Roots Vacuum Pumps (Stand 06 - LEYBONOL
230.00.02Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog 2013Catalog Part Roots Vacuum PumpsEdition 2013Roots Vacuum PumpsRUVAC
2Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013leybold
ContentsRoots Vacuum PumpsGeneralApplications and Accessories for RUVAC Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4Oil for RUVAC pumps, for different fields of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5Oil for RUVAC pumps, for different pump types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6General Information on Roots Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7Types. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11ProductsRUVAC WA/WAURoots Vacuum Pumps with Air-Cooled Flange-Mounted Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14RUVAC WS/WSURoots Vacuum Pumps with Air-Cooled Canned Motors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20RUVAC WH/WHURoots Vacuum Pumps with Water-Cooled Hermetically Sealed Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26RUVAC WSLFRoots Vacuum Pumps for Laser Gas Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34AccessoriesPressure Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36Temperature Sensor Pt100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36MiscellaneousServices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38leyboldOerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 20133
GeneralRootPu s Vamcps uumWA/WW AUA/W 25W AU 1S/ (HW)W SU 501S/2W5 2SU 1 0Applications and Accessoriesfor RUVAC PumpsApplicationsSemiconductor production Vacuum coating Large scale research Chemistry/Pharmaceutical Metallurgy/Furnaces Lamps and tubes manufacturing Laser engineering Packaging Central vacuum supply systems Freeze drying Leak testing systemsElectrical engineering High purity gases/closed refrigerant cycles Mechanical engineering Automotive industry AccessoriesPageFrequency converters13 Pressure switches36 Temperature sensor Pt1001)436 1)For ATEX pumps onlyOerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013leybold
SemiVa concu duRe um ctose co r par atrCh ch ing oductem aniodnM istr deetyall /P velhouLa rg arpm y/ ma meps Fuce ntrLa anuse nd ac ticPa r te tub es alck ch esnaCe gin olo magy nunt gfarctFr al vuree ainze cuguLedr mak yisng uptEl esplec tinysytrgstHi ica syemlsghen tesmgpM ur ine sac ityha g erinAu n as gto ica esm l e /cot n loive gin sein ee d redu rin frst g igeryrantcApplicationsyclesOil for RUVAC Pumpsfor different fields of applicationLEYBONOL OilsLVO 100 LVO 210 LVO 220LVO 400 Standard Possible Please contact Oerlikon Leybold VacuumThe table only lists general applications. Your specific requirements might be subject to deeper analysis. For further questions, please contact our technical Sales support.For information on oil specifications please refer to Catalog Part“Oils / Greases / Lubricants LEYBONOL ”.leyboldOerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 20135
25WA/WAU(WA/WAUpsPum01WOil for RUVAC pumps for different pump typesLEYBONOL OilsLVO 100 LVO 210 LVO 220LVO 400 Standard Possible Please contact Oerlikon Leybold VacuumThe table only lists general applications. Your specific requirements might be subject to deeper analysis. For furtherquestions, please contact our technical Sales support.For information on oil specifications please refer to Catalog Part“Oils / Greases / Lubricants LEYBONOL ”.6Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013leybold
General Information on Roots Vacuum PumpsApplicationsFor many years now Roots vacuumpumps have been well established inthe area of vacuum technology.In combination with backing pumps,which compress against the atmosphere, these pumps offer the followingadvantages:10 -310 -210 -110 010 1Pumping speed1000m 3 x h-1600Shifting the OperatingPressure into the HighVacuum RangeTorr7505002,3400cfm2200100210 -310 23410014 6810 -210 -110 010 1Pressure10 2 mbar 10 31 Pumping speed ofthe backing pump2 Pumping speed ofthe Roots pumpsystem without pressure equalization line3 Pumping speed ofthe Roots pumpsystem with pressureequalization line4 Pumping speedgained by the pressure equalization lineComparison of pumping