TM International, Ltd. Product Range & Technical Data

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Piezo mechanical and electrostrictive stack and ring actuators: TM International, Ltd. Product Range & Technical Data sales@americanpiezo.com www.americanpiezo.com 1 570 726 6961

Contents Actuators are arranged according to increasing stack diameters A. Stack types piezo actuators Low voltage actuators with preloaded casings VS .6 PSt 150/5/ VS10. 7 PSt 150/7/. VS12 . 8 PSt 150/10/ VS15 . 9 PSt 150/14/ VS20.10 PSt 150/20/ VS25.11 Piezocartridges: Low voltage actuators in casings with front mount threading .12 FPSt 150/5/ M10x0.75 . 14 FPSt 150/5/ M12x0.5 (former versions MPSt-BD) .14 FPSt 150/7/ M14x1 . 15 FPSt 150/10/ M18x1 .15 Low voltage electrostrictive stacks . 16 ESt 150/5/ VS10 .16 ESt 150/7/ VS12 . 16 ESt 150/5/ M12x0.5 electrostrictive stacks, front mount cartridge versions .17 High voltage stack actuators . . 18 PSt 500: max. operating voltage 500 V PSt 1000: max. operating voltage 1000 V Bare stacks without casing: PSt 500/5.and PSt 1000/5/ .18 PSt 1000/10. 19 PSt 1000/16/. 20 PSt 1000/25/. 20 PSt 1000/35/. 21 High voltage actuators with casing and internal prestress: PSt 1000/10/ VS18 . 22 PSt 1000/16/ VS25 . 24 PSt 1000/25/ VS35 . 25 PSt 1000/35/ VS45 . 26 3

Contents B. Ring actuators (stack type hollow cylinders) Low voltage ring actuators .27 Bare ring actuators (without casing) HPSt 150/14-10/. 27 HPSt 150/20-15/.28 Low voltage ring actuators with internally prestressed casings VS: HPSt 150/14-10/ VS22 .29 HPSt 150/20-15/ VS35.30 High voltage ring actuators .31 Bare ring actuators without casing: HPSt 1000/10-5/.32 HPSt 500/15-8/ and HPSt 1000/15-8/.33 HPSt 1000/25-15/.34 HPSt 1000/35-25/.35 High voltage ring actuators, with casing, internally prestressed VS: VS18 and HPSt 1000/10-5/ VS18 . 36 HPSt 500/15-8/ VS22 and HPSt 1000/15-8/ VS22 .37 HPSt 1000/25-15/ VS35 . 38 HPSt 1000/35-25/ VS45 . 39 Electrostrictive low voltage ring actuators. 40 HESt 150/15-8/ bare rings, without casing . 40 HESt 150/15-8/ VS22 casing with internal prestress . 40 C. Accessories Electricals . 41 Mechanics . 41 Optic adaptors for ring actuators . 42 Screw-in front adaptors SE for stacks with casings VS . 42 4

New Developments The APC International specialists in PZT actuation have a more than 20 years experience in this field now and are well known to supply customers not only with standardized piezo system components like catalog actuators and supply electronics. APC International has been always contacted, when new fields of application for piezo actuation shall be successfully exploited and special solutions are needed. APC International provides complete piezo actuation systems with highly sophisticated electronics dealing with all the “subs” like sub-micrometers, sub-nanometers, sub-milliseconds on one hand and real powers in the kilowatt range on the other. No technician/customer interface problems: By profound consulting APC International bridges the (potential) gap between the technical specialities of piezo actuation and the new coming user and guides him towards really working system solutions. APC International is making the pace again: When you want to go towards the limits of piezo actuation: contact APC International Only a few highlights out of a bundle: 1 mm 1000 µm piezo stroke with 70.000 Newtons load generated by a 500 mm long ceramic stack APC International provided heavily preloaded PSt1000/ 35 /L 500 actuator packages for studies related to active vibration cancellation in heavy mobile structures. The enormous strain of 2‰ was achieved by semi-bipolar operation based on APC International recharging switching amplifiers providing more than 10 Amperes peak current into a –200 V/ 1000 V swing for highest dynamics of this big block actuator. (Fig.1) Long stroke / high load actuators for cryogenic operation at 2 K APC International delivered custom designed PSt 1000/16/200 VS 25 actuators to the SNS (Spallation Neutron Source) activity as mechanical modulators for the superconducting resonator elements within the accelerator arrangement. The elements have been designed as high force actuating elements showing very long lifetime by using the bipolar activation scheme applicable during the operation at 2 K. Generation of highest power mechanical shocks Big block piezo actuators with mechanical energy contents up to several Joules have been used to produce mechanical shock waves with mechanical powers peaking at 100.000 Watts by charging the stack with electrical pulses of 50 µsec duration. APC International provided both the actuators and the electrical supplies. High frequency large amplitude oscillators APC International provided PSt 1000/16/150 VS 25 thermostable /HS/HT actuators together with the necessary power electronics for tunable 150 µm/kHz oscillators for special applications like rapid valve control and fretting test machines. Fig. 1 5

