Cleanroom Facility Handbook - Upm

UNIVERSITI PUTRA MALAYSIA CLEANROOM CLEANROOM HAZARDS, SAFETY MEASURES AND ACTION IN EMERGENCY ISSUE: MAY 2014 PART A: HAZARDS 1.0 WET PROCESSES LINE AND RESEARCH WET LINE 1.1 HAZARDS The chemicals used are generally corrosive and toxic, and several are extremely dangerous. Note especially: 1.1.1 Those containing HF in various concentrations: Hydrofluoric acid (HF), SiO2 Etchant, Silox Glass Etch, Titanum Etch. HF is particularly dangerous and insidious because it penetrates skin rapidly and without much pain, so that it might go unnoticed until it is too late to avoid serious injury. In larger amounts it will remove vital calcium from the blood and cause death. 1.1.2 Resist Stripper (fuming nitric acid); Extremely corrosive and powerful oxidising agent. Will consume all organic matter and many plastics rapidly (including gloves!!!), and can cause fire spontaneously. 1.2 PRECAUTIONS 1.2.1 For WET PROCESSING wear: Acid resistant (beige) gloves, PVC overalls, Visor. 1.2.2 Gloves must be tested for leaks before each use by inflating. They must be replaced if there is any sign of damage. 1.2.3 Ensure all wet-bench shields are down/in place.

1.2.4 Check fume exhausts are operating: a) Air downflow into perforated bench surface. b) Exhaust warning light in room not illuminated. 1.3 SAFETY FACILITIES 1.3.1 HF (Hydrofluoric acid) FIRST AID. HF burn cream is special marked box in each wet process area. 1.3.2 Spills kit within and fume clearance button just outside each area. (Spills clear-up procedure – see ‘Action in Emergency’). 1.4 THICK FILM UNIT The thick film furnace has HOT SURFACES. The thick film dryer has a moving belt – beware trapping loose tripping clothing. 2.0 ACIDS STORE AND DISPENSARY 2.1 HAZARDS As 1.1 2.2 PRECAUTIONS As 1.2 Also : Bottle carriers must be used to transfer chemicals to and from the store. Use the transfer hatch to move chemicals into the Wet Process Room. 2.3 SAFETY FACILITIES As 1.3 2.3.1 Rubber boots to be worn for spillage mop-up. Spill kit. 2.3.2 Safety shower fitted in each of these areas. 2.4 PPE As 1.2

3.0 3.1 SOLVENT STORE AND YELLOW ROOM HAZARDS Solvents are generally harmful and must not be inhaled to contact skin. Most are flammable, some toxic and ACETONE is highly flammable – a particular fire hazard. 3.2 PRECAUTIONS 3.2.1 Chemically protective (beige) gloves and eye protection to be used when dispensing or using solvents. 3.2.2 Use bottle carriers to transfer chemicals to and from the store. 3.3 SAFETY FACILITIES 3.3.1 Fire extinguisher dry powder (suitable for flammable liquid fire) in each of the areas. 3.3.2 Fire blanket in yellow room. 3.3.3 Water shower in dispensary. 3.3.4 WATER OUTLET in each process bench - Eye wash stations are now used for washing eyes not the water sprays on the benches – be aware of their location while you are processing! 3.3.5 Spills kit within and fume clearance button just outside dispensary. 4.0 GASES The facility’s gasses present various hazards, listed below. Note their characteristic smells to identify in event of leakage. (Full details of each gas may be found in a folder of SAFETY DATA SHEETS). 4.1 TOXIC AND VERY TOXIC GASES (These are listed in decreasing order of toxicity. ‘OEL’ ‘Occupational Exposure Limit’ for 8 hours working day. ‘Pyrophoric” Ignites spontaneously in air.

