Systematic Investigation Of Mid-T Furnace Baking For High .
Systematic Investigation of Mid-TFurnace Baking for High-Q Performance2021 International Conference on RF Superconductivity (SRF'21)2021/07/02Hayato Ito 1, Hayato Araki 1, Kotaro Takahashi 2, Kensei Umemori 1, 21 KEK2 SOKENDAI
Outline Mid-T furnace baking method RF measurement results Q-E curve RBCS Rres Sensitivity ΔF during warm-up Summaryhayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance2
10610118 10107 10106 10101055 10104 10103 1010X-ray [µSv/h]Q0Mid-T furnace baking method1041032 1010102120C 48h baking (R-9 15th VT)102/0 N-dope (R-8 11th VT)1010300C 3h furnace baking (R-8 13th VT)8 10997 106 10901510152025303510 140Eacc [MV/m]We can achieve high-Q value with asimpler process by furnace baking.hayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance3
Furnace baking at KEKlight EP Refresh inner surfaceHPRFurnace baking 200-800 C, 3hHPRcleanroom assemblyrf test No bakingExposure to air and waterhayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance4
Furnace baking at KEKlight EPHPRFurnace baking Refresh inner surfacecleanroom assemblyHPR 200-800 C, 3hrf test No bakingExposure to air and water1.0E-061.0E-06300C 3 h furnace baking (R-8) 2020/12/07Mass 2Mass 18Mass 32Mass 44Pressure [Pa]1.E-06Mass 4Mass 28Mass 40Control temperature e [ ]1.E-05①2020/12/7 ss 211213118 2841445161718191③2020/12/7 15:551001.E-1112/7 10:3012/7 13:3012/7 16:30①12/7 19:30012/7 22:301.0E-081.0E-091hayato Ito, 2021/07/02111213141512020/12/7 81 Main components:mass 2, 18, 28, 44 Very small signalsfor higher masses91Systematic Investigation of Mid-T Furnace Baking for High-Q Performance5
Setup of RF measurement Magnetic field is reduced to lowerthan 1 mG by magnetic shield andsolenoid coilHeater Flux expulsion is performed tominimize the flux trappingFlux gate sensorTemperaturesensor(Equator andbeamtube)hayato Ito, 2021/07/02Solenoid coil RF test was performed to single cellcavity which was furnace baked withthe following parameters;200, 250, 300, 350, 400, 500, 600,800 C for 3hSystematic Investigation of Mid-T Furnace Baking for High-Q Performance6
1061011105 104 101010Standard recipe3 10105X-ray [µSv/h]Q0Comparison of Q-E curveCavity temperature during measurement 120 600 C baking at 2.0 K (2.00 2.01 K) 800 C baking at 2.1 K (2.07K)1042 101010120C 48h baking (R-9 15th VT)10103200 C baking200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)102300C 3h baking (R-4 10th VT)Standard recipe (120 C 48 h), 200 C 3 h 200 C baked cavity follows the standard recipe (120 C 48h) Q-E behavior at low Eacc is slightly different300C 3h baking (R-8 13th VT)5 10994 103 109350C 3h baking (R-4 13th VT)400C 3h baking (TE1AES018 7th VT)10500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)800C 3h baking (R-8c 5th VT)2 109Radiation of 300C 3h baking (R-4)1Radiation of 350C 3h bakingRadiation of 400C 3h bakingRadiation of 500C 3h baking0510152025303510 140Eacc [MV/m]hayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance7
1011106300 C baking10105 104 10103 10102 1010104400 C baking350 C baking120C 48h baking (R-9 15th VT)10105200C 3h baking (R-4 11th VT)X-ray [µSv/h]Q0Comparison of Q-E curveCavity temperature during measurement 120 600 C baking at 2.0 K (2.00 2.01 K) 800 C baking at 2.1 K (2.07K)250 400 C 3 h Extremely high Q value and anti-Q slope are observed Highest Q value at 2.0 K is 5E10 for 300 C baked cavity Magnetic field was trapped before 2 K measurement of350 C baked cavity - Q value is Essentially a bit higher103250 C baking250C 3h baking (R-4 16th VT)102300C 3h baking (R-4 10th VT)300C 3h baking (R-8 13th VT)5 10994 103 109350C 3h baking (R-4 13th VT)400C 3h baking (TE1AES018 7th VT)10500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)800C 3h baking (R-8c 5th VT)2 109Radiation of 300C 3h baking (R-4)1Radiation of 350C 3h bakingRadiation of 400C 3h bakingRadiation of 500C 3h baking0510152025303510 140Eacc [MV/m]hayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance8
