Diffractive Optics: Design, Fabrication, And Applications

pplicationsG. MichaelMorrisThe Instituteof OpticsUniversityof RochersterRochester,New York 14627(716) 275-5140(716) 271-1027TELFAXandRochesterPhotonicsCorporation330 Clay RoadRochester,New York 14623(716) 272-3010(716) 272-9374TELFAXConf. on Binary Optics, 199331I:: I EPACE" BLANKNOTFW.I I D

Diffractive(or Binary)aturesFeI i LargeapertureOpticsandlightWeightelementsii.-:::i ii!ii:: :'. f opticalin weight: :: ' ' ::EliminatesSynthesisissuesgenerationthe needandnumberfor exoticof key ethods32andof lensesmaterialsdevelopmentleveragingfor massproduction

Diffractive(or ldImagingFourierTransformOpticsLensesCollimation& BeamF-ThetaScan olensarrays--HartmannSensors,Laser Diodes and DetectorArraysOptical InterconnectsNull Optics for d Diffractive/RefractiveAchromatsBeam Shapingfor Diode LasersBi-FocalContact& IntraocularLensesOpticalData StorageHead-up(HUD) and Head-MountedDisplaysAft-ImagerOptics for NASA SensorsIntegratedOptics33(HMD)

Diffractive(or ndows(cont'd)StructuredStructuredand Domes(ARS)Low Observable(Stealth)Detectorsand Solar CellsPolarizationLinearBeamSurfaces- rsStatic Filters(laser end mirrors)TunableFilters(laser mode tuners,optical switches)-: .SecurityApplications(Indentificationor friendSystems

DiffractiveLenses Phase Function of Lens(r) 2 (A r2 G r4 2 Diffractive Zone Boundariesrmis the radius such that (rm) 2 m Blaze Height Diffraction Efficiency(scalar diffraction theory)PeakBl. TeEfficiency100 %Polynomial99 %Unear16 level98.7 %95 %8 level81.1%4 level35r3

of earand to &properties)36

MasterNickel37Master

:\EC(,OC00-JII m,eifo'tONIt)o I'n'IIl,,.IILLz38

onsWavelengthSpot SizePixelSpacingEdge Location441.6ErrorPart SizeWrite ess39nm0.7- 10 m0.25 - 5 tm 0.7 mper 0.03 m/inch4" x 4" x 0.5"3.1 hrs/lO02 - 256 3 inch0.2 - 3 msq. mm

DiffractiveLandscapeLens odulationF/5.6Transfer FunctionsF 50mmZo 587.6 nm DiffractiveHolographic!!Landscape 1.0 r1.0 I'% :!\o ,, oo,.,m,, /:: ': o" "m0"00(lines/mm)'Spatial Frequency3001.0: m0.00miliuiu n JSpatial Frequency (lines/mini3001.0IHFOV -- 4.5 deg0.0I ,HFOV.4.5 uency(lineshnm)300---

Achromatic Lens Powersa Abbe numbers20 Vglass 90Va d)Va- ConventionalDoubletVbVDOE -3.45DoubletsVa 60Vb 36crownflinta 2.5(b -1.5( Hybrid doubletVa 60Vb - -3.45crownDOEa 0.95(:I:)b o.o5(t). Features of Hybrid Doubletslower curvatureslower F/#lower weightno need for exotic glasses41

Application- OpticalDataStorage General ODS elementF/0.9f - 3.0mmpositivesingletHFOV 1 Xo ---0.780:1: 0.011 mmonochromaticdiskcoating Conventional Glass DoubletConventional achromatic doubletadds weight and size Hybrid Doublet iHybridHybrid lens reduces weight, andhelps correct,other aberrations,12i

StrehlRatio vs Field Angle1.000.95HybridODouSlet.mn-" (D0.90OlympusTriplett.O9SF57 singlet0.0II0.20.4I0.6Field AngleNumerical(degrees)Apertures: HybridDoublet Olympus- 0.57Triplet SF57 Singlet- 0.50- 0,5343I0.8110

-1nn .,,Hybrid.ororiIJ,[ llum i"* ''Longitudinal .TI"ChromaticdaAberrationEHybrid Le n';" 'O.ooW0Mode-lndexLensU." - oo- oosoWavelengthError. &;k (nm) 10044s?