The very toxic hydrides marked with asterisk* are all diluted in either hydrogen or argon; the highest concentration stored of each is indicated). 4.2 FLAMMABLE AND COMBUSTILE CHEMICALS Flammable and combustible chemicals are the most commonly used hazardous chemicals. The hazard of a flammable or combustible chemical is based on its flash point, and, in the case of a flammable chemical, its boiling point as well. The National Fire Protection Association (NFPA) has identified flammability classes from the flash point and boiling point data of chemicals. The following table lists some common flammable and combustible chemicals, their flash points and boiling points, and associated NFPA flammability classes: 4.2.1 Flammable Liquid Class IA liquids shall include those liquids that have a flash point below 22.8 C (73 F) and a boiling point below 37.8 C (100 F). Class IB liquids shall include those liquids that have a flash point below 22.8 C (73 F) and a boiling point at or above 37.8 C (100 F). Class IC liquids shall include those liquids that have flash points at or above 22.8 C (73 F) but below 37.8 C (100 F). 4.2.2 Combustible Liquid Class II shall include those liquids that have a flash point at or above 37.8 C (100 F) and below 60 C (140 F). Class IIIA shall include those liquids that have a flash point at or above 60 C (140 F) and below 93 C (200 F). Class IIIB shall include those liquids with a flash point at or above 93 C (200 F). Degree of Fire Hazards Class A Class B High Class C Class D Moderate Low Minimal

Chemical Flash Point Boiling Point F C F C Acetaldehyde -38 -39 69 21 IA Dimethyl sulfide -36 -38 99 37 IA Ethyl ether -49 -45 95 35 IA Ethylene oxide -20 -29 55 13 IA Pentane -57 -49 97 36 IA Propane -157 -105 -44 -42 IA Benzene 12 -11 176 80 IB Carbon disulfide -22 -30 115 46 IB Cyclohexane -4 -20 179 81 IB Ethyl alcohol 55 13 173 78 IB n-Hexane -7 -22 156 69 IB Methyl alcohol 52 11 149 65 IB Methyl ethyl ketone 16 -9 176 80 IB Pyridine 68 20 239-241 116 IB Tetrahydrofuran 6 -14 153 67 IB Toluene 40 4 231 111 IB Triethylamine 20 -7 193 89 IB tert Butyl isocyanate 80 27 185-187 85-86 IC Chlorobenzene 82 28 270 IC Epichlorohydrin 88 31 239-243 115-117 IC 2-Nitropropane 75 24 248 Xylene 81-90 27-32 280-291 138-144 IC Acetic Acid, glacial 103 39 244 132 120 48 NFPA Class IC II

Bromobenzene 118 48 307-316 153-158 II Formic Acid 156 69 213 101 II Morpholine 100 38 263 128 II Stoddard Solvent 100-140 38-60 300-400 150-200 II Benzaldehyde 145 63 352 178 IIIA Cyclohexanol 154 68 322 161 IIIA Methacrylic Acid 170 77 316 158 IIIA Nitrobenzene 190 88 412 211 IIIA Tetrahydronaphthalene 160 71 406 208 IIIA Benzyl Alcohol 213 101 401 205 IIIB Caproic Acid 215 102 400 204 IIIB Ethylene Glycol 232 111 388 198 IIIB Phenyl Ether 239 115 498 258 IIIB Stearic Acid 385 196 726 386 IIIB 4.3 IMPLANTATION GASES Small canister liquid sources in implanter and room (these gases all ‘very toxic’ – OEL’s indicated). Arsenic trichloride Phosphorus trichloride Boron trifluoride Antimony pentachloride 4.4 0.05 ppm 0.2 ppm 1.0 ppm 0.5 mg/m3 GAS SAFETY FACILITIES 4.4.1 ‘MDA’ toxic gas central monitoring system. Monitors for leakage of the ‘very toxic’ hydrides and flourides including germane and silane at the OEL level from the various equipment use points. Operates personnel EVACUATION ALARM.