speed characteristics with and without pressure equalization lineAs a rule of the thumb one may saythat Roots vacuum pumps are capableof improving the attainable ultimatepressure of a pump system by a factorof 10. With two Roots vacuum pumpstages and a corresponding backingpump it is possible to attain pressuresin the range down to 10-5 mbar(0.75 x 10-5 Torr). Under certaincircumstances this will make the use ofadditional high vacuum pumps (turbomolecular pumps or diffusion pumps)unnecessary.Multiplied Pumping SpeedPump system with WH 7000 Roots vacuum pump and SOGEVAC SV 630 B rotary vane vacuum pumpDue to the non-contact rotation of theimpellers, Roots vacuum pumps areable to run at higher speeds. Thus ahigh pumping speed is obtained with arelatively small size pump. Pumpingspeeds in excess of 1500 m3/h(589 cfm) can only be attained withRoots vacuum pumps.When selecting the right kind ofbacking pump (sizing) it will bepossible to pump large quantities ofgas in connection with smaller backingpumps. Energy consumption of such apump system is much less comparedto a single backing pump offering thesame pumping speed.leyboldThe use of Roots vacuum pumps inthe area of vacuum technology hasresulted in further specializations andimprovements:- Through an integrated bypass (pressure equalization line) it is also possible to utilize the pumping speed ofthe Roots vacuum pump at highpressures and large quantities ofgas at an early stage. This reducesthe pumpdown time especially forcyclic operation (see figure “Comparison of pumping speed characteristics with and without pressureequalization line”).Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013- High-purity gases or hazardousgases impose strict requirements onthe leak-tightness of the system.Canned motors from the WS line orcanned motors from the WH line arehermetically sealed. There are noseals in contact with the atmosphere which might be subject towear. This prevents leaks and failures due to oil leaks. A service lifeof over 20,000 hours without maintenance is quite common.7
- Tolerances and the quality of thebalancing combined with forcefedlubricated bearings and toothedgears permit high speeds and theuse of frequency converters. Thus itis possible to attain a high pumpingspeed while the process is in progress and to reduce the speedwhen the process has beenstopped or while changing thebatch. This results in a lower consumption of energy and a longerservice life with uncompromisedreliability.- Conversion from vertical to horizontal flow is easily implementedand can be performed at the placewhere the pump has been installed.Thus the pump can be adaptedmore closely to the operating conditions of your system.These characteristics make the Rootsvacuum pump attractive for almost allrough and medium vacuum applications.Semiconductor Technology(RUVAC WH and WS)In the area of semiconductor technology, Roots vacuum pumps are foundin etching processes among others,and in use with dry compressingbacking pumps.The pumping speed of the combination of backing pumps amounts to200 to 500 m3/h (118 to 295 cfm)and it ensures a cut-in pressure of10-1 mbar (0.75 x 10-1 Torr) for theturbomolecular pump. In the process,corrosive gases need to be pumpedtogether with a high particle count.Owing to the usage of media whichpresent a health hazard, hermeticallysealed pump versions are used. Due tothe LVO 400 lubricant filling in the gear,a high degree of media resistance,long service intervals a high reliabilityand thus very low costs of ownershipare attained.For use in clean rooms, Roots vacuumpumps with a water cooled motorwithout a motor fan are used.This type of motor reduces the quantity of heat dissipated to the surroundings to a minimum.Lately, a further characteristic is gainingprominence: Roots vacuum pumps arecapable of compressing the media inthe pump chamber without the presence of any further media. This mostlyavoids interaction between differentmedia in the pump itself and also inthe connected vacuum chamber.Therefore- the medium which is pumped is notcontaminated with lubricants orsealants; complex accessories (exhaust filters, separators, etc.) arenot needed;- the lubricant in the side chambers ishardly affected, so that service life isnot reduced;- backstreaming of oil from thebacking pump into the connectedvacuum chamber is prevented.Pump system with WH 7000 Roots vacuum pump and SOGEVAC SV 630 B rotary vane vacuum pumpPump system consisting of RUVAC WH 4400and SOGEVAC SV 630 B8Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013leybold
