Magnetically Levitated Turbo Molecular Pump
263-13236EMagnetically Levitated Turbo Molecular PumpModel:TMP-3203M（Air cooled type）Model:TMP-3203MC （Air cooled chemical type）Model:TMP-3203LM （Wide range type）Model:TMP-3203LMC （Wide range chemical type）Model:TMP-3403LMC （Wide range chemical type）INSTRUCTION MANUALRead the instruction manual thoroughly before you use the product.Keep this instruction manual for future reference.Semiconductor Equipment Division
IntroductionThank you for choosing the turbo molecular pump made by Shimadzu Corporation.(hereafter referred to as "turbo molecular pump").Please read the instruction manual carefully in conjuction with the instruction manual of"Power Supply Unit" before using turbo molecular pump, and save the instruction manual forfuture reference.Copyrights and DisclaimersThis document is copyrighted by Shimadzu Corporation. Please refrain from reproducingor copying part or all of this document without permission from Shimadzu.In an effort to improve the product, this document may be revised in the future withoutnotice.Every effort has been made to prepare an accurate and complete manual, but if an erroror omission should be discovered, revisions might not be possible immediately.Shimadzu does not take responsibility for any effects that may result from the use of thismanual.Copyright 2003-2006 Shimadzu Corporation.All rights reserved.Magnetically Levitated Turbo Molecular PumpINSTRUCTION MANUALi
Precautions for Safe OperationThe instruction manual's nomenclature for warnings and precautions complies withthe following safety warning symbols.WARNINGIndicates a potentially hazardous situation whitch, if not avoided, could resultin serious injuly or possibly death.CAUTIONIndicates a potentially hazardous situation whitch, if not avoided, may result inminor to moderate injuly or equipment damage.NOTICEEmphasizes additional information that is provided to ensure the proper use ofthis product.WARNINGTurbo molecular pump repair and/or power supply repair can be very hazardous.Only trained technicians who are authorized by Shimadzu may do service ofproducts.WARNINGNeither overhaul nor modify the pump proper and power supply unit withoutadmission. Doing so would impair safety of the pump proper.WARNINGDecisions on system compatibility should be made by the system designer or the persondeciding the specifications after conducting tests as necessary.The responsibility forguaranteeing the expected performance and safety of the system lies with the person whodecides system compatibility.ii263-13236
WARNING・Fix the pump to the device according to 5.1.2.1 and 5.1.2.2. The method to fix the pump isdifferent depending on the pump model and the size of inlet flange of the pump.・The device should be fixed to the floor so as not to move. The device should be designed toendure the torque 1.5 times the rapid shutdown torque to take the safety margin inpreparation for an emergency accident.・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdowntorque should be generated when abnormality occurs in the pump by any chance. Incidentalaccident will cause the pump to drop out and to make a catastrophe if the pump is fixed byinsufficient method.WARNINGDo not remove the turbo molecular pump, before safety has been confirmed.Improper turbo molecular pump use may be hazardous to operator's health in applications notrecommended or approved by Shimadzu. In the event removal of the turbo molecular pump froman application is required, full protective measures including purging of the turbo molecular pumpwith an inert gas and/or apparel are recommended when the turbo molecular pump has beenused in applications that required the use of corrosive, reactive, stimulative, or toxic gases.Magnetically Levitated Turbo Molecular PumpINSTRUCTION MANUALiii
CAUTIONAfter having operated the turbo molecular pump for evacuation of corrosive gas, keep thepump internal as vacuumed even after shutdown. Inflow of water content in the air to the pumpinternal would cause rapid erosion trouble of the pump internals.CAUTIONAvoid to install the pump at the following places.(1) Place where the pump is inevitably exposed to significant vibration and impact.(2) Unstable place.(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/impact to it during transportation.This pump is not connected to grand. Please providePE(Protective earth) connection to the chassis of pump in final application.CAUTIONThe following "CAUTIONS" are to prevent operation anomalies.1.This turbo molecular pump is not approved for use in applications exhausting process gascontaining gallium (Ga, e.g., triethyl gallium, etc.).2.Protect the pump from any and all types of impact during operation.3.Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces electromagnetic pollution, noise, etc., in the immediate proximity of an operating turbo molecularpumping system (pump, power supply, cables, etc).4.Do not interrupt the electrical power operating the turbo molecular pump while the turbomolecular pump is in operation.5.Do not connect or disconnect the turbo molecular pump control cable during the time thepower supply is "ON".6.Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or fluorine.7.Plasmas may cause the pump rotor to discharge electrically thus damaging the electricalcomponents.8.When using the variable speed function to change the pump rotation rate, use a rotation ratethat does not cause resonance with other devices installed at the site.iv263-13236
Explanation of labelCAUTIO N！HOT SURFACE 高温 注 意Risk of burn. Avoid contact.(1) HOT SURFACE labelRisk of burn. Keep off from touching surface of thepump as it is ��固定してください。WARNINGCAN CAUSE INJURY BY DROPEDPUMP, INSTALL PUMP SECURELYACCORDING TO INSTRUCTIONMANUAL.263-16180(2) INSTALL PUMP labelIncidental accident will cause the pump to dropout and to make a catastrophe if the pump is fixedby insufficient method.Fix the pump to the device according to 5.1.2「Installation of the Pump」.(3) SECURITY sealThis label certificates that the product was madeor maintenanced by Shimadzu or by Shimadzuauthorized facility .In case "this label is removed" or "there is a markshowing once this label has been removed",Shimadzu warranty shall not be applied to theproduct. Location of label(2)(3)(1)(2), (3)(1)(1)(1)(2)Series of TMP-3203 and TMP-3403LMCLabel attachment phaseMagnetically Levitated Turbo Molecular PumpINSTRUCTION MANUALv
Installation PrecautionsDo not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.Abnormal loads may cause cable disconnection.(1) Do not pull the turbo molecular pump control cable by the connector or plug.(2) Do not allow any electrical cables to be in tension or to have very tight bending radii.240mm(3) Do not twist the turbo molecular pump control cable during connection. Part ReplacementThe lifetime of parts are specified as below.The request for changing parts exceeding the estimated lifetime should be made to Shimadzuor an approved service company in order for safety and adequate performance of the pump andpower supply unit.Table 1 Estimated Part Life.Parts ListCooling fanvi263-13236Estimated Part Life5 years
Air Cooled Turbo Molecular PumpFor the air cooled turbo molecular pumps, it is necessary to clean the cooling fan periodicallybecause of the cooling fan collecting dust, debris, etc. Shimadzu recommends removal of thecooling fan for all methods of cleaning (compressed air, etc.) to prevent the particles, cleaningdebris, from accumulating in or on the turbo molecular pump. Please refer to Fig. 1 how tochange fan.COOLING UNITPUMPFLOWCONNECTORPump modelTMP-3203MTMP-3203MCSCREWFig. 1Parts nameCooling unitDV24VParts Number262-76043-01How to Change the Cooling Fan Unit Warranty period12 months on new TMP's from the date of shipment from Shimadzu, or from any of itsworldwide sales offices. Conditional warrantyDuring the warranty period and under normal operation, if the TMP fails to meet its productspecification due to defects in material and/or workmanship, Shimadzu will, at its discretion,either repair it or exchange it with a new one for free. Scope of the warrantyThe warranty covers only TMPs, controllers and accessories sold by Shimadzu. Warranty of repaired or replacement partsIn-warranty repaired or replacement parts are warranted only for the remaining unexpiredportion of the original warranty period applicable to the parts that have been repaired or replaced. Exemption from the warrantyDuring the warranty period, Shimadzu will charge for repair or exchange in the following cases:1) Failure caused by natural disasters or fire.2) Failure or functional deterioration due to the following:a) Pumping of special gases and materialsb) Ingestion of foreign objects through the TMP's protective netc) TMP is operated differently than what is prescribed in the instruction manualMagnetically Levitated Turbo Molecular PumpINSTRUCTION MANUALvii
d) When Shimadzu determines through failure analysis that the cause of failure was due toabnormal operation or external circumstances. our engineers judge that the cause of thetrouble is an irregular operation3) Warranty is voided if the "Security Seal" on the product has been removed, hampered with,or altered. Disposal of Products and PartsPlease contact Shimadzu for proper disposal of its products or parts. There is a possibility topollute the environment with the material of the parts, when you dispose this product in an inappropriate way. LIMITATION OF LIABILITYEXCEPT AS STATED HEREIN, SHIMADZU MAKES NO WARRANTY, EXPRESSED ORIMPLIED (EITHER IN FACT OR BY OPERATION OF LAW), STATUTORY OR OTHERWISE:AND, EXCEPT AS STATED HEREIN, SHIMADZU SHALL HAVE NO LIABILITY FORSPECIAL OR CONSEQUENTIAL DAMAGES OF ANY KIND OR FROM ANY CAUSE ARISINGOUT OF THE SALE, INSTALLATION, OR USE OF ANY OF ITS PRODUCTS.viii263-13236