4.4.2 Hydrogen and chlorine detectors at use points. These operate personnel EVACUATION ALARM. 4.4.3 Gas extract system Extracts all cylinder cabinets and equipment gas usage points. In event of fan failure personnel EVACUATION ALARM operates. 4.4.4 Portable toxic hydride monitor. Used to test for pipework leakage. 4.4.5 Personnel EVACUATION ALARM. This may also be operated manually in the event of a strong smell of a recognisable toxic gas (see 4.1, 4.2 & 4.3). 4.4.6 Breathing apparatus (PPE). Must only be used by the trained personnel. Unauthorised use is potentially lethal! Will be to attempt rescue in emergency. 5.0 ELECTRICAL AND RADIATION 5.1 5.2 HIGH VOLTAGE 5.1.1 UV Lamp 5.1.2 Scanning Electron Microscope 5.1.4 Sputter RADIATION 5.2.1 5.3 1 kV 30 kV 1 kV UV lamp U-V hazard ELECTRICAL AND RADIATION SAFETY MEASURES All electrically powered equipment is monitored for the safety as required by official regulations. Appropriate test labels appear on the various items of equipment. All equipment producing RF power is designed to produce leakage of RF power less than about one tenth the maximum recommended doses into a person situated

adjacent and is factory tested to this criterion. This leakage level is maintained by regular attention to the panel mechanical integrity and to electrical earth bonding. PART B: 1.0 ACTION IN EMERGENCY GENERAL 1.1 In event of ACCIDENT general course of action. AMBULANCE : Phone 999 University Health Centre : Phone 03-89467332 University Security Division : Phone 0389466116 FIRST AIDERS: Use the First Aider. Report all accidents to Safety Officer. Report immediately any unusual condition – noise, temperature, etc. 1.2 FIRE ALARM BUTTONS If assistance needed in any area in the any area in the clean room use the FIRE ALARM buttons. 1.3 EVACUATION ALARM The general evacuation alarm is a very loud sounder which has a continually repeating falling tone. On hearing this: a) Leave IMMEDIATELY by nearest exit or emergency exit. b) Do not stop to remove clean clothing. c) Assemble in foyer - wait to be personally checked out.

2.0 CHEMICALS IN EYE OR ON PERSON 2.1 EYE Chemical in EYE must be treated as FIRST PRIORITY. The rule is: SPRAY WATER INTO EYE AS QUICKLY AS POSSIBLE. - as with other types of burn every moment of the time counts and speed will reduce the severity of the final damage to body tissue. Before embarking on any chemical processing ensure a water spray is within reach. Summary of action a) b) c) d) 2.2 IMMEDIATELY spray water into eye. CALL for help. CONTINUE water spray for 15 minutes. Subject to be taken to UNIVERSITY HEALTH CENTRE or SERDANG HOSPITAL. Hospital Serdang: Phone 03-89475555 CHEMICAL ON PERSON a) IMMEDIATELY wash affected area using water spray or emergency shower, REMOVE any contaminated clothing. b) CALL for help. c) CONTINUE washing for 15 minutes. d) SEEK medical attention – doctor or hospital. ----------------------------HYDROFLUORIC ACID (HF) BURNS. ESSENTIAL SPECIAL FIRST AID FOR SKIN. ----------------------------- 3.0 TOXIC GAS INHALATION RESCUERS must not expose themselves to gassing. The breathing apparatus must only be used by the trained personnel. a) REMOVE subject to fresh air. b) If subject is conscious and the breathing: Maintain careful observation of her/his condition.

