D . 25i
Table of ContentsMounting Hardware. 26Installation Procedure . 26Chapter Four: Analog and Digital Interfaces . 29Analog I/O Interface Cables . 29Analog Interface Input and Output Options. 30Digital Interface Input and Output Options . 33Chapter Five: Ethernet Interface Setup and Configuration . 44Step 1: Install the Java Plug-in (for single IP address) . 44Step 2: Setup Network for Communication through Ethernet . 45Chapter Six: Embedded Web-Based GUI and Diagnostics . 54Logging On to Your MFC . 54Monitor Mode . 54Setup Mode. 59Chapter Seven: Maintenance . 68General Information . 68Recalibration. 68Flow Zero Adjustment . 68Chapter Eight: Troubleshooting . 73Troubleshooting Chart . 73Appendix A: Product Specifications . 79Performance Specifications – GE50A/GV50A/GM50A . 79Specifications are subject to change without notice.Mechanical Specifications - GE50A/GV50A/GM50A . 79Electrical Specifications for GE50A, GM50A and GV50A . 80Appendix B : Model Code Explanation for GE50A & GV50A . 84Model Code Description – Elastomer Sealed Products . 84Appendix C: Model Code Explanation for GM50A . 90Model Code Description – GM50A – Metal Sealed Products . 90Appendix D : Outline Drawings . 96GE50A MFC and GM50A MFC/MFM . 96GV50A MFC w/ Integral Shut-off Valve . 99Appendix D: Health and Safety Form . 102. 102ii
List of ReferencesList of FiguresFigure 1: Serial Number Label (sample). 26Figure 2: DeviceNet Connector Pin Diagram . 33Figure 3: Devicenet Top View . 34Figure 4: Devicenet Baud Rate Switch . 35Figure 5: Devicenet MAC ID Switches . 35Figure 6: Profibus Top View . 38Figure 7: Profibus Station Address Switches . 39Figure 8: RS485 Top View . 41Figure 9: Embedded GUI, MFC Device Page in Monitor Mode . 55Figure 10: Embedded GUI, Plot Page in Monitor Mode . 56Figure 11: Embedded GUI, Configuration Page in Monitor Mode . 57Figure 12: Embedded GUI, RS485 Comm Page in Monitor Mode . 58Figure 13: Setup Mode (Configuration Page) . 59Figure 14: Embedded GUI, Device Page in Setup Mode . 60Figure 15: Embedded GUI, Creating A New Gas Instance . 61Figure 16: Changing the Full Scale Flow Range . 61Figure 17: Embedded GUI, Plot Page in Setup Mode . 62Figure 18: Embedded GUI, Configuration Page in Setup Mode . 63Figure 19: Embedded GUI, RS485 Comm Page in Setup Mode . 65Figure 20: Embedded GUI, Diagnostics Page in Setup Mode . 66iii
List of ReferencesList of TablesTable 1: Definition of Symbols Found on the Unit . 1Tabelle 2: Bedeutung der am Gerät angebrachten Symbole . 3Tableau 3: Définition des symboles sur l'unité. 5Tabla 4: Definición de los símbolos hallados en la unidad . 7表 5: 本機器に使 されているマークについて . 9표 6: 장치에 표시된 기호들의 정의 . 13Table 7: MKS Interface Cables . 29Table 8: Analog Interface Voltage I/O (0 to 5 VDC) – 9 Pin D Male Pinouts – Model Code A . 30Table 9: Analog Interface Voltage I/O (0 to 5 VDC) – 15 Pin D Male Pinouts – Model Code B . 31Table 10: Digital Interface - DeviceNet Connector Pinout – Model Code 6 . 33Table 11: Network (NET) Status LED Indicators . 34Table 12A: Profibus 9 Pin D Male Power Connector– Model Code 4 . 37Table 12B: Profibus 9 Pin D Female Communications Connector – Model Code 4 . 38Table 13: Digital Interface – RS485 Using 9 Pin D – Model Code 5 . 40Table 14: RS485 Module Status LED Indicators . 40Table 15: Troubleshooting Chart. 73iv
List of ReferencesList of ReferencesThe documents listed below are referenced throughout this manual.[1]“DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, OpenDeviceNet Vendors Association, Inc. Release 2.0. ERRATA 4.0[2]“DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNetVendors Association, Inc. Release 2.0. ERRATA 4.0[3]“Sensor/Actuator Network Common Device Model”, SEMI Standards Document E54.1-0097.[4]“Sensor/Actuator Network Communications Standard for DeviceNet”, SEMI Standards DraftDocument E54.4-0097.[5]“Sensor/Actuator Network Specific Device Model for Mass Flow Devices”, SEMI Standards DraftDocument #2253C.[6]“Sensor/Actuator Network Standard”, SEMI Standards Document E54-0097.[7]SEMI E17-00-0060 Guideline for Mass Flow Controller Transient Characteristics Tests[8]SEMI E18-00-0091. Guideline for Temperature Specifications of the Mass Flow Controller[9]SEMI E27-00-0
Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers [12] SEMI Standards Document E52-95. [13] SEMI E80-00-0299. Test Method Determining Attitude Sensitivity of Mass Flow Controllers [14] SEMI Standards Document E52-95. Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers
Technology Manual MKS P/N 20021023-001 Revision A WARRANTY C Series Mass Flow Controllers MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment which is described above and manufactured by MKS, shall be free from defects in materials and workmanship.
(2 mks) (c) A trolley of mass 1.4kg moving at 0.8ms-1 on a frictionless horizontal surface was acted on by a force of 0.7N. If the resulting speed of the trolley was 1.7ms-1, determine (i) The change of momentum of the trolley. (2 mks) (ii) The time interval the force acted on the trolley. (2 mks) (iii)The
CODA-Series Coriolis mass flow meter operating manual 9 Communication Analog Communication KM-Series mass flow meters with a DB-15 connector include an analog output for both mass flow and density. CODA instruments with the optional 8-pin M12 connector have a single analog output for mass flow (page 7). Both of these outputs are linear across .
Mass Flow Rate Model Analytical equation used to calculate mass flow through an injector Steady-state mass flow will be verified with mass flow meter Cold Flow Mass Flow : 0.892 lbm/s 36 Inputs Values Coefficient of Discharge 0.375 Injection Inlet Area 0.017 sq. in Liquid Density 45.73 lbm/ft 3 Tank Pressure 900 psi Chamber Pressure 12.315 psi
116527-P1 Rev E, 3/99 Instruction Manual MKS Type 1179A and 2179A Mass-Flo Controller
The coriolis mass flow meters measure simultaneously mass flow, volume flow, temperature and density and consequently can replace different measuring instruments. Due to a construction free of dead spots the meters are well flushable and can be easily sterilized. The C-flow mass flow meters do not contain any moving parts and
824-S Mass Flow Meter without display (stainless steel flow body) SierraÕs Top-Trak" Mass Flow Meters are designed for precise measurement of gas mass flow. The 820 Series offers a broad range of sizes and process connections for flexibility and versatility. The primary standard calibration ensures starting point accuracy and NIST .
ANSI A300 Purpose: To provide performance standards for developing written specifications for tree management. Currently nine individual parts . ANSI Z60 American Nurseryman and Landscape Association began developing this standard back in 1929 Became an ANSI document in 1949 Current version is 2004 . ANSI A300 The Tree Care Industry Association convened a consensus body .