General remarks Coefficients of thermal expansion (CTE) of ceramic stacks (axial): Low voltage stacks: –3 ppm/ K High voltage stacks about 1 ppm/ K When you need a better understanding of piezomechanics with its effects and parameters: Please refer to brochure “Piezomechanics: An Introduction” Definition of polarities: ( ) means voltage polarity parallel to ceramic’s polarity (-) means voltage polarity antiparallel to ceramic’s polarity Example: semibipolar operating range of a PSt 1000 actuator (–) 200V ( )1000V Definition of strokes A/B A defined for specified maximum semibipolar voltage swing (e.g. (–) 200V / ( ) 1000V for PSt 1000) B defi ned for max. unipolar activation (e.g. 0V / ( ) 1000V for PSt 1000) Due to the larger voltage swing in case A: stroke A B Electrical capacitances: Stated values are related to small voltage variations Real large signal values: multiply at least by factor 1.5 Defi ned for standard material Tolerances ( /–20%) Options: (see catalog “Piezomechanics: An Introduction”) ceramic diameters up to 65 mm for very high loading (high voltage types) special driving voltage ranges, bipolar types custom materials extra wide stroke (see fi g. 1) extra high preloading for symmetric push/pull forces antagonistic systems high mechanical power materials high stability materials cryogenic applications high temperature application up to 200 C UHV applications Space applications Actuators with internal heat management (“Thermostable”) Position detection Force detection Special casing materials (INVAR, Titanium, nonmagnetic alloys etc.) 6

PSt 150/5/ VS10 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force approx. 150 N Max. load force: 800 N Max force generation: 800 N Open loop sensitivity at 1 mV noise for actuator PSt 150/5/7 VS10: 0.05 Nanometer Type max. stroke µm PSt 150/5/7 VS10 13/9 PSt 150/5/20 VS10 27/20 PSt 150/5/40 VS10 55/40 PSt 150/5/60 VS10 80/60 PSt 150/5/80 VS10 105/80 PSt 150/5/100 VS10 130/100 length mm 19 28 46 64 82 100 el. capacitance nF 350 800 1600 2400 3200 4000 Standard configuration: stiffness resonance frequency N/µm kHz 50 40 25 30 12 20 8 15 6 12 5 10 Moving end with spherical end piece Vbs Moving end with threaded pin VAg Moving end plane pF Thermostable modification Low temperature modification UHV compatibility Position detection Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Options: Coaxial cable RG 178 with LEMOSA connectors 00250 or 0S250 Accessories see section C 7

PSt 150/7/ VS12 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force 300 N Max. load force: 1800 N Max. force generation: 1800 N Open loop sensitivity at 1 mV noise for actuator PSt 150/7/7: 0.05 Nanometer Type max. stroke µm PSt 150/7/700VS12 13/9 PSt 150/7/20 VS12 27/20 PSt 150/7/400VS12 55/40 PSt 150/7/60 VS12 80/60 PSt 150/7/800VS12 105/80 PSt 150/7/100 VS12 130/100 PSt 150/7/120 VS12 160/120 PSt 150/7/140 VS12 190/140 PSt 150/7/160 VS12 210/160 length mm 19 28 46 64 82 100 118 136 154 el. capacitance nF 0.7 1.8 3.6 5.4 7.2 9 11 13 15 stiffness N/µm 120 60 25 15 12 10 8 7 6 resonance frequency kHz 40 30 20 15 12 10 8 6 5 Moving end with spherical end piece VbS Moving end with threaded pin VAg Moving end plane pF Thermostable modification Low temperature modification UHV compatibility Position detection Standard configuration: Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Options: Coaxial cable RG178 with LEMOSA connectors 00250 or 0S250 Accessories see section C 8