WaveguidetB 0.67gmCorning7059PyrexLens Comparisont L 0.371amLN B 1.532, N L 1.497AN -0.035tfocal length 10mm,.':': '":".'. ""Mode-IndexDiffractiveF/5LensLensh0 17.51am# zones 54smallestzone 6.1 JamHybrid AchromaticMode-indexsurfaceLensf 5.3ramDiffractive surfaceIlllfd -11.5ramh0 17.51am# zones 47smallest45zone 7.0gin

WaveguideLens PerformanceComparison chromaticI)i firaciil.ensi','70%4oe/ ,70%'WaveiengthRangeRatio 0.8/25(tlybridof focus 44 tm)1te,,,-,",a[]-25t)-51111M tlc-imlcxHybrid:i,cIINil nmMode/Index:Diffractive:.o--for Strehi1.cns(Depth'-Efficiency40% I.cns.%i--Diffraction40e,4,Lens]--- -l oss 5 nm49-nm- - --7 ()571)It580 5, o , 610 (,2o (,3oWavelength(rim)46

DiffractiveLens Imaging Undiffracted light forms background in image planeDiffractiveImageLensPlanem lOpticalAxism 2m 0f/2f Point Spread ion47Primary.DiffractionOrder

Diffraction AnalyticEfficiencyresult for diffractionefficiencysin2[ :(o -m)] [ ( . rn)]2 Wavelengthdetuning parametero (X)"; o n(X)- 1n(%o).'1"t00 eoige::i40o121%%2O"',m 2 :!%%%m JJ0 z%.Jj0.45l a-.0.500,55:zWavelength.a ,-0.60 0.65(pro) ,18

PolychromaticXO 0.55k nax 0.7 I.l,m11int,poly (0.95)(0.914) 0.868I mP 8Examplesmin -- 0.4F/5.6.u,m1.0[-.0.8 ' "'-.iii- :I-",,, ",,,,,0"0050DiffractionLimit100150Spatial Frequency Xo 10. 0 l m,minContinuous profile 200250300(lines/mm)8.0 pmF/212.0 l mTlint,poly 0.955max %%'%%0.8F "-"%.IDiffraction Limito41%%%0.28 I m - 12 m oo 2o3040go.6'0Spatial Frequency (lines/mm)49

i . . Ji\I.I.1,-III---I.I.I.I. -. 0OI.L II{niII"-'viccJ50

Phase Grating Synthesis11 x 11 Array, Equal Intensity Diffracted ctedFourierModulus51

Phase Grating SynthesisTriangular Array, Equal Intensity Diffracted OrdersDesiredFourierModulus ! .PhaseGrating-3 t : !iE. zReconstructedFourierModulusrA W52E

Sub- Wavelength StructuredSurfacesConceptUse gth)comparedto synthesizeto theanindex of refractionniA p eof FresnelField-of-ViewReflectionsand SpectralBandwidthAdvantagesover-I-hinFilm CoatingsNo CohesionProblemsBirefringentSurface53

ARS Surfaces RequireONL Y Ro and TO non-evanescentincident wave 01niRmV/#RoRmd.-TmA-- k1Max[ni,n s] ni sinemax.L .! PeriodA smallerthan wavelength;k i iveMedium.ininiZ-aasMulti-level ProfileLight averages opticalstructuredregionFilm Stackpropertiesof--"Em 54Z