106101110105 104 1010500 C baking5800 C baking3 1010X-ray [µSv/h]Q0Comparison of Q-E curveCavity temperature during measurement 120 600 C baking at 2.0 K (2.00 2.01 K) 800 C baking at 2.1 K (2.07K)1042 1010103120C 48h baking (R-9 15th VT)1010200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)102300C 3h baking (R-4 10th VT)300C 3h baking (R-8 13th VT)5 10994 103 109600 C baking350C 3h baking (R-4 13th VT)400C 3h baking (TE1AES018 7th VT)10500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)800C 3h baking (R-8c 5th VT)2 109Radiation of 300C 3h baking (R-4)500 800 C 3 h High Q value wasn’t observed HFQS occurred1Radiation of 350C 3h bakingRadiation of 400C 3h bakingRadiation of 500C 3h baking0510152025303510 140Eacc [MV/m]hayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance9
106101110105 104 10103 101051042 101010120C 48h baking (R-9 15th VT)10103200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)102300C 3h baking (R-4 10th VT)X-ray [µSv/h]Q0Comparison of Q-E curveCavity temperature during measurement 120 600 C baking at 2.0 K (2.00 2.01 K) 800 C baking at 2.1 K (2.07K)250 400 C 3 h Extremely high Q value and anti-Q slope are observed Highest Q value at 2.0 K is 5E10 for 300 C baked cavity Magnetic field was trapped before 2 K measurement of350 C baked cavity - Q value is Essentially a bit higherStandard recipe (120 C 48 h), 200 C 3 h 200 C baked cavity follows the standard recipe (120 C 48h) Q-E behavior at low Eacc is slightly different300C 3h baking (R-8 13th VT)5 10994 103 109350C 3h baking (R-4 13th VT)400C 3h baking (TE1AES018 7th VT)10500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)800C 3h baking (R-8c 5th VT)2 109Radiation of 300C 3h baking (R-4)1Radiation of 350C 3h bakingRadiation of 400C 3h bakingRadiation of 500C 3h baking0510152025303510 140Eacc [MV/m]hayato Ito, 2021/07/02500 800 C 3 h High Q value wasn’t observed HFQS occurred Varying the temperature of furnace baking varies Q-Ebehavior drastically In 300 400 C furnace baking, the cavity is limited ataround 25 MV/m?Systematic Investigation of Mid-T Furnace Baking for High-Q Performance10
Comparison of normalized RBCS0RBCS/R BCS2.2120C 48h baking (R-9 15th VT)The RBCS behavior varies greatly with differencesin baking temperature.200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)2300C 3h baking (R-4 10th VT)300C 3h baking (R-8 13th VT)350C 3h baking (R-4 13th VT)1.8400C 3h baking (TE1AES018 7th VT)500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)1.6Standard recipe (120 C 48 h), 200 C 3 h RBCS increases as Eacc increases Slope of RBCS is steep800C 3h baking (R-8c 5th VT)1.41.2500 800 C 3 h Slope of RBCS is gentle compared with standard recipe10.80.60.40510152025303540250 400 C 3 h RBCS decreases strongly as Eacc increases resulting in anti-Qslope Difference of the slope is clearly seen with difference ofbaking temperatureEacc [MV/m]hayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance11
120C 48h baking (R-9 15th VT)200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)2300C 3h baking (R-4 10th VT)300C 3h baking (R-8 13th VT)350C 3h baking (R-4 13th VT)1.8400C 3h baking (TE1AES018 7th VT)500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)1.6800C 3h baking (R-8c 5th VT)1.41.2Slope of Normalized R0RBCS/R BCS2.2BCSComparison of normalized RBCS0.1Standard recipe (120C 48 h)0.08Furnace baking0.060.040.02010.8 0.020.6 0.040.40510152025303540Eacc [MV/m]0100200300400500600700800900Baking temperature [degree C]The significant change in RBCS behavior between 200 300 C - May be related to the decomposition temperature of Nb2O5 (above 250 C)hayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance12
Rres [nΩ]Comparison of Rres10987120C 48h baking (R-9 15th VT)200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)300C 3h baking (R-4 10th VT)300C 3h baking (R-8 13th VT)350C 3h baking (R-4 13th VT)400C 3h baking (TE1AES018 7th VT)500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)800C 3h baking (R-8c 5th VT) Rres is clearly different between the standard recipe andfurnace baking Rres behavior changes with differences in bakingtemperature but not as drastically as RBCS654Standard recipe (120 C 48 h) Higher Rres Rres is minimal at 10 MV/m32Furnace baking (200 800 C 3 h) Low Rres is observed for all of furnace baked cavity 600 C baked cavity has extremely low Rres100510152025303540Eacc [MV/m]hayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance13