PSt 150/10/ VS15 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force approx. 400 N Max. load force: 4000 N Max. force generation: 3500 N Open loop sensitivity at 1 mV noise for actuator PSt 150/10/7 VS15: 0.05 Nanometer Type max. stroke µm PSt 150/10/20 VS15 27/20 PSt 150/10/40 VS15 55/40 PSt 150/10/60 VS15 80/60 PSt 150/10/80 VS15 105/80 PSt 150/10/100 VS15 130/100 PSt 150/10/120 VS15 160/120 PSt 150/10/140 VS15 190/140 PSt 150/10/160 VS15 210/160 PSt 150/10/180 VS15 240/180 PSt 150/10/200 VS15 270/200 length mm 28 46 64 82 100 118 136 154 172 190 el. capacitance nF 3.6 7.2 11 14 18 21 25 28 33 37 stiffness N/µm 120 60 35 25 20 15 14 13 11 10 resonance frequency kHz 30 20 14 12 10 8 7 6 5 4 Moving end with spherical end piece Vbs Moving end with threaded pin VAg Moving end plane pF Thermostable modification Low temperature modification UHV compatibility Position detection Standard configuration: Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Options: Accessories see section C Coaxial cable RG 178 with LEMOSA connectors 00250 or 0S250 9

PSt 150/14/ VS20 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force approx. 1000 N Max. load force: 7000 N Max. force generation: 7000 N Open loop sensitivity at 1 mV noise for actuator PSt 150/14/20: approx. 0.1 Nanometer Type max. stroke µm length PSt 150/14/20 0VS20 PSt 150/14/40 VS20 PSt 150/14/60 VS20 PSt 150/14/80 VS20 PSt 150/14/100 VS20 PSt 150/14/120 VS20 PSt 150/14/140 VS20 PSt 150/14/160 VS20 PSt 150/14/180 VS20 PSt 150/14/200 VS20 35 53 71 89 107 125 143 161 179 197 27/20 55/40 80/60 105/80 130/100 160/120 190/140 210/160 240/180 270/200 mm el. capacitance nF 7 14 22 30 39 47 55 63 71 80 stiffness N/µm resonance frequency kHz 250 120 70 50 40 35 30 25 22 20 Moving end with spherical end piece Vbs Moving end with threaded pin VAg Moving end plane pF Thermostable modification Low temperature modification UHV compatibility Position detection Standard configuration: Tapped hole in moving end 1 m coaxial cable RG 178 with BNC connector Options: Coaxial cable RG178 with LEMOSA connectors 00250 or 0S250 Coaxial cable RG 316 for power applications Accessories see section C 10 30 20 14 12 10 8 7 6 5 4

PSt 150/20/ VS25 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force approx. 1500 N Max. load force: 14000 N Max. force generation: 11000 N Open loop sensitivity at 1 mV noise for actuator PSt 150/20/20 VS25: approx. 0.1 Nanometer (see 2.8.) Type max. stroke µm PSt 150/20/18 VS25 25/18 PSt 150/20/36 VS25 50/36 PSt 150/20/54 VS25 75/54 PSt 150/20/72 VS25 95/72 PSt 150/20/90 VS25 120/90 PSt 150/20/110 VS25 150/110 PSt 150/20/130 VS25 175/130 PSt 150/20/150 VS25 200/150 PSt 150/20/170 VS25 230/170 PSt 150/20/190 VS25 250/190 length mm 37 57 77 97 117 137 157 177 197 217 el. capacitance nF 11 22 33 44 55 66 77 88 100 110 Standard configuration: stiffness N/µm 500 250 160 100 80 65 55 50 45 40 resonance frequency kHz 28 18 13 11 9 7 6 5 4 3 Stroke A/B A: for –30 V thru 150 V B: for 0 V thru 150 V Max. force generation: for –30 V thru 150 V Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Thermostable modification Low temperature modification UHV compatibility Position detection Accessories see section C Options: Coaxial cable RG178 with LEMOSA connectors 00250 or 0S250 Coaxial cable RG 316 for power applications Modified end pieces on request 11

Piezocartridges: Low voltage actuators in casings with front mount threading Stack actuators in cartridge-version offer elegant design features by simple attachment of an actuator to the mechanics using a front mounting thread. Using this thread a coarse adjustment for the system is provided. Piezocartridges can retrofit conventional lead screws. Mechanical arrangements for adjusting purposes can be very simply upgraded by using piezocartridges. 12