Table of contentsTABLE OF CONTENTSIntroductionCopyrights and Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iPrecautions for Safe Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii Explanation of label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Location of label. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Installation Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi Part Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi Air Cooled Turbo Molecular Pump. . . . . . . . . . . . . . . . . . . . . . . . vii Warranty period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii Conditional warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii Scope of the warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii Warranty of repaired or replacement parts . . . . . . . . . . . . . . . . . vii Exemption from the warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii Disposal of Products and Parts . . . . . . . . . . . . . . . . . . . . . . . . . viii LIMITATION OF LIABILITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . viiiTABLE OF CONTENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ixSection 1 OUTLINE AND DESCRIPTIONS1.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21.2 Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31.2.1Outside drawing of Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . .1.2.1.1 Outside drawing of series of TMP-3203 . . . . . . . . . . . . . . .1.2.1.2 Outside drawing of TMP-3403LMC . . . . . . . . . . . . . . . . . .1.2.2 Standard Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3356Section 2 IDENTIFICATION AND FUNCTION2.1 Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8Magnetically Levitated Turbo Molecular PumpINSTRUCTION MANUALix
Table of contentsSection 3 CONSTRUCTION AND PRINCIPLE3.1 Pump Construction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.2 Principle of Turbo Molecular Pumping . . . . . . . . . . . . . . . . . . 10Section 4 SPECIFICATIONS4.1 Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144.1.14.1.2Specification of series of TMP-3203 . . . . . . . . . . . . . . . . . . . . . . . 14Specification of TMP-3403LMC . . . . . . . . . . . . . . . . . . . . . . . . . . . 154.2 Standards Fulfilled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16Section 5 INSTALLATION5.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185.1.15.1.2Pump Mounting Direction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Installation of the Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5.1.2.1 Installation of series of TMP-3203 . . . . . . . . . . . . . . . . . .5.1.2.2 Installation of TMP-3403LMC . . . . . . . . . . . . . . . . . . . . . .5.1.3 Example of piping connection . . . . . . . . . . . . . . . . . . . . . . . . . . . .5.1.4 Center of gravity of the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . .1819212324255.2 Connection of the Pump to the Power Supply Unit . . . . . . . . 265.3 Interlock for Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . 27Section 6 OPERATION6.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 306.1.1Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 306.2 Start-up Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 316.2.1Start-up Preparation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 316.3 Start-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 316.3.1Start-up Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 316.4 Shutting Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 326.5 Baking Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34x263-13236
Table of contentsSection 7 GAS PURGESection 8 TURBO MOLECULAR PUMP RECONDITION8.1 Turbo Molecular Pump Return Request . . . . . . . . . . . . . . . . 408.2 Turbo Molecular Pump Decontamination. . . . . . . . . . . . . . . . 418.3 Touch-Down Bearing Replacement . . . . . . . . . . . . . . . . . . . . 418.4 Check of the rotor blades. . . . . . . . . . . . . . . . . . . . . . . . . . . . 41Section 9 TROUBLESHOOTING9.1 Vacuum Pressure Rise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 449.2 Abnormal Noise and/or Vibration . . . . . . . . . . . . . . . . . . . . . . 44Magnetically Levitated Turbo Molecular PumpINSTRUCTION MANUALxi
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1OUTLINE ide drawing of Pump Main Unit1.2.1.1 Outside drawing of series of TMP-32031.2.1.2 Outside drawing of TMP-3403LMC1.2.2Standard Accessories