Angle of IncidenceSensitivityofGaAs 2-D Multilevel ARS Surfaces Performancefor randomly-polarizedradiation1.00 levelBinary4 level010203040Angle of Incidence ARS Surfaceni l,Profile50.I6070(deg.)Parametersn s 3.27,Ax Ay 2.4801JmProfile depth (pm) 5( v/oI

-Spectral Sensitivity of GaAs2-D Multi-level ARS Surfaces 4-level-r-Pyramidal89Profile10111213Wavelength 8-level Pyramidal-r-8914151617( m)Profile1011-'121314Wavelength (pm)56151617

Experimental Work2-D Binary ARS Surface for GaAs Preliminary Results: CAIBE etched GaAs4.22k Magnification' ".10.00k Magnification16.50k MagnificationSurfacesFabricatedat Cornell'sNationalNanofabrication5'7Facilities(NNF)

Polarization ComponentsForm Birefringence High-FrequencySurface-ReliefGratingsE LKFn ?usingn EIlK i'K Birefringence An nE LK-nEIIKAn is a function of filling factor ff a/A-aximUm-- -Bin frin g ence M; 0-0.25"qm-0.5-0.75E - 3-1-1.25-1.5-1.751258ns/n i 34mm

ResonanceStructuresIIncidentWavet' rRonoRegion 0.R , . ,,,,,,, ,, ,,,,,,,,,,,, ,,, , ,,, ,,,z n 1R m., :: ff ; : ., , ,rdl Regl,:,!:!!. :: :::: ::: ::: ::: ::::::::: ::::::::;:: ::: :;i:: : :::: ::'. : ;hi:i:: C:::. : i-: '?C?- ""7':7 :::LT:L::,?" ' " ?"Y"15i i i i! !i! ! ! i i;ili ii i :: i ! ] :: ::i i :;i ::i::i:: ::i:;::i::ii :"!;!'::;" ii ; ;"'""":, ; ii iii i!iiiiiiiiiii;iiiii "':':'T:':::'(71:,:i .:ii:. ::i:: iiii:iiii i ii i i i iiiii:: :E:I! :!: :I:E:I:I11." .i!i'/ iiiii!ii ' ;i ili {i i':Lea::i ii!i h:::::: : de. ' i i i !!i!iiiii ! ii ! !:!::::!:E: EE;!i i i! iliill; ii i' 'r: : ' ; i ! iii i i iii!i i' U:-:i:iii ! ij:ij:i i i:i:i:; i:i:i. .iiiiii:i:i:i:i:}:}:!:i:}:!:i:i:i: :: : !!i,}iiiiiii:!il;iiiiii;; .: : iiiii.{.i,i::::ii!iiii' d2 Regi " "::: : '. t' 2'n .:::. ::: :A: :: '. :: :T: m : :[ : ." : : : .m: :: .j .::::::::::::::::::::::::::::::::::::::::::::: Only Zeroth Orders Coupling Extremely Example:Propagatingoccurs betweennarrrowRegion 3(A X)incidentwave and leaky waveFWHM possible.FWHM of 2A1.00-'Parameters:N rmal lncidenc(EIIK P larizatiorx 0.75- .%) II.i0.25-0.000.610IA 0.401.tmIdl 0.301.tmm-) L. D6 s / :0.6150.620Wavelength:no l .0,n 1 n3 1.5./Itl.n2 2"00.50-n 59n 20.625(ILtm)0.630

FutureDirectionsin DiffractiveDiffractiveOpticsOpticsi!iiiii! !!ii!i!i!i ii!i! i i! iiiiiiiiiiirz6O

Design, Fabrication, and Applications G. Michael Morris The Institute of Optics University of Rocherster Rochester, New York 14627 (716) 275-5140 TEL (716) 271-1027 FAX and Rochester Photonics Corporation 330 Clay Road Rochester, New York 14623 (716) 272-3010 TEL (716) 272-9374 FAX 31 I::_I_E_ PACE" BLANK NOT FW.I_I_D Conf. on Binary Optics, 1993