MICRO/NANO SENSORS FOR HEALTHCARE AND SMART

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MICRO/NANO SENSORSFOR HEALTHCARE ANDSMART CITYByHong Kong Science and Technology Parks Corporation Electronics Cluster

CONTENTEXECUTIVE SUMMARY1The dawning of the Golden Age of microelectronics . 1Sensor ecosystem thriving at Science Park . 2Technology powered by the human body . 3Micro bubbles bring relief for patients globally. 4MEMS is here to stay. 5Using electrokinetics to detect biomolecules . 6Sensors helping patients inside and out.7Enhancing semiconductors with MEMS. 8Sensors driving advances in healthcare and the environment . 9Tracking technology powering smart city development . 10System integration key to readouts . 11Sensors leveraging machine learning .12Thermal imaging driving better lifestyles .13SNAPSHOT OF THE LATEST SENSOR R&D AT SCIENCE PARK14AAC Acoustic Technologies .15Future Impact Lab .16mCube Hong Kong . 17Meridian Innovation .18Nano and Advanced Materials Institute .19Neosen Energy .20Optical Sensing .21Platysens . 22Teledyne e2v Asia Pacific . 23Well Being Digital . 24ACKNOWLEDGEMENTS

EXECUTIVE SUMMARYThe dawning of the Golden Age of microelectronicsAt a time when businesses and consumers areincreasingly looking to translate the physical worldinto digital format, small, durable and sophisticatedsensors proliferate and play an expanding rolein robotics, artificial intelligence, IoT, electronicsand healthcare applications. Significant progressin Microelectromechanical Systems (MEMS) andNanotechnology has enabled the manufacturing of anew generation of sensors, opening up a whole host ofmarkets and opportunities yet to be fully explored.Actively building a sensor R&D community atHong Kong Science Park, Hong Kong Science andTechnology Parks Corporation (HKSTP) organisedthe first International Symposium on Micro/NanoSensors for Healthcare and Smart City with the IEEENanotechnology Council (NTC) on December 10, 2018 atScience Park. We brought in 12 internationally renownedexperts from the US, Europe and Asia to talk about thelatest developments in micro/nano sensor technologyand to share their insights into applications in theirspecialist fields. It was also a forum for 300 leadersfrom industry, academia and the public sector to cometogether to exchange ideas and discuss issues raised bythe speakers as well as wider trends and developments.By the end of the conference, three broad themes hademerged. First, the market and commercial developmentopportunity for MEMS and nano-sensors is changingfrom consumer electronics to healthcare and smart cityapplications. There is no doubt that the coming yearswill be a “golden age” for microelectronics as a widevariety of advanced sensors will be needed for the rapidgrowth in healthcare and smart city applications.Second, the biggest development trends relate to thedevelopment of sensors with new sensing materials,sensor device design and sensor fusion. Some moremature sensors, like Inertial Measurement Units (IMUs),will still have promising growth due to wearable andhealthcare applications. Third, we see new devicescoming that will have the potential to be used for thefollowing applications: gas/environmental sensors,thermal imaging sensors, biosensors and microfluidics.This paper provides a quick overview of sensordevelopment at Science Park, followed by snapshots ofthe observations and insights of the invited speakers,grouped under four themes: Medical and Bio-tech, IOTand Location Base, Sensor Fusion and Integration, andNext-Gen Thermal Imaging. It also summarises the latestResearch and Development work on sensor technologynow underway at Science Park from the perspectiveof 10 partner companies based at the Park. Finally, thispaper offers some direction for those interested inlearning more about the conference content, the workof Science Park and ways to tap into the exciting newworld of MEMS and sensor technology.Mr. George TeeChief Technology OfficerHong Kong Science and Technology Parks CorporationIr. Peter YeungHead of EE & ICT Clusters, Smart City PlatformHong Kong Science and Technology Parks CorporationPage 1