Central Vacuum SupplySystemsLarge Roots vacuum pumps, usually inconnection with single-stage rotaryvane vacuum pumps serve severalconsumers of vacuum (packagingmachines, for example) at the sametime.The pressure can be controlled in ahighly flexible manner through thespeed controller of the Roots pump,which allows for a flexible adaptation ofthe pumping speed. In the case of theRUVAC WH and WS types a significantly higher pumping speed can alsobe attained by means of a frequencyconverter compared to operation offthe normal mains power.SolarIn the solar industry, Roots vacuumpumps can be found in almost all production steps. In connection with theCzochralski process or at DSS furnaces for the manufacture of siliconcrystals, Roots vacuum pumps aredeployed to rapidly attain the demanded conditioning pressure. In connection with the various coating processesthey ensure the necessary pumpingspeed at process pressure and veryfast cycles at the load lock chambers.In connection with lamination processes for the modules they assist inpumping down the laminators quicklyand ensure a high pumping speed atlamination pressure.leyboldOwing to the high production pressure,very much is demanded as to the reliability of the pumps during all processsteps and this despite of reducedmaintenance and service complexity.Process IndustryTypical process industry applicationsare highly demanding regarding theruggedness of Roots pumps. Theseneed not only to pump clean mediabut must also be suited for pumpingdusty or vapor containing media withinan industrial environment.Here a high level of ruggedness isdemanded at a good price-to-performance ratio.Whether during metallurgical processing or heat treatment of metals, inconnection with drying processes, theplasma treatment of surfaces or invacuum packaging processes – everywhere Roots pumps from the differentRUVAC lines can excel. They permit arapid pump down and offer a highpumping speed at process pressure. Incombination with a frequency converter, extremely high pumping speedsare possible with a small footprint.Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013Laser Systems (WSLF 1001)Continuous circulation of the gas inorder to remove heat from a closedcycle in which pressure differentials ofup to 100 mbar (75 Torr) must bemaintained. The high cleanness requirements necessitate an absolutefreedom from oil and particles. This isensured through a reduced pressurelevel within the oil-filled gear chambersas well as a nickel coated pumpchamber. Assembly and testing is rununder clean room conditions.The canned motor ensures a highdegree of leak-tightness to the outsideand permits operation in connectionwith a frequency converter.Pump system consisting of RUVAC WAU 2001and SOGEVAC SV 630 B9
Operating PrincipleRoots vacuum pumps, which are alsocalled Roots blowers, are rotary plunger type pumps where two symmetrically shaped impellors rotate in opposite directions inside the pumphousing.The figure-of-eight rotors are synchronized by a gear which ensures that theimpellors are counter-rotating in such away, that they are near to one anotherand to the housing without actual contacting.In rotor positions I and II (see figure“Operational diagram of a single-stageRoots vacuum pump (with verticalpumping action)”) the volume of theintake is increased. As the rotors turnfurther to position III a part of the volume is cut off from the intake side.In position IV this volume is opened tothe exhaust side and gas under forevacuum pressure (higher than theintake pressure) flows in. This gascompresses the gas coming from theintake. As the rotors turn further thecompressed gas is ejected through theexhaust flange.This process repeats itself twice foreach rotor per full turn.As the rotors do not come into contactwith the pump’s housing Rootsvacuum pumps may be operated athigh speeds. Thus a high pumpingspeed