Simulation Of Ultra-Small Electronic Devices: The .

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Simulation of Ultra-Small Electronic Devices:The Classical-Quantum Transition RegionBryan A. BiegelMRJ Technology Solutions Inc.IT Modeling and Simulation Group, Numerical Aerospace Simulation (NAS) DivisionNASA Ames Research Center, MailStop T27A-1, Moffett Field, CA cern is increasing about how quantum effects willimpact electronic device operation as down-scaling continues along the SIA Roadmap through 2010. Thisdocument describes part of a new semiconductor devicemodeling (SDM) program at NAS to investigate these concerns by utilizing advanced NAS and third-partynumerical computation software to rapidly implement andinvestigate electronic device models including quantumeffects. This SDM project will investigate quantum effectsin devices in the classical-quantum transition region,especially sub-0.1 µm MOSFETs. Specific tasks plannedfor this project include the use of quantum corrections tothe classical drift-diffusion and hydrodynamic models ofelectron transport, and the use of nominally quantummodels including significant scattering.EC0TunnelCurrent(n Gate)(Oxide)ECEVEnergyquantization(p-Si Substrate)Figure 1: Quantum Effects in an n-MOSFETnow very much want to know how significantly parasiticquantum effects will degrade electronic device operationwith each future device generation, how long these effectscan be suppressed and by what means, and whether quantum effects might be used to actually improve device operation.Experiment is not a suitable first line of attack in theinvestigation of these questions, since it can not view internal device operation or isolate particular physical effects, ithas a very high (and increasing) cost, experimental structures and conditions are not precisely controllable, andturn-around time is very slow. Numerical simulation is avery viable alternative to experiment, since it does not suffer from these weaknesses. From the electronic devicemodeling community, two approaches are being followedin the attempt to answer questions about quantum effects inelectronic devices: the addition of quantum corrections toconventional device models such as DD, and the development of fully quantum mechanical models for electronicdevices. However, existing simulation tools currently cannot provide the needed information for two reasons: 1)converting a new device model (including quantum effects)into functioning simulation software is very time-consuming, and 2) the required computational resources areimmense. Both of these difficulties are directly addressedby this project, the goal of which is the rapid and accurate1: IntroductionElectronic devices have decreased in size and switchingtime by many orders of magnitude over the past threedecades. In spite of this, the drift-diffusion (DD) model ofelectronic device operation is still used in nearly all line-ofbusiness device simulations [1]. The reason is that the DDmodel has adequately explained or predicted the behaviorof commercially important electronic devices through thisrapid technology advancement. Because the DD model hasmaintained reasonable accuracy, the development of new(smaller) device generations using simple scaling laws anda few experimental iterations to optimize performance andyield has also worked very well through this advancement.However, concern is increasing about how quantumeffects will impact electronic device operation as progresscontinues along the SIA roadmap through 2010, which predicts that MOSFET gate lengths will then be only 70 nm[2]. The increasing significance of quantum effects in theseultra-small devices (see Figure 1), such as tunnelingthrough gate oxides, inversion layer energy quantization,barrier proximity exclusion, and wave-like transport ofelectrons over short distances, has called into question theadequacy of the classical DD model (and other classicalmodels) as down-scaling continues. Technology leaders1

