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Leak DetectingInstrumentsLeak DetectingInstrumentsLeak DPHOENIXHelium Leak Detectors270.00.02Excerpt from the Leybold Full Line Catalog (Edition 2021)Catalog Part Leak Detecting Instruments

ContentsLeak Detecting InstrumentsGeneralApplications for Leak Detection Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3Leak Detection – Leak Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4Leak Detection Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5Operating Principles of the Helium Leak Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7ProductsFourth PHOENIX Generation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.PHOENIX Quadro . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10.PHOENIX Magno . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12.PHOENIX Vario . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Mobile Leak Detection Systems PHOENIX 4 Cart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18AccessoriesAccessories for the PHOENIX Quadro, PHOENIX Magno und PHOENIX Vario . . . . . . . . . . . . . . . . 22CART for PHOENIX Quadro and PHOENIX Vario . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24CART for PHOENIX Magno . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Remote Control Units for Leak Detectors RC 310 für PHOENIX . . . . . . . . . . . . . . . . . . . . . . . 26Helium Sample Probes (Sniffers) for PHOENIX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Calibrated Leaks for PHOENIX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30MiscellaneousConnection Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34Connection Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 342Leybold Full Line Catalog (Edition 2021) - Leak Detecting Instrumentsleybold

GeneralPHOENIXVarioPHOEN(oil s IX Vea ariled oPHOENIXTestLe Instak ruD meetnec tsto /rsApplicationsfor Leak Detecting InstrumentsSemiconductor productionnnnnnVacuum coatingnnnnResearch and ve industrynnnLaser engineeringnnAnalytical engineeringnSystems with cryopumpsnApplicationsnnnnnnnnnnnnnnnnnnnCooling and air conditioningnElectrical engineeringnMechanical engineeringnnnPower plantsnnnSystems engineeringnnnnnnUHV applicationsnnnnnnleyboldnnLeybold Full Line Catalog (Edition 2021) - Leak Detecting InstrumentsLeak DetectingInstrumentsParticle acceleratorsnn3

Leak Detection – Leak TestingWhether a component or a system isleak-tight depends on the application itis to be used in and the leak rate thatis acceptable. Absolutely leak-tightcomponents and systems do not exist.A component is considered technicallyleak-tight if its leak rate remains belowa value defined for this particular component. In order to provide a quantita tive measure, the term “leak rate” withthe symbol “qL” was introduced. Invacuum technology mbar x l/s is usedas the unit for leak rates.qL V x Vp t(mbar x l/s)The wide range of leak rates fromseveral 100 mbar x l/s to below10-11 mbar x l/s as they occur in practice necessitates the use of different leakVacuum methodHelium leak detector PHOENIX MagnoHelium leak detector PHOENIX Vario103.100 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9 10-10 10-11 10-12 mbar x l x s -1Helium leak detector PHOENIX 4Overpressure methodA leak rate of 1 mbar x l/s exists ina closed vessel having a volume of1 liter when the pressure increases by1 mbar within one second, or in caseof an overpressure it decreases by1 mbar within one second.Helium leak detector PHOENIX QuadroPressure riseBubble testPressure drop testOverview of the leak rate detection rangesdetection principles and hence leakdetectors (see figure).Besides the determination of the totalleak tight ness, it is usually important tolocate the leak, quickly and precisely,in order to seal it. Instruments for localLeak Rateleak detection are called leak detectors.The leak detectors presented in thisproduct section can be used for thelocalization of leaks, and in additionsome are suitable for determining thetotal leak rate of test objects.Pa x m /satm x cm3/s *)mbar x l/s *)1109.870.110.991 atm x cm3/s *) cm3 (STP) /s0.1011.0111 Torr x l/s *)0.1331.331.331 kg/h air23.43Pa x cm3/s1 mbar x l/s (He)2346,41 x 101 g/a C2H2F4 (R 134a)-7Leak Rateatm x cm3/sTorr x l/s *)7,58 x 106,3 x 10-6kg/hAirg/aC2H2F4 (R 134a)Pa x cm3/s7.54.28 x 10-22.28 x 1061 mbar x l/s (He)0.754.3 x 10-32.28 x 1051 atm x cm3/s *) cm3 (STP) /s0.764.3 x 10-32.3 x 10515.7 x 10-33.0 x 1051751–4,8 x 10-6–11 Torr x l/s *)1 kg/h air1 g/a C2H2F4 (R 134a)*)4*)234-6*)atm x cm3/scm3/s *)According to international system of units only Pa x m /s is permissible3Leybold Full Line Catalog (Edition 2021) - Leak Detecting Instrumentsleybold