is obtained from comparablysmall pumps.10Operational diagram of a single-stage Roots vacuum pump (with vertical pumping action)The pressure difference and the compression ratio between intake and exhaust is limited in Roots vacuumpumps.In practice the maximum attainablepressure difference is of significanceonly in the rough vacuum range(p 10 mbar (p 7.5 Torr)) where-asin the medium vacuum range(p 1 mbar (p 0.75 Torr)) the attainable compression ratio is of importance.Roots vacuum pumps from OerlikonLeybold Vacuum have been designedto specially meet the requirements ofthe fine vacuum range. They are normally used in connection with backingpumps or in closed gas cycles (WSLFseries).DesignThe pump chamber of Roots vacuumpumps is free of any sealing agents orlubricants. Only the toothed wheels ofthe synchronous gear are lubricatedwith oil. Toothed gear wheels andbearings of the RUVAC are placed intwo side chambers which also containthe oil reservoir. These two side chambers are separated from the pumpchamber by piston ring seals.Suitably designed oil supply systems inboth chambers ensure that a sufficientquantity of oil is supplied to the gearwheels and bearings at all permissiblespeeds.Almost all RUVAC Roots vacuumpumps are designed for a horizontaland vertical pumping action.Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013leybold
TypesVarious types of Roots vacuum pumpshave been developed to ensure optimum adaptation to the widely varyingapplications for this type of pump.- Flange mounted motorThe drive shaft of the pump is directly connected to an electricmotor via a flexible coupling. Therequired seal of the drive shaftagainst atmospheric pressure isobtained by oiled shaft seals.- Canned motorIn the canned motor, rotor andstator pack are separated by avacuum-tight can made of a nonmagnetic material. The rotor operates on the drive shaft of the pumpin the vacuum, so that a shaft sealwhich would be subject to wear isnot required.- Hermetically sealed motorThe hermetically sealed motor is thelatest technology step for Rootsvacuum pumps. It integrates thecomplete motor assembly into thevacuum reaching the same efficiency as a standard flange mountedmotor without the need of a shaftseal. The hermetically sealed motoris the most compact, efficient andreliable motor technology availablefor roots pumps.- Pressure equalization lineThe integrated pressure equalisationline connects the exhaust flange tothe intake flange by means of a differential pressure valve.In the event of an excessively highpressure difference between theleyboldflanges, the valve will open. Then apart of the pumped gas will flowthrough this line back to the intakeflange.Therefore the pump may beswitched on together with thebacking pump at atmospheric pressure. This increases the pumpingspeed of the pump combinationalso at high intake pressures.- Special ACE vibration absorberThese pumps are best used in applications involving frequent pumpdown cycles. The vibration absorberis of an oil sealed or filled designwhere minute amounts of oil mayenter the vacuum system via thepiston of the vibration attenuator.RUVAC WA/WAU, WS/WSUThe series WA/WAU Roots vacuumpumps are provided with directlyflange-mounted air-cooled standardthree-phase motors. The oiled radialsealing rings of the RUVAC WA/WAUfor sealing the shaft against the atmosphere are made of FPM (FKM) (fluorpolymer).The WS/WSU series pumps have a aircooled hermetically canned motor.Roots vacuum pumps of the seriesWAU/WSU/WHU are provided with anadditional integrated pressure equalization line and a differential pressurevalve.Pumps from these series are suppliedwith a vertical pumping action as standard.Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013RUVAC WH/WHUThe series WH/WHU pumps are technological leaders in the area of Rootsvacuum pumps.Both motors and oil reservoirs arewater cooled thereby perfectly balancing the internal temperature management of the pumps resulting in significantly lower oil temperatures and thusa longer oil service life. At ultimatepressure, emissions are reduced byapproximately 50% and the motor coilscan sustain higher loads while at thesame time offering improved efficiency.The new drive concept with pottedmotors replaces the can for hermetically sealed drives. This improves efficiency even further whereby themotors are capable of complying withthe IE2 requirements of the new efficiency standard without problems.In order to increase pumping speedthereby cutting pumpdown times, optionally available specially parameterized frequency converters can beused.Moreover, the pump may be operatedat its maximum power already at atmospheric pressure.Especially for short cycles the newWHU pump is being equipped withimproved valve technology. Due to thebypass line, this pump can be operated starting at atmospheric pressure.The bypass valve already closes at avery early stage, whereby the cycletimes can be significantly reduced.Pumps from the WHU series shouldnot be operated over longer periods oftime at high pressures.11
Using the RUVAC WS andRUVAC WH in combinationwith a frequency converterSimulation of a pressure equalization lineThe available frequency convertershave been matched to the pump sothat the possibility of mechanicallyoverloading it is excluded. In the caseof a pressure difference which is toohigh, the rotational speed of the pumpis automatically reduced until its loaddrops in to the permissible range.Operation at any rotational speedsThe frequency converter can be usedto adjust the pumping speed of theRoots pump during operation. Thisallows maximum flexibility to find theright setup for any application.Increasing the pumping speedThe pumps were developed to handlea maximum rotational speed between4200 rpm and 7200 rpm dependingon the respective pump size.Therefore the use of a frequency converter permits an increase in the nominal pumping speed of up to 140%.NotePlease enquire about possibly existingusage limits (process dependent).RUVAC WSLFBacking PumpsThe pumps of these series are especially adapted Roots vacuum pumpsfrom the RUVAC WS series which areintended for operation with gas lasers.The backing pumps from OerlikonLeybold Vacuum listed in the followingare recommended for connection tothe RUVAC Roots vacuum pumps:They are driven by a canned motor sothat a shaft seal for sealing against atmospheric pressure is not required.- Rotary vane vacuum pumps- TRIVAC B with pumping speedsbetween 16 and 65 m3 x h-1(9.4 and 38.3 cfm)Air-cooled series with nominal pumpingspeeds of 1000 m3 x h-1 (589 cfm) areavailable.The RUVAC WSLF series with increased motor ratings is intended foroperation in connection with frequencyconverters.These pumps are available with nickelplated or plasma-nitrated surface asstandard.All pumps of these series are suppliedwith a horizontal pumping action.Vertical pumping action is availableupon request.- Rotary vane vacuum pumps- SOGEVAC with pumping speedsbetween 16 and 1200 m3 x h-1(9.4 and 707 cfm)- Dry compressing screw vacuumpumps- SCREWLINE SP 250 and SP 630with pumping speed of 250 and630 m3 x h-1 (147.3 and 371 cfm)- Dry compressing screw vacuumpumps- DRYVAC with pumping speed of450 to 3800 m3 x h-1 (265 and2238 cfm)- directly adaptable- smallest system- smart control- Rotary piston vacuum pumps- E and DK with pumping speedsbetween 200 and 250 m3 x h-1(117.8 and 147.3 cfm)Schematic section through a RUVAC WA/WS (left) and a RUVAC WAU/WSU (right)12Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013leybold
Frequency ConverterRUVATRONIC RT 5AccessoriesFrequency Converter V1000The electronic frequency convertersRUVATRONIC RT 5/251 to 5/16000have been designed specially for use inconnection with Oerlikon LeyboldVacuum Roots pumps of the RUVACWA and WS series.A frequency converter was speciallydeveloped for the WH series whichperfectly matches the requirements ofvacuum engineering applications.Owing to the flexible current limiting,the maximum pumping speed is available within the high pressure rangewhereas in the lower pressure rangesthe current limit is reduced correspondingly so as to best protect thepump against thermal overloads.The main characteristics of theRUVATRONIC RT 5 are:Simulation of a pressureequalisation lineThis combination of power and protection can only be attained through ourspecially developed frequency converter.High motor torque- maximumdifferential pressureLow motor torque- thermal