Schematic of a mirror mount based on piezo cartridges for coarse adjust by mounting screw and ultra fine adjustment by piezo action. The stiffness of piezo cartridges is reduced compared to a normally mounted stack because of the force transmission from mounting plate to moving end via stack casing, and in addition by the quality the screw mount. A lock nut is provided to increase attaching force. Piezocartridges can therefore withstand high loads, but force generation is reduced due to the lower stiffness. Most applications (e.g. for adjusting purposes) use constant loading. Standard Configuration: Options: Casing: stainless steel Electrical connection: 1 m coaxial cable RG 178 with BNC connector Coaxial cable RG178 with LEMOSA connectors 00250 or 0S250 Position detection Thermostable Stroke A/B A: for –30 V thru 150 V B: for 0 V thru 150 V Max. force generation: for –30 V thru 150 V 13

FPSt 150/5/ M10x0.75 (no internal prestress) Maximum load 600 N Open loop sensitivity at 1 mV noise for actuator FPSt 150/5/20: approx. 0.1 Nanometer Type max. stroke µm FPSt 150/5/20 M10 FPSt 150/5/40 M10 FPSt 150/5/60 M10 FPSt 150/5/80 M10 FPSt 150/5/100 M10 27/20 55/40 80/60 105/80 130/100 length mm el. capacitance nF 23 41 59 77 95 800 1600 2400 3200 4000 length mm el. capacitance nF FPSt 150/5/ M12x0.5(-BD) (former versions MPSt(-BD) (no internal prestress) For retrofitting translation stages MRL 80.25 and Newport mirror mounts SL Maximum load: 600 N Open loop sensitivity at 1 mV noise for actuator FPSt 150/5/20 : approx. 0.1 Nanometer Type max. stroke µm FPSt 150/5/20 M12 (BD) FPSt 150/5/30 M12 (BD) FPSt 150/5/40 M12 (BD) FPSt 150/5/60 M12 (BD) FPSt 150/5/80 M12 (BD) FPSt 150/5/100 M12 (BD) 27/20 40/30 60/40 80/60 105/80 130/100 FPSt 150/5/120 M12 (BD) 160/120 FPSt 150/5/140 M12 (BD) 190/140 14 25 34 43 61 79 97 800 1200 1600 2400 3200 4000 115 133 4800 5600

FPSt 150/7/ M14x1 Prestress force max. tensile force 200 N Maximum load: 1500 N Open loop sensitivity at 1 mV noise for actuator FPSt 150/7/20: approx. 0.1 Nanometer Type max. stroke µm FPSt 150/7/20 M14 FPSt 150/7/40 M14 FPSt 150/7/60 M14 FPSt 150/7/80 M14 FPSt 150/7/1000 M14 FPSt 150/7/120 M14 FPSt 150/7/140 M14 FPSt 150/7/ 140 M14 27/20 60/40 80/60 105/80 130/100 160/120 190/140 / 140 length mm el. capacitance nF 28 46 64 82 100 118 136 on request 1.8 3.6 5.4 7.2 9 11 13 FPSt 150/10/ M18x1 (with internal prestress) Prestress force max. tensile force 400 N Maximum load: 3000 N Open loop sensitivity at 1 mV noise for actuator FPSt 150/10/20: approx. 0.1 Nanometer Type max. stroke µm FPSt 150/10/20 M18 FPSt 150/10/40 M18 FPSt 150/10/60 M18 FPSt 150/10/80 M18 FPSt 150/10/100 M18 FPSt 150/10/120 M18 FPSt 150/10/140 M18 FPSt 150/10/ 140 M18 27/20 55/40 80/60 105/80 130/100 160/120 190/140 /140 length mm el. capacitance nF 28 46 64 82 100 118 136 on request 3.6 7.2 11 14 18 21 25 15

Low voltage electrostrictive stacks Operating voltage 0 V thru 150 V, arbitrary polarity Bare stacks: on request Stacks with preloaded casings VS ESt 150/5/ VS10 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force 150 N Maximum compressive load: 500 N Open loop sensitivity for ESt 150/5/6 VS10 at 1 mV noise: approx. 0.05 Nanometer Type max. stroke µm length mm el. capacitance nF stiffness N/µm ESt 150/5/6 VS10 6 19 600 50 ESt 150/5/12 VS10 ESt 150/5/18 VS10 ESt 150/5/25 VS10 12 18 25 28 37 46 1200 1800 2400 25 16 12 ESt 150/7/ VS12 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force 200 N Maximum compressive load: 1000 N Open loop sensitivity for ESt 150/7/6 VS12 at 1 mV noise: approx. 0.05 Nanometer Type ESt 150/7/6 VS12 ESt 150/7/12 VS12 ESt 150/7/18 VS12 ESt 150/7/25 VS12 ESt 150/7/40 VS12 max. stroke µm length mm el. capacitance nF 6 19 2 2 28 4.2 18 37 6.3 25 46 8.4 40 64 12.6 16 stiffness N/µm 100 50 33 25 20

