High Vacuum Pumps High Va - Leybold
High VaHigh Vacuum PumpsDIP / DIJ / OB / LEYBOJETOil Diffusions Pumps
2Leybold Full Line Catalog 2018 - High Vacuum Pumpsleybold
ContentsHigh Vacuum PumpsTurbomolecular Pumps TURBOVAC / TURBOVAC MAG6GeneralGeneral to TURBOVAC Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6Applications for TURBOVAC Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Accessories for TURBOVAC Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13ProductsTurbomolecular Pumps with Hybrid (magnetic/mechanical) Rotor SuspensionGeneral toTURBOVAC i / iX Pumps. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14with integrated Frequency Converter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22with integrated Frequency Converter and integrated Vacuum System Controller . . . . . . . . . . . . . . . 22Special Turbomolecular Pumps. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34Turbomolecular Pumps with Magnetic Rotor SuspensionMAG INTEGRAwith integrated Frequency Converterwith and without Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36with separate Frequency Converterwith Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50AccessoriesElectronic Frequency Convertersfor Turbomolecular Pumps with Magnetic Rotor Suspension. . . . . . . . . . . . . . . . . . . . . . . . 58Vibration Absorber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62Flange Heater for CF High Vacuum Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62Fine Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63Solenoid Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63Power Failure Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63Power Failure Venting Valve, electromagnetically actuated . . . . . . . . . . . . . . . . . . . . . . . . . . 63Purge Gas and Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64Gas Filter to G 1/4" for Purge Gas and Venting Valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64Accessories for Serial Interfaces RS 232 C and RS 485 C . . . . . . . . . . . . . . . . . . . . . . . . . . 65PC-Software LEYASSIST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65Interface Adaptor for Frequency Converter with RS 232 C/RS 485 C Interface . . . . . . . . . . . . . . . . 65MiscellaneousServices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66leyboldLeybold Full Line Catalog 2018 - High Vacuum Pumps3
68Oil Diffusion Pumps DIP, LEYBOJET, OBGeneralApplications and Accessories for Oil Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68Oil for Diffusion Pumps, for different fields of application . . . . . . . . . . . . . . . . . . . . . . . . . . . 68Oil for Diffusion Pumps, for different pump types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69ProductsDIP Pumps, Water-Cooled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72DIJ Pumps, Water-Cooled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76Oil Booster OB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80LEYBOJET 630, Water-Cooled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82AccessoriesAstrotorus Baffles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84Temperature dependant Switching Components for Automatic Pump System Control . . . . . . . . . . . . 86Monitoring Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87Power Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88Adsorption Traps with Aluminium Oxide Insert . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90Right-Angle Valves, Electropneumatically Operated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92Cryo Pumps, Cold Heads and Compressor UnitsCOOLVAC / COOLPOWER / COOLPAK94GeneralApplications and AccessoriesCryo Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94Cryogenics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95Cryo Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98Refrigerating Capacity of Cryogenic Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100Compressor Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101ProductsCryo PumpsCryo Pumps with Fully Automatic ControliClassicLineCOOLVAC 1500 iCL . . . . . . . . . . . . . .COOLVAC 2000 iCL, 3000 iCL . . . . . . . .COOLVAC 5000 iCL, 10000 iCL . . . . . . .COOLVAC 18000 iCL, 30000 iCL, 60000 iCL.102104108112Cryo Pumps with Liquid Nitrogen Cooling of Radiation Shield and Baffle of Cryo PumpCOOLVAC 30000 BL LN2, 60000 BL LN2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1154Leybold Full Line Catalog 2018 - High Vacuum Pumpsleybold
CryogenicsCold HeadsPneumatically drivenSingle-Stage Cold Head COOLPOWER 50 and 140 T . . . . . . . . . . . . . . . . . . . . . . . . . 118Dual-Stage Cold Heads COOLPOWER 7/25, 5/100 and 5/100 T . . . . . . . . . . . . . . . . . . . 120Mechanically drivenSingle-Stage Cold Head COOLPOWER 250 MD and Dual-Stage Cold Head COOLPOWER 10 MD . 122Compressor Unitsfor pneumatically driven cold heads and pumpswith water coolingCOOLPAK 2000/2200 . . . . . . . . . . .COOLPAK 6000 H/6200 H/6000 HD . . . .for mechanically driven cold heads and pumpswith water coolingCOOLPAK 6000 HMD/6200 HMD . . . . .General Accessories for Compressor Units COOLPAK. . . . . . . . . . . . . . . . . . . . . . . . . . . . 125. . . . . . . . . . . . . . . . . . . . . . . . . . . . 128. . . . . . . . . . . . . . . . . . . . . . . . . . . . 130. . . . . . . . . . . . . . . . . . . . . . . . . . . . 132AccessoriesCryo Pumps / CryogenicsControllers and Monitoring Units for Cryo Pumps. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134COOLVAC iClassicLine, System ConfigurationSingle Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138Dual and Multiple Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139Low Temperature Measurement Instrument MODEL 211S . . . . . . . . . . . . . . . . . . . . . . . . . . 141Temperature Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142leyboldLeybold Full Line Catalog 2018 - High Vacuum Pumps5
pplications and Accessoriesfor Oil Diffusion PumpsApplicationVacuum coating (e g Sputtering)Research and developmentMetallurgy/furnacesMechanical engineeringSputtering processSecondary metallurgy (e g VIM, VID)High vacuum furnacesCristal growing plantsElectron beam weldingNitride hardeningDrying plantsnnnnnnnnnnnnnnnn* DIJ 35 available from November 2017, DIJ 10 and DIJ 16 available from March 2018AccessoriesPageAstrotorus baffleOver-temperature protectionswitchContact thermometer84nnnnnnnnnnn86nnnnnnnnnnn86Resistance thermometer Pt10086Water flow monitor87nnnnnnnnnPower controller88nnnnnnnnAdsorption trap90For generating an oil-free vacuum with oil sealed backing pumpsValve92Right-angle valve with, electropneumatically operated, DN 250 ISO-K to DN 1000 atioApplacveloringpmentOil for Diffusion Pumpsfor different fields of applicationLVO 500nnnnnLVO 510lllllLVO 520llLVO 530llnnnnnLEYBONOL OilsLVO 5401)n Standardl Possible1)Only for OB pumpsThe table only lists general applications. Your specific requirements might be subject to deeper analysis.For further questions, please contact our technical Sales support.68Leybold Full Line Catalog 2018 - High Vacuum Pumpsleybold