c) If subject is, or becomes unconscious: Loosen clothing and place in recovery position. Watch carefully to see if breathing stops, in which case apply artificial resuscitation until breathing restarts. d) Arrange early removal to hospital. e) Information on the gas responsible and brief details of treatment given must accompany subject to hospital. Additional special treatment for exposure to AMMONIA gas. f) Drench eyes or exposed skin with water. 4.0 ELECTRIC SHOCK a) SWITCH OFF power source if necessary and if possible or remove subject from power using an insulating item (eg lab clothing) b) Use mouth-to-mouth resuscitation if subject not breathing, and heart massage if necessary (instructions in charging room – look at room) c) Call ambulance: 5.0 AMBULANCE 5.1 SMALL FIRES Use either the RED/black or RED/blue fire extinguishers. To find location of fire extinguishers look on safety maps in clean room or changing room. 5.2 SMALL FLAMMABLE LIQUID FIRES Use ONLY the RED/blue dry powder extinguishers. 5.3 LARGER FIRES If any is large or getting out of control: a) Leave IMMEDIATELY by nearest exit or emergency exit. b) Do not stop to remove cleanroom clothing. c) Sound fire alarm – but do not delay your exit! d) Assemble in the foyer – wait to be checked out. This fire alarm for the cleanroom is the same. If you hear either a continuous or intermittent BELL the action is the same. Leave the building by the nearest fire exit and assemble in the foyer – wait to be checked out.

6.0 PRESENCE OF DANGEROUS GAS 6.1 FIRE ALARM 6.2 This will sound in event of leakage of the ‘toxic’ hyrides, hydrogen or chlorine, and on failure of extracts. On hearing: a) Leave IMMEDIATELY by nearest emergency exit. b) Do not stop to remove clean clothing. c) Assemble in foyer - wait to be checked out. SLIGHT SMELLS Various smells from outside occur occasionally; these can be petrol fumes from the filling station smells, etc. if you are concerned about the particular smell INFORM FACULTY STAFF (e.g, a burning smell which could suggest equipment failure). The following smells must be treated seriously: GARLIC, ROTTING FISH, SICKLY SWEET, BLEACH, AMMONIA and PUNGENT/ACID smells (causing eyes and nose to sting). 6.3 STRONG SMELLS If any chemical smells as above occurs STRONGLY, even if the evacuation alarm has nit sounded, the clean room must be vacated. 7.0 CHEMICALS SPILLAGE a) If fumes are present, push ‘EMERGENCY EXHAUST’ red button located just outside the door of the room. Do not to clear up spillage until fumes have cleared. Always call staff in event of spillage. b) If clear don PROTECTIVE CLOTHING, chemical-proof gloves, PVC overall, rubber boots, face shield. c) To clear up spillage, use the ‘3M’ hazardous spill kit - absorbent sheets for smaller volumes, the ‘pillow’ for larger volumes. d) Place the contaminated material in the poly bag provided. Write the name of the spilt liquid (or best possible description – ‘acid’, ‘alkali’. ‘solvent’, etc) on the identification sheet and attach to the poly bag. e) Wash down area of spill with water or dilute detergent.

8.0 FLOODING Call Mr. Mohd Shaiful Nizam B. Kamaruzzaman or your supervisor or any staff. 9.0 ELECTRICAL POWER SUPPLY FAILURE This will sound the fire alarm. In any case VACATE the cleanroom immediately. Dr. Nurul Amziah Md Yunus Mr. Mohd Izhwan Muhamad June 2016

CLEANROOM LAYOUT Specification: Class 100K Working hours: 8:00a.m. to 5:00p.m. Built-in size: 70m² Cleanroom 1: Lithography Cleanroom 2: Measurement Cleanroom 3: Chemical Temperature: 23 1 C Room Humidity (RH): 45 5% Pressure: 12 to 50 Pascal Maximum capacity: 10 persons

IN CASE OF HAZARDS IN THE CLEANROOM Fire Extinguisher Entrance Door

CLEANROOM EQUIPMENTS Probe station Fume Hood Keithley characterization & measurement set Double side vacuum UV unit

