EME Graduate Program Guide 2020-2021 - RIT

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Rochester Institute of TechnologyDepartment of Electrical andMicroelectronic EngineeringKate Gleason College of EngineeringEME Graduate Program Guide2020-2021

WelcomeWelcome to the Electrical and Microelectronic Engineering Department at the RochesterInstitute of Technology. Our exciting profession is at the forefront of manytransformational innovations including cell phones, media players, lasers, medicaldiagnosis systems, and multimedia workstations to name but a few. We provide strong,rigorous curricula that prepares students to enter the professional workforce and/orpursue further graduate studies in their field of interest. Our graduates are highly soughtafter by leading employers and top graduate and professional schools in the country.Surveys consistently confirm that an advanced degree in engineering providesignificantly more career opportunities than a standard four year program. The Electricaland Microelectronic Engineering Department offers a number of full and part timegraduate programs and is supported by a wide range of highly experienced,internationally renowned faculty and staff; and world class laboratories and facilities. Weoffer numerous graduate courses in multiple disciplines and concentrations. Furthermore,our faculty conduct state of the art sponsored research for government agencies andindustrial partners. Our work is routinely cited in leading journals and periodicals.The objective of this document is to provide guidance for students pursuing a Master’sdegree in the Department of Electrical and Microelectronic Engineering. There are threeseparate degrees within the department for which this guide applies. They are thefollowing Master of Science in Electrical Engineering (EEEE-MS)Master of Science in Microelectronic Engineering (MCEE-MS)Master of Engineering in Microelectronic Manufacturing Engineering (MCEMANUME)This document is intended to provide pertinent information concerning each of thesedegrees. It also contains multiple sections devoted to common issues such as thesisformats and binding etc. These guidelines outline the expectations of the Department ofElectrical and Microelectronic Engineering and the Rochester Institute of Technology aswell as the responsibilities of the student, thesis supervisor, and committee he KGCOE Student booklet which contains all resources and policies related tocomputer networking, Student Information System (SIS), grades, probation andsuspension and Ethics can be found in the link provided ent%20Handbook%202019-2020.pdf2

Table of ContentsPage51.Contact Information2.Master of Science in Electrical Engineering .132.1467777788999910113.Master of Science in Microelectronic Engineering ral steps towards earning the MSEE degreeAdmission requirementsGraduation requirementsFocus areas of SpecializationGraduate student advisingPlan of study and policiesTransfer creditsGraduate Teaching and Research assistantshipsGood academic standingMSEE Graduate PaperMSEE ThesisMSEE Comprehensive examGraduate Internships in the MSEE ProgramEE Graduate Course Offerings by Focus AreasGeneral steps towards earning the degree12MCEE-MS Microelectronic Engineering Admission requirements 12MCEE-MS Microelectronic Engineering Program13MCEE-MS Core Courses13MCEE-MS Elective Courses13MCEE-MS Microelectronic Engineering Plan of study13MCEE-MS Microelectronic Engineering Graduate student advising13Assistantships and Fellowships14Thesis Proposal and Thesis Work14Typical schedule for non BS MicroE14Typical schedule for BS MicroE15Master of Engineering in Microelectronic ManufacturingEngineering (MCEMANU-ME)4.14.24.34.44.54.612General steps towards earning the MCEMANU-ME degreeMCEMANU-ME Admission requirementsMCEMANU-ME Program requirementsMicroelectronics CoursesMicrolithography CoursesManufacturing Courses316161616171717

Page4.74.85.MCEMANU-ME Typical schedule18On-Line Master of Engineering in Microelectronic Manufacturing 16EngineeringGraduate Paper and Thesis Procedures for all EMEGraduate mentsRegistrationProceduresGraduate Paper: Format and FormalitiesGraduate Thesis:5.5.1 Thesis format5.5.2 Thesis Defense5.5.3 Permissions: Copyright and Embargoes5.5.4 Thesis submission on ProQuestAppendix A –Electrical and Microelectronic Engineering Faculty23Appendix B - Recent MS Electrical Engineering Thesis Titles26Appendix C - Recent MS Microelectronic Engineering Thesis Titles27Appendix D – Electrical Engineering (EEEE) Graduate Course Descriptions28Appendix E – Microelectronic Engineering (MCEE) Graduate Course Description 39Appendix F - Sample MSEE Thesis Title Page and Signature Page42Appendix G - Sample MSEE Graduate Paper Title Page44Appendix H- Sample MS MicroE Thesis Title Page and Signature Page45Appendix J – Sample Table of Contents for Thesis and Graduate Paper474