IP80DIPDIP3000Pumps000Oil for Diffusion Pumpsfor different pump typesLVO 500nnnnnnnnnnnLVO 510lllllllllllLVO 520lllllllllllLVO 530lllllllllllLEYBONOL OilsLVO 540nlnnn Standard PossibleNoteAll oils may be used.The pumps are supplied as standard without oil.The table only lists general applications. Your specific requirements might be subject to deeper analysis.For further questions, please contact our technical Sales support.For information on oil specifications please refer to Catalog Part“Oils / Greases / Lubricants LEYBONOL ”.Operating Principle of FluidEntrainment Vacuum PumpsThe main components of diffusionpumps, the operation of which relies onvapor-phase pump fluids are:- Cooled pump body with intake andexhaust ports- System of nozzles- Pump boilerleyboldIn the case of diffusion pumps a pumpfluid contained in a boiler is heated tosuch an extent that it is vaporized. Thevapor is then forced through nozzleswithin the pump. The nozzles are generally designed in such a way, thatthey accelerate the vapor to a speedexceeding the speed of sound (Lavalnozzles), thus creating a high speedvapor jet. The vapor is then deflectedby the nozzles at a specific angle ontothe pump body. The pump body isLeybold Full Line Catalog 2018 - High Vacuum Pumpscooled, so that the vaporized pumpfluid condenses and is returned backto the boiler as a liquid. The pumpingaction of diffusion pumps and fluidentrainment pumps in general is basedon the transporting capacity of thevapor jet.The gas which is to be pumped iscompressed sufficiently at the forevacuum port so that it can be pumpedout by a backing pump.69
Oil Diffusion Pumpsforevacuum pump depends on theoperating conditions and the quantitiesof gas which are to be pumped.Compared to other fluid entrainmentpumps the density of the vapor in theboiler and in the vapor jet is fairly lowso that the gas molecules may almostcompletely diffuse into the vapor jet.Thus most of the molecules which enterthe vapor jet are also pumped out.For this reason, the pumping speed ofdiffusion pumps is extremely high withrespect to the intake area and constant– starting at an inlet pressure of approx.10-3 mbar (0.75 x 10-3 Torr) down tovery low pressures – as within thepressure range the vapor jet is notinfluenced in any way by the pressurewithin the vacuum vessel.1. Continuous operation at operatingpressures above 10-4 mbar(0.75 x 10-4 Torr) – largequantities of gas.The pumping speed of any pump isequivalent to the volume throughputthrough the intake opening of a pump.In the case of diffusion pumps thepumping speed for lighter gases ishigher compared to heavier gases.2. Continuous operation at operatingpressures below 10-4 mbar(0.75 x 10-4 Torr) – smaller quantitiesof gas.Backstreaming of the PumpFluidIn applications which rely on diffusionpumps, the vacuum chamber mustbe connected via a valve (3) and aroughing line directly to the backingpump. This is done so that the vacuumchamber may be pre-evacuated by thebacking pump down to a pressurewhere the diffusion pump can takeover. Until the high vacuum valve (4)opens, both diffusion pump and pumpfluid are preserved. Before venting thevacuum chamber the forevacuum valve(2) and the high vacuum valve (4) mustbe closed, whereby the diffusion pumpremains in the ready status.OperatingOil Diffusion PumpsForevacuumIn all cases diffusion pumps require asufficiently sized backing pump (seeTechnical Data). The size and type ofHMDIJOil diffusion pump with cold cap baffleP1Rotary vane vacuum pumpP2Roots vacuum pumpP3Rotary vane vacuum pump(optional as support pump)V1High-vacuum valveV2Forevacuum valveV3Bypass valveV4DIJ forevacuum valve(optional for support vacuum)Pumping SpeedUndesirable backstreaming of molecules from the pump fluid is caused bythe effect that some molecules are ableto leave the vapor jet and thus do notarrive at the cooled pump body.Because of collisions between eachother and due to reflection at the pumpbody, these molecules are then able tomove in the direction of the vacuumchamber.For DIP pumps the backstreamingeffect amounts only to a few µgper cm2 of intake area per minute.Backstreaming may be almost completely suppressed by includinga cold cap baffle or an additionalAstrotorus baffle.VM2Backstreaming of Oil in theCase of Diffusion Pumps- Pump without baffleapprox. 1 x 10-2 mg x cm-2 x min-1BVV1- Pump with cold cap baffleapprox. 1 x 10-3 mg x cm-2 x min-1V3- Pump with Astrotorus baffle(T 10 C (50 F))approx. 1 x 10-5 mg x cm-2 x min-1BaffleBaffleVapor baffleBVAiring valveHMHigh-vacuum measurement pointVM1Forevacuum measurement point (DIJ)VM2Forevacuum measurement point(vacuum chamber customer)The values stated have been measuredat an intake pressure of 1 x 10-4 mbarand apply to LEYBONOL LVO 500.DIPVM1V2P2V4P3P1Schematic for a diffusion-type vacuum pump system70Leybold Full Line Catalog 2018 - High Vacuum Pumpsleybold
