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A 110-170 GHz transceiver in 130 nm SiGe BiCMOS technology for FMCW applications Downloaded from: https://research.chalmers.se, 2023-03-15 15:03 UTC Citation for the original published paper (version of record): Yan, Y., Bryllert, T., Vassilev, V. et al (2018). A 110-170 GHz transceiver in 130 nm SiGe BiCMOS technology for FMCW applications. Proceedings of SPIE - The International Society for Optical Engineering, 10800. http://dx.doi.org/10.1117/12.2318791 N.B. When citing this work, cite the original published paper. research.chalmers.se offers the possibility of retrieving research publications produced at Chalmers University of Technology. It covers all kind of research output: articles, dissertations, conference papers, reports etc. since 2004. research.chalmers.se is administrated and maintained by Chalmers Library (article starts on next page)

A 110-170 GHz Transceiver in 130 nm SiGe BiCMOS Technology for FMCW Applications Yu Yan*a, Tomas Bryllertb, Vessen Vassileva, Sten E. Gunnarssona, Herbert Ziratha Microwave Electronics Laboratory, Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Göteborg SE-41296, Sweden; bTerahertz and Millimetre Wave Laboratory, Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Göteborg SE-41296, Sweden a ABSTRACT A 110-170 GHz transceiver is designed and fabricated in a 130 nm SiGe BiCMOS technology. The transceiver operates as an amplifier for transmitting and simultaneously as a fundamental mixer for receiving. In a measured frequency range of 120-160 GHz, a typical output power of 0 dBm is obtained with an input power of 3 dBm. As a fundamental mixer, a conversion gain of -9 dB is obtained at 130 GHz LO, and a noise figure of 19 dB is achieved. The transceiver is successfully demonstrated as a FMCW radar front-end for distance measurement. With a chirp rate of 1.6 1012 Hz/s and a bandwidth of 14.4 GHz, a range resolution of 2.8 cm is demonstrated, and transmission test is shown on different objects. Keywords: transceiver, radar front-end, FMCW, amplifier, mixer, power, conversion gain, noise figure, 130 nm, SiGe, BiCMOS, HBT, chirp rate, range resolution, transmission. 1. INTRODUCTION In most commercial imaging techniques for security applications, the sensor needs to be in close proximity to the target. However, to survive a person borne improvised explosive device (IED) even without shrapnel, at least 5 meters separation distance is required [1]. Therefore, standoff imaging, which is capable of detecting concealed weapons, explosives, or hidden contraband, tends to be increasingly important for security applications. Using radar technologies, the 100 GHz to 1 THz region is interesting for standoff detection of concealed objects [2]. The cross-range resolution is proportional to the wavelength of the transmitted signal, and the range resolution is inversely proportional to the frequency bandwidth, which is also related to the operating frequency [3]. In general, higher operating frequency gives better range resolution and cross-range resolution. Furthermore, as the frequency increases above 500 GHz, the aperture sizes become more manageable. However, the attenuation of the atmosphere and clothing will be affected significantly as the frequency increase. In the 100-600 GHz frequency range, transmission has been experimentally shown on a variety of clothing [4]. Using an overcoat as an example, the measured transmission decreases from the peak value of more than 0.8 down to around 0.5 as the frequency increases from 192 GHz to 576 GHz. To compensate the attenuation, active systems can be a choice. By employing frequency-modulated continuous wave (FMCW) radar technique, Jet Propulsion Laboratory (JPL) has developed a 580-GHz imaging radar [5], followed by a 600 GHz version [6], and the latest updated 675 GHz one [7]. In the coherent transceiver front-ends of the three versions, the transmitters are constructed by multiplier chains and power amplifiers, while the receivers are formed by mixers driven by multipliers. Schottky diodes are employed in all the multipliers and mixers using traditional waveguide technology. In addition, to achieve high-isolation duplexing, a high-resistivity silicon etalon beam splitter is used at the expense of losing half of the beam power for both transmitter and receiver. In the best case, this duplexing method introduces a round-trip loss of 6 dB. In order to simplify the bulky transmitter/receiver chains and overcome the power loss from duplexing method, an integrated FMCW radar transceiver module, which operates as a frequency doubler for transmitting and simultaneously as a sub-harmonic mixer for receiving, is reported at 200-240 GHz [3]. The waveguide technology is employed by the transceiver module, in which the transceiver circuits are fabricated on 3-µm thick GaAs membranes which contains GaAs Schottky diodes. Millimetre Wave and Terahertz Sensors and Technology XI, edited by Neil A. Salmon, Frank Gumbmann, Proc. of SPIE Vol. 10800, 108000I · 2018 SPIE CCC code: 0277-786X/18/ 18 · doi: 10.1117/12.2318791 Proc. of SPIE Vol. 10800 108000I-1

