Springless Diaphragm Valves - Swagelok

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Springless Diaphragm Valves for High Performance—DP Series 1 www.swagelok.com Spr ingle s s D iaphragm Valve s for High Pe r for ma nce DP SERIES DIAPHRAGM DP Se r ie s Suitable for ultrahigh-purity applications 316L VIM-VAR stainless steel body Low-pressure and high-pressure models VCR , tube butt weld, and modular surface-mount end connections Manual or pneumatic actuation

2 Bellows- and Diaphragm-Sealed Valves Contents Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 Low-Pressure Valves . . . . . . . . . . . . . . . . . . . . . . . . . . 5 Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 High-Pressure Valves . . . . . . . . . . . . . . . . . . . . . . . . . 6 Materials of Construction . . . . . . . . . . . . . . . . . . . . . . . 3 IGC II Modular Surface-Mount Valves . . . . . . . . . . . 7 Process Specifications . . . . . . . . . . . . . . . . . . . . . . . . . 3 Options and Accessories . . . . . . . . . . . . . . . . . . . . . . . 8 Performance Specifications . . . . . . . . . . . . . . . . . . . . . 3 Multiport and Elbow Valves and Flow Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Actuation Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 DP SERIES DIAPHRAGM Ordering Information and Dimensions Monoblock Manifolds . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Maintenance Kits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Features Models Seat Low-Pressure Fully contained PCTFE seat design provides: Pressure rating: 250 psig (17.2 bar) Temperature rating: –10 to 150 F excellent resistance to swelling and ( –23 to 65 C) contamination Flow coefficient: 0.27 improved helium leak test performance High-Pressure minimal particle generation Pressure rating: 3045 psig (210 bar) long cycle life. Temperature rating: –10 to 150 F Diaphragm ( –23 to 65 C) Cobalt-based superalloy (UNS R30003) Flow coefficient: 0.20 material for strength and corrosion resistance Optimal design for long cycle life Body 316L VIM-VAR stainless steel body material for ultrahigh-purity applications Fully swept flow path minimizes entrapment areas facilitates purging maximizes flow capacity. Technical Data Working Pressure psig (bar) Model Lowpressure Highpressure Operating Vacuum to 250 (17.2) Vacuum to 3045 (210) Burst 3200 Temperature Rating F ( C) Short-Term Operating Bakeout (220) –10 to 150 12 200 (–23 to 65) 302 (150) (valve open) (840) See Options and Accessories, page 8, for high-temperature seat materials. Flow Coefficient (Cv ) 0.27 0.20 Orifice in. (mm) 0.16 (4.1) Internal Volume in.3 (cm3) 0.086 (1.4) (body with BW4 ends) Pneumatic Actuator Actuation Air Pressure Displacement psig (bar) in.3 (cm3) 60 to 120 0.09 (4.2 to 8.2) (1.5) 70 to 120 0.47 (4.9 to 8.2) (7.7)