Attainable Ultimate PressureThe attainable ultimate pressure for aparticular vacuum system depends notonly on the type and pumping speedrating of the diffusion pump, but alsoon the vapor pressure of the pumpfluid, shape and temperature of thebaffle, leaks at connecting flanges orwelded joints and the condition of thesurfaces within the vacuum chamber.When excluding all effects which contribute to an increase in pressure withinthe vacuum chamber due to leaks andcontamination of the vacuum chamberwalls, it will be possible to attain theultimate pressures stated in the table“Attainable Ultimate Pressures withOil Diffusion Pumps (DIP)” given inchapter “General”.- Water-cooled cold cap baffle as aintegral part of the diffusion pumptogether with a water-cooled Astrotorus baffle which may be installedas an additional component on thehigh vacuum flange of the diffusionpump.In practice the following combinationhas been found to work very well whenneeding a low vacuum free of oilvapors.Sealing MethodsCoolingFor ultimate pressures down to10-8 mbar (0.75 x 10-8 Torr) bakeouttemperatures of up to 150 C (302 F)are sufficient. FPM [FKM ( Fluor caoutchouc), temperature resistant up to150 C (302 F)] sealing rings or ultrasealing rings made of aluminum mustbe used.In order to prevent pressure variations,ultra sealing rings must be used in theconnections, between diffusion pumpand baffle.Ultimate pressures below 10 mbar(0.75 x 10-8 Torr) require bakeouttemperatures up to 400 C (752 F).However, it is only necessary to bakeout the vacuum chamber to 400 C(752 F) and to maintain a temperaturegradient across the baffle or the coldtrap so that a temperature of 150 C(302 F) is not exceeded at the intakeflange of the pump.-8In this way, it is still acceptable to useFPM (FKM) sealing rings or ultrasealing rings made of aluminium.The cooling water temperature shouldnot exceed 25 C (77 F) at the intakeand 30 C (86 F) at the discharge,otherwise sufficient condensation of thepump fluid cannot be ensured. Whenconnecting the cooling system ofthe pump and the baffle in series, thecooling water must always be made toflow through the baffle first and thenthrough the diffusion pump, becausethe attainable ultimate pressure in thevacuum chamber depends strongly onthe condensation temperature of thepump fluid in the baffle.Attainable Ultimate Pressures with Oil Diffusion PumpsAttainable Ultimate Pressure1)LEYBONOL LVO 500Without bafflembar (Torr)1.5 x 10-6 (1.1 x 10-6)With cold cap bafflembar (Torr)5.0 x 10-7 (3.8 x 10-7)With Astrotorus bafflembar (Torr)1.5 x 10-7 (1.1 x 10-7)1)Attained in consideration of the notes given under “Sealing Methods” in the chapter “General” para. “Oil Diffusion Pumps” and after degassing the connectedvacuum chamber for several hours at 200 C (392 F)leyboldLeybold Full Line Catalog 2018 - High Vacuum Pumps71
