AIR BEARING - Canon Global

AIR BEARINGRotation Precision Exceeding Sub-Microns, High Rigidity, High Endurance------ Canon’s Air Bearings Have Them AllCanon’s air bearings, developed originally as a key component in super-high precision manufacturingtechnology, have a special structure that gives them superior characteristics such as high rigidity, high precision,and high endurance.Motion Precision, Reproducibility ComparisonNRRTIRAir bearing with Canon motor (0.05µm/div)NRR 0.01µm N 3500rpmAir bearing (1mm/div)Ball bearing (1mm/div)Rotational precision (15-rotation component)The rotation precision of an air bearing is designed to be 0.05µmmaximum, much more precise than ball bearings. Another factorthat is crucial in achieving high precision is that the reproducibility be 0.01µm maximum and that this value can be maintained.8-1Canon’s air bearings use porous chokes in their bearings, so evenunder normal factory supply-air pressure (490 kpa), they aresufficiently rigid for common use. Compared with bearings withorifice chokes and self-formed chokes, the rigidity per unit area ishigher, the flow consumption is about ten times (one digit)smaller, and the damping capacity is also higher than that ofbearings with other types of chokes.

General Characteristics Compared for Various BearingsAdvantagesAir BearingBall bearingHydrostatic bearing High rotation precision, nodeterioration Standardized High rotation precision, nodeterioration Little friction; little temperatureincrease Low cost No vibration source Strong against collision impact No vibration source High rigidity and damping capacity Wide range of operationaltemperature; clean operation Strong against collision impact Capable of high-speed rotation No stick slipDisadvantages No stick slip Weak against collision impact Low rotation precision, deteriorates An external auxiliary unit (aircleaning unit) is necessary Becomes a vibration source High cost Friction; temperature increase High-speed rotation leading tosignificant temperature increase Oil deteriorates and gets polluted An external auxiliary unit (hydraulicgenerator) is necessary High costSPECIFICATIONS TABLEAir Pressure 490kpa al rigidityAxial rigidityNormal radial loadMax radial loadNormal axial loadMax axial dial rotation .050.09Axial rotation .050.05Max rotation 5,0003,0002,5001,500500612Air consumption r/min (0 0-4 1.925X10-48-2

AIR BEARINGEXTERNAL DIMENSIONS Canon Air Bearing R-seriesD8 (also opposite direction)15 Reverse D7L42-D10Vacuum intake holeD9 air supply16PF1/8 vacuum 102X3-M62X3-M8stop facing 8 stop facing 11 stop facing 15 stop facing 15 stop facing 15 stop facing 15 stop facing 8 stop facing 11depth 24depth 38depth 47depth 61depth 60depth 75depth 24depth 38D82X6-M4depth 122X6-M5depth 182X6-M6depth 202X6-M6depth 202X12-M8depth 202X12-M8depth 182X6-M4depth 122X6-M5depth Note 1: * Vacuum intake type; 80RV, 100RVNote 2: ** ø150 is 19mm from both ends. Inside is ø120.8-3D4D1H7D6D3h7D5D23

AIR BEARING AB-30RAir discharge hole (30R),M5 depth 5, vacuum hole (30RV)ø2 vacuum intake hole (30RV)(46)308815ø38ø30ø45ø242X3 - M3 depth 5(also opposite direction)M5 depth 5,air supply hole2X3 - M3 depth 5(also opposite direction) AB-40RVC3-4.5 spot facing 8,depth 4.440 PCD6715 AB air discharge andvacuum hole: M5 depth 510Bearing air discharge:M5 depth 436103-M3, depth 5PCD2628.5ø36ø40ø80ø3645 5 ø183-M3 depth 43.5 drill depth 0.5Chuck vacuum holePCD28(3 locations)5 Chuck air supplyM5 depth 40ø2 vacuum intake hole(connects to )ø53 -0.13-M3 depth 3, 3.5 drill depth 0.5PCD246-ø4.5Balance holeVacuum hole: M5 depth 411Air supply hole:M5 depth 53-ø2.7 Chuck air supply holePCD282 AB-50R/AB-50RVM5 depth 5, air supply hole2-ø2.7 vacuum intake hole (50RV)(60)36121218ø45ø55ø75ø15H7ø672X3 - M4 depth 8.5(also opposite direction)Air discharge hole (50R),M5 depth 5, vacuum hole (50RV)2X6 - M3 depth 6(also opposite direction)8-4