Springless Diaphragm Valves for High Performance—DP Series Materials of Construction 3 Material Grade/ASTM Specification Pneumatic actuator Component Body and integral end connections Welded VCR end connections Low-Pressure High-Pressure 316L VIM-VAR SS/ SEMI F20 Ultrahigh-Purity➀ 316L VAR SS/ SEMI F20 High-Purity➀ Swagelok tube fittings 316 SS/A276 Seat PCTFE Diaphragm Cobalt-based superalloy (UNS R30003)/AMS 5876 Support diaphragm Silver-plated cobalt-based superalloy (UNS R30003)/AMS 5876 Washer — S17700 Bonnet Bonnet nut S17400 SS Bonnet nut 316 SS Pneumatic Actuator Bonnet Cylinder, cap, pistons Aluminum Button O-rings Buna N Washer Springs S17700 SS Support diaphragm Button 316 SS Manual Actuator Diaphragm Actuator Seat 316 SS Button Body Nylon with stainless steel insert Integral lockout handle Glass-filled nylon with stainless steel base Round handle Polyester with stainless steel insert 316 SS with epoxy coating Toggle handle High-Pressure Pneumatic Actuator Shown 316 SS Directional handle DP SERIES DIAPHRAGM End connections — — Wetted components listed in italics. O-rings are lubricated with PTFE-based lube; no lubricants on wetted components. ➀ 20 % minimum elongation allowed. Process Specifications See Swagelok Ultrahigh-Purity Process Specification (SC-01) catalog, MS-06-61; Swagelok Photovoltaic Process Specification (SC‑06) catalog, MS‑06‑64; and Swagelok Special Cleaning and Packaging (SC‑11) catalog, 06 - 63, for details on processes, process controls, and process ver i fi ca tion. Cleaning Assembly and Packaging Process Designator Process Specification P UltrahighPurity Process Specification (SC-01) Photovoltaic Process Specification (SC-06) Ultrahigh-purity cleaning with Performed in ISO Class 4 a continuously monitored, work areas; valves are double deionized water, ultrasonic bagged and vacuum sealed cleaning system in cleanroom bags. High-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system Performed in specially cleaned areas; valves are individually bagged. P6 Special cleaning with non–ozone-depleting chemicals Performed in specially cleaned areas; valves are individually bagged. P1 Performance Specifications Refer to DP Series Diaphragm Valve Technical Report, MS‑06‑15, for additional information on helium leak testing, particle counting, moisture analysis, hydrocarbon analysis, ionic cleanliness, and lab cycle testing data. Wetted Surface Roughness (Ra) Electropolished and finished to an average of 5 µin. (0.13 µm) Special Cleaning and Packaging (SC‑11) Testing Inboard helium leak tested to a rate of 1 10–9 std cm3/s at the seat, envelope, and all seals. The DP series design has been helium leak tested to maximum leak rate of 1 10–10 std cm3/s. Flow Data Low-Pressure Models Cv 0.27 Pressure Drop to Water Air Atmosphere U.S. gal/min std ft3/min psig (bar) (L/min) (std L/min) 10 (0.68) 0.85 (3.2) 50 (3.4) 100 (6.8) High-Pressure Models Cv 0.20 Water Air U.S. gal/min std ft3/min (L/min) (std L/min) 3.0 (86) 0.63 (2.4) 2.3 (64) 1.9 (7.2) 8.1 (230) 1.4 (5.4) 6.0 (170) 2.7 (10.2) 14.3 (410) 2.0 (7.6) 10.6 (300)

4 Bellows- and Diaphragm-Sealed Valves Actuation Options Manual Actuators Low-pressure valves have blue handles as standard. High-pressure valves have white handles as standard. Seven handle colors are available; see Options and Accessories — Handle Colors, page 8. Directional Integral Lockout Quick, quarter-turn Quick, quarter-turn actuation actuation Handle shape provides Lockable in the CLOSED visual indication of OPEN and CLOSED position position for safety Handle shape and window Available on high- and indicator provides visual indication of OPEN and CLOSED position. low-pressure models Available on high- and low- DP SERIES DIAPHRAGM pressure models Round Toggle Quick, quarter-turn actuation Spring-loaded toggle design for quick actuation Handle with window provides visual indication of OPEN and CLOSED positions Lockable in the CLOSED position for safety Available on high- and low- Handle position provides visual pressure models indication of OPEN and CLOSED positions Narrow handle profile allows close parallel mounting of valves Available on low-pressure models with PCTFE seats Pneumatic Actuators IGC II Modular Surface-Mount Valves Normally open pneumatic actuators are marked with a green ring on top of the cylinder. High-Pressure Pneumatic Actuator 1.5 in. C-seal design Low-pressure valves: directional, Low-Pressure Pneumatic Actuator integral lockout, round, toggle, and pneumatic actuators High-pressure valves: directional and integral lockout handles Available in two- or three-port configurations For more information on IGC II integrated gas components, see the IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware catalog, MS-02-134.

