P9002A Parallel Parametric Test System - Keysight

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P9002AParallel Parametric Test SystemMost Flexible Parallel Parametric TesterThe P9002A is an addition to the proven Keysight P9000 Series Parallel Parametric Test System, the“true” per-pin parametric tester, with the most flexible license-based configuration. It provides the bestreturn on parametric test investment for all evolving semiconductor manufacturers by meeting all testdemands from Keysight 4080 Series serial parametric test to P9001A per-pin parallel parametric testand everything in between.Find us at www.keysight.comPage 1

Keysight P9002A: Parametric Test System Total SolutionKeysight P9002A Parallel Parametric Test System offers flexible configurations for your own parametrictester with various measurement functions for up to 100 channels. Each per-pin test resource give allbasic measurement functions such as voltage, current, capacitance, and frequency as installed andlicensed.Hardware, Software, and Professional ServicesP9002A parallel parametric test system may be considered as a hardware integrated system withsystem cabinet and test head, however, there are more essential system elements of software andprofessional service by Keysight technical experts.Figure 1. Parametric Test System Total SolutionP9002A as Single Offer of Total SolutionKeysight also offers solution support and training as professional services to provide a quickerstart up, maximize your productivity and minimize downtime of systems. Keysight experts havedeep domain knowledge of test equipment, software, standards, and regulations. Service andsolutions from Keysight provide truly trusted systems that you can rely on the measurementsyou make, through the proactively structure an on-site service plan that can include an on-siterepair service, a remote response team, a scheduled calibration services, or timely softwareupdates. Upfront purchase: configuring available hardware and software options along with someprofessional Application Engineer (AE) consulting and Customer Engineer (CE) uptimeservice such as installation, repair, and calibration. Hardware warranty and service agreements are essential for first 12 months andavailable to extend to 36 months. Software subscription service is offered for first 36 months as required. Post-sales: upgrading hardware and software with available retrofit kits and professional AEor CE services. Renewals of service agreement are available with both hardware servicesand software subscription.Find us at www.keysight.comPage 2

Hardware ElementsP9002A has the test head with per-pin test resource of up to 100 output channels and system cabinet touse with the probers in semiconductor wafer production line. Most of hardware elements areconfigurable per your test needs and test structure design to maximize the production capacity and forthe highest throughput to archive.These are the available hardware functions with P9002A Parallel Parametric Test System.SelectionUpfrontPost-salesPer-pin test resourcesRequired:Source Monitor Unit (PSMU)Optional:Capacitance Measurement Unit (PCMU)Frequency Measurement Unit (PFMU)Pulse Generation Unit (PPGU)High Voltage PGU (HVPPGU)Voltage Source Unit (PVSU)High resolution option, Rapid Vth, UniversalKelvin, Extended PathRetrofittable for addingmore channelsShared test resourcesRequired:Source Monitor Unit (SSMU) to choosefrom Medium Power SMU and High PowerSMUOptional:Digital multimeterLCR meterHigh Voltage Semiconductor PulseGenerator Unit (HV-SPGU)Spectrum analyzerRetrofittableTest head accessories(optional)Temperature extension, 4080 probe cardadapterRetrofittableSystem controller(required)Industrial PC (Linux)RetrofittableFind us at www.keysight.comPage 3

Software ElementsP9002A has the dedicated system controller with Linux operating system (Red Hat Enterprise Linux).This controller has the P9002A system software with fundamental capabilities to operate and control theP9002A test system. The controller can be installed with the optional but essential software effective inmanaging the semiconductor wafer production and factory automation with P9002A Parallel ParametricTest System.Keysight SPECS Parallel Test ExtensionKeysight P9002A uses Keysight SPECS (Semiconductor Process Evaluation Core Software) and theSPECS Parallel Test Extension software to perform parallel test with synchronous or asynchronousparallel mode. The P9002A system software and SPECS parallel test extension support powerful andintuitive way of developing parallel test applications. Parallel test sequence and flow control allow you todefine parallel test flexibly. Parallel test algorithm interface allows you to define scalable test algorithms.Figure 2. P9002A SPECS Edit Menu SampleFigure 3. P9002A SPECS Debug Menu SampleKeysight SPECS-FA (Factory Automation)It’s the factory automation version of Keysight SPECS test shell.Offline Debug Environment of SPECS & SPECS-FAFor test plan development and debug purpose, offline SPECS and SPECS-FA environment (runningwithout live connection to P9002A test system) is available for optional purchase.Find us at www.keysight.comPage 4