According to [3] and [7], a single transceiver is not enough to provide the necessary frame rate for real-time standoff imaging. The most practical solution is to use an array of transceivers. To stack single transceivers into an array, monolithically integrated circuit technologies would be more efficient in terms of space and cost compared to the ones in traditional waveguide technology [8]. At frequencies above 500 GHz, key components of a transceiver may be more challenging to realize in transistor based technologies than Schottky diode technologies. However, as it is pointed out in [2], transmission loss in atmosphere and clothing tends to drive designs to lower frequencies (e.g. below 500 GHz). The transistor based active circuits would possibly have gain to achieve adequate sensitivity and signal to noise ratio. In this paper, a transceiver, which operates as an amplifier for transmitting and simultaneously as a fundamental mixer for receiving, is designed at 110-170 GHz and can be stacked linearly on-chip to form a compact transceiver array. This transceiver can then be used as a FMCW radar front-end. The circuit is fabricated in Infineon’s 130 nm SiGe BiCMOS technology (B11HFC), which has a typical fT/fmax of 250/435 GHz. The given technology consists of 6 metal layers for interconnection and offers the opportunity of high integration level. 2. TRANSCEIVER CIRCUIT DESIGN The original idea of sharing a single circuit for FMCW front-end operation including both transmitter and receiver was first demonstrated in [9]. That first presented FMCW radar transceiver front-end, which consists two diodes and a few passive components on a printed circuit board, operates as a frequency multiplier for transmitting, and simultaneously as a sub-harmonically pumped “I/Q” mixer for receiving. Then, by choosing a field effect transistor (FET) as the only nonlinear device, a transceiver circuit was designed and demonstrated simultaneously as an amplifier and a resistive mixer at around 10 GHz [10]. Using it as the prototype, a balanced FMCW transceiver is presented with improved AM noise performance [11]. Again, in [3], the measured IF noise power is largely suppressed from the balanced transceiver module compared to the unbalanced one. IF out Vcc Vcc/IF On chip Vcc/IF5052 In 50 52 8 90 ---' Out 8 900 Figure 1. Schematic of the transceiver. Since the IF noise performance is extremely important for standoff imaging applications, a balanced configuration is chosen in this work. The schematic of the designed transceiver is shown in Fig. 1. The circuit is designed to operate as an amplifier for transmitting and simultaneously as a fundamental mixer for receiving. The input signal not only applies as the input for the amplifier but also serves as the local oscillator (LO) signal for the mixer. Then, the transmitted signal will be echoed back into the output port and applied as RF for the mixer. In the presented transceiver circuit, the active Proc. of SPIE Vol. 10800 108000I-2

devices are two high speed npn transistors (emitter size: 0.13 10 µm2) from the given technology, and they are biased in class-AB condition for a compromised performance as an amplifier and a mixer. The two identical single-ended common emitter stages are combined by a 90 branch line hybrid at the input and another 90 branch line hybrid at the output. Therefore, the output signals from the two common emitter stages will be combined in-phase from the transmitter’s view, and the generated IF signals will be 180 out-of-phase from the receiver’s view. On the integrated transceiver chip, the IF signals share the same path as the collector dc bias lines. In addition, IF signals generated from a short range FMCW radar are normally within a frequency range of kHz or MHz. Therefore, large capacitors and inductors (e.g. bias tee) would be needed to isolate the dc bias from the IF port. However, the capacitor and inductor, which intend to couple out and block few kHz IF frequencies, would occupy unacceptable large chip areas in given technology, so they are omitted on-chip and off-chip components will instead be used. The circuit is designed and optimized in Cadence Virtuoso and some essential passive components (e.g. the 90 branch line hybrid and matching networks) are EM simulated in Sonnet. Fig. 2 shows the chip photo of the fabricated transceiver circuit. The 90 branch line hybrids are meandered to save space, and the base dc bias of the two transistors are combined on-chip into a single dc pad. The transceiver chip occupies a chip area of 980 560 µm2. Figure 2. Chip photo of the transceiver circuit. (Size: 980 560 µm2). 14. In this work, a commercial off-chip transformer (ADT4-6T from Mini-Circuits) is used to convert the differential IF outputs to a single-ended output, and its center tap is used to apply collector dc bias. Fig. 3 shows the photo of the balanced transceiver circuit together with the off-chip transformer. The transformer is surface mounted on a designed printed circuit board (PCB), which is further mounted on a brass block by silver epoxy. The secondary terminals of the transformer are connected to the two on-chip Vcc/IF pads through bond wires. Since the chip has no back metallization for grounding, a small gold plate is conductively glued on the brass block and sits between the circuit chip and the PCB. When connecting the on-chip ground pads and the gold plate through bond wires, common ground between the chip and the PCB is obtained. Figure 3. Photo of the balanced transceiver circuit connected with off-chip transformer. 3. CIRCUIT MEASUREMENT On-chip measurement is applied to the fabricated transceiver circuit, where the input/output ports and dc bias are connected through probes. The circuit is characterized as an amplifier and a mixer. To characterize it as an amplifier, the single-ended IF port is terminated by a 50 Ω load. Two-port small signal Sparameter measurement is applied at D-band (110-170 GHz). At the dc biases of IB 34 µA and Vcc 1.6 V, Fig. 4 shows both the measured and simulated small signal S-parameters. Reasonable agreement of S21 and S12 is achieved in the Proc. of SPIE Vol. 10800 108000I-3