1. Contact InformationDepartment of Electrical and Microelectronic EngineeringRochester Institute of Technology79 Lomb Memorial DriveRochester, NY 14623Phone (585) /www.rit.edu/kgcoe/microelectronicDr. Ferat Sahin, Professor and Department HeadElectrical and Microelectronic Engineering79 Lomb Memorial DriveRochester, NY 14623Phone (585) 475-2164Email: feseee@rit.eduMs. Patricia Vicari, Graduate Sr. Staff Specialist79 Lomb Memorial DriveRochester, NY 14623Phone (585) 475-2164Email: pmveee@rit.eduDr. Jayanti Venkataraman, Graduate Program Director (MSEE)Professor Department of Electrical and Microelectronic EngineeringRochester Institute of TechnologyBuilding 09, Office 309179 Lomb Memorial DriveRochester, NY 14623Phone (585) 475-2143Email: jnveee@rit.eduhttp://www.rit.edu/kgcoe/eta/Dr. Sean Rommel, Microelectronic Engineering Program DirectorElectrical and Microelectronic Engineering82 Lomb Memorial DriveRochester, NY 14623Phone (585) 475-4723Email: onic5

2 Master of Science in Electrical Engineering (EEEE-MS)2.1 General Steps towards earning the MSEE Degree The MSEE Program requirements which is a total of 30 credits can be completed by one ofthe following options- Graduate Thesis (6 credit hours) and 8 courses (3 credits each)- Graduate Paper (3 credit hours) and 9 courses (3 credits each)- Comprehensive Exam (No credit) and 10 courses (3 credits each)Details are provided in section 2.3. MSEE students are required to select a focus area prior to registering for their first semesterof studies upon which a faculty advisor in that area will be assigned who will assist thestudent with course selections. The focus area, however, can be changed to meet educationalneeds. Details are provided in Section 2.4 and 2.6. The MSEE course outlines are providedin Appendix D. During the first semester, MSEE students should begin to consider a topic for their graduatepaper or thesis. This document contains recent thesis titles as well as up to date abstracts offaculty publications in Appendices A, B, and K, which may assist you in determining aspecific thesis or graduate paper advisor. While completing the remaining credits, studentsare encouraged to continue to develop their paper or thesis ideas and discuss their thoughtswith their faculty advisor. Graduate thesis (6 credit) can be split in increments of 3 credits per semester. AFTER youhave registered for all six credits, you must KEEP REGISTERING on a semester-bysemester-basis for one credit each time, for as long as your work is still in progress. Thisallows you to stay current in the system. You are allowed one free credit in which tocomplete your thesis. After that, you will be charged for one credit per semester until youcomplete your thesis. Summer semesters are free. Upon completion, students are required toobtain the proper approvals for their thesis and provide the necessary copies to the Electricaland Microelectronic Engineering department. Details are described in Section 2.11 andSection 5. Graduate paper (3 credits) needs to be completed in one semester, upon which a letter gradewill be awarded by the faculty advisor. This grade will be counted for the cumulative gradepoint average (CGPA). Students are required to provide the necessary copies to the Electricaland Microelectronic Engineering department. Details are in Section 2.10 and Section 5. The Comprehensive exam is offered twice a year in January and June. Details are providedin section 2.12. During the semester prior to the one you intend to graduate in, you are required to completeand submit an application for graduation to the Electrical and Microelectronic Engineeringdepartment. Internships are permitted during any semester, upon approval of the graduate paper / thesisfaculty advisor and the Graduate Program Director. Details are provided in Section 2.13.6

2.2 Admission RequirementsAdmission into graduate studies leading to an MS degree in Electrical Engineering requires aBachelor of Science degree from an accredited program in Electrical Engineering (note that a BSdegree in Microelectronic Engineering qualifies). An applicant with a strong undergraduaterecord and a Bachelor of Science degree in another branch of engineering (mechanical, computer,industrial, etc.) will also be considered for admission. In this case, the student must complete acertain number of undergraduate courses in order to bridge over to Electrical Engineering.Additional information in this regard is available from the department.A combined Bachelor of Science and Master of Science program in Electrical Engineering existswith separate admission requirements. Please refer to documents describing that program foradmission requirements. These guidelines apply once a student has been accepted into thecombined BS/MS EE program.MSEE can be pursued both on a full time or part time basis.2.3 Graduation RequirementsThe Master of Science degree in Electrical Engineering is awarded upon the successfulcompletion of an approved graduate program consisting of a minimum of 30 credit hours. Undercertain circumstances, a student s required to complete more than the minimum number of credits.2.4 Focus Areas of SpecializationFor the MSEE degree, the student can select and specialize in one of the following eight areas. CommunicationsControl SystemsDigital SystemsElectromagnetics, Microwaves and AntennaIntegrated ElectronicsMEMSRoboticsSignal & Image Processing2.5 Graduate Student AdvisingAll incoming students will be assigned an academic faculty advisor who is in the focus area oftheir choice. He/she will continue to be the student’s academic advisor until a research topic hasbeen chosen. At that time, the thesis/paper advisor assumes the role of academic advisor.2.6 Plan of Study and PoliciesEvery matriculated student must arrange to have a Plan of Study prepared in consultation withhis/her faculty advisor at the beginning of the program7