SECTION 11.11OUTLINE AND DESCRIPTIONSOutlineThe turbo molecular pump is a vacuum pump. The turbo molecular pump is used with abacking vacuum pump to create a high vacuum in a vacuum chamber.Typical Applications ; Semiconductor equipments,Industrial equipments,R&D applications,The other ultra high vacuum applications.The turbo molecular pump (one standard set) consists of the following items.・Pump・Power Supply Unit・Control Cable・Motor Cable・Standard Accessories11111 SetThis instruction manual explains the operation of the pump unit. For more detailed instructionsregarding the power supply unit, please refer to the Power Supply Unit Instruction Manual.2263-13236
1.2 Descriptions1.2Descriptions11.2.1 Outside drawing of Pump Main Unit1.2.1.1 Outside drawing of series of TMP-3203INLETFLANGEVG350ISO320BSpecialParts numberTMP-3203MTMP-3203MCABCEFP/N 262-78430-62 P/N 262-78430-72 287 294 289 375 420G22φHφJn-φdφ450 φ420 12-φ15P/N 262-78430-63 P/N 262-78430-73 287 294 289 375 420 22.5 φ425 φ395 12-φ13VG300P/N 262-78430-67 P/N 262-78430-77 307 314 309 395 440 18.5 φ400 φ370 12-φ13VG250P/N 262-78430-68 P/N 262-78430-78 331 338 333 419 464 18.5 φ350 φ320 12-φ13Fig.1-1TMP-3203M and TMP-3203MCMagnetically Levitated Turbo Molecular PumpINSTRUCTION MANUAL3
SECTION 1OUTLINE AND DESCRIPTIONS1INLETFLANGEVG350ISO320BSpecialParts numberTMP-3203LMTMP-3203LMCBCDEFP/N 262-78430-42 P/N 262-78430-52 287 294 289 270 375 420G22φHφJn-φdφ450 φ420 12-φ15P/N 262-78430-43 P/N 262-78430-53 287 294 289 270 375 42022.5 φ425 φ395 12-φ13VG300P/N 262-78430-47 P/N 262-78430-57 307 314 309 290 375 44018.5 φ400 φ370 12-φ13VG250P/N 262-78430-48 P/N 262-78430-58 331 338 333 314 419 46418.5 φ350 φ320 12-φ13Fig.1-24A263-13236TMP-3203LM and TMP-3203LMC
1.2 Descriptions1.2.1.2 Outside drawing of TMP-3403LMCF1INLETFLANGEVG350ISO320BSpecialParts numberABCDEFKφHn-φdP/N 262-78503-52287 294 270 375 420P/N 262-78503-53287 294 270 375 420 22.5 φ425 360 φ395 12-φ13VG300P/N 262-78503-57307 314 290 395 440 18.5 φ400 380 φ370 12-φ13VG250P/N 262-78503-58331 338 314 419 464 18.5 φ350 404 φ320 12-φ13Fig.1-322φGφ450 360 φ420 12-φ15TMP-3403LMCMagnetically Levitated Turbo Molecular PumpINSTRUCTION MANUAL5
SECTION 1OUTLINE AND DESCRIPTIONS1.2.2 Standard Accessories1Series of TMP-3203Description1Gasket for inlet flange(Note)Q'ty12Bolt set for inlet flange(Note)1345Centering with O-ringClampInstruction manual111NotesO-ring gasket for VG350O-ring gasket for VG300O-ring gasket for ISO320B SpecialO-ring gasket for VG250VG350：Hex Head, M12 40, 12PC(A2-70)VG300：Hex Head, M12 35, 12PC(12.9)ISO320B Special： Hex Head,M12 40, 12PC (12.9)VG250：Stud Bolt, M12 47, 12PC(12.9)KF40KF40EnglishParts number036-13516036-13515036-15554-55036-13514 ption1Gasket for inlet flange(Note)1NotesO-ring gasket for VG350O-ring gasket for VG300O-ring gasket for ISO320B SpecialO-ring gasket for VG2502Bolt set for inlet flange(Note)134Centering with O-ringClamp11VG350：Hex Head, M12 40, 12PC(12.9)VG300：Hex Head, M12 35, 12PC(12.9)ISO320B Special： Hex Head,M12 40, 12PC (12.9)VG250：Stud Bolt, M12 47, 12PC(12.9)KF40KF405Instruction manual1English(Note) One of followings.6Q'ty263-13236Parts number036-13516036-13515036-15554-55036-13514 035-06004-14035-06004-03263-13236
2IDENTIFICATION ANDFUNCTION22.1Pump Main Unit
SECTION 22.1IDENTIFICATION AND FUNCTIONPump Main P-3203M/MCFig.2-1 Pump Main Unit(1) INLET FLANGE. . . . . . . . . . . . . Inlet flange, joint the turbo molecular pump, VG350,(2) PORT FOR GAS PURGE . . . . .(3) OUTLET FLANGE. . . . . . . . . . .(4) MOTOR CONNECTOR. . . . . . .(5) CONTROL CONNECTOR. . . . .(6) COOLING WATER PIPELINE. .(7) COOLING FAN . . . . . . . . . . . . .8263-13236ISO320B Special, VG30, VG250 are also available.Gas purge adaptor port(see Section 7 "GAS PURGE")Outlet flange, connect a backing vacuum pump or itsrelated pipe connection, KF40.Motor cable receptacleControl cable receptacleCooling water pipe connector, Rc1/4Cooling Fan
3CONSTRUCTION ANDPRINCIPLE33.1Pump Construction3.2Principle of Turbo Molecular Pumping
SECTION 33.13CONSTRUCTION AND PRINCIPLEPump ConstructionFig. 3-1 is a sectional drawing of the TMP-3203LM and TMP-3203LMC and TMP-3403LMCmagnetic bearing type turbo molecular pump. The built-in high frequency motor (1) is acceleratedto the specified revolutions (speed) by the high frequency power supply unit. Rotor blades (4) arefitted o
12 months on new TMP's from the date of shipment from Shimadzu, or from any of its worldwide sales offices. Conditional warranty During the warranty period and under normal operation, if the TMP fails to meet its product specification due to de
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