Wire bonder Spin Coater Laminator Laminar flow and hot plate

UNIVERSITI PUTRA MALAYSIA ADVANCED MATERIAL SYNTHESIS AND FABRICATION LABORATORY UPM CLEANROOM FLOW CHART OF CLEANROOM & EQUIPMENT USAGE APPLICATION FILL UP CLEANROOM & EQUIPMENT USAGE APPLICATION FORM, LABORATORY SAFETY FORM, RISK ASSESSMENT FORM AND COSHH ASSESSMENT (IF RELATED). GET ENDORSEMENT FROM SUPERVISOR / PROJECT LEADER SUBMIT ALL THE FORMS AND WAIT FOR ENDORSEMENT AND APPROVAL TO USE THE CLEANROOM. WRITE IN THE CLEANROOM USAGE LOG BOOK WHENEVER ENTER THE CLEANROOM OBTAIN ACCESS CARD TO CLEAN ROOM FROM THE CLEANROOM TECHNICAL STAFF

APPENDIX B WORKING PRACTICES DOCUMENT Guide to Working Practices in the Cleanroom.

Guide to Working Practices in the Cleanroom (To be read in conjunction with ‘Cleanroom Hazards, Safety Measures and Action in Emergency) Issue: June 2016 1. Why Working Practices? Silicon/MEMS/NEMS devices may be damaged irreparably by exposure during their processing to particles, chemicals and electrical discharges. It will probably not be apparent that this has happened until the final device testing is done, by which time it is too late. Special equipment and ways of working are therefore necessary during the processing in order to minimize risk and also ensure safety. 1.1. Particles The cleanrooms are supplied with air filtered to various degrees or classes, depending on the sensitivity of the processes in each area. The classifications are defined as the number of particle above 0.5µm in one cubic foot of air. Silicon wafers may only be exposed to Class 100 air or better, this is achieved in most areas by the use of local air polishing units, and in the lithography area by the buildings air handling system. 1.2. Chemical contamination This is derived from a wide variety of substances, in particular from metals, finger grease and substances transferred into lab the lab from outside on lab books, etc. cross contamination is controlled by the use of gloves and careful dedication of processing equipment and work areas. 1.3. Electrostatic charge Some of the processing and ancillary equipment incorporates anti-static protection features. 1.4. Safety The following working practices are all safe practices.

2. General 2.1. Access Access to the clean room is ONLY via the changing room. (For safety reasons ALL personnel must log their presence in the cleanroom into the Cleanroom Usage Logbook before you enter the Cleanroom). 2.1.1. Dressing 1) Outdoor shoes to be changed for indoor shoes at the rack in the north corridor; the indoors shoes must only contact the stacky mat at this point and the clean floor beyond. 2) Don the hoods, coveralls and overboots in the changing room. Hair must be tucked inside hoods, and hoods inside coveralls, fastening under the chin. Coveralls are zipped up fully and fastened at the wrists and neck. 3) Put on facemask and disposable gloves. 2.1.2. Lithography areas Entry to the Direct Write and Yellow rooms are restricted to those actually working in them. General discussion must take place outside these rooms. Wafers for lithography should be passed through the hatches in the wall. 2.2. Permitted ‘standard’ items The following are the permitted items in the clean room complex: Writing Ball-point or fibre pens and clean room paper only Manuals In plastic covers, printed on clean room paper or in cabinets only. These to be exposed in the cleanroom only during the period required for work. Wafers/substrates Boxed Class 100K items Outer wrap of double-wrapped class 100K items to be removed in changing room, inner wrap in class 100K area. 2.3. Non-standard items Equipment, Tools etc New chemicals, Material Equipment must not be imported into the cleanroom unless approved and assessed for safety, etc., by Cleanroom Technical Staffs. All items must be cleaned to appropriate standard. Only clean plastic boxes may be used to transfer bulky items into the clean area. Must not be imported into the cleanroom unless approved for use in specified activity and area and assessed for sa

7. In front of the mirror, make sure cleanroom garments are tuck in properly. 8. Put on the cleanroom gloves. 9. Step on the sticky mat to remove any contaminants adhering to soles of booties. 10. Enter cleanroom through air shower. B. Degowning procedure (Removing cleanroom garments) 1. Exit from the cleanroom to changing room through air .