whole D-bandd. Measured S11 S and S22 show s that bothh input and ou utput ports aree well matcheed. From the measured m S21, no power gaiin is obtained. However, frrom the transm mitter’s point of view, the maximum ouutput power is more cruciall. Therefore, the output poweer is measuredd as a functionn of the input power, wheree the input is applied by thee VDI D-bandd ower is measuured by an Errickson powerr meter. Fig. 5 source modulle followed by a tunable atttenuator and the output po shows both thhe measured and a simulated results at 1400 GHz. As can n be seen from m the measureed results, morre than 0 dBm m output powerr is obtained with w an input power p of 3 dBm, d and the gain g is still linnear at this poower level. At the frequencyy range of 120--160 GHz, thee maximum output o power is measured when w the maxximum availabble power from m the VDI Dband source module m is appplied. This is shown s in fig. 6, in which th he measured maximum m inpuut power is also included ass a reference. ui S22 S1 2 120 t30 140 150 160 170 Figure 4. Measured (solid lines) and sim mulated (dashedd lines) small siignal S-parametters. . . . . . . . . . s;irri.@140GH: . neás@140 G n 5 0 Tut Power (dIBm) In Figure 5. Measured and simulated s outpuut power in trannsmit mode as a function of thee input power aat 140 GHz. When characcterizing the circuit c as a mixer, m the inpuut is applied by b the VDI D-band D sourcee module with h a maximum m available pow wer and servees as LO. Thee output is appplied by a VD DI D-band exttender with a power level of around -200 dBm and servves as the RF. By measurinng the output IF I power, con nversion gain of the mixer ccan be obtaineed. With a LO O power of arouund 3 dBm (thhe LO power at different freequencies is shown s as Pin,m s the measuredd max in fig. 6), fiig. 7(a) shows conversion gaain as a functtion of the LO O frequencies at a fixed IF frequency off 10 MHz. Figg. 7(b) shows the measuredd Proc. of SPIE Vol. 10800 108000I-4

conversion gaain as a functiion of the IF frequencies f att a fixed LO frequency fr of 130 1 GHz. Thee IF frequency y is only sweppt up to 300 MH Hz, which is thhe upper limitt of the transfoormer in use. Typical T conveersion gain of -10 -12 dB iss obtained. n chip, sn chip . . 125 135 130 140 1'45 150 15 O 0 0 0 01 Conversion Gain (dB) Figure 6. Measured maxiimum availablee power to feed in and the max ximum availablee power from thhe output. sim t meas -,O N O Ñ meas 130 140 LC) 150 1 105 10' 106 108 IF freq (Hz) freq (GHz) (a) (b) Figure 7. (a) Simulated and a measured coonversion gain in receive mod de as a function of the LO frequuencies (fIF 10 MHz). ( Simulated and (b) a measured coonversion gain in receive mod de as a function of the IF frequeencies (fLO 130 0 GHz). To evaluate thhe noise perfoormance of the mixer, the IF noise powerr is first amplified by a low w noise ampliffier, which hass a typical gainn of GLNA 50 dB and a typpical noise figure of NFLNA 2.5 dB, and further measuured by a spectral analyzerr. With a resoluution bandwiddth (RBW) off 1 MHz for the t spectral an nalyzer, fig. 8 shows the m measured IF noise n power at a different condditions. A typpical IF noise power of PIF -53 dBm is obtained o whenn the transceiiver circuit is dc biased andd 130 GHz LO pumped. Froom fig. 7 (b), a typical convversion gain of Gmixer -9 dB B can be read. Therefore, th he noise figuree c be calculaated from: of the mixer can (1) (2) Proc. of SPIE Vol. 10800 108000I-5