ProductsDIP PumpsWater-CooledThe DIP range of pumps wasdeveloped for operation in industrialsystems. Excellent vacuum performance data combined with theinherent ruggedness of this kind ofpump, make our diffusion pumps areliable component in high and mediumvacuum applications.DIP 12 000DIP 20 000 with Power ControllerAdvantages to the User- High pumping speeds in the fineand high vacuum ranges- Low attainable ultimate pressure- Integrated, water-cooled cold capbaffle guarantees low oil backstreaming rates into the vacuumchamber- Low oil losses (even at high gasthroughputs) by integrated watercooled forevacuum baffle- High forevacuum resistance even atreduced heating power- The heating cartridges are accessible from the outside via heatinginserts which are built into the boiler.This ensures a quick exchange ofsingle heating cartridges (even whenthe pump is hot)- A separate automatic circuit breakerfor each heating cartridge ensures ahigh level of electrical safety72Typical Applications- A standard built-in thermostat actsas an thermal overload switch andensures that the heating cartridgescan not overheat- All pumps are prepared for installation with an over-temperatureswitch (optional) for checking thecooling water circuit, and a contactthermometer (optional) to monitorthe operating temperature of thediffusion pump- Indication of the oil level by sightglass permits simple checking of thecurrent oil level- All DIP pumps are delivered withtheir inside chamber cleaned in sucha manner that it is free of oil. Theinside is evacuated. In the conditionas delivered, the pumps may bealso operated with silicone oilThe diffusion pumps from the DIPrange are used in coating systems,vacuum melting and drying systems aswell as in vacuum furnaces in the areaof metallurgy.Supplied EquipmentThe DIP pumps are supplied ready forconnection but without the filling ofpump fluid.The inside of the pump is cleanedbefore delivery to such an extent that itis free of oil. The inside is evacuated.High and forevacuum flanges areequipped with gaskets and centeringrings having shipping flanges andcomplete with clamping components.- Utilisation of the DIP power controller cuts power consumption by upto 30% without impairing pump performance (option)Leybold Full Line Catalog 2018 - High Vacuum Pumpsleybold
DIPDNDN1aa1bb1dd1d2d3d4d5Quantity of holeshh1h2h3 1 2 33 000250 ISO-K63 ISO-K240 (9.45)250.5 (9.86)443 (17.44)276 (10.87)290 (11.42)261 (10.28)–278 (10.94)–––560 (22.05)250 (9.84)68 (2.68)75 (2.95)45 20 ––8 000400 ISO-K63 ISO-K350 (13.78)375.5 (14.78)643 (25.31)373 (14.69)450 (17.72)400 (15.75)405 (15.94)530 (20.87)–––785 (30.91)400 (15.75)88 (3.46)102 (4.02)30 45 30 15 12 000500 ISO-K100 ISO-K420 (16.54)432 (17)775 (30.51)460 (18.11)550 (21.65)50119.72)506 (19.92)630 (24.80)–––940 (37)470 18.5)92 (3.62)106 (4.17)30 45 30 15 20 000630 ISO-F100 ISO-K540 (21.26)496 (19.53)980 (38.58)600 (23.62)750 (29.53)651 (25.63)636 (25.04)760 (29.92)720 (28.35)14 (0.55)201130 (44.49)620 (24.41)97 (3.82)110 (4.33)30 45 30 15 30 000800 ISO-F160 ISO-K600 (23.62)536 (21.10)1150 (45.28)690 (27.17)920 (36.22)800 (31.5)716 (28.19)840 (33.07)890 (35.04)14 (0.55)241450 (57.09)870 (34.25)102 (4.02)116 (4.57)20 45 30 15 50 0001000 ISO-F160 ISO-K800 (31.5)636 (25.04)1350 (53.15)790 (31.10)1120 (44.09)1000 (39.37)916 (36.06)1040 (40.94)1090 (42.91)14 (0.55)321880 (74.02)1275 (50.2)102 (4.02)116 (4.57)25 45 25 15 Dimensional drawing for the DIP 3000 [left], DIP 8000 and DIP 12000 [middle], DIP 20 000 to DIP 50 000 [right]; dimensions in brackets ( ) are in inch45 000l/sDIP 50 00040 00035 00020 000l/s30 000Pumping SpeedPumping Speed15 000DIP 1200010 000DIP 80005 00025 000DIP 30 00020 000DIP 30000DIP 20 00015 00010-610-510 -410 -310 -210 -1Intake Pressurembar10 010 0005 000010-610-510 -410 -310 -210 -1mbar10 0Intake PressurePumping speed characteristics of the DIP 3000 to 12000 pumpsas a function of intake pressureleyboldPumping speed characteristics of the DIP 20000 to 50000 pumpsas a function of intake pressureLeybold Full Line Catalog 2018 - High Vacuum Pumps73