Leak Detection MethodsVacuum MethodsLocal Leak DetectionLeak Testing Based on Vacuum Methods(Vacuum inside the test object.)Pressure Rise MethodThe equipment to be tested is evacuated. The pressure ratio betweeninside and outside is 0:1.Overpressure MethodsThe equipment to be tested is pressurized with a search gas or a searchgas mixture.The pressure ratio between inside andoutside is over 1:1.Between the two methods there existmany variations depending on the particular application.General Notes1. The lowest leak rates can only bemeasured by employing the vacuummethod, whereby the following applies:The lower the leak rate, the higher therequirements are concerning cleannessand ultimate vacuum.2. If possible the test objects should betested under the same conditions thatwill be used in their final applica tion, i.e.parts for vacuum operation should betested according to the vacuummethod and parts for overpressureoperation should be tested using theoverpressure method.With this method it is only possible todetermine the total leak rate. The testobject is evacuated with a vacuumpump or a vacuum pump system. Avalve is used to isolate the test objectfrom the vacuum pump. The pressurewill then rise as a function of time.Curve (a) shows the theoretical pressure rise if there is only a leak. Curve(b) shows the pressure rise due to outgassing from the surfaces of the testobject. This pressure rise tends to tailoff in the direction of a saturation level.If in such a case the time allowed formonitoring the pressure rise is tooshort, a leak will be indicated which inreality does not exist. If one waits longenough for the pressure to rise, i.e.after the bend of curve (b) the outgassing process can then be disregarded,so that the leak rate can be determin edfrom the known volume of the testobject and the measured pressure riseover a fixed rise time (see equation onpage before). Curve (c) shows thepressure rise as it occurs in practice,where out-gassing and leak rate add.The detectable leak rate depends onthe volume of the test object, the ob tained ultimate pressure and the outgassing from the test object. In con nection with very large test objects thismethod is time consuming if extremelylow leak rates are to be determined inthe fine and rough vacuum range.1 Test object2 Leak detector634The test object is evacuated by a vacuum pump (auxiliary pump) until thepressure is low enough for the leakdetector to operate. When using ahelium leak detector, its own pumpsystem will take care of further evacuation. Suspicious spots on the testobject will then be sprayed with a finejet of search gas. Search gas enteringthrough leaks into the test object ispumped out by the vacuum pump andit is converted by the leak detector intoan electrical signal which is then displayed. This perwiths rapid detectionand determination of the size of eventhe smallest leaks.Integral MethodDetermination of the total leak rate of atest object. The testing arrangement isthe same as for local leak detection,but in this case the test object is notsprayed with search gas on selectedareas, but it is s urrounded by a hood ora chamber which is filled with thesearch gas. Thus the entire outer surface of the test object comes into contact with the search gas. If the searchgas e nters the test object, the total leakrate is indicated independently of thenumber of existing leaks. With he liumleak detectors it is possible to determine the helium content of the air. This isutilized in the detection of gross leaks.Search gas cylinderVacuum pump56HoodSpray gun for search gas1LDHELIUMa) Pressure rise due to leakageb) Pressure rise due to outgassingfrom the chamber wallsc) Both effects combinedPressure rise in a vacuum chamber after switchingoff the pump; double log. plotleybold243Local leak detection – Evacuated test object (left) and Integral method – Evacuated test object (right)Leybold Full Line Catalog (Edition 2021) - Leak Detecting Instruments5Leak DetectingInstrumentsThere are two main groups of leakdetection methods; for both there arespecial instruments available:

Leak Testing Based onOverpressure Methods(Overpressure within the test object.)Pressure Drop MethodThe test object is filled with a gas (forexample air or nitrogen) until the testingpressure is reached. Precision vacuumgauges are used to detect a possiblepressure drop during the testing period.This method is simple to implement, itis suitable for the determination ofgross leaks and can be improved uponby using differential pressure gauges.By a pplying soap solutions or similar,leaks can be locat ed.Local Leak Detection with LeakDetectors – SniffingThe test object is filled with the searchgas or the search gas/air mixture towhich the leak detector is sensitive.The leak detector is e quipped with asniffer probe, whereby there is a lowpressure at the probe tip. If the sniffertip passes suspicious points on the testobject the search gas coming out ofthe leak is sucked in and transferred tothe detection system of the leak detector. After conversion into e lectrical signals these are displayed optically andacoustically by the leak detector.Integral Method – Hood TestTo determine the total leak rate of a testobject subjected to a search gas overpressure, the test object is surroundedby a hood of a known vol ume. Thesearch gas which escapes through theleaks collects in the hood.Key to the Figures1 Test object2 Leak detector34After a fixed accumulation period asniffer probe is used to measure theconcentration of the search gas whichhas collected in the hood.Before this the leak detector should becalibrated by a reference measurementusing a known search gas concentra tion.The leak rate can then be determinedby the equation for qL where V is thevolume of the hood, p is the partialpressure difference of the search gas(concentration change) and t is theaccumulation period.Uncertainties in the determination ofthe volume, leaks in the hood and awrong accumulation period make precise leak rate measurements based onthis method very questionable.Integral Method – Vacuum HoodTestThis test is a variation of the hood testdescribed above, which has consider able advantages. A vacuum chamberwhich is evacuated by an auxiliarypump and which is c onnected to a leakdetector is used as the hood. Thesearch gas escaping through the leaksis converted by the detection system ofthe leak detector into electrical signalswhich are immediately displayed. Aftercalibration of the leak detector with acalibrated leak it is possible to quantitatively determine the total leak rate.56Local leak detection –Search gas overpressure in the test object6This method perwiths the detection ofthe lowest leak rates and is used mainly in automatic industrial leak testingespecially when it is not p ossible to fillthe parts with gas in any other way.51636LDHELIUMAfter this, the test objects are transferred to a vacuum chamber andtheir total leak rate is determined in thesame way as in the vacuum hood test.During evacuation of the vacuumchamber down to the r equired testingpressure, those test objects whichhave a gross leak already lost theiraccumulated search gas. These partsare not detected as leaking during theactual leak test. Therefore the test withthe vacuum chamber is often preced edby a “bubble test”.HoodSniffer probe12This method is used for testing her met i cally sealed components suchas transistors, IC-packages or dry reedrelays. It is basically a v ariation of thevacuum hood test. Here the test objects are placed in a vessel which ispressurized with the search gas – preferably helium. At a fairly high searchgas pressure and after a period of upto several hours it is tried to enrich thesearch gas i nside leaky test objects.This is the actual so called “bombing”process.This method perwiths the detection ofvery small leaks and is especially s uitedfor automatic industrial leak detection.Search gas cylinderVacuum pump3Integral Method –Bombing-Test2LDHELIUMIntegral method (search gas accumulation)Search gas overpressure in the test objectIntegral method –Search gas overpressure in the test objectLeybold Full Line Catalog (Edition 2021) - Leak Detecting Instrumentsleybold