Simulation of Ultra-Small Electronic Devices: The Classical-Quantum Transition Regioninvestigation of quantum effects in near-future electronicdevices.This project addresses the first issue by advancing thetrend in software development away from writing huge single-purpose software packages, and towards the use ofextensible software packages and generic modules, inorder to rapidly implement and investigate new electronicdevice models including quantum effects. In particular, thisproject will draw upon the wide array of highly functionalnumerical simulation software and expert personnel thatNAS has accumulated in its pursuit of advanced aerospacesimulation and parallel numerical code development. Relevant NAS software resources include parallel equationsolver routines for linear and non-linear systems, a 3-DPoisson equation solver, advanced dynamic griddingcodes, computational fluid dynamics (CFD) codes, anddata visualization codes. Use will also be made of appropriate third-party numerical computation tools and codemodules.With the formation of the SDM group, an additionalresource is the combined knowledge within the group ofmany electronic device simulation approaches, includingvarious classical models (drift-diffusion, hydrodynamic,and Monte-Carlo) and quantum models (Wigner function,Green’s function, transfer matrix, and density matrix). Thisknowledge and the associated codes will allow collaboration and code-sharing that will accelerate progress by eachapproach.The objective of device modeling is to produce, as efficiently as possible, accurate predictions of device operation. Thus, the productive tasks of the device modelingphysicist are developing accurate and computationally feasible models of the physics of interest, and analysis of simulation results. The goal of collaboration and code reuse inthe NAS SDM Program is illustrated in Figure 2: to maximize the fraction of time spent on these “high-level” tasks,while minimizing the “low level” work of writing anddebugging code. The traditional approach to electronicdevice modeling of spending years writing monolithic,“vertical” simulation codes (which only implement a singlephysical model) line-by-line from the ground up usuallyresults in the opposite distribution of effort, and correspondingly slow progress.The modular, collaborative approach is being increasingly used in software development, and will be extendedas much as possible to device simulation tool developmentin this project. This goes well beyond the use of Netlib routines [3] to implement numerical functionality, since thisproject also seeks to leverage all of the NAS softwareresources listed previously.The second reason for the inability of device simulationtools to answer questions about quantum effects in electronic devices is that accurate simulation of quantumBryan A. Biegel100Analysis% of elConstructionProductiveFigure 2: High-Level vs. Low-Level TCADThe most productive TCAD research takes the shortest path between defining the physics of the systemand analyzing simulation results. High-level TCAD tooldevelopment greatly reduces unproductive time,including derivation of the numerical model, programming, and debugging. Some unproductive tasks mayincrease somewhat, including researching and incorporating third-party code modules and computationtime using more generic code.effects in commercially important devices requires hugecomputational resources, both in terms of memory andCPU cycles [4]. Such large computations are most feasiblyhandled by vector or parallel supercomputers, since manynumerical and graphical libraries which perform the vastmajority of the computation can be (and have been) efficiently vectorized and parallelized.This project addresses the second device modeling challenge by utilizing available computation resources at NAS,including Cray C90s and J90s vector machines, and IBMSP2 and SGI Origin 2000 parallel machines [5]. Many ofthe NAS software resources mentioned above are designedto take advantage of large parallel computation systemssuch as those at NAS. Note that the availability of verypowerful computation hardware makes it reasonable tofocus on rapid model implementation, even if resourceusage is increased somewhat. This combination of rapidlydeveloped software and powerful hardware will bring previously infeasible computations such as 2-D and 3-D quantum simulations within reach. More importantly, it willfinally allow the questions about quantum effects in currentand future electronic devices to be answered.The principal test device for this project will be theMOSFET, in which quantum effects are the highest concern, due to its dominance in electronics in the near future(the focal time-frame in this project) and to the wide range2