Electrostrictive stacks, frontmount cartridges versions FESt 150/5/ M10x0.75 on request FESt 150/5/ M12x0.5(-BD) Maximum load: 500 N Open loop sensitivity for 1 mV noise with FESt 150/5/12 M12: approx. 0.1 Nanometer Type max. stroke µm length mm el. capacitance nF FESt 150/5/12 M12 (BD) FESt 150/5/18 M12 (BD) FESt 150/5/25 M12 (BD) 12 18 25 31 40 48 1200 1800 2400 FESt 150/5/40 M12 (BD) 40 67 3600 17

High voltage stack actuators Bare stacks without casing Configuration: discretely stacked elements Endfaces piezo ceramic of aluminia, electrically insulated Potential free operation possible Surface coating General data: see brochure: “Piezomechanics: An Introduction” PSt 500/5/ and PSt 1000/5/ Maximum load: 800 N Maximum force generation: 600 N Open loop sensitivity for 5 mV noise at PSt 500/5/5: approx. 0.05 Nanometer Type max. stroke length el. capacitance µm mm nF PSt 500/5/5 12/7 9 20 PSt 500/5/15 24/18 18 45 PSt 500/5/25 35/2 52 78 PSt 500/5/40 55/40 36 100 152 PSt 1000/5/5 12/7 9 5 PSt 1000/5/15 24/18 18 12 PSt 1000/5/25 35/25 27 22 PSt 1000/5/40 55/40 36 27 PSt 1000/5/60 80/60 54 45 Options: Spherical endface bS, R 2.5 mm When not otherwise stated, the half sphere will be applied to the moving end Threaded piece for fix end (tapped hole M3): Ig Low temperature modification UHV modification 18 stiffness N/µm 70 35 20 75 35 25 15 10 resonance frequency kHz 50 30 25 60 40 30 25 20

PSt 1000/10/ Maximum load: 5000 N Maximum force generation: 4000 N Open loop sensitivity for 5 mV noise at PSt 500/10/5: approx. 0.05 Nanometer Type max. stroke µm PSt 1000/10/5 12/7 PSt 1000/10/15 24/18 PSt 1000/10/25 35/25 PSt 1000/10/40 55/40 PSt 1000/10/60 80/60 PSt 1000/10/80 105/80 PSt 1000/10/ 100 /100 length mm 9 18 27 36 54 72 on request el. capacitance nF 20 45 85 110 170 220 Options: Spherical endface bS, R 5 mm (order code e.g. PSt 500/10/25 bS) When not otherwise stated, the half sphere will be applied to the moving end. Threaded piece for fix end (tapped hole M3): Ig Materials HP, HS, HT on request Low temperature modification UHV modification 19 stiffness N/µm 300 150 100 75 50 35 resonance frequency kHz 60 40 30 25 20 15

PSt 1000/16/ Maximum load: 15000 N Maximum force generation: 12000 N Open loop sensitivity for 10 mV noise at PSt 1000/16/5: approx. 0.05 Nanometer Type max. stroke µm PSt 1000/16/5 12/7 PSt 1000/16/15 25/17 PSt 1000/16/40 55/40 PSt 1000/16/60 80/60 PSt 1000/16/80 105/80 PSt 1000/16/ 100 /100 length mm 9 18 36 54 72 on request el. capacitance nF 60 150 360 540 720 stiffness resonance frequency N/µm kHz 800 60 400 40 200 25 120 20 90 15 el. capacitance nF 140 350 800 1250 1700 stiffness Options: End pieces for fixed and moving end on request Materials HP, HS HT on request Low temperature modification UHV modification PSt 1000/25/ Maximum load: 35000 N Maximum force generation: 25000 N Open loop sensitivity for 10 mV noise at PSt 1000/25/5: approx. 0.05 Nanometer Type max. stroke µm PSt 1000/25/5 12/7 PSt 1000/25/15 25/17 PSt 1000/25/40 55/40 PSt 1000/25/60 80/60 PSt 1000/25/80 105/80 PSt 1000/25/ 100 /100 length mm 9 18 36 54 72 on request Options: End pieces for fixed and moving end on request Materials HP, HS HT on request Low temperature modification UHV modification 20 resonance frequency N/µm kHz 1800 60 900 40 450 25 300 20 200 15