Sensor ecosystem thriving at Science ParkMore than 700 technology companies were based at HongKong Science Park working on research and development ina range of fields including ICT, Electronics, Green Technology,Biomedical, Nanotechnology, Materials and Robotics. Mr.George Tee, Chief Technology Officer of HKSTP, told thesymposium that the sensor ecosystem was growing rapidlyat the park and the number of sensor-related companies hadincreased by 25% in the last year.Science Park was a Living Lab and uniquelypositioned to help companies with sensorapplication testing.Mr. Tee said that Science Park was a Living Lab and uniquelypositioned to help companies with sensor applicationtesting. There was a dedicated Sensor Hub which welcomedacademia, companies and industries to test sensor products,collect data and continuously fine-tune products. HKSTPhad also set up a Sensor Lab in which R&D partners couldwork together to enable a platform for the design anddevelopment of sensor chips.HKSTP was now building a sensor R&D community at SciencePark bridging University researchers, R&D centres, leadingtechnology companies, start-ups and investors to workon various upstream to midstream sensor-related researchprojects and applications. Mr. Tee said the community wouldbe strengthened by the development of the Greater Bay Areaand the Hong Kong Government’s support for innovationand technology and the transformation of Hong Kong into aglobal I&T hub.Mr. George Tee, Chief Technology Officer, Hong KongScience and Technology Parks CorporationPage 2

Sensor Applications in the Medical and Bio-tech fieldsTechnology powered by the human bodyEnergy was the new era and self-powered nanogeneratorswere having a big impact on medical science, according toProfessor Zhonglin Wang, the Hightower Chair in MaterialsScience and Engineering and Regents’ Professor, of theGeorgia Institute of Technology. Prof. Wang talked about therapid development of nanogenerators based on triboelectriceffects. He said that self-powered nanogenerators usingtriboelectrification (TENG) could be used for a host ofmedical science applications including:Self-powered nanogenerators usingtriboelectrification (TENG) could be used fora host of medical science applications. wearable electronics powered only by human motion,realised through TENG with optimised materials andstructural design; pacemakers powered by human breathing, enabled byTENG; monitoring of regular heartbeats and arrhythmia by ECGand TENG; wireless heart rate monitoring; implantable self-powered low-level laser cure system formouse embryonic osteoblasts; self-powered throat microphones using a bionic membranesensor offering superior anti-interference.Prof. Wang concluded by summarising the likely trends from2017 to 2027 for micro/nano power sources, self-poweredsensing, blue energy and high voltage sources.(a) Prof. Zhonglin Wang, Hightower Chair in MaterialsScience and Engineering and Regents’ Professor, GeorgiaInstitute of Technology(b) A stretchable-rubber triboelectric nanogeneratorused as a self-powered body motion sensor (Source: Prof.Zhonglin Wang, Georgia Institute of Technology)Page 3

Sensor Applications in the Medical and Bio-tech fieldsMicro bubbles bring relief for patients globallyMicro bubble technology was emerging as a highly effectivetreatment for kidney stones. Thomas Kenny, Richard W.Weiland Professor and Senior Associate Dean for StudentAffairs in the School of Engineering at Stanford University,referenced the new treatment as part of his presentationabout advances in MEMS for IoT and Health. He said microbubbles could be used to improve the safety and efficacy ofthe lithotripsy procedures. If the bubbles were introducedat the start and throughout the usual shockwave procedure,the kidney stones would be more rapidly broken down andthe residual fragments would be smaller. The result shouldbe faster procedures, less risk of damage to the patient,higher efficacy, less use of primary capital equipment andelimination of secondary treatments for at least one third ofthe 700,000 kidney stone patients each year.Prof. Kenny said that size, power and cost would always bethe key drivers for the development of MEMS in the future.In this presentation, he explained how the chip fabricationprocess on a single wafer and thick film encapsulation couldenable the smallest possible MEMS for different sensors.He talked about the development of pressure sensors,gyroscopes, magnetometers and oscillators at StanfordUniversity based on MEMS and film encapsulation. He alsoshared a story about the successful adoption of MEMS-basedtiming technology by a California-based company SiTime thatwas now at the core of almost all wearables and portableelectronic devices.Micro bubbles could be used to improvethe safety and efficacy of the lithotripsyprocedures.(a) Prof. Thomas Kenny, Department of MechanicalEngineering and Senior Associate Dean for Student Affairs,Stanford University(b) Micrograph of MEMS and CMOS dies and final CSPpackage (1.5 x 0.8mm) (Source: Prof. Thomas Kenny, StanfordUniversity)Page 4