The following general rules apply to all MSEE students: All students seeking the MSEE degree must satisfactorily complete two core courses,EEEE-707: Engineering Analysis and EEEE-709: Advanced Engineering Mathematics.Students will be expected to take the required core courses immediately upon entering theprogram since these courses are prerequisites to several other graduate courses. Those students who have selected the following focus areas: Control Systems,Communications, Electromagnetics, Robotics and Signal & Image Processing, must alsocomplete EEEE-602: Random Signals and Noise. Students must take three courses in their chosen focus area from the Electrical andMicroelectronic Engineering department and expected to perform the research needed fora graduate paper or thesis in the same area. Student may take the remaining courses from a related area within the College ofEngineering, the Center for Imaging Science and the Computer Science Department withapproval from the Graduate Program Director. A maximum of 2 courses are allowed as electives from programs outside the above listedColleges / Departments. These must be approved by the Graduate Program Director. All courses must be 600 level or above. MSEE students can select one of the following options to complete the degreerequirement.oGraduate Thesis (6 credit hours) and 8 courses.oGraduate Research Paper (3 credit hours) and 9 courses.oComprehensive Examination (NO Credit) and 10 courses. All graduate work must be completed within a seven-year period starting from the firstcourse applied towards the MSEE degree. Also, a student who is pursuing thethesis/graduate paper options may be required to register for a continuation of thesiscredits if he or she is not enrolled for any credits in a given semester. For completedetails, please consult the Continuation of Thesis credit requirements discussed in thebeginning section of the RIT Graduate Catalog.2.7 Transfer CreditsFor students transferring credits from other universities, a maximum of 2 graduate courses (6credits) are allowed with approval from the Graduate Program Director.2.8 Graduate Teaching and Research AssistantshipsThe Electrical and Microelectronic Engineering Department offers teaching assistantships to alimited number of outstanding incoming first year graduate students. During the second year,students are encouraged to seek support as research assistants (RA) from a faculty member.8

2.9 Good Academic StandingA 3.0 GPA or higher is required to graduate. ALL graduate courses taken after matriculating intoan MS program at RIT are counted toward your grade point average (GPA). To be in goodacademic standing, a graduate student must maintain a cumulative GPA of 3.0/4.0 or betterthroughout their program of study. Students would be placed on probation or may be suspendedat the discretion of the Graduate Program Director and in accordance with RIT and KGCOEpolicies if the cumulative GPA falls below 3.0. If placed on probation, students are given onesemester to elevate their GPA to 3.0 or be suspended indefinitely from the program. Please notethat RIT institute policy states ‘C-‘, ‘D’ or ‘F’ grades do not count toward the fulfillment of theprogram requirements for a graduate degree.” However, they are calculated in the CGPA andwill remain on the student’s transcript permanently. Students placed on probation may have theirscholarship reduced or totally eliminated at the discretion of the Graduate Program Director andin accordance with RIT policies.2.10 MSEE Graduate PaperThe MSEE graduate paper is 3 credits. It is treated as a regular course that is required to becompleted in one semester. Letter grades A through F will be assigned by the Faculty advisor.This grade will count towards the CGPA. Students are required to provide the necessary copies tothe Electrical and Microelectronic Engineering department. Details of the format of the paper isgiven in Section 5.2.11 MSEE ThesisGraduate thesis (6 credits) can be split in increments of 3 credits per semester. AFTER you haveregistered for all six credits, you must KEEP REGISTERING on a semester-by-semester-basisfor one credit each time, for as long as your work is still in progress. This allows you to staycurrent in the system. You are allowed one free credit in which to complete your thesis. Afterthat, you will be charged for one credit per semester until you complete your thesis. Summersemesters are free. Upon completion, students are required to obtain the proper approvals for theirthesis and provide the necessary copies to the Electrical and Microelectronic Engineeringdepartment. Details of the thesis defense and thesis format are provided in Section 5.2.12 MSEE Comprehensive Exam There are two parts to the exam.o Part I: Based on the two Mandated Courses EEEE707 Engineering Analysis EEEE709 Advanced Engineering Mathematicso Part II: Based on the Student’s Focus Area Students are allowed to take the exam after a successful completion of 7 to 8 EE courses. The exam will be conducted twice every academic year: Mid-June and January (during theIntersession) Sign up for the exam is in early May and early December The duration of the exam is 3 hours for each part.9