PSt 1000/35/ Maximum load: 70000 N Maximum force generation: 50000 N Open loop sensitivity for 10 mV noise a tPSt 1000/35/5: approx. 0.05 Nanometer Type max. stroke length µm mm PPSt 1000/35/5 12/7 9 PSt 1000/35/15 25/17 18 PSt 1000/35/40 55/40 36 PSt 1000/35/60 80/60 54 PSt 1000/35/80 105/80 72 3300 450 15 PSt 1000/35/ 100 /100 on request el. capacitance nF 300 800 1600 2500 stiffness resonance frequency N/µm kHz 4000 60 2000 40 1000 25 600 20 Options: End pieces for fixed and moving end on request Materials HP, HSHT on request Low temperature modification UHV modification Stroke A/B: PSt 500: A:–100 V thru 500 V B:–0 V thru 500 V Max. force generation: for –100 V thru 500 V PSt 1000: A:–200 V thru 1000 V B:–0 V thru 1000 V Max. force generation: for –200 V thru 1000 V 21

High Voltage Actuators with casing and internal prestress PSt 500/5/xx VS10PSt 1000/5/xx VS10 on request VS18 and PSt 1000/10/ VS18 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force 700 N Maximum load: 5000 N Maximum force generation: 4000 N Open loop sensitivity at 5 mV noise for actuator PSt 500/10/5: approx. 0.05 Nanometer Stroke A/B: PSt 500: A: –100 V thru 500 V B: –0 V thru 500 V Max. force generation: for –100 V thru 500 V PSt 1000: A: –200 V thru 1000 V B: –0 V thru 1000 V Max. force generation: for –200 V thru 1000 V 22

Type max. stroke µm PSt 1000/10/5 VS18 12/7 PSt 1000/10/15 VS18 25/17 PSt 1000/10/25 VS18 35/25 PSt 1000/10/40 VS18 55/40 PSt 1000/10/60 VS18 80/60 PSt 1000/10/80 VS18 105/80 PSt 1000/10/100 VS18 130/100 PSt 1000/10/125 VS18 160/125 PSt 1000/10/150 VS18 200/150 PSt 1000/10/200 VS18 260/200 length mm 24 33 42 51 69 87 105 125 145 185 el. capacitance nF 20 45 85 110 170 220 270 330 390 510 stiffness N/µm 300 150 100 75 50 35 30 25 17 10 resonance frequency kHz 40 35 30 27 23 20 15 10 5 3 Standard Configuration: Options: Coaxial cable RG 178, 1 m with connectors BNC or LEMOSA 0S250 Coaxial cable RG178 with LEMOSA connectors 0A250 Piezomaterials HP, HP, HT Thermostable modification for power applications Low temperature modification UHV modification Position sensor Negative polarity Accessories: see section C Mechanical end pieces 23

PSt 1000/16/ VS 25 General data: see brochure: “Piezomechanics: An Introduction” Prestress force max. tensile force 1500 N Maximum load: 15000 N Maximum force generation: 12000 N Open loop sensitivity at 10 mV noise for actuator PSt 1000/16/5 VS25: approx. 0.05 Nanometer Type max. stroke µm PSt 1000/16/5 VS25 12/7 PSt 1000/16/20 VS25 25/17 PSt 1000/16/40 VS25 55/40 PSt 1000/16/60 VS25 80/60 PSt 1000/16/80 VS25 105/80 PSt 1000/16/100 VS25 130/100 PSt 1000/16/125 VS25 160/125 PSt 1000/16/150 VS25 200/150 PSt 1000/16/200 VS25 260/200 PSt 1000/16/ 200 VS25 200 length mm 26 35 53 71 89 107 127 147 187 on request el. capacitance nF 60 150 360 540 72

pst 150/10/80 vs15 105/80 82 14 25 12 pst 150/10/100 vs15 130/100 100 18 20 10 pst 150/10/120 vs15 160/120 118 21 15 8 pst 150/10/140 vs15 190/140 136 25 14 7 pst 150/10/160 vs15 210/160 154 28 13 6 pst 150/10/180 vs15 240/180 172 33 11 5

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