Simulation of Ultra-Small Electronic Devices: The Classical-Quantum Transition Region2: Quantum Corrected Transport Modelsof quantum effects which are increasing in significance inthis device (see Figure 1). Other projects in the NAS Semiconductor Device Modeling (SDM) Program [6] focus onlonger term quantum simulation approaches and devices.One goal of the NAS SDM Program is cover the entirerange from classical devices and physics to purely quantumcomputing. This spectrum is described in terms of particular (proposed or demonstrated) electronic devices in Table1. Note from Table 1 that as quantum (wave transport)effects become more fundamental to device operation,classical effects (due to inelastic scattering) become moredetrimental to proper device operation, and vice-versa.The preceding paragraphs describe the motivation forthis study of quantum effects in near-future electronicdevices and the general approach that will be taken. Theremainder of this document develops the specific tasks andplans for this project in more detail. The two specific taskseach pursue one of the approaches being taken by the electronic device modeling community to answer the industry’squestions about quantum effects in these electronicdevices: adding quantum corrections to classical electronicdevice models (Section 2), and using a fully quantummodel (Section 3). Finally, Section 4 contains a discussionof issues which continue to shape our approach in thiseffort at NAS to develop a widely useful electronic devicesimulation capability in general, and a quantum effect andquantum device simulation capability in particular.As stated above, quantum effects such as those depictedin Figure 1 will increasingly affect electronic device operation as devices are scaled to smaller and smaller dimensions. As a result, electronic device models based onclassical mechanics, such as drift-diffusion (DD), hydrodynamic (HD), and Boltzmann transport equation (BTE), arebecoming progressively less accurate. At the same time,the increasing cost of experimental R&D with smalldevices makes it imperative to use device modeling to agreater extent in the advancement of electronics into thefuture. One way to reconcile these incompatible trends(maintain accuracy of device models in the face of increasing quantum effects) is to add some form of quantum correction to the classical models. The main strength of thisapproach is that it retains all of the accumulated experienceand refinement that has made classical device models efficient, robust, and acceptably accurate for past and currentelectronic devices such as the MOSFET. The main weakness is that an independent approach is required to determine when the quantum correction is accurate, and underwhat conditions it too breaks down. This weakness isaddressed by the task discussed in Section 3.Many forms of quantum corrections to classical electronic device models have been proposed or implemented.These include MOSFET-specific quantum corrections [7,8, 9, 10, 11, 12] and generic quantum corrections to thedrift-diffusion [13], hydrodynamic [14, 15, 16], and Boltzmann transport equation [17] models.It is impossible for a researcher to single-handedlyimplement and adequately investigate more than one ortwo of these quantum correction approaches. [This fact isfurther discussed in Section 4.] Unfortunately, choosingone or a few approaches from the wide array is not straightforward. The main trade-off between models is computational efficiency versus accuracy and generality. Differentquantum correction approaches are undoubtedly preferablefor various device sizes, device types, or simulation tasks.Given that the strength of NAS in large numerical computations is to be exploited in this project, the choice in thiscase will favor accuracy and generality, at the probableexpense of higher computational cost. The two methodsthat appear to best fit this description are a 3-D density-gradient quantum correction to the DD model, and a 3-Dquantum-corrected HD model. These will be the first quantum correction models implemented in this task.Even having chosen just two quantum correction modelsto investigate, these models should be implemented asexpeditiously as possible. This task will therefore use ageneral PDE solver called PROPHET [18] (and possiblysimilar tools) to quickly implement and investigate thesemodels. Rapid model implementation is further discussedTable 1: Classical to Quantum Electronic DevicesClassical (inelastic scattering) effects become moredetrimental, and quantum (wave transport) effectsmore essential, as devices transition from classical toquantum. Note: HET hot electron transistor, QWLD quantum well laser diode, QUIT quantum interference transistor, SQUID superconducting quantuminterference device, SET single electron EffectsMOSFET, BJTDominantParasiticMODFET, HET,QWLDDominantUsefulRTD, RTTSignificantSignificantQUIT, SQUIDParasiticDominantQuantum Computation-killerExclusiveBryan A. Biegel3