The exam is written, held in class and proctored. Part I is closed book. Part II is closed book or open book, depending on the focus area and the instructor. In case of a failing grade a maximum of two more attempts are permitted (total 3 attempts).2.13 Graduate Internships in the MSEE ProgramA maximum of one year is permitted for Graduate internships. Following is the approval process. Student should have an offer letter from a company with start and end dates.Students should be registered for courses in the semester following the duration of theinternship.Approval is required by the student’s graduate paper/thesis faculty advisor stating that uponreturn of student to RIT, the faculty will continue to work with student to ensure that thegraduate paper /thesis will be completed in a timely manner.Upon approval by the MSEE Program coordinator, the student will be registered inEEEE699-Graduate Co-op.Students accepted for Co-op by a company who fail to report for work or who quit theinternship before the designated date, will not be permitted to accept any other Co-op duringtheir duration in the MSEE program at RIT.10

2.14 EE Graduate Course Offerings by Focus AreaCore CoursesRequired Courses for allfocus areasRequired Course for allFocus Areas except #3,5,6Focus Area1 - Communication2 - Control Systems3 - Digital Systems4-Electromagnetics,Microwaves and Antenna5- Integrated Electronics6-MEMS7- Robotics8- Signal & ImageProcessing-FallEEEE-707 Engineering AnalysisEEEE-709 Adv. EngineeringMathematicsSpringEEEE-707 Engineering AnalysisEEEE-709 Adv. EngineeringMathematicsEEEE-602 Random Signal and NoiseEEEE-602 Random Signal and NoiseEEEE 692 Communications NetworksEEEE-629 Antenna Theory and DesignEEEE-718 Des & Characterization ofMicrowave SystemsEEEE-793 Error Detect/ErrorCorrectionEEEE-797 Wireless CommunicationEEEE-693 Digital Data Communication.EEEE-694 Sensor Array Processing forWireless CommunicationsEEEE-617 Microwave Circuit DesignEEEE-710 Advanced EM TheoryEEEE-794 Information TheoryEEEE-661 Modern Control TheoryEEEE-663 Real-Time EmbeddedSystemsEEEE-620 Design of Digital SystemsEEEE-621 Design of ComputerSystemsEEEE 722 Complex Digital SystemsVerificationEEEE-629 Antenna Theory & DesignEEEE-718 Des & Characterization ofMicrowave SystemsEEEE-664 Performance Engineering ofReal-time & Embedded SystemsEEEE-765 Optimal ControlEEEE-620 Design of Digital SystemsEEEE-720 Advanced Topic in DigitalSys DesignEEEE-721 Advanced Topics inComputer Sys DesignEEEE-617 Microwave Circuit DesignEEEE-710 Advanced ElectromagneticTheoryEEEE-610 Analog ElectronicsEEEE-711 Advanced Carrier-InjectionDevicesEEEE-713 Solid State PhysicsMCEE-601 Micro FabricationEEEE-661 Modern Control TheoryEEEE-689 Fundamentals of MEMsMCEE-601 Micro FabricationMCEE-770 MEMs FabEEEE-622 Electric PowerTransmission & Distribution (Elective)EEEE-685 Principles of RoboticsEEEE-647 Artificial IntelligenceEEEE-661 Modern Control TheoryEEEE-678Digital Signal ProcessingEEEE-695 Optimization Methods forEngineersEEEE-794 Information TheoryEEEE-712 Advanced Field EffectDevicesEEEE-726 Mixed Signal IC DesignMCEE-732 CMOS Mfg.EEEE-646 Power ElectronicsEEEE-787 MEMs EvaluationsEEEE-624 Advances in Power Systems(Elective)EEEE-631 Biomed Sensors &Transducers I (Elective)EEEE-636 Bio-robotics/ CyberneticsEEEE-784 Advanced RoboticsEEEE-670 Pattern RecognitionEEEE-694 Sensor Array Processing forWireless CommunicationsEEEE-768 Adaptive Signal ProcessingEEEE-779 Digital Image ProcessingEEEE-781 Image and VideoCompressionA selected number of Graduate courses are usually available during the summer semester.Graduate level courses taken in Microelectronic Engineering, Computer Engineering or MechanicalEngineering can be counted towards the 3-course requirement in the Controls, Digital Systems,Integrated Electronics or MEMs focus areas.Related area courses may be taken from the College of Engineering, the Center for Imaging Scienceand the Computer Science Department11