Springless Diaphragm Valves for High Performance—DP Series N-ELD-664 DP Series Low-pressure BW Butt Weld, manual actuator, REV 03-16-01 MS-01-165 Ordering Information and Dimensions N-ELD-0663 DP Series Low-pressure Pneumatically Actuated Male Integral VCR, normally closed MS-01-165 5 Dimensions, in inches (millimeters), are for reference only and are subject to change. Low-Pressure Valves Round Handle Directional Handle 1.49 1.49 (37.8) Toggle Handle 1.49 (37.8) Pneumatic Actuator (37.8) 1.80 (45.7) Air inlet 1/8-27 NPT radius R 0.20 (5.1) 0.31 (7.9) minimum shank diameter 4.55 (116) open 3.38 3.31 (85.9) (84.1) 2.84 closed (72.1) N-ELD-444 NUPRO DF SERIES BOTTOM VIEW open 0.25 (6.4) 0.30 N-ELD-0665 (7.6) N-ELD-0665 DP Series Low-pressure Female VCR with Locking Handle, open position MS-01-165 0.44 DP Series Low-pressure Female VCR with LockingH Handle, open position (11.2) MS-01-165 Integral Male VCR Fittings 0.44 H H (11.2) Tube Butt Weld Ends DP Series Low-pressure Female VCR with Locking Handle, locked position MS-01-165 N-ELD-0666 0.44 (11.2) Rotatable Male VCR Fittings 1.49 (37.8) Bottom DP SERIES DIAPHRAGM Integral Lockout Handle 1.06 (26.9) 1.06 (26.9) 0.33 (8.4) hole, 0.18 (4.6) minimum shank diameter 4.07 (103) closed and locked 3.73 (94.7) open H 0.44 (11.2) End Connection Inlet and Outlet 1/4 in. tube butt weld 0.30 in. (7.6 mm) tube stub, 0.035 in. wall 1/4 in. tube butt weld 0.26 in. (6.6 mm) tube stub, 0.035 in. wall 6 mm tube butt weld, 1 mm wall 1/4 in. female VCR fitting 1/4 in. rotatable male VCR fitting 1/4 in. integral male VCR fitting Basic Ordering Number➀ 6LVV-DPBW4- M5 0.8-6H holes are compatible with 10-32 mounting screws. Female VCR Fittings H in. (mm) 1.74 (44.2) To order, add a process designator, P, P1, or P6 (see page 3), to the basic ordering number, then specify the actuator style as shown: For a directional handle, no additional designators are required. 6LVV-DPBW4S- 1.61 (40.9) 6LVV-DPBW6M- 1.74 (44.2) 6LVV-DPFR46LVV-DPMR46LVV-DPVR4- Example: 6LVV-DPBW4-P For an integral lockout handle, insert L. Example: 6LVV-DPLBW4-P For a round handle, insert R. 2.78 (70.6) Example: 6LVV-DPRBW4-P For a toggle handle, insert T. 2.30 (58.4) 1/4 in. Swagelok tube fitting 6LVV-DPS4-➁ 2.46 (62.5) 6 mm Swagelok tube fitting 6LVV-DPS6M-➁ 2.45 (62.2) ➀ Low-pressure valves have blue handles. For other colors, see Options and Accessories —Handle Colors, page 8. ➁ Not available with P, P1, or P6 processing; omit process designator from ordering number. Four mounting holes, M5 0.8-6H thread, 0.25 (6.4) deep, 45 from center line, on a 1.00 (25.4) bolt circle. Example: 6LVV-DPTVR4-P For a pneumatic actuator, add -C for normally closed actuation or -O for normally open actuation. Example: 6LVV-DPBW4-P-C