Simulation of Ultra-Small Electronic Devices: The Classical-Quantum Transition Regionin Section 4.The density-gradient quantum correction to the DDmodel will be investigated first in this task, since it shouldrequire the less time to implement and fewer computationalresources. Indeed, implementation of the 3-D DG model inPROPHET is already underway. The DG model formalizesthe quantum mechanical requirement that wavefunctions,and thus carrier densities, can not change abruptly versusposition. For example, classically, carriers can reach veryhigh densities directly against the MOS gate oxide in theinversion layer, and drop to zero just inside the oxide.Quantum mechanically, carrier wavefunctions are nearzero in the oxide, and they must decrease smoothly towardszero in the neighboring inversion layer. The result is thatthe inversion charge is smoothed out and forced away fromthe gate oxide by some (classically unknown) distance,decreasing gate capacitance and thus MOSFET transconductance. The DG model can also model quantum tunneling.The mathematical description of the DG model is a simple extension of the classical DD model. The classical DDmodel can be written: ( ε ψ ) – ρ – q ( p – n ND–tronic devices.After implementing and investigating the density-gradient model, the quantum hydrodynamic (QHD) model willbe implemented in 3-D using PROPHET. The idea of theHD transport model (classical or quantum) is that, ratherthan resolve the momentum distribution of carriers exactly,the momentum distribution is assumed to be a mathematically simple modification of the equilibrium. Under thisassumption, the distribution can be described by a fewcharacteristic values. The equations for these values arederived by taking one or more moments of the Boltzmann(classical) or Wigner function (quantum) transport equation. The standard HD electronic device model uses threemoments, with the resulting characteristic values beingdensity, average velocity, and average energy.We now describe the QHD model mathematically. Several forms of the HD and QHD transport equations havebeen proposed. For illustration purposes, we present onewhich has been written in both classical and quantum corrected form. In classical form, for a spatially-independenteffective mass, and in 1-D, this HD model is [17]: ρ ρp ------ 0------ t x m N A) Jn n----- -------------- ( – n µ n ψ D n n ) ,q t Jp p------ – --------------- ( pµ p ψ D p p ) tq2 ( ρp ) U ( ρp ) ρ p ( ρkT ) -------------- -------------- --------- ρ t c x x t x m (1) W W pW ρpkT ρp U--------- ------------- ------------- -------- t c t x m x m m xwhich equations are solved for electrostatic potential ψ ,electron density n , and hole density p . Mathematically,the DG model [13] modifies the two continuity equationsby adding a “quantum potential” (the Bohm potential [19])to ψ : n----- ( – n µ n ψ*n D n n ) t,(2) p------ ( pµ p ψ *p D p p ) t2h 2 pψ*p ψ – -------------- -------------- 6m *p q p , (4)23ρkT ρ pW ------------- --------2m2which are solved for carrier density ρ , average momentump , and average energy W . A full mathematical HDdescription including three moments each for electrons andholes requires seven equations (including the Poissonequation).The quantum-corrected system of HD transport equations corresponding to (4), as derived from the Wignerfunction-corrected BTE [17], are:where2 2 nhψ*n ψ -------------- ------------- 6m*n qn Bryan A. Biegel ρ ρp ------ 0------ t x m .(3)2 Q ( ρp ) ρ p --------- ρ U ---- ( ρkT )-------------- x 3 x t x m ( ρp ) -------------- t cThe DG model has only been implemented in 1-D, usually assuming an infinite oxide band gap. This task willstudy the DG model in 3-D, with a physically correct(finite) oxide band gap. In this way, gate oxide tunnel current can be investigated, along with other quantum effectsin MOSFETs (see Figure 1) and other “classical” elec-Q W pW ρpkT ρp ------------- -------------- U ---- -------- 3 t x m x m m x 2ρh 1 ρ p W– ---------- --- ---- -------- 12m x ρ x x m t c4,(5)

Simulation of Ultra-Small Electronic Devices: The Classical-Quantum Transition Region(6)Schrödinger EquationQuantum Transportwhere Q is the Bohm quantum potential. This (or a similar) QHD model should give more accurate electronicdevice simulations than purely classical models, but theexpense of the computation may be very high, and numerical robustness may suffer. Analysis of such expectationswill be an important aspect of the investigation of quantum-corrected classical models in this task.EquationsTransfer MatrixScattering MatrixGreen’s Functions Density MatrixWigner FunctionPath IntegralFigure 3: Partial Quantum Mechanics Family TreeRelationships between quantum mechanics formulations relevant to the simulation of electronic devicesare shown. Models implemented in existing NAS 1-Dsimulation software tools are shown in bold.3: Quantum Models with ScatteringEven with the near-term device modeling focus of thisproject, more accurate models of quantum effects in electronic systems are needed to complement quantum correction models such as those described above. These moreaccurate models will be used to determine the accuracy andlimitations of the quantum correction models, and possiblyto derive more accurate and computationally efficientquantum correction models. The second specific task inthis project, described in this section, will use a fully quantum model to accomplish these goals.Figure 3 shows many of the quantum formulations thathave been used for electronic device modeling. As with thequantum correction models, it is only possible for a singleresearcher to implement and adequately investigate one ortwo of these models, so a choice must be made amongthese formulations. Because classical devices inherentlyexhibit significant inelastic scatteri

longer term quantum simulation approaches and devices. One goal of the NAS SDM Program is cover the entire range from classical devices and physics to purely quantum computing. This spectrum is described in terms of particu-lar (proposed or demonstrated) electronic devices in Table 1. Note from Table 1 that as quantum (wave transport)

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