Rres [nΩ]RBCS [nΩ]RBCS and Rres vs baking temperature14109812710120C 48h baking (R-9 15th VT)200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)300C 3h baking (R-4 10th VT)300C 3h baking (R-8 13th VT)350C 3h baking (R-4 13th VT)400C 3h baking (TE1AES018 7th VT)500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)800C 3h baking (R-8c 5th VT)68564120C 48h baking (R-9 15th VT)200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)300C 3h baking (R-4 10th VT)300C 3h baking (R-8 13th VT)350C 3h baking (R-4 13th VT)400C 3h baking (TE1AES018 7th VT)500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)4200321800C 3h baking (R-8c 5th VT)51015202530354000Eacc [MV/m]510152025303540Eacc [MV/m] Differences are clearly seen at higher Eacc RBCS has a minimum at 300 C furnace baking, Rres has aminimum at 600 Chayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance14
3Sensitivity at 2 MV/m [nΩ/mG]Sensitivity [nΩ/mG]Sensitivity120C 48 h baking (standard recipe)200C 3 h baking (furnace baking)2.5250C 3 h baking (furnace baking)300C 3 h baking (furnace baking)350C 3 h baking (furnace baking)2400C 3 h baking (furnace baking)500C 3 h baking (furnace baking)1.52.5120C 48 h standard baking3 h furnace baking21.5110.50.500510152025303540Eacc [MV/m]00100200300400500600Baking temperature [degree C] 300 C furnace baked cavity has a higher sensitivity compared with other cavities There is a structure that has a sharp peak at around 300 Chayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance15
Δ F [kHz]Δ F [kHz]ΔF during warm-up252025120C 48 h standard baking3 h furnace baking201515105100 5 108120C 48h baking (R-9 15th VT)200C 3h baking (R-4 11th VT)250C 3h baking (R-4 16th VT)300C 3h baking (R-4 10th VT)300C 3h baking (R-8 13th VT)350C 3h baking (R-4 13th VT)500C 3h baking (R-8 16th VT)600C 3h baking (R-4 12th VT)8.28.48.658.899.29.4Temperature [K]00100200300400500600Baking temperature [degree C] 300 C baked cavities have bigger ΔF Similar structure to the Sensitivity vs baking temperaturehayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance16
5 10101064 10103 10Preliminary101051042 1010103102120C 48h baking (R-9 15th VT)10109 1098 109No precooling200C 1h baking (R-8 18th VT)10200C 2h baking (R-8 20th VT)200C 3h baking (R-12 2nd VT)No precooling200C 3h baking (R-4 11th VT)7 1091X-ray [µSv/h]Q0Changing baking time for 200C furnace baking Onset of HFQS for 200 C 1 hcavity was overcome by 200 C 2h furnace baking- Q exceeded 2E10 at 35 MV/m The effect of precooling needs tobe considered Or is there a cavity dependence?6 1090510152025303510 140Eacc [MV/m]hayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance17
Summary Furnace baking was applied to the single-cell cavity with various baking temperaturesand results in various Q-E behavior Also, the relationship between baking temperature and sensitivity and ΔF wassystematically investigated 300 C baked cavities have an extremely high Q value besides sensitivity and ΔF areabnormally different from the other cavities- Furnace baking is promising to make high Q value cavity with a more simpleprocess We plan further investigation for furnace baking: sample study to reveal the surface condition applying to the 9-cell cavity and LG cavity changing the parameter of baking time - Achieving both high-Q value and high Eacchayato Ito, 2021/07/02Systematic Investigation of Mid-T Furnace Baking for High-Q Performance18
Furnace baking at KEK light EP Furnace baking HPR cleanroom assembly rf test Refresh inner surface 200-800 C, 3h No baking Exposure to air and water HPR ① ② ③ ① ② ③ Mass2 18 28 44 5 Main components: mass 2, 18, 28, 44 Very small signals for higher masses
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