6 Bellows- and Diaphragm-Sealed Valves Ordering Information and Dimensions DP Series High-pressure BW Butt Weld, pneumatically actuated N-ELD-0667 N-ELD-664 DP Series Low-pressure BW Butt Weld, manual actuator, REV 03-16-01 MS-01-165 MS-01-165 Dimensions, in inches (millimeters), are for reference only and are subject to change. High-Pressure Valves Round Handle Pneumatic Actuator Directional Handle 1.49 DP Series Migh-pressure Female VCR, Manual Actuator 2.48 Air inlet 1/8-27 NPT (63.0) 1.49 (37.8) MS-01-165 (37.8) N-ELD-0668 3.89 (98.8) 2.84 (72.1) NUPRO DF SERIES BOTTOM VIEW N-ELD-444 open 0.25 (6.4) 0.30 H (7.6) H 0.44 (11.2) DP Series High-pressure Male Rotatable VCR with Locking Handle, open position N-ELD-0669 DP Series High-pressure Male Rotatable VCR with Locking Handle, open position N-ELD-0669 MS-01-165 DP Series High-pressure Male Rotatable VCR with Locking Handle, locked position MS-01-165 MS-01-165 Tube Butt Weld Ends 0.44 (11.2) Female VCR Fittings N-ELD-0670 1.49 (37.8) DP SERIES DIAPHRAGM Integral Lockout Handle Bottom 1.06 (26.9) 1.06 0.33 (8.4) hole, 0.18 (4.6) minimum shank diameter (26.9) 4.26 (108) 3.89 closed and locked (98.8) open H 0.44 (11.2) End Connection Inlet and Outlet 1/4 in. tube butt weld 0.30 in. (7.6 mm) tube stub, 0.035 in. wall 1/4 in. tube butt weld short 0.26 in. (6.6 mm) tube stub, 0.035 in. wall 6 mm tube butt weld, 1 mm wall 1/4 in. female VCR fitting 1/4 in. rotatable male VCR fitting 1/4 in. integral male VCR fitting Basic Ordering Number➀ 6LVV-DPHBW4- M5 0.8-6H holes are compatible with 10-32 mounting screws. Rotatable Male VCR Fittings H in. (mm) 1.74 (44.2) To order, add a process designator, P, P1, or P6 (see page 3), to the basic ordering number, then specify the actuator style as shown: For a directional handle, no additional designators are required. 6LVV-DPHBW4S- 1.61 (40.9) 6LVV-DPHBW6M- 1.74 (44.2) 6LVV-DPHFR46LVV-DPHMR4- Example: 6LVV-DPHBW4-P For an integral lockout handle, insert L. Example: 6LVV-DPHLBW4-P For a round handle, insert R. 2.78 (70.6) Example: 6LVV-DPHRBW4-P For a pneumatic actuator, add -C for normally closed 6LVV-DPHVR4- 2.30 (58.4) 1/4 in. Swagelok tube fitting 6LVV-DPHS4-➁ 2.46 (62.5) 6 mm Swagelok tube fitting 6LVV-DPHS6M-➁ 2.45 (62.2) ➀ High-pressure valves have white handles. For other colors, see Options and Accessories—Handle Colors, page 8. ➁ Not available with P, P1, or P6 processing; omit process designator from ordering number. Four mounting holes, M5 0.8-6H thread, 0.25 (6.4) deep, 45 from center line, on a 1.00 (25.4) bolt circle. actuation or -O for normally open actuation. Example: 6LVV-DPHBW4-P-C

Springless Diaphragm Valves for High Performance—DP Series 7 Ordering Information and Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. IGC II Modular Surface-Mount Valves Integral Lockout Handle Directional and Round Handles H closed and locked H open H open ies toggle handle, MSM Body -165 01 N-ELD-XX NUPRO DF SERIES MSM Bod, BOTTOM VIEW N-ELD-0839 DP Series Low-pressure Pneumatically Actuated MSM Body MS-01-165 Toggle Handle Bottom Pneumatic Actuator 1.50 Air inlet 1/8-27 NPT DP SERIES DIAPHRAGM (38.1) H open 1.50 (38.1) H closed 2.91 (73.9) Four through holes, 0.22 (5.6) dia Dimensions Low-Pressure Models For other valve dimensions, see Ordering Information and Dimensions for low-pressure or high-pressure valves on pages 5 and 6. Dimensions, in. (mm) Handle Type Directional and round Integral lockout Toggle Low-Pressure High-Pressure Ordering Numbers Actuation 2 Port 3 Port Directional handle 6LVV-MSM-DP-2-P 6LVV-MSM-DP-3-P Integral lockout handle 6LVV-MSM-DPL-2-P 6LVV-MSM-DPL-3-P H Open 2.36 H Closed 2.34 H Open 2.36 H Closed 2.34 Round handle 6LVV-MSM-DPR-2-P 6LVV-MSM-DPR-3-P Toggle handle 6LVV-MSM-DPT-2-P 6LVV-MSM-DPT-3-P (59.9) (59.4) (59.9) (59.4) 3.25 3.59➀ 3.41 3.78➀ 6LVV-MSM-DP-2-P-C 6LVV-MSM-DP-3-P-C (82.6) (91.2) (86.6) (96.0) 2.83 4.04 Pneumatic, normally closed Pneumatic, normally open 6LVV-MSM-DP-2-P-O 6LVV-MSM-DP-3-P-O (71.9) (103) ➀ Closed and locked position. — High-Pressure Models Ordering Numbers Actuation Directional handle 2 Port 6LVV-MSM-DPH-2-P 3 Port 6LVV-MSM-DPH-3-P Integral lockout handle 6LVV-MSM-DPHL-2-P 6LVV-MSM-DPHL-3-P Round handle 6LVV-MSM-DPHR-2-P 6LVV-MSM-DPHR-3-P