DIP 3 000DIP 8 000DIP 12 000DN250 ISO-K / 63 ISO-K400 ISO-K / 63 ISO-K500 ISO-K / 100 ISO-Kl/s3 0008 00012 000Technical DataHigh vacuum / forevacuum connectionPumping speed for airbelow 1 x 10-4 mbar1)Operating rangeUltimate total pressure 10 to 10(0.75 x 10-2 to 0.75 x 10-7) 10 to 10(0.75 x 10-2 to 0.75 x 10-7) 10-2 to 10-7(0.75 x 10-2 to 0.75 x 10-7) 5.0 x 10-7 (3.75 x 10-7) 5.0 x 10-7 (3.75 x 10-7) 5.0 x 10-7 (3.75 x 10-7)6.0 x 10-2 (4.5 x 10-2)6.0 x 10-2 (4.5 x 10-2)6.0 x 10-2 (4.5 x 10-2)1.0 / 1.4 (1.1 / 1.5)1.7 / 3.4 (1.8 / 3.6)2.4 / 5.3 (2.5 / 5.6)230 1 Ph230 1 Ph–400 3 Ph Y460 3 Ph Y230 3 Ph Δ400 3 Ph Y460 3 Ph Y230 3 Ph ΔkW2.44.87.2269min 25 25 25160 (0.7)20 (0.09)6 (87)290 (1.28)30 (0.13)6 (87)500 (2.2)50 (0.22)6 (87)222mbar(Torr)mbar (Torr)1)Max permissible forevacuum pressurembar (Torr)Pump fluid filling, min / maxl (qts)Mains connectionStandard EURO, 50/60 HzStandard Americas, 50/60 HzSpecial, 50/60 HzVVVHeating powerNumber of heating cartridgesHeating up timeCooling water (minimum)for pump 2)for cold cap bafflemax supply pressurel/h (gal/min)l/h (gal/min)bar (psig)Number of cooling circuits(including cold cap baffle)-2-7-2-7Cooling water connectionfor pumpfor cold cap baffleG (BPS)G (BPS)3/8"1/4"1/2"3/8"1/2"3/8"Weight, approxkg (lbs)29 (64)70 (154)102 (225)TRIVAC D 65 B W 251SV 300 W 251SV 300 W 501–TRIVAC D 65 B W 251TRIVAC D 65 B W 251DIP 3 000DIP 8 000DIP 12 000Part No.Part No.Part No.Oil diffusion pumpStandard EUROStandard AmericasSpecial222 10222 10–222 20500 670500 649222 25500 59122225V003Astrotorus baffle227 50227 60227 65Recommended backing pump 3)at operating pressures 10-4 mbar ( 0 75 x 10-4 Torr)at operating pressures 10-4 mbar ( 0 75 x 10-4 Torr)Ordering InformationWater flow monitor500006623500006623500006623Over-temperature protection switch122 84122 84122 84Contact thermometer218 81218 81218 81200 02 958200 02 958200 02 958Resistance thermometer Pt100 sensorPump fluid1)2)3)4)4)see Catalog Part “Oils / Greases / Lubricants LEYBONOL”Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluidThe required quantity of cooling water refers to ΔT 10 C (50 F). The discharge temperature should not exceed 30 C (86 F)Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) from our range of forevacuum pumpsjointly with Roots vacuum pumps (RUVAC) in pump systemsOil must be purchased separately74Leybold Full Line Catalog 2018 - High Vacuum Pumpsleybold
DIP 20 000DIP 30 000DIP 50 000DN630 ISO-F / 100 ISO-K800 ISO-F / 160 ISO-K1000 ISO-F / 160 ISO-Kl/s20 00030 00050 000Technical DataHigh vacuum / forevacuum connectionPumping speed for airbelow 1 x 10-4 mbar1) 10 to 10(0.75 x 10-2 to 0.75 x 10-7) 10 to 10(0.75 x 10-2 to 0.75 x 10-7) 10-2 to 10-7(0.75 x 10-2 to 0.75 x 10-7) 5.0 x 10-7 (3.75 x 10-7) 5.0 x 10-7 (3.75 x 10-7) 5.0 x 10-7 (3.75 x 10-7)Max permissible forevacuum pressurembar (Torr)6.0 x 10-2 (4.5 x 10-2)6.0 x 10-2 (4.5 x 10-2)6.0 x 10-2 (4.5 x 10-2)Pump fluid filling, min / max7.0 / 11.0 (7.4 / 11.6)10.0 / 15.0 (10.6 / 15.9)15.0 / 25.0 (15.9 / 26.4)400 3 Ph Y460 3 Ph Y230 3 Ph Δ400 3 Ph Y460 3 Ph Y230 3 Ph Δ400 3 Ph Y460 3 Ph Y230 3 Ph ΔOperating rangeUltimate total pressurembar(Torr)mbar (Torr)1)l (qts)Mains connectionStandard EURO, 50/60 HzStandard Americas, 50/60 HzSpecial, 50/60 HzVVV-2-7-2-7Reduced power consumption throughpower controller (saves up 30%)kW8.412.616.8Heating powerkW121824121824 25 30 30600 (2.6)60 (0.26)6 (87)900 (4.0)80 (0.35)6 (87)1500 (6.6)150 (0.66)6 (87)233G (BPS)G (BPS)1/2"3/8"1/2"3/8"1/2"3/8"kg (lbs)172 (379)296 (653)560 (1235)SV 200 W 501SV 300 W 1001SV 630 B W 2001TRIVAC D 65 B W 251SV 300 W 251SV 300 W 501DIP 20 000DIP 30 000DIP 50 000Part No.Part No.Part No.222 30V001222 30V002222 30500 88222230V004222 35V001222 35V002222 35500 66522235V006222 40V001222 40V002222 40500 728500 654503 647V001503 647V002503 648V001503 648V002503 649V001503 649V002Number of heating cartridgesHeating up timeminCooling water (minimum)for pump 2)for cold cap bafflemax supply pressurel/h (gal/min)l/h (gal/min)bar (psig)Number of cooling circuits(including