Available Software Options for SystemThere are available options for P9002A system software, SPECS, SPECS Parallel Test Extension andSPECS-FA as follows: Software media on CD-ROM English paper manualsSoftware with Subscription ServiceP9002A software packages and its software packages offer 36 months subscription service for eachnew tester at purchase. When software media option is purchased, 36-month software mediasubscription is available.1. Software License-To-Use (LTU) subscription service2. Software media subscription serviceTo maintain the software with the latest enhancements and defect fixes, Keysight recommendsrenewing the software update subscription with P9002A system software, SPECS, Parallel TestExtension, and SPECS-FA. You can access to the latest software within the subscription service as wellas the remote technical support calls to local Keysight AE experts.Advanced Optional Software FunctionsP9002A has optional software functions as advanced software functions to enhance the testenvironment with P9002A Parallel Parametric Test System. Interactive Debug Panel (IDP) Package for standard parallel parametric test Package for array test structure Package for multi-die testFind us at www.keysight.comPage 5

Keysight Professional ServicesKeysight offers numbers of services to complete the parametric tester solution including;On-site installation servicesThis is a standard service for every new parametric test system at purchase. Keysight CustomerEngineer (CE) will install the system at on-site. Before installing the system, Keysight CE also performssite verification as pre-installation process.Warranty and extended services12 months of on-site repair service is offered as a standard warranty. Extended warranty serviceagreements are also available for sale.Calibration services12 months of on-site calibration service agreement is offered with the parametric test system. Extendedcalibration service agreements are also available for sale.Productivity assistanceCustomers can choose the term of productivity assistance from a day to required terms Keysightprofessional Application Engineer (AE) consulting services.Application software supportKeysight AE consulting is also available for specific deliverables such as software customization,software program conversion or software program optimization to assist customers programming foradditional test parameters, and/or throughput improvement by optimizing software design.Startup assistanceTo correctly set up the parametric test system and check through all purchased functions to operate assoon as possible, Keysight Customer Engineer (CE) can help your smooth production ramp up with thestartup assistance.Training (on-site, Keysight office, or remote)Various trainings are provided by each region or country to meet your local needs. Contact to thetraining coordinator in your region or country to see what trainings are available and get a quote of theright ones in local price.Post-sales professional serviceKeysight offers all above consulting services for post-sales as well. Feel free to contact Keysightrepresentative if you need additional needs for new operator trainings and/or for tester throughputimprovements for lowering cost of test.Post-sales service agreement and contract renewalWhen the initial service agreements of hardware and software subscription are expiring, Keysightcontract sales team will propose you for renewals based on your current system configuration. Requestyour renewal quote to secure and maintain the parametric test system up and running with theminimized downtime.Find us at www.keysight.comPage 6

ConclusionAll parametric test users want to improve the throughput and minimize any production downtime for thebetter cost of test in semiconductor wafer productions. To overcome some typical but difficult processtest challenges in your semiconductor wafer production, Keysight offers the total solution on parametrictest system not only with hardware and software but with professional AE and CE consulting service foryour P9002A Parallel Parametric Test System.If you need any technical consulting service on throughput improvement and/or advice on serviceagreements to reduce the unwanted downtime, contact Keysight as we offer the various professionalservice as agreement and per-incident consultation to maximize your productivity and productioncapacity.Learn more at: www.keysight.comFor more information on Keysight Technologies’ products, applications or services,please contact your local Keysight office. The complete list is available at:www.keysight.com/find/contactusFind us at www.keysight.comThis information is subject to change without notice. Keysight Technologies, 2021, Published in USA, April 1, 2021, 3121-1083.ENPage 7

"true" per-pin parametric tester, with the most flexible license-based configuration. It provides the best return on parametric test investment for all evolving semiconductor manufacturers by meeting all test demands from Keysight 4080 Series serial parametric test to P9001A per-pin parallel parametric test and everything in between.

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