3 Master of Science in Microelectronic Engineering (MCEE-MS)3.1 General Steps towards earning the Degree Master of Science in Microelectronics students typically have a default schedule for their firstsemester. If a student has transfer credit or other academic issues they should meet with theMicroelectronic Engineering graduate program director (currently Dr. Rommel) beforeregistering for their first semester of studies. During the first semester, Master of Science students should begin to consider a topic fortheir graduate thesis. This document contains recent thesis titles (appendix C). Abstracts offaculty publications which may assist you in determining a specific thesis advisor can befound on individual faculty web pages. Students are required to interact with program facultyand declare a thesis advisor by the beginning of April of the spring semester. While completing the remaining degree credits, students are encouraged to continue todevelop their thesis ideas and discuss their thoughts with their faculty advisor. MCEE students can register for thesis in increments of 3 credits per semester. A total of sixcredits of thesis are required. AFTER you have registered for all six credits, you must KEEPREGISTERING on a semester-by-semester-basis for one credit each time, for as long as yourwork is still in progress. This allows you to stay current in the system. You are allowed onefree credit in which to complete your thesis. After that, you will be charged for one credit persemester until you complete your thesis. Summer semesters are free. Students are required to obtain the proper final approvals for their thesis document andprovide the necessary electronic copy to ProQuest. The electronic receipt must be sent viaemail to the EME graduate coordinator. Microelectronic Engineering continues to require a bound paper copy be submitted to theprogram director. During the semester prior to the one you intend to graduate in, you are required to completeand submit an application for graduation to the Electrical and Microelectronic Engineeringdepartment.3.2 MCEE-MS Microelectronic Engineering Admission RequirementsThe objective of the Master of Science in Microelectronic Engineering program is to provide anopportunity for students to perform graduate level research as they prepare for entry into thesemiconductor industry or a Ph.D. program. The program requires strong preparation in the areaof microelectronics. The program typically takes two years to complete and requires a thesis.Applicants must hold a baccalaureate degree in Electrical Engineering, Chemical Engineering,Materials Science and Engineering, Physics or the equivalent, from an accredited college oruniversity in good academic standing. An undergraduate grade point average of 3.0 or better on a4.0 scale or strong academic advisor/supervisor endorsements are required. Graduate RecordExam (GRE) scores are not mandatory but may support the candidacy.The prerequisites include a BS in engineering (such as electrical or microelectronic engineering),and an introductory course in device physics. Students who do not have the prerequisite device12

physics can take a course during their first year of study at RIT and still complete the Master ofScience program in two years. The prerequisite course will not count toward the 24 credits worthof graduate courses required for the MS degree.3.3 MCEE-MS Microelectronic Engineering ProgramThe program consists of eight graduate level (600 level or higher) courses, including six corecourses and two elective courses. For students with BS in Microelectronic Engineering two corecourses (MCEE-704 and MCEE-732) courses and six elective courses are required. Inaddition, all graduate students in this program are required to take one credit seminar/researchcourse for their first two semesters. Up to 2 seminar/research credits will be allowed to counttoward the required 32 hours. A six-credit thesis proposal, written thesis oral defense will berequired of all students in this program. The total number of credits needed for the Master ofScience in Microelectronics Engineering is 32.3.4 MCEE-MS Core EE-732MCEE-704***Required for ME not MS**Required for MS not MEMicro FabricationSemiconductor Process IntegrationThin FilmsLithographic Materials and ProcessesNanolithography SystemsMicroelectronic ManufacturingPhysical Modeling Semiconductor Devices3.5 MCEE-MS Elective CoursesThe following is a subset of the elective courses offered for graduate credits. See the degree auditfunction in Student Information Services (SIS) or the program website for a complete rriculumMCEE-706SiGe and SOI Devices and TechnologyMCEE-615*Microlithography Systems, LabMCEE-620PhotovoltaicsMCEE-704**Physical Modeling of Semi DevicesMCEE-732Microelectronics ManufacturingMCEE-730Metrology Failure Analysis & YieldMCEE-770MEMS FabricationMCEE-789Special Topics*Required for ME elective for MS**Required for MS elective for MEBased on the student's particular needs, he or she may, with the approval of the program director,choose electives from other programs at RIT.3.6 MCEE-MS Microelectronic Engineering Plan of StudyAs previously stated, new incoming students receive a default schedule for their first semester.Students should initially discuss this schedule with the Program’s Graduate Director. Students13