Operating Principlesof the Helium Leak DetectorsA helium leak detector perwiths thelocalization of leaks and the quantita tivedetermination of the leak rate, i.e. thegas flow through the leak. Such a leakdetector is t herefore a helium flowmeter.In practice the leak detector performsthis task by firstly evacuating the partwhich is to be tested, so that gas fromthe outside may enter through an ex ist ing leak due to the pressure difference present. If only helium is brought infront of the leak (for example by using aspray gun) this helium flows throughthe leak and is pumped out by the leakdetector. The helium partial pressurepresent in the leak detector is mea sured by a sector mass spectrometerand is displayed as a leak rate. This isusually given in terms of volume flow ofthe helium (pV-flow).Important SpecificationsThe two most important features of aleak detector are its measurementrange (detection liwiths) and itsre sponse time.The measurement range is liwithed bythe lowest and the highest detectableleak rate. The lowest detectable leakrate is defined by the sum of drift andnoise in the most sensitive measurement range. Usually the sum of noiseamplitude and zero drift per minute ismade to be equivalent to the lowestdetectable leak rate. With leak detectors the amount of drift is so low, thatthe noise amplitude alone determinesthe detection liwith.also perwith the measurement of highleak rates.In practical applications, especially in thelocalization of leaks the response time isof great significance. This is the time ittakes from spraying the test object withhelium until a measured value is displayed by the leak detector. The response time of the electronic signal conditioning circuitry is an important factor in theoverall response time. In the case of leakdetectors the response time of the electronic circuitry is well below 1 s.The volume flow rate for helium at thepoint of the test object is of decisivesignificance to leak detection on components which are pumped downsolely by the leak detector. This volumeflow rate provided by the leak detectortakes care of the helium enteringthrough a leak and it e nsures quickdetection by the leak detector. On theother hand the v olume of the testobject delays the arrival of the heliumsignal. The response time can be calculated on the basis of the followingsimple equation:VResponse time for helium tA 3SHe(for 95% of the final value)with V SHe Volume of the test objectVolume flow rate for he- lium at the point of thetest object(or at the inlet of the leakdetector, if it alone pumpsdown the test object).Main Flow MethodThis operating principle of helium leakdetectors is based on the main flowmethod and was long time the classicmethod of leak detectors. Here theentire helium flow passes through thehigh v acuum system of the leakdetector, where the mass spectrometermea sures the partial pressure of thehelium. In this, the use of a liquidnitrogen cold trap is essential toremove water vapor or other condensable gases in the vacuum systemwhich impair the operation. Moreover,the use of a cold trap perwiths the lowoperat-ing pressures for the massspectrometer to be reached (below10-4 mbar) despite the directlyconnected (and possibly contaminated)test object.The advantages of the main flowmethod are:– Highest sensitivity, i.e. low detectionliwith– Short response time due to a highvolume flow rate at the inlet.The disadvantage of the main flowmethod is that the gas flow is being ledthrough the mass spectrometer thusparticels like dust and dirt penetrateinto the measuring system and maydisturb the helium measurements.The highest detectable leak rate depends strongly on the method employed. Especially the counterflow methodand partial flow operation (see description below) perwith the measurement ofvery high leak rates even with a sensi tive helium leak detector. In addition themultistage switchable high impedanceinput amplifiers of the leak de tectorsMain flow methodleyboldLeybold Full Line Catalog (Edition 2021) - Leak Detecting Instruments7Leak DetectingInstrumentsOperating Principle