Bellows- and Diaphragm-Sealed Valves 8 Options and Accessories Handle Colors (excluding multivalve manifolds) High-Temperature Seat Material—Polyimide Seven handle colors are available for color coding of process lines. Temperature rating is from 50 to 300 F (10 to 150 C). Select a basic kit ordering number and add a color designator. All other materials and ratings remain the same. Basic Ordering Number Handle Kit Directional NY-5K-DP- Integral NY-5K-DPLlockout Round handle PY-5QK-DPRreplacement Round handle PY-5K-DPRretrofit Fluorocarbon FKM O-rings in pneumatic actuator are included. Color Designator Black BK Blue BL Green GR Orange OR Red RD White WH Yellow YW Example: NY-5K-DP-RD for a red directional handle kit. Examples: 6LVV-DPVC111P-C 6LVV-DPHVBW4P-C Indicator Switch Transmits a signal to an electrical device, indicating the open or closed position of the pneumatically actuated valve. Features a single-pole, single-throw switch rated at: 1/2 A for 115 V (ac) for a normally open switch; Maintenance Kits 1/4 A for 115 V (ac) for a Diaphragm Replacement Kits normally closed switch; Include two diaphragms and –40 to 185 F (–40 to 85 C) temperature. re place ment instructions. DP SERIES DIAPHRAGM To order, insert V in the valve ordering number. Includes a 24 in. (61 cm) wire lead with an inline clip. Are available for high- or low- Is available assembled on any normally closed and high- pressure valves. pressure, normally open, pneumatically actuated DP series valve, or as a kit for field assembly. Ordering number: E-3DK-DP Actuator Replacement Kits Factory-Assembled Indicator Switches Include actuator and service instructions. To order a valve with an indicator switch, add M for a normally open switch or M-2 for a normally closed switch to the valve ordering number. Select a kit ordering number: Ordering Numbers Actuator Replacement Kit Low-Pressure High-Pressure Directional handle NY-DP-K1-BL NY-DPH-K1-WH Integral lockout handle NY-DPL-K1-BL NY-DPHL-K1-WH Round handle PY-DPR-K1-BL PY-DPHR-K1-WH Examples: 6LVV-DPFR4-P-CM 6LVV-DPHBW4-P-CM-2 Indicator Switch Kits Include actuator and switch. Select an ordering number. Toggle handle SS-DPT-K1-BL — Pneumatic normally closed A-DP-K1-C A-DPH-K1-C➀ Indicator Switch Kit Pneumatic normally open A-DP-K1-O A-DPH-K1-O➀ Normally open A-DPV-K1-C A-DPHV-K1-C➀ A-DPV-K1-O A-DPHV-K1-O➀ High-temperature pneumatic normally closed High-temperature pneumatic normally open Normally closed Ordering Numbers Low-Pressure High-Pressure MS-ISK-DP-CM MS-ISK-DPH-CM➀ MS-ISK-DP-CM-2 MS-ISK-DPH-CM-2➀ ➀ For high-pressure 1V and 2V monoblock configurations, insert M into the ordering number as shown. Example: MS-ISK-DPHM-CM ➀ For high-pressure 1V and 2V monoblock configurations, insert M into the ordering number as shown. Examples: A-DPHM-K1-C A-DPHMV-K1-C Do not interchange high- and low-pressure actuators. Multiport and Elbow Valves and Monoblock Manifolds DP series valves are available in multiport and elbow configurations and monoblock manifolds; refer to Bellowsand Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds catalog, MS‑02‑442. Oxygen Service Hazards WARNING Do not mix/interchange Swagelok products or components not governed by industrial design standards, including Swagelok tube fitting end connections, with those of other manufacturers. For more information about hazards and risks of oxygenenriched systems, refer to Oxygen System Safety technical report, MS-06-13. MS-01-165, RevP, January 2023