protectionof boosterIn connection with this kind of operation, the minimum pumping speed ofthe backing pump needs to be observed.dizemsto itcu imV nt lOL rrecuCurrent limit“Plug and play operation” allows forsimple installation. The frequency converters are set up in the factory so thatthey only need to be connected foroptimised pump operation. It is notnecessary to set up any additionalparameters, and no further expertknow-how is required.The software of the frequency converters is adapted to each pump andensures that the risk of mechanicallyoverloading the pump can be excluded. In the case of too high pressuredifferences, the rotational speed will bedecreased automatically until the loadis reduced to within the pump’s limits.RUVAC Roots vacuum pumps of thetypes WA and WS (without pressureequalisation line) can be switched ontogether with the forepump at atmospheric pressure. Through this, thepumpdown time can be reduced drastically. The minimum pumping speedof the backing pump needs to be considered in this case.Standard VFD fixedcurrent limitBooster frequencyPumpRequired pumpingspeed for the backingpumpWA/WS 0251WA/WS 0501WA/WS 1001WA/WS 2001WH 700/702WH/WHU 2500WH/WHU 4400WH/WHU 700000500100020004100140043008801200Flexible motor current limit V fm)cfm)Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013Operation at up to 3 predefinedspeedsVia floating contacts, the pump canbe operated at one of the 3 predefinedspeeds. Switching over to another predefined speed is possible during operation.Operation at any rotational speedWith a 0 to 10 V signal, any speed canbe predefined to operate the pumpbetween the minimum and maximumrotational speed. The software reliablyensures that the rotational speed cannot drop below the minimum speed orexceed the maximum speed.Increase in the pumping speedBy operating the Roots vacuumpumps at frequencies over 50 Hz,the nominal pumping speed of thepumps can be increased. Dependingon the type of pump, an increase between 20 and 100% is possible.NotePlease enquire about possible application limitations (process dependent).Dust Separators andDust FiltersVacuum processes with a high particlecount or involving significant quantitiesof dust require special measures forprotecting the vacuum pumps.Dust separators and dust filters can befound in the Catalog Part “VacuumPump Systems”, Chapter “Accessoriesfor oil sealed and dry compressingvacuum pumps”.13
ProductsRUVAC WA/WAU 251 to 2001Roots Vacuum Pumpswith Air-Cooled Flange-Mounted MotorsRUVAC WAU 2001 single-stage Roots vacuum pump, depicted with a DN 160 ISO-K collar flangeAdvantages to the UserTypical ApplicationsSupplied Equipment- Two air-cooled lines WA/WAU, eachwith four pump sizes- For oil-free compression of gasesand vapors in combination with abacking pump- RUVAC WA/WAU are supplied asstandard for a vertical pumpingaction, horizontal pumping actionupon request- Motors of efficiency class IE 2- Reliable and trouble-free- Sealing rings with their housing canbe readily replaced- Shaft seals and elastomer sealsmade of FPM (FKM)/Viton- Easy to exchange with custommotors- Short cycle pumping processes alsoin the presence of large quantities ofgas and vapor- Mineral oil LVO 100 is used asstandard- Gasket in the intake flange with dirtsieve- The required lubricant filling is included in separate bottles- Integrated pressure equalization linefor protection against overloading athigh pressures on WAU models- Conversion from vertical to horizontal pumping action can be donefrom the side of the customer- All WA(U) pumps comply as standard with ATEX Cat. 3i- Depending on requirements, motorsfrom different ATEX categories canbe fitted14Oerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 2013leybold
b8DNa4h2h7a1a2TypeWA/WAU 251WA/WAU 501WA/WAU 501HWA/WAU 1001WA/WAU 1001HWA/WAU 2001WA/WAU 2001HWA/WAU 251WA/WAU 501WA/WAU 501HWA/WAU 1001WA/WAU 1001HWA/WAU 2001WA/WAU 2001HWA/WAU 251WA/WAU 501WA/WAU 501HWA/WAU 1001WA/WAU 1001HWA/WAU 2001WA/WAU min.mmin.mmin.mmin.h3da3a63 27550.20127550.2063 ISO-K63 ISO-K100 ISO-K100 ISO-K160 ISO-K160 ISO-Kh5h4hh1a5DNDNb9b6DNb2bb 1b 6 6b7 2)b8b9d27010.6329911 7729911 7735213 12 3233012 42416.6952320.5953020.871)This dimension “a” relates to pumps with the IEC motor used as standard by Oerlikon Leybold VacuumDN1 ND 6 pump flange in accordance with DIN 25012)For RUVAC WAU onlyDN1 Collar flange with gasket for connecting ISO-K standard componentsOutside dimensions 3 mm (0.12 in.)Dimensional drawing for the RUVAC WA/WAU(H) pumpsleyboldOerlikon Leybold VacuumCatalog Part Roots Vacuum Pumps, Edition 201315