Counterflow MethodPartial Flow MethodWith this method the test object is notconnected to the high vacuum. Insteadit is connected to the fore vacuum(be tween turbomolecular pump andbacking pump), so that the entire gasflow (especially water vapor) does notcontribute to the pressure increase inthe mass spectrometer. Thus a coldtrap is no longer required!In order to expand the measurementrange in the direction of higher leakrates and for operation at higher inletpressures, helium leak detectors incorporate a partial flow or a gross leaksystem. This consists basically of athrottle and a rotary vane pump. Atpressures above the normal inlet pressure (main flow: above 10-2 mbar,counterflow: above 10-1 mbar) or in thecase of high helium leak rates, the inletvalve is closed and the main flow isallowed to enter the partial flow pump,whereas only a small part entersthe leak detector via the partial flowthrottle. Thus the total pressure andthe helium pressure are dropped tovalues suitable for operation of theleak detector.The helium which now enters the forevacuum can still be detected, as it isable to flow against the pumping direction of the turbomolecular pump intothe mass spectrometer. This is due tothe high particle velocity of the helium.The sensitivity of this counterflowar range ment is equal to that of themain flow principle, provided the rightcombination of volume flow rate of thebacking pump and helium compres sionof the turbomolecular pump is used.The advantages of the counterflowmethod are:– No liquid nitrogen is required– High permissible inlet pressures (i.e.pressure within the test object)This makes the counterflow methodespecially suitable for mobile leakdetection on systems. For leak detection on larger components where ashort response time is essential (i.e.high volume flow rate) an additional turbomolecular pump stage is required atthe inlet of the leak detector.Counterflow method8To obtain correct leak rate readings inthe partial flow mode, the partial flowratio, i.e. the ratio between the actuallymeasured gas flow and the total gasflow must be known and stable.In all leak detectors this is achieved bya partial flow throttle made of ruby witha precisely machined hole. This en sures that the quantitatively determinedleak rates are always correct withoutcalibration, even for gross leaks.Calibration of Helium LeakDetectors with CalibratedLeaksIn the process of leak detection oneexpects that a test object which doesnot have a leak produces a zero read ing on the leak detector. In this anymalfunctions are excluded. Thus calibrated leaks, i.e. artificial leaks whichproduce a known helium leak rate areessential for reliable results.To obtain a quantitatively correct leakrate reading the sensitivity of the leakdetector must also be adjusted. Thisrequires the use of a calibrated leak.Leybold offers calibrated helium leaksof various designs covering the rangebetween 10-9 to 10-4 mbar x l/s as partof the standard range of products. Allleak rates are traceable to the standards of the DAkkS Calibration Servicecontrolled by the PTB (Federal Institution of Physics and Technology).If requested each helium calibrated leakcan be supplied with a calibration certificate issued by the DAkkS CalibrationService. The calibration itself isper form ed by the DAkkS CalibrationService for Vacuum which is run byLeybold on behalf of the PTB.Partial flow methodLeybold Full Line Catalog (Edition 2021) - Leak Detecting Instrumentsleybold

ProductsFourth PHOENIX GenerationThe new PHOENIX 4 family sets newstandards in helium leak detection.All versions are suited for the use invacuum as well as sniffer operation.The PHOENIX Quadro and PHOENIXMagno are available with oil-sealed ordry-running backing pump as well as ina variety of different voltage versions.Leak DetectingInstrumentsThe product portfolio provides theperfect device for a variety of applications. The PHOENIX Quadro – as auniversal, portable helium leak detector is the all-rounder in its class. Forapplications with larger test volumes,which require faster pump down orrepeated measuring cycles fromatmosphere to test pressure, thePHOENIX Magno provides just the righthigh pumping speed. Full flexibility isachieved with the PHOENIX Vario,which knows to convince with itsunique compactness and free selectionof the backing pump that is to beconnected.leyboldLeybold Full Line Catalog (Edition 2021) - Leak Detecting Instruments9

PHOENIX QuadroThe PHOENIX Quadro is a portablehelium leak detector, which can beused in many different applications.The accurate measuring system andthe intuitive operation of the PHOENIXQuadro ensure simple and highlyreliable leak detection. The PHOENIXQuadro dry has a dry-running backingpump and thus an oil-free pumpsystem.When it comes to applications thatrequire oil-free pumping, the PHOENIXQuadro dry is therefore the ideal choicefor reliable and efficient leak detection.Advantages to the User- Detects even the smallest leakquickly and reliably- Very fast operational readiness475- Extremely short response times- Rapid decontamination time in caseof helium contamination- Very high detection sensitivity- Convenient remote control viasmartphone or tablet PC withoutsoftware installation495- Variety of interfaces for optimaldevice communication- Innovative color touch display- Long life span of the components- Oil-free pumping system with thePHOENIX Quadro dry319- Internal data memory as well assimple data output via USBDimensional drawing PHOENIX Quadro (Dimensions in mm)10Leybold Full Line Catalog (Edition 2021) - Leak Detecting Instrumentsleybold

