Pilot PVD Li Roll-to-Roll Vacuum Coater - Sidrabe
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified Pilot PVD Li Roll-to-Roll Vacuum Coater Overview Sidrabe Vacuum, Ltd. 17 Krustpils Str. Riga LV – 1073, Latvia Phone: 371 67249806 Fax: 371 67139506 E-mail: sidrabe@sidrabe.eu www.sidrabe.com Riga, 2019 www.sidrabe.com Page 1 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 1. APPLICATION & DEVELOPMENT 1.1 R&D roll-to-roll vacuum coater Z2P150H (hereinafter – "the coater") is a complete system designed to deposit metallic lithium coatings by means of thermal evaporation. 1.3 The coater can produce either a single-sided coating in one or two deposition zones, or a double-sided coating without breaking the vacuum. 1.4 The design of this coater is based on Sidrabe’s practical experience in vacuum web coaters and processes development as well as R&D results, obtained in Sidrabe’s Research Department. 1.5 The coater operates in laboratory of Sidrabe’s R&D department. It is used for Li deposition technology scaling and manufacturing of trial batches of Li coated material. www.sidrabe.com Page 2 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 2. MAIN FEATURES OF THE COATER 2.1. The coater is a batch-operating plant with web roll loading before cycle and product roll unloading after the cycle. 2.2. The coater consists of 1 chamber, incorporating winding device, 2 process drums, pre-treatment sources, 2 thermal evaporation zones, pumping station and control desk. 2.3. Thermal evaporation zones are equipped with a closed-loop controlled electrically heated crucibles and shutters. 2.4. Process drums incorporate cooling channels and argon-venting for heat contact between substrate and drum surface. 2.5. The coater is designed to run in either single-sided or dual-sided deposition modes. 2.6. A blind flange and mounting area is foreseen for future upgrades, for example a planar magnetron. 2.7. The web winding system is capable of handling thin metallic foils and provides tension separation between the unwinder and rewinder zones. 2.8. Interleaf pre-treatment is performed by glow-discharge. 2.9. The pumping station is based on the usage of turbo-molecular pumps and combination of Roots and rotary vane pumps. 2.10. Operator interface uses a PC-based HMI. 2.11. Coater control is accomplished by a system of PLCs. www.sidrabe.com Page 3 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 3. SCOPE OF DELIVERY FOR THE COATER 3.1. Vacuum chamber 3.1.1. Chamber supports. 3.1.2. Chamber doors. 3.2. Winding system 3.2.1. Web unwinding and rewinding shafts. 3.2.2. Interleaf unwinder shaft. 3.2.3. Cooled, vented process drums. 3.2.4. Idle rollers. 3.2.5. Idlers with load cells. 3.2.6. Winding device drive, motors and clutches. 3.2.7. Tools for roll loading. 3.3. Glow-discharge pre-treatment 3.3.1. Pre-treatment sources. 3.3.2. HV power supply. 3.4. Evaporation sources 3.4.1. Heated jackets. 3.4.2. Removable and fixed shields. 3.4.3. Shutters and pneumatic actuators. 3.4.4. Heating and cooling lines. 3.4.5. Heating power supplies. 3.5. Gas inlet system 3.5.1. Mass flow controllers. 3.5.2. Gas admission control units. 3.5.3. Manual needle valve. 3.6. Pumping system 3.6.1. Turbo-pumps. 3.6.2. Roots blowers and backing pumps. 3.6.3. Vacuum gauges. 3.4.4. Electrically operated valves. 3.7. Control system 3.7.1. Operator PC with HMI interface. 3.7.2. PLCs. 3.7. Control system 3.8. Electrical cabinets for coater controls, drives and power distribution 3.9. Primary cooling water system 3.10. Process drum cooling system 3.11. Pneumatic system www.sidrabe.com Page 4 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 4. TECHNICAL PARAMETERS 4.1. 