also usually take a default schedule in the spring semester as well and wait until their second yearto take electives.The second semester each student should seek out a thesis advisor based on common interests.Students are required to declare an advisor by April of the spring semester (both student andadvisor have to sign-off). Then, in consultation with his or her academic advisor – a plan of studyis formulated based on the student's academic background, program objectives, degreerequirements and course offerings and submits it to the program director within the first year. Theplan of study should be revised with the recommendation of the advisor at start of each semesterin the second year of study.3.7 MCEE-MS Microelectronic Engineering Graduate Student AdvisingDr. Sean Rommel is the initial graduate advisor for all students with a MS in Microelectronics.3.8 Assistantships and FellowshipsA limited number of assistantships and fellowships may be available for full-time (or full-timeequivalent) MS students. Appointment in the second year of study as a teaching/lab assistanttypically carries a 8-10 hour-per-week commitment to a laboratory teaching function and permitsa student to take graduate work at the rate of 10 credits per semester. Students in the MS programmay also eligible for research fellowships. Appointment as a research assistant also permitstaking up to 10 credits per semester while the remaining time is devoted to the research effort,which often serves as a thesis subject. Appointments provide hourly pay. Applicants for researchassistantships should contact the program director or individual faculty members for details.3.9 Thesis Proposal and Thesis WorkA process and set of requirements have been created for the thesis proposal for the Master ofScience degree in Microelectronic Engineering. The thesis proposal should occur in the fall ofthe second year of MS study. Key features of the proposal are the make-up of the committee, theliterature search, presentation of the problem/issues, research plan and thesis timetable. A copyof a sample proposal can be obtained from the Microelectronic Engineering Graduate Director toillustrate the proper format and content. The expectation of the Microelectronic Engineeringprogram is that the master's thesis will involve an empirical component. While theoreticalframeworks or conceptual models may (and should in many cases) guide the research questions,or be the subject of empirical testing, a strictly theoretical paper is not acceptable for a master'sthesis. The thesis may involve research in device, circuit or process design, development andvalidation and evaluations through modeling and analysis within the realm of microelectronicengineering discipline.In some cases, the thesis may be developed in conjunction with ongoing projects or extension ofexisting processes. In other cases, the thesis may involve original or new devices, circuits, and/orprocesses. The thesis may involve quantitative data, qualitative data, or a combination of bothtypes of data. Details about the thesis defense, thesis preparation, binding etc. can be found in alater section of this document (section VII).14

3.10 Typical Schedule for a non BS MicroE studentA typical schedule for a Master of Science in Microelectronic Engineering studentwhere the student does not hold a BS in Microelectronic EngineeringFall (year 1)Spring (year 1)Fall (year 2)Spring (year 2)1.2.3.4.MCEE-601 Micro Fab,Lab COREMCEE-605 (3 cr)MicrolithographyMaterials & Processes,Lab COREMCEE-603 (3 cr) ThinFilms, Lab COREMCEE-795 (1 cr)Seminar/Research1.2.3.4.MCEE-602 (3 cr)Semiconductor ProcessIntegration COREMCEE-732 (4 cr)MicroelectronicManufacturing & LabCOREGraduate ProfessionalElective (3 cr)MCEE-795 (1 cr)Seminar/Research1.2.3.MCEE-704 (3 cr)Physical Modeling ofSemi. Devices, LabCOREMCEE-790 (3 cr)ThesisGraduate ProfessionalElective (3 cr)1.2.MCEE-790 (3cr) ThesisFull TimeEquivalency (6cr) ResearchTotal of 32 credits: 2 Seminar, 6 thesis and 24 course credits (8 courses). Transitioncourses may be required which do not count towards th

Electrical and Microelectronic Engineering and the Rochester Institute of Technology as well as the responsibilities of the student, thesis supervisor, and committee members. . and Microelectronic Engineering department. in Section 2.11 and Details are described Section 5. Graduate paper (3

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