Technical DataPHOENIX 4QuadroQuadro dryMinimum detectable helium leak rateVacuum modembar x l/sSniffer modembar x l/s 5 x 10-12 1 x 10-9 1)Minimum detectable hydrogen leak rateVacuum modembar x l/sSniffer modembar x l/s 1 x 10-8 1 x 10-7Units of measurement (selectable)PressureLeak rateSniffer modeLeak rate measurement rangembar, Pa, atm, Torrmbar x l/s, Pa x m3/s, Torr x l/s, atm x cc/sec, sft3/yrppm, g/a eq, oz/yr eq1 x 10-12 to 1 x 10-1mbar x l/s12 decadesMeasurement rangesMax. inlet pressure15 (11.25)mbar (Torr)Pumping speed during theevacuation process50 Hz60 Hzm3/h (cfm)m3/h (cfm)2.5 (1.5)3.0 (1.8)3.4 (2.0)3.8 (2.2)0,41.2 3.10.041.2 3.1Pumping speed (helium) at the inletGROSS modeFINE modeULTRA modesl/sl/sl/sTime constant of the leak rate signal(blanked off, 63% of final value)s 1Run-up time (after starting)s 110Leak DetectingInstruments180 magnetic sector fieldMass spectrometer2 filaments; iridium/yttria-oxideIon sourceamu2, 3 and 4Inlet portDN25 ISO-KFDimensions (W x H x D)mm495 x 475 x 318Detectable massesWeightkg (lbs)41 (90.39)35 (77.16)English, German, Chinese, Japanese (Katakana), KoreanRussian, French, Italian, Spanish and PolishAvailable languagesOrdering InformationPHOENIX 4QuadroQuadro dryPart No.Part No.PHOENIX Quadro EURO version230 V, 50/60 Hz250000V02-PHOENIX Quadro US version115 V, 60 Hz251000V02-PHOENIX Quadro Japan version100 V, 60 Hz251100V02--250001V02PHOENIX Quadro100 – 240 V, 50/60 Hz1)Depending on the used sniffer line and site conditions. Leakage rate signal after zero: 1 x 10-8 mbar x l/s when using the sniffer lineSL 300 or SL 301For further accessories see para. “Accessories for PHOENIX Quadro, PHOENIX Magno and PHOENIX Vario”leyboldLeybold Full Line Catalog (Edition 2021) - Leak Detecting Instruments11

PHOENIX MagnoThe PHOENIX Magno is the highperformance leak detector in thePHOENIX 4 Series. With added forevacuum suction capacity, the PHOENIXMagno ensures very rapid evacuationtimes and is therefore particularly suitedfor larger test volumes. It has the same,highly-precise measuring system as thePHOENIX Quadro. The oil-tightenedversion together with the integratedSOGEVAC SV16D provides highestsuction capacity. The dry version hasan integrated SCROLLVAC SC5D forapplications that require an oil-freepump system.Advantages to the User- Very high suction capacity for rapidmeasuring cycles24- Detects even the smallest leaksquickly and reliably- Very fast operational readiness366653- Extremely short response times- Rapid decontamination time in caseof helium contamination- Very high detection sensitivity- Convenient remote control viasmartphone or tablet PC withoutsoftware installation521- Variety of interfaces for optimaldevice communicationDimensional drawing PHOENIX Magno (Dimensions in mm)- Innovative color touch display- Long life span of the components- Oil-free pumping system with thePHOENIX Magno dry- Internal data memory as well assimple data output via USB12Leybold Full Line Catalog (Edition 2021) - Leak Detecting Instrumentsleybold