Sensor Applications in the Medical and Bio-tech fieldsMEMS is here to stayMEMS had become a fundamental and mature technology forsensors, said Professor Osamu Tabata of Kyoto University, andnanosensors were becoming important to AI and connectingthings in cyberspace and the physical world. Prof. Tabatapresented an overview of the development of micro andnano sensors from the past to the future, especially in Japan.MEMS had become a fundamental andmature technology for sensors.He touched on a range of emerging technologies includingnanosensors, IoT, AI, deep learning, organs-on-chips andplasmonic materials. During his presentation, Prof. Tabatadiscussed the body on a chip and an AI concept for drugdevelopment, covering new therapies, precision medicine andsafer clinical trials. He concluded MEMS would continue toexpand and accelerate the development of new sensors tothe benefit of society.(a) Prof. Osamu Tabata of Kyoto University(b) Positive outlook for the connection of nanosensors, IoTand AI through cyberspace (Source: Prof. Osamu Tabata ofKyoto University)Page 5

Sensor Applications in the Medical and Bio-tech fieldsUsing electrokinetics to detect biomoleculesIntegrating electrokinetics in ion sensitive field-effecttransistors (ISFETs) could result in a more reproducibleand sensitive bio-sensing platform, Uppsala University’sDr. Apurba Dev, Researcher, Department of Solid StateElectronics, The Ångström Laboratory, suggested in hispresentation on silicon nanotechnology for biomoleculesensing and the Si-based multiplexed bio-sensing platform.During his presentation, Dr Dev introduced the electrokineticeffect for the detection of different large biomolecules witha better response signal and suggested that ISFET/BioFETcould offer high sensitivity for detection of biomolecules. Hehighlighted the approach of sensing of DNA by solid statenanopores by using silicon process technology which involvedthe fabrication of large arrays using lithography.Integrating electrokinetics in ion sensitivefield-effect transistors (ISFETs) could resultin a more reproducible and sensitivebio-sensing platform.(a) Dr. Apurba Dev, Researcher, Department of Solid StateElectronics, The Ångström Laboratory, Uppsala University(b) Wafer with chip layout and capillary channels withnanopores (Source: Dr. Apurba Dev, Uppsala University)Page 6

Sensor Applications in the Medical and Bio-tech fieldsSensors helping patients inside and outTracking the journey of a medical pill through the humanbody was just one of the valuable sensor applicationsshared by mCube, Inc.’s Chief Executive Officer, Mr. Ben Lee.Hong Kong Science Park-based mCube talked about thedevelopment of single chip MEMS and CMOS inertial sensorsand systems for medical applications, including:Wearable sensors can detect when its userhas a fall and send an alert transmission andconduct pre-fall data logging. inertial sensors to enable tracking of the location ofmedical pills in the body and to monitor pill activation aswell as actuation of the medical function of pills with theembedded sensor electronics; wearable sensors to detect when its user has a fall and tosend an alert transmission, as well as pre-fall data logging; inertial sensors enable robotic and autonomous devices insurgery; smart gloves using multiple accelerometers to aidtherapeutic applications; accelerometer and gyroscope system to track motiontrajectory.Mr. Lee also highlighted the emerging motion sensorapplications in wearables for changing behavior, such as sportperformance enhancement and injury monitoring. mCube hadjust set up an application team at Science Park to support thedevelopment of various motion sensing applications.(a) Mr. Ben Lee, Chief Executive Officer of mCube, Inc.(b) A wearable device which can be embedded in clothingand equipment (Source: Mr. Ben Lee, mCube, Inc.)Page 7