cold cap baffle)Cooling water connectionfor pumpfor cold cap baffleWeight, approxRecommended backing pumpat operating pressures 10-4 mbar ( 0 75 x 10-4 Torr)at operating pressures 10-4 mbar ( 0 75 x 10-4 Torr)3)Ordering InformationOil diffusion pumpStandard EURO with control unitStandard Americas with control unitStandard EUROStandard AmericasSpecialRetrofit kit energy control unitRetrofit kit energy control unit USAstrotorus baffle227 70227 75227 80500006623500006623500006623Over-temperature protection switch122 84122 84122 84Contact thermometer218 81218 81218 81200 02 958200 02 958200 02 958Water flow monitorResistance thermometer Pt100 sensorPump fluid1)2)3)4)4)see Catalog Part “Oils / Greases / Lubricants LEYBONOL”Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluidThe required quantity of cooling water refers to ΔT 10 C (50 F). The discharge temperature should not exceed 30 C (86 F)Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) from our range of forevacuum pumpsjointly with Roots vacuum pumps (RUVAC) in pump systemsOil must be purchased separatelyleyboldLeybold Full Line Catalog 2018 - High Vacuum Pumps75
DIJ PumpsWater-CooledThe Leybold oil diffusion pumps areideal for all industrial high vacuumapplications.The DIJ series impresses withinnovative and energy-efficiencyconstruction.Important features are a new heatingconception; variable flange connections; fully equipped with fore line baffleand cold cap baffle; electrical connectvariants and a powerful five stagenozzle system.DIJ 20 with plug (right), DIJ 20 with fuse box (middle) and DIJ 630 with energy saving unit (EER) (right)Advantages to the UserTypical ApplicationsSupplied Equipment- Lowest operation costs by minimized energy consumptionThe diffusion pumps from the DIPrange are used in coating systems,vacuum melting and drying systems aswell as in vacuum furnaces in the areaof metallurgy.All DIJ pumps are shipped from thefactory without pump fluid installed.- Stable throughput in the10-2 to 10-3 mbar range (e.g. forsputtering or steel degassing)- Flexible flange designFlange variants:- ANSI / Inch flanges (with O-ring)- ISO-F or ISO-K flanges(with centering ring)- Highest system uptime- Smart temperature control ensuresminimum load and longest lifetimefor heaters and oil- Unique baffle designIncluded as standard equipment withthe pump are- centering ring with centering star,O-ring and outer ring for the highvacuum flange,- centering ring with insert for forevacuum baffle, O-ring and outer ring forthe forevacuum flange.The high-vacuum and forevacuumflanges are closed with shipping flanges and claws. The insides of the pumpshave been cleaned; they are evacuatedprior to shipment.- Various electrical connection possibilities:- Three different connection variantsavailable incl. energy controlsystem (ECU)- 4 1 stage system design:- The 4 diffusion pump stagesprovide excellent high-vacuumpumping speed- The additional jet-stage ensuresstable throughput at pressures 10-3 mbar76Leybold Full Line Catalog 2018 - High Vacuum Pumpsleybold
0x 18 20x 18 360 3 3 Ø32,563415 15 15 Ø12630 44868Ø19Ø19Ø190,515 15 15 Ø128,530 Ø5501806833 Ø32Ø63515 15 15 Ø550360 5Ø584422Ø5569711111197Ø30Ø30Ø550Ø128,533 Ø190,533 30 Dimensional drawings for DIJ 20 with plug, (left), DIJ 20 with ESU (middle) and DIJ 630 with junction box (EER) (right)1200030l/smbar x l/s258000600020Pumping speed NitrogenPumping speed ArgonThroughput NitrogenThroughput Argon1540001020005010-710-610-510-410-3Inlet pressureThroughputPumping speed10000010-110-2mbarPumping speed overview for nitrogen and argonleyboldLeybold Full Line Catalog 2018 - High Vacuum Pumps77