Technical DataNominal pumping speedWA/WAU 2511)Max. effective pumping speedwith backing pumpUltimate total pressure 2)m3WA/WAU(H) 50150 Hz60 Hz50 Hz60 Hz(cfm)253.0 (149.0)304.0 (179.0)505.0 (297.4)606.0 (357.0)(cfm)TRIVACSOGEVAC210.0 (123.7)D 65 B–251.0 (148.0)D 65 B–410.0 (241.0)–SV 200530.0 (312.0)–SV 200xm3h-1xh-1mbar (Torr) 8 x 10-4 ( 6 x 10-4) 8 x 10-4 ( 6 x 10-4) 4 x 10-2 ( 3 x 10-2) 4 x 10-2 ( 3 x 10-2)Max. permissible pressure differenceduring continuous operation 3) mbar (Torr)80.0 (60.0)80.0 (60.0)80.0 (60.0)80.0 (60.0)mbar x l x s-110-410-410-4 5 x 10-4Leak rate, integralMains supplyVVThermal classPermissible ambient temperaturesMotor power C( F)kW (hp)Energy efficiency class 5x 5x 0380-480FFFF 5 to 40( 41 to 104) 5 to 40( 41 to 104) 5 to 40( 41 to 104) 5 to 40( 41 to 104)1.1 (1.5)1.1 (1.5)2.2 (3.0)2.2 (3.0)IE 2IE 2IE 2IE 2Nominal speed, approx.rpm3000360030003600Max. permissible speedrpm360036003600360055555555ATEX protection category 4)Category 3iCategory 3iCategory 3iCategory 3iLubricant for the bearing chamber 5)vertical pumping action, approx.l (qt)horizontal pumping action, approx. l (qt)0.6 (0.63)0.45 (0.48)0.6 (0.63)0.45 (0.48)0.8 (0.85)0.7 (0.74)0.8 (0.85)0.7 (0.74)Lubricant of the shaft sealingring housingl (qt)0.6 (0.63)0.6 (0.63)1.0 (1.06)1.0 (1.06)DN63 ISO-K63 ISO-K63 ISO-K63 ISO-KC steel, CrNi steel,grey cast iron,FPM (FKM)C steel, CrNi steel,grey cast iron,FPM (FKM)C steel, CrNi steel,grey cast iron,FPM (FKM)C steel, CrNi steel,grey cast iron,FPM (FKM)
LVO 100 LVO 210 LVO 220 LVO 400 Standard Possible Please contact Oerlikon Leybold Vacuum The table only lists general applications. Your specific requirements might be subject to deeper analysis. For further questions, please contact our technical Sales support. Pumps 251 501-2001 W W 7
Roots Vacuum Pumps leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 285 Central Vacuum Supply Systems Large Roots vacuum pumps, usually in connection with single-stage rotary vane vacuum pumps serve several consumers of vacuum (packaging machines, for example) at the same time. The pressure can be controlled in a
CRANE DEMING HAYWARD TYLER PYLES WILSON SNYDER . DURCO IMO SIMS ZOELLER TYPES OF PUMPS REPAIRED BY KENNEDY INDUSTRIES, INC.: Boiler Feed Pumps Piston Pumps Horizontal Split Case Pumps Submersible Pumps Vertical Turbine Pumps End Suction Pumps Circulating Pumps Sewage Pumps Vacuum Pumps Amine Pumps Slurry and Abrasive .
Viking Gear Pumps Finish Thompson Drum & Centrifugal Pumps Micropump Gear Pumps Hydra-Cell High Pressure Diaphragm Pumps Ismatec Peristaltic Pumps Liqui o Gear Pumps Codip Air Operated PTFE Diaphragm Pumps HNP Gear Pumps M Pumps, Centrifugal, Turbine and Vane Pumps Fluid Metering Piston Pumps.
series. Rugged and efficient, these vacuum pumps fit perfectly in smaller applications that require lower volume flows but also require the long-life characteristics of Quincy rotary screw vacuum pumps. HIGH VACUUM CAPABILITY The powerful QSVB vacuum pumps are capable of attaining base vacuum levels of 29.9" HgV (0.5 torr).
Oilgear engineers will be there, ready to help you with the education, field service, parts and repairs . Table of Contents Pvm Pumps page 3 PvWJ Pumps page page4 PvWh Pumps page page5 PvWW Pumps page 6 PvWc Pumps page page7 Pvg Pumps page 8 PvK Pumps page page9 Pvv Pumps page 10 PfBA Pumps page 11 PfBK Pumps 12 . 130 7.94 130,2 1500 103,4 .
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5 Fisher Scientifi c Vacuum Pumps Two Stage Rotary Vane Vacuum Pumps Type Cat. No. Cat. No. Cat. No. Cat. No. Cat. No. Rotary Vane Vacuum Pump 100-120 V/200-240 V 50/60 Hz FB654591 FB654601 FB654611 FB654641 Rotary Vane Vacuum Pump 230 V 50/60 Hz FB65458² Rotary Vane Vacuum Pump 115 V 50/60 Hz FB65458A² Maintenance kit 302012-1 302075 302076 302077 302079 .
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