Technical DataPHOENIX 4MagnoMagno dryMinimum detectable helium leak rateVacuum modembar x l/sSniffer modembar x l/s 5 x 10-12 1 x 10-9 1)Minimum detectable hydrogen leak rateVacuum modembar x l/sSniffer modembar x l/s 1 x 10-8 1 x 10-7Units of measurement (selectable)PressureLeak rateSniffer modeLeak rate measurement rangembar, Pa, atm, Torrmbar x l/s, Pa x m3/s, Torr x l/s, atm x cc/sec, sft3/yrppm, g/a eq, oz/yr eq1 x 10-12 to 1 x 10-1mbar x l/s12 decadesMeasurement rangesMax. inlet pressure15 (3.75)mbar (Torr)Pumping speed during theevacuation process50 Hz60 Hzm3/h (cfm)m3/h (cfm)15 (8.83)17 (10.01)5 (2.94)6 (3.53)2.61.2 3.11.21.2 3.1Pumping speed (helium) at the inletGROSS modeFINE modeULTRA modesl/sl/sl/sTime constant of the leak rate signal(blanked off, 63% of final value)s 1Run-up time (after starting)s110Leak DetectingInstruments180 magnetic sector fieldMass spectrometer2 filaments; iridium/yttria-oxideIon sourceamu2, 3 and 4Inlet portDN25 ISO-KFDimensions (W x H x D)mm521 x 679 x 371Detectable massesWeightkg (lbs)67 (147.71)57 (125.66)English, German, Chinese, Japanese (Katakana), KoreanRussian, French, Italian, Spanish and PolishAvailable languagesOrdering InformationPHOENIX 4MagnoMagno dryPart No.Part No.PHOENIX Magno EURO version200 – 230 V, 50/60 Hz350000V02350001V02PHOENIX Magno Japan / US version100 – 115 V, 50/60 Hz352200V02352201V02Depending on the used sniffer line and site conditions. Leakage rate signal after zero: 1 x 10-8 mbar x l/s when using the sniffer lineSL 300 or SL 3011)For further accessories see para. “Accessories for PHOENIX Quadro, PHOENIX Magno and PHOENIX Vario”leyboldLeybold Full Line Catalog (Edition 2021) - Leak Detecting Instruments13

PHOENIX VarioThe PHOENIX Vario has no built-inbacking pump, and therefore has thesmallest installation space with maximum flexibility. The type and size of thebacking pump can be chosen freelydepending on applications and processrequirements.The PHOENIX Vario thus combines theexcellent properties of the PHOENIX 4series with the required pumpingsystem. In that way both oil-sealed anddry backing pumps can be selectedand the fore vacuum suction capacitycan be adapted perfectly to the targetapplication.Advantages to the User- Application-optimized pumpingspeed- Extremely small installation space380- Very light weight- Highly reliable measuring system- Simple, intuitive handling- Very high detection sensitivity486- Convenient remote control viasmartphone or tablet PC withoutsoftware installation- Variety of interfaces for optimaldevice communication-319Innovative color touch display- Extremely short response times- Internal data memory as well assimple data output via USBDimensional drawing PHOENIX Vario (Dimensions in mm)14Leybold Full Line Catalog (Edition 2021) - Leak Detecting Instrumentsleybold

Technical DataPHOENIX VarioMinimum detectable helium leak rateVacuum modembar x l/sSniffer modembar x l/s 5 x 10-12 1 x 10-9 1)Minimum detectable hydrogen leak rateVacuum modembar x l/sSniffer modembar x l/s 1 x 10-8 1 x 10-7Max. inlet pressurewi

The wide range of leak rates from Besides the determination of the total several 100 mbar x l/s to below 10-11 mbar x l/s as they occur in practi-ce necessitates the use of different leak detection principles and hence leak detectors (see figure). leak tightness, it is usually important to locate the leak, quickly and precisely,

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constant leak sound value of a leak and the total current sound value. In addition, the results of each measurement can be automatically stored for a comparison of leak sound levels along a series of sequential listening points (see Section 3.8 on Memory Mode, pp 18 - 19). The HL 5000 is the first leak locator that when in leak

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