Technical DataDIJ 10 DIJ 320 DIJ 16 DIJ 500 DIJ 20 DIJ 630 DIJ 35 DIJ 1000High vacuum connectionDN10" ANSI 320 ISO-K16"ANSI500 ISO-K 20" ANSI 630 ISO-K 35" ANSI 1000 ISO-FForevacuum connectionDN2" ANSI3"ANSI100 ISO-KPumping speed 1) forNitrogen 10-4 mbar2 800Working rangeUltimate total pressure2)Max permissibleforevacuum pressure6 800160 ISO-K6" ANSI200 ISO-K10 80028 000 10-2 to 10-7 10-2 to 10-7 10-2 to 10-7 10-2 to 10-7mbar 5 x 10 5 x 10 5 x 10 5 x 10-7mbar5 x 10-15 x 10-15 x 10-15 x 10-1Mains voltagedepending on variant, 50 / 60 HzHeating powerWarm up periodCoolant (minimum) 2)for the pumpfor the cold cap baffleWeight, approx-7-7l1.0 / 1.41.7 / 3.45.0 / 7.012.0 / 18.01 230 /N/PE1 230 /N/PE3 400 /N/PE3 460 /N/PE3 400 /N/PE3 460 /N/PE3 400 /N/PE3 460 /N/PEkW2.43.610.821.623918min 25 25 25 30I/hI/h1602029050600801 0208720SV 100 B & W 501-SV 200 & W 501DV 450 & W 501SV 300 B & W 1001DV 450 & W 1001SV 630 B & W 2001DV 650 & W 2001D 25 BECODRY plus 60D 65 B & W 251ECODRY plus 60 & W 251SV 100 B & W 501-SV 300 B & W 1001DV 450 & W 1001TRIVAC D 25 BTRIVAC D 40 BTRIVAC D 65 BTRIVAC D 65
LEYBONOL Oils LVO 500 n n n n n n n n n n n LVO 510 l l l l l l l l l l l LVO 520 l l l l l l l l l l l LVO 530 l l l l l l l l l l l LVO 540 n n n n Standard l Possible Note All oils may be used. The pumps are supplied as standard without oil. The table only lists ge
Viking Gear Pumps Finish Thompson Drum & Centrifugal Pumps Micropump Gear Pumps Hydra-Cell High Pressure Diaphragm Pumps Ismatec Peristaltic Pumps Liqui o Gear Pumps Codip Air Operated PTFE Diaphragm Pumps HNP Gear Pumps M Pumps, Centrifugal, Turbine and Vane Pumps Fluid Metering Piston Pumps.
CRANE DEMING HAYWARD TYLER PYLES WILSON SNYDER . DURCO IMO SIMS ZOELLER TYPES OF PUMPS REPAIRED BY KENNEDY INDUSTRIES, INC.: Boiler Feed Pumps Piston Pumps Horizontal Split Case Pumps Submersible Pumps Vertical Turbine Pumps End Suction Pumps Circulating Pumps Sewage Pumps Vacuum Pumps Amine Pumps Slurry and Abrasive .
Roots Vacuum Pumps leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 285 Central Vacuum Supply Systems Large Roots vacuum pumps, usually in connection with single-stage rotary vane vacuum pumps serve several consumers of vacuum (packaging machines, for example) at the same time. The pressure can be controlled in a
series. Rugged and efficient, these vacuum pumps fit perfectly in smaller applications that require lower volume flows but also require the long-life characteristics of Quincy rotary screw vacuum pumps. HIGH VACUUM CAPABILITY The powerful QSVB vacuum pumps are capable of attaining base vacuum levels of 29.9" HgV (0.5 torr).
Oilgear engineers will be there, ready to help you with the education, field service, parts and repairs . Table of Contents Pvm Pumps page 3 PvWJ Pumps page page4 PvWh Pumps page page5 PvWW Pumps page 6 PvWc Pumps page page7 Pvg Pumps page 8 PvK Pumps page page9 Pvv Pumps page 10 PfBA Pumps page 11 PfBK Pumps 12 . 130 7.94 130,2 1500 103,4 .
Tuthill Vacuum & Blower Systems, manufacturer of Kinney vacuum pumps and M-D Pneumatics blowers & vacuum boosters, is a leader in the design and manufacture of high performance, reliable positive displacement blowers, mechanical vacuum pumps, vacuum boosters and engineered systems ready to install and run. Tuthill Vacuum & Blower Systems offers customers
5 Fisher Scientifi c Vacuum Pumps Two Stage Rotary Vane Vacuum Pumps Type Cat. No. Cat. No. Cat. No. Cat. No. Cat. No. Rotary Vane Vacuum Pump 100-120 V/200-240 V 50/60 Hz FB654591 FB654601 FB654611 FB654641 Rotary Vane Vacuum Pump 230 V 50/60 Hz FB65458² Rotary Vane Vacuum Pump 115 V 50/60 Hz FB65458A² Maintenance kit 302012-1 302075 302076 302077 302079 .
Vacuum Pumps 2-710 CFM 15-10,000 CFM DKR_1041_08/2014_REV. 1 Large Capacity Liquid Ring Vacuum Pumps 1,500 to 39,000 CFM Large Capacity Conical Liquid Ring Vacuum Pumps 1,000 to 22,000 CFM Call DEKKER: The Experts in Vacuum Solutions at 888-925-5444 for application expertise. ISO9001 2015 CERTIFIED ISO9001 2015 CERTIFIED