Introduction Since 1947, Swagelok has designed, developed, and manufactured high-quality, general-purpose and specialty fluid system products to meet the evolving needs of global industries. Our focus is on understanding our customers’ needs, finding timely solutions, and adding value with our products and services. We are pleased to provide this global edition of the book-bound Swagelok Product Catalog, which compiles more than 100 separate product catalogs, technical bulletins, and reference documents into one convenient, easy-to-use volume. Each product catalog is up to date at the time of printing, with its revision number shown on the last page of the individual catalog. Subsequent revisions will supersede the printed version and will be posted on the Swagelok website and in the Swagelok electronic Desktop Technical Reference (eDTR) tool. For more information, visit your Swagelok website or contact your authorized Swagelok sales and service representative. Warranty Information Swagelok products are backed by The Swagelok Limited Lifetime Warranty. For a copy, visit swagelok.com or contact your authorized Swagelok representative. Safe Product Selection When selecting a product, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user. WARNING Do not mix/interchange Swagelok products or components not governed by industrial design standards, including Swagelok tube fitting end connections, with those of other manufacturers. Not all trademarks listed below apply to this catalog. Swagelok, Cajon, Ferrule-Pak, Goop, Hinging-Colleting, IGC, Kenmac, Micro-Fit, Nupro, Snoop, Sno-Trik, SWAK, VCO, VCR, Ultra-Torr, Whitey—TM Swagelok Company 15-7 PH—TM AK Steel Corp. AccuTrak, Beacon, Westlock—TM Tyco International Services Aflas—TM Asahi Glass Co., Ltd. Alleima—TM Alleima ASCO, El-O-Matic—TM Emerson AutoCAD—TM Autodesk, Inc. CSA—TM Canadian Standards Association Crastin, DuPont, Kalrez, Krytox, Teflon, Viton—TM E.I. duPont Nemours and Company DeviceNet—TM ODVA Dyneon, Elgiloy, TFM—TM Dyneon Elgiloy—TM Elgiloy Specialty Metals Festo—TM Festo SE & Co. KG FM —TM FM Global Grafoil—TM GrafTech International Holdings, Inc. Honeywell, MICRO SWITCH—TM Honeywell MAC—TM MAC Valves Microsoft, Windows—TM Microsoft Corp. NACE—TM NACE International PH 15-7 Mo, 17-7 PH—TM AK Steel Corp picofast—Hans Turck KG Pillar—TM Nippon Pillar Packing Company, Ltd. Raychem—TM Tyco Electronics Corp. Sandvik, SAF 2507—TM Sandvik AB Simriz—TM Freudenberg-NOK SolidWorks—TM SolidWorks Corporation UL—Underwriters Laboratories Inc. Xylan—TM Whitford Corporation 2022 Swagelok Company

See Swagelok Ultrahigh-Purity Process Specification (SC-01) catalog, MS-06-61; Swagelok Photovoltaic Process Specification (SC-06) catalog, MS-06-64; and Swagelok Special Cleaning and Packaging (SC-11) catalog, 06 63- , for details on processes, r ndea s, pvrossecrol poct nrossec i f i aco. n i t Cleaning Assembly and Packaging Process

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