(3) where K 1.338 10-13 J/K iss the Boltzmannn constant; T0 2995 K is the stanndard room teemperature; B RB BW 1.128 is thhe equivalent noise bandwiidth in Hz [12]. Given all the numbers, the calculated nooise figure is 19 1 dB. IF IF IF LNA off & tnansceiver off LNA on & tnansceiver off LNAon&tnansceiver on SeaMdf 5 . . 10 15 20 25 3( ) 35 40 4 5 50 freq (MHz) Figure 8. Measured noisee power at IF. 4. FMCW F RA ADAR MEA ASUREME ENT Using the designed transceiver front-ennd, a FMCW radar is setup p and demonsstrated for disstance measurrement. Fig. 9 ment setup. A chirped signaal is generated d by a direct digital syntheesizer (DDS) and it linearlyy shows the raddar measurem swept from 0.3 0 GHz to 1.22 GHz in 9 ms. m After up-coonversion in a mixer using a 7.8 GHz LO O signal, two 4 frequencyy multipliers arre followed. This T results inn a 129.6 1444 GHz signal with a chirp rate of 1.6 11012 Hz/s to be b fed into thee designed trannsceiver front--end. At the output of the trransceiver, a D-band D lens corrected c antennna, which haas a gain of 400 dBi, is conneected to the ouutput port of the transceiveer. The outputt IF signal is amplified by an LNA (GLNNA 50 dB andd NFLNA 2.5 dB B) and measuured by an osciilloscope. Thee IF spectra is obtained from m fast Fourierr transform (FF FT). The theoretical range resollution of a FM MCW radar is given g by: 2 where c is thee speed of lighht, and BW is the chirp banndwidth. Proc. of SPIE Vol. 10800 108000I-6 (4)

-- uVA x4 Agilent Digital S'dorage Oscillosco¡ DS07032A 129.6 -1441 VDI Objec GHz D -band lens corre cted antenna 32.4 -36 GHz x4 PA J.3-1.2 GHz E 8.1-9 GE Figure 9. FMCW radar measurement m seetup. In our setup with a chirp bandwidth off 14.4 GHz, itt gives a theo oretical range resolution off 1.04 cm. In n practice, thee range resoluttion will be deegraded due to t nonlinearitiies and windo owing in the post p processinng [5]. In the measurementt, the range resoolution is dem monstrated by placing two cardboard c layeers (which are actually the ttwo layers from m a cardboardd box and the distance in between b is tunned by replaccing boxes wiith different thicknesses) t aalone with the beam traveel t cardboaard box is used as the targeet. The two IF F direction. Figg. 10 shows thhe measured IF spectra whhen a 3 cm thick peaks can be recognized with w a frequenccy separation (Δf) ( of 300 Hzz, which resullts in a distancce (D) of: 2.8 81 (5) This agrees with w the value of 3 cm, whhich is measureed by a ruler. - -3 cm thick( cardboard b -300 Hz 5 10 1!5 20 25 31 freq (kHz) 1 2 3 Distance (n i) Figure 10. Measured IF spectra s when thhe target is a 3 cm thick cardb board box. Transmissionn test is also applied a on sevveral materialss. As is shown n in fig. 11. A big piece of metal facing the antenna iss used as a refeerence. The obbject under teest is then placced between the t antenna annd the metal reference. Fig. 12 shows thee measured IF spectra with different d objeccts. By compaaring the poweer of the seconnd IF peaks w with the referen nce one, it cann be seen that the t signal at 140 GHz pennetrate througgh a 0.5 cm th hick plastic booard with bareely any loss, while w a 0.3 cm m thick wet carddboard and a 2 cm thick woood shows aroound 20 dB loss and 40 dB loss, l respectivvely, in a returrn path. Proc. of SPIE Vol. 10800 108000I-7