4.2. Substrate and interleaf 4.1.1. Substrate material polymer films or metal foils 4.1.2. Substrate width 150 5 mm 4.1.3. Substrate thickness 6 ‒ 40 µm 4.1.4. Interleaf material polypropylene 4.1.5. Interleaf thickness 12 ‒ 30 µm 4.1.6. Core ID (all rolls) 76.2 0.4 mm 4.1.7. Core material metal or plastic 4.1.8. Maximum interleaved product roll OD 140 mm Coating 4.2.1. Coating material metallic lithium 4.2.2. Coating deposition single or double-sided 4.2.3. Coating thickness 1 ‒ 30 µm 4.2.4. Coated width 106 mm 4.2.5. Uniform coating width 100 mm 4.2.6. Coating thickness uniformity 10% www.sidrabe.com Page 5 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 4.3. 4.4. 4.5. 4.6. Winding system 4.3.1. Type non-reversible 4.3.2. Web speed range 0.2 ‒ 2 m/min 4.3.3. Tension force range at unwinder and around the process drum 20 ‒ 120 N 4.3.4. Tension force range at the rewinder 20 ‒ 200 N Process drum 4.4.1. Drum type water-glycol-cooled, backside ventilated with grooved surface 4.4.2. Drum diameter 300 mm 4.4.3. Drum operational temperature -20 ‒ 15 ᵒC Pre-treatment units 4.5.1. Type magnetically-assisted, directed glow disharge 4.5.2. Power supply DC, 1kV, 200 W 4.5.3. Working pressure 7*10-3 Torr Evaporators 4.6.1. Type indirectly heated, stainless-steel vessels 4.6.2. Temperature range at sides of evaporator 450 ‒ 600 ᵒC 4.6.3. Temperature range at bottom of evaporator 100 ‒ 700 ᵒC 4.6.4. Heater power 5 3 kW each source www.sidrabe.com Page 6 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 4.7. 4.8. 4.6.5. Power supplies thyristor-controlled AC 4.6.6. Working pressure 8*10-5 ‒ 3*10-4 Torr 4.6.7. Dynamic deposition rate 6 μm*m/min Gas inlet system 4.7.1. Supply line pressure 1.5 ‒ 2.5 bar 4.7.2. Purity of process gasses Ar: 6N CO2: 6N 4.7.3. Highest gas flows of argon for each process drum 70 sccm Pumping system performance 4.8.1. Ultimate pressure in the deposition compartment (after cleaning of shields, 20 h non-continuous pumping, with substrate) 6x10-6 Torr 4.8.2. Base pressure in the deposition compartment (within 180 minutes, with substrate) 2x10-5 Torr 4.8.3. Venting time 5 minutes www.sidrabe.com Page 7 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 4.9. Requirements for Customer-provided utilities and operating conditions 4.9.1. 4.9.2. www.sidrabe.com Cooling water system 4.9.1.1. Supply line temperature 15 ‒ 25 ᵒC 4.9.1.2. Supply line pressure 2.5 ‒ 3.0 bar 4.9.1.3. Return line pressure 0.5 bar 4.9.1.4. Estimated flowrate up to 2.5 m3/h 4.9.1.5. Water quality particle size 150 μm; hardness 20 ᵒdH; conductivity 50 ‒ 600 μS/cm; PH value 7 ‒ 8.5. Cooling/heating system of process drums 4.9.2.1. Heat-transfer agent mixture of ethylene glycol and water (50:50 by vol.) 4.9.2.2. Supply line temperature range -20 ‒ 40 ᵒC 4.9.2.3. Pressure in the system up to 4 bar 4.9.2.4. 2 bar 4.9.2.5. Min. differential pressure Estimated flowrate 4.9.2.6. Cooling capacity 2 kW at -5 ᵒC 4.9.2.7. Particle filtration size 150 μm up to 16 l/h Page 8 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 4.9.3. 4.9.4. 4.9.5. Electric power 4.9.3.1. Type of connection 3-phase, TN-S earthing 4.9.3.2. Frequency 50 Hz 2% 4.9.3.3. Voltage 3 ph. 400 V 6/-10% 4.9.3.4. Estimated installed power 45 kVA 4.9.3.5. Actual power consumption 16 kW Compressed air 4.9.4.1. Supply line pressure 4.5 ‒ 7.0 bar 4.9.4.2. Estimated consumption up to 120 l/min during cooling 4.9.4.3. Particle size 5 μm 4.9.4.4. Dew-point 1.7 ᵒC 4.9.4.5. Oil contamination 2 ppm Requirements to operation area The room, to which the vacuum side of this coater is exposed to whilst open, has to meet the requirements as follows: www.sidrabe.com 4.9.5.1. Room temperature: 22 3 ᵒС. 4.9.5.2. Relative humidity: 2%. 4.9.5.3. Air circulation rate: 0.4 m/s. 4.9.5.4. Room maintenance to be in conformity with ISO 14644-5. 4.9.5.5. The room to be in conformity with fire safety requirements of ISO 16730. 