Sensor Applications in the world of IoT and Location TrackingEnhancing semiconductors with MEMSSemiconductors combined with MEMS and sensor technologywere now the key to IoT, according to Professor WeileunFang, of National Tsing Hua University. Prof. Fang highlightedthat semiconductors were being enhanced by adding MEMSand sensor technology, miniaturised advanced packagingtechnology and ultra-low power technology. He sharedthe CMOS-MEMS platform for the fabrication of sensors,with its mature CMOS process, thin film etching and siliconetching. It could produce MEMS components and sensingcircuits such as 3-axis G-sensors, pressure sensors, magneticsensors and microphones. In addition, it was easy to integratethree sensors together for a tire-pressure monitoring systemthrough monolithic sensor integration.Semiconductors combined with MEMS andsensor technology were now the key to IoT.During his presentation, Prof. Fang also shared a poly-siliconplatform for acoustics sensors, a metal-MEMS platform thatused metal to fabricate vertical inductors and 3D TSV, and apolymer-MEMS platform using polymer to fabricate opticalcomponents. The platforms could form the building blocks ofa microsystem, further reinforcing the role of MEMS as a keyenabling technology for IoT in the future.(a) Prof. Weileun Fang of National Tsing Hua University(b) Integration of G-sensors, temperature sensors andpressure sensors for the tire-pressure monitoring system(Source: Prof. Weileun Fang, National Tsing Hua University)Page 8

Sensor Applications in the world of IoT and Location TrackingSensors driving advances in healthcare and theenvironmentHigh performance sensors were helping industry make giantstrides in healthcare and environmental monitoring, usingmicro and nano-engineered devices. Professor Inkyu Park,of the Korea Advanced Institute of Science and Technology,talked about a wireless smart glove system for human motiondetection and personalised health monitoring through theInternet of Things (IoT). It was made possible by using ananocomposite of microstructured polymer (nanosphere)with conductive nanomaterials (metal nanowires) to producewearable and flexible physical sensors. Furthermore, amultiplexed sensor array could be fixed on biomedical toolsto enhance the accuracy and safety of clinical proceduressuch as a smart micro-sensor integrated needle for highprecision biopsies.The integration of sensing nanomaterialswith microheating platforms could result inan ultra-low power and ultra-compact gassensor array.Prof. Park also outlined the key requirements for the nextgeneration of gas sensors which offered truly personalisedenvironmental air quality monitoring through MEMS andNanotechnology. He explained that the integration of sensingnanomaterials with microheating platforms could result in anultra-low power and ultra-compact gas sensor array.(a) Prof. Inkyu Park of the Korea Advanced Institute ofScience and Technology(b) Wireless smart glove system for human motiondetection (Source: Prof. Inkyu Park, Korea Advanced Instituteof Science and Technology)Page 9

Sensor Applications in the world of IoT and Location TrackingTracking technology powering smart citydevelopmentLocation information would continue to be a major driver fornew retail and smart city development. Professor Gary Chan,of Hong Kong University of Science and Technology, notedthat advances in 4G and 5G networks would greatly increasethe location accuracy of users in the future. Prof. Chan saidthat research was now focusing on location sensing algorithms,sensor innovations, machine learning and data analytics. Itcould enable new location-based applications and services andcreate new and immense commercial and social value.Location information would continue to bea major driver for new retail and smart citydev

Nanotechnology has enabled the manufacturing of a new generation of sensors, opening up a whole host of markets and opportunities yet to be fully explored. Actively building a sensor R&D community at Hong Kong Science Park, Hong Kong Science and Technology Parks Corporation (HKSTP) organised the first Inter

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