Figure 11. Transmission test setup. 20 metal asa reference 0.5 cm thick plastic board -- - 0.3cm tick wet cardboard - -- - 2cm chic wood 10 0 -10 Ê á -20 ao -30 -40 -50 -60 -70 0 5 10 15 20 25 30 freq (kHz) 2 0 35 40 3 45 50 4 Distance (m) Figure 12. Measured IF spectra for transmission test. 5. CONCLUSION Aiming for standoff imaging applications, a 110 170 GHz transceiver is designed to operate as an amplifier for transmitting and simultaneously as a fundamental mixer for receiving. The circuit is fabricated in a 130 nm SiGe BiCMOS technology. The transceiver circuit is well matched in full D-band, and in the frequency range of 120 160 GHz, a typical output power of 0 dBm is measured with an input power of 3 dBm. When it works as a mixer, a conversion gain of -9 dB is obtained at 130 GHz LO frequency, and a measured noise figure of 19 dB is achieved. The designed transceiver is successfully demonstrated as a FMCW radar for distance measurement. With a chirp bandwidth of 14.4 GHz and a chirp rate of 1.6 1012 Hz/s, a range resolution of 2.8 cm is demonstrated, and transmission loss from several objects are also measured. From the performance of the transceiver circuit alone, reasonable output power and conversion gain are obtained in a frequency bandwidth of more than 30 GHz. Therefore, a sub-cm range resolution should be achieved if the chirp signal could cover the whole bandwidth of the transceiver. Proc. of SPIE Vol. 10800 108000I-8

ACKNOWLEDGMENT The authors would like to acknowledge and thank the wafer processing team at Infineon Technologies for chip manufacture. REFERENCES [1] “Controlling Risks Around Explosives Stores, A Review of the Requirements on Separation Distance,” [Online]. Available: http://www.hse.gov.uk/research/misc/qdwgrep.pdf. Crown Copyright, 2002. [2] R. Appleby and H. B. Wallace, “Standoff detection of weapons and contraband in the 100 GHz to 1 THz region,” IEEE Trans. Antennas Propag., vol. 55, no. 11, pp. 2944–2956, Nov. 2007. [3] T. Bryllert, V. Drakinskiy, K. B. Cooper, and J. Stake, “Integrated 200-240-GHz FMCW radar transceiver module,” IEEE Trans. Microw. Theory Techn., vol. 61, no. 10, pp. 3808-3815, Oct. 2013. [4] D. T. Petkie, F. C. De Lucia, C. Casto, P. Helminger, E. L. Jacobs, S. K. Moyer, S.Murrill, C. Halford, S. Griffin, and C. Franck, “Active and passive millimeter and sub-millimeter-wave imaging,” in Proc. SPIE, 2005, vol. 5989, pp. 5989l8-1–5989l8-8. [5] K. B. Cooper, R. J. Dengler, G. Chattopadhyay, E. Schlecht, J. Gill, A. Skalare, I. Mehdi, and P. H. Siegel, “A high-resolution imaging radar at 580 GHz,” IEEE Microw. Wireless Compon. Lett., vol. 18, no. 1, pp. 64–66, Jan. 2008. [6] K. B. Cooper, R. J. Dengler, N. Llombart, T. Bryllert, G. Chattopadbyay, E. Schlecht, J. Gill, C. Lee, A. Skalare, I. Mehdi, and P. H. Siegel, “Penetrating 3-D imaging at 4 and 25 meter range using a submillimetrewave radar,” IEEE Trans. Microw. Theory Tech., vol. 56, pp. 2771–2778, 2008. [7] K. B. Cooper, R. K. Dengler, N. Llombart, B. Thomas, G. Chattopadhyay, and P. H. Siegel, “THz imaging radar for standoff personnel screening,” IEEE Trans. THz Sci. Technol., vol. 1, no. 1, p. 169, 182, Sep. 2011. [8] M. Jahn, R. Feger, C. Pfeffer, T. F. Meister, and A. Stelzer, “A SiGe-based 140-GHz four-channel radar sensor with digital beamforming capability,” in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2012. [9] S. A. Maas, “FM-CW radar transceiver,” U.S. Patent 5 596 325, Jan. 21, 1997. [10] K. Yhland, and C. Fager, "A FET transceiver suitable for FMCW radars," IEEE Microwave and Guided Wave Lett., vol. 10, no. 9, pp. 377-379, Sep. 2000. [11] C. Fager, K. Yhland, and H. Zirath, "A balanced FET FMCW radar transceiver with improved AM noise performance," IEEE Trans. Microw. Theory Tech., vol. 50, no. 4, pp. 1224-1227, Apr. 2002. [12] “Spectrum and signal analyzer measurements and noise,” Agilent Technol., Santa Clara, CA, USA, 2012 [Online]. Available: 008E.pdf. Proc. of SPIE Vol. 10800 108000I-9

Chalmers University of Tec hnology, Göteborg SE-41296, Sweden; bTerahertz and Millimetre Wave Laboratory, Department of Micr otechnology and Nanoscience (MC2), Chalmers University of Technology, Göteborg SE-41296, Sweden ABSTRACT A 110-170 GHz transceiver is designed and fabricated in a 130 nm SiGe BiCMOS technology. The transceiver operates

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