Search high e low collisional plasma confinement characteristics
Plasma Etching Page 2 OUTLINE Introduction Plasma Etching Metrics – Isotropic, Anisotropic, Selectivity, Aspect Ratio, Etch Bias Plasma and Wet Etch Summary The Plasma State - Plasma composition, DC & RF Plasma Plasma Etching Processes - The principle of plasma etching, Etching Si and SiO2 with CF4
Plasma Fundamentals - Outline 1. What is a plasma ? Temperature Debye shielding Plasma frequency 2. The edge of a plasma Sheath physics 3. How to ignite a plasma Ignition, Paschen curve Streamer RF-ignition 4. Transport in a plasma Particle motion Plasma
Collisional plasma sheath model T. E. Sheridana and J. Goree Department of Physics and Astronomy, The University of Iowa, Iowa City, Iowa 52242 (Received 25 April 1991; accepted 30 May 1991) The effects of ion collisionality on the pla
Plasma Cleaner: Physics of Plasma Nature of Plasma A plasma is a partially ionized gas consisting of electrons, ions and neutral atoms or molecules The plasma electrons are at a much hi
2.0 MagMate Cut25 Plasma 6 2.1 Fundamentals of Plasma Cutting 6 2.2 Process operation for transferred arc applications 7 3.0 Plasma cutting components 8 3.1 Plasma cutting power sources 8 3.2 Plasma cutting capacity 8 3.3 Plasma cutting torches (general) 8 3.4 Air supply 9 3.5 Process comparisons 9 3.6 Work return cable assembly 9
2.0 Smoothcut Plasma Cutters 8 2.1 Fundamentals of Plasma Cutting 8 2.2 Process operation 9 3.0 Plasma cutting components 10 3.1 Plasma cutting power sources 10 3.2 Plasma cutting capacity 10 3.3 Plasma cutting torches 10 3.4 Air supply 11 3.5 Process comparisons 11 3.6 Earth cable assembly 11 4.0 Cutting Technique 12 4.1 Cutting 12
Plasma Physics . Plasma-etching For nanosized sample High-density plasma sources, such as inductively coupled plasma (ICP) and electron-cyclotron resonance (ECR) plasma. charge build-up and UV photon radiation . In the future we can use tens-of-microsecond pulse-time modul
Micro plasma weldings (f.l.): membran, glow plug, magnetic valve, relay) Micro plasma welding of pressure cells Micro plasma welding torch PJB100superior Circular welding system for micro plasma welding with plasmaJET100SPS Micro plasma welding Welding currents from 0.1A W
vortex generator. Though a Plasma Window is not necessary to generate a Plasma Shield, a Plasma Window was used as a plasma source. Basically, a vortex generator was mounted on FIG. 1. Color online Schematic of the plasma shield concept. FIG. 2. Color online Top view of the vortex generator
Key Plasma Properties Particle Density Ionization Degree –Quasi Neutrality Plasma Temperature Plasma as a Gas Debye Length –Plasma Sheath Plasma Oscillation Readings and materials for the lecture – Brown, I.G., The Physics and Technology of Ion Sources. 2nd ed.The Physics and Technology of
A PLASMA ARC CAN CAUSE INJURY AND BURNS . Plasma arc can cut anything instantly. -Keep hand away from the torch tip when the plasma unit is on -Do not hold metal near the cutting path. -Never clean up the torch head when the plasma unit is on. PLASMA ARC RAYS CAN BURN SKIN AND EYE . Plasmas produce intense visible and invisible
- IHI Inc./Westinghouse Plasma. Recent DoD Plasma Furnace Applications Plasma Arc Shipboard Waste Destruction System (PAWDS) . Plasma Pyrolysis of MSW PLASMA GASIFIER MSW 1 Ton - 9.39 Mbtu 33% Moisture Steam Negligible Electricity 0.56 MWHr - 1.90 MBtu Product Gas 30,300 SCF Heating Value 8.16 MBTU L o s s e s 1. 7 7 M B t u