4.9.5.6. Cleaning of detachable parts of the coater shall be carried out in a separate room. Page 9 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 5. DIMENSIONS OF THE COATER 5.1. 5.2. 5.3. Size of the coater 5.1.1. Depth 1.9 m 5.1.2. Width 3.4 m 5.1.3. Height 2.2 m Minimum installation area 5.2.1. Length 6.0 m 5.2.2. Width 5.0 m 5.2.3. Height 2.5 m Weight of the coater Estimated weight www.sidrabe.com 8100 kg Page 10 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified 6. IMAGES www.sidrabe.com Page 11 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified www.sidrabe.com Page 12 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified www.sidrabe.com Page 13 of 14
Pilot PVD Li Roll-to-Roll Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified www.sidrabe.com Page 14 of 14
Room maintenance to be in conformity with ISO 14644-5. . ISO 16730. 4.9.5.6. Cleaning of detachable parts of the coater shall be carried out in a separate room. Pilot PVD Li Roll-to Vacuum Coater Z2P150H OVERVIEW ISO 9001:2015, 14001:2015 Certified www.sidrabe.com Page 10 of 14 5. DIMENSIONS OF THE COATER
(Specify Rose A, B, or D) 605 PVD, 606 PVD, 612 PVD, 619 PVD, 625, 626 613 PVD, 622 PVD, 630 Part # Description List Lever and Rose (specify design/finish and handing) 79003 Lever and rose, outside dummy 173.00 193.00 79001 Lever and rose, outside 173.00 193.00 79002 Lever and rose, inside 173.00 193.00 79
PVD-14: Chronic limb swelling due to venous insufficiency/Venous stasis changes/Varicose veins 65 PVD-15: Venous stasis ulceration 69 PVD-16: IVC filters 71 . CPT 74185, CPT 73725, and CPT 73725. The CPT code for MRA Pelvis (CPT 72198) should not be included in this circumstance PVD-1.1: General Information .
PVD-14: Chronic limb swelling due to venous insufficiency/ Venous stasis changes/Varicose veins 60 PVD-15: Venous stasis ulceration 64 PVD-16: IVC filters 66 . CPT 74185, CPT 73725, and CPT 73725. The CPT code for MRA Pelvis (CPT 72198) should not be included in this circumstance
01 forever brass (pvd) 06 antique brass 07 english bronze 08a antique copper 10b oil rubbed bronze 15 polished nickel 15a antique nickel 15s satin nickel 20 stainless steel (pvd) 26 polished chrome 56 flat black metropole 2510-5103 01 forever brass (pvd) 07 english bronze 10b oil rubbed bronze 15 polished nickel 15s satin nickel
Peripheral Vascular Disease (PVD) Imaging Guidelines . PVD -2: Screening for Suspected Peripheral Artery Disease/Aneurysmal Disease 10 PVD -3: Cerebrovascular a nd Carotid Disease 14 . The TBI (toe-brachial index) is used to establish the diagnosis of PAD in the setting of non-compressible arteries (ABI 1.40) and may also be used to assess .
The PVD process validates a solution and provides design consideration and deployment best practices to accelerate deployment. The PVD process assures the chosen technologies form an integrated solution to address critical business objectives. This document provides design consideration and deployment best practices for the PVD using Pure Storage
Mikuni-style ceviche 9 Fair Oaks Roll Panko shrimp, avocado, sauce, masago and onion 8 Jerry Roll Double panko shrimp, crab mix, avocado, shrimp, sauce, masago and onion 14.5 Kings Roll Sesame chicken, soy wrap, sauce 12.5 Sacramento Roll Tempura California roll, ponzu 9.5 Tekka Maki Tuna roll 6 Tommy Roll Deep fried soft shell crab, spicy
The American Guild of Musical Artists (AGMA) Relief Fund provides support and temporary financial assistance to members who are in need. AGMA contracts with The Actors Fund to administer this program nationally as well as to provide comprehensive social services. Services include counseling and referrals for personal, family or work-related problems. Outreach is made to community resources for .