AIR BEARING AB-50LRVC966-M3 (for balancing)2-ø2.7vacuum hole0.05PCD491272126-M3 (for balancing)PCD490.05Air supply hole6-M3 depth 6, equallyPCD4555ø75ø15H7ø55ø15H76-M3 depth 6, equallyPCD456-M4 depth 8, equallyPCD67 AB-80R6-M4 depth 8, equallyPCD67802236PF1/822(Air supply hole)ø20H7ø60ø84h7ø80ø110PCD962thep g 8ll d cindri ot fa76sp3-M erse 4rev pth 2ed2x6-M4 depth 12, 5 drill depth 2(equally)3-M6 spot facing 8 depth 2.4reverse 7 drill depth 2 AB-400R3-PF1/4 air supply hole30 4-13 through22050(70)30 12-M6 depth nent magnetchuck tableø400ø350ø1202-Air dischargeholeø370102012-M6 depth 25

AIR BEARINGInspection Method Rigidity measurement Pressure is applied to the rotor in the cylinder and displacement is measured at the opposite side with anelectric micrometer.Axial rigidityRadial rigidityDisplacement4Radial load - displacementcharacteristics30R50R oadAxial load - displacementcharacteristics30R 50R80R4Displacement[µm]392 [N]40 oad1568 [N]160 [kgf] Rotational precision measurement Measure the Lissajous' using a glass spherical gauge (precision 0.012µm). Precision includes the sphericalgauge.Radial rotational precisionAxial rotational precisionAxial rotational precisionGauge eccentricity(0.06µm/div)(0.125µm/div) Edge runout precision measurement Displacement is measured with an electric micrometer at a location at the fixed distance from the center ofthe thrust plate.Standard edge runout precision is 1µm or less. Edge runout precision of 0.3µm or less is an optional specification.1 rotation(0.125µm/div)8-6

Air Bearing Spindle MotorOptimized for disk production, inspection Compact, keeping high accuracy rotation of air bearing by using built-in motor. Adopted DC brushless motor, realized low generation of heat, high precision rotation. Smooth rotation with very few cogging by using coreless motor.APPLICATION EXAMPLES for Measurement for ProcessingSpinstand for HDD, Spinstand for optical disk, PolygonGrinding machine, cutting machine, Main axial ofmirror inspectionmachine tool OtherHigh precision rotary table, θ-tableSPECIFICATIONS TABLEModelBearing typeSP-5011AB2SP-5083KLMSP-250M10Canon Air Bearing AB36RVCanon Air Bearing AB50RVCanon Air Bearing AB50LRVCanon Air Bearing AB250RRotation speedMax 15,000rpmMax 22,000rpmMax 10,000rpm500 2,500rpmEncoder pulse2,0482,04883,3281,0240.001% or less0.001% or less0.001% or lessJitter 0.01% or lessRamp up time1.5sec or less (0 8,000) (3.5"HD) 16sec or less (0 20,000) (no load) 8sec or less (0 10,000) (no load)30sec or less (0 2,500) (no load)Ramp down time1.5sec or less (8,000 0) (3.5"HD) 16sec or less (20,000 0) (no load) 7sec or less (10,000 0) (no load)30sec or less (2,500 0) (no load)Dimensionø54x142 mmø75x176 mmø75x211 mmø378x490 mmVoltageDC24V 5%DC24V 5%DC24V 5%3 phase AC200V 10%Current10A (max)10A (max)10A (max)75A (max)Motor typeTorque constantThrust permission loadCoreless DC servo motorCoreless DC servo motorCoreless DC servo motorSynchronized AC servo motor0.010Nm/A (100gfcm/A) 10%0.0009Nm/A (86gfcm/A) 10%0.0011Nm/A (115gfcm/A) 10%24.3Nm/A (248kgfcm/A) 10%41.1N (4.2kgf) or over70.6N (7.2kgf) or over70.6N (7.2kgf) or over2352.0N (240.0kgf) or overAir consumption6 Nr/min or less6 Nr/min or less6 Nr/min or less35 Nr/min or lessCompressed eight8-7SP-3611AB2

AIR BEARING SPINDLE MOTOREXTERNAL DIMENSIONS SP-3611AB245.0 141.5ø2626ø54ø45ø3656ø54ø70ø6284460.0 3-M3,120 pitch5487.56-M3,60 pitch118.46-M3 SP-5011AB2452-ø2.783.56-M3PCD45ø97ø75Air In93-M4PCD674-ø5.5840 20 SP-5083KLM8-ø5.5PCD86 0.15 45 Pitch2-ø2.7(holes for vacuum)0.00111 0.0523 0.01188(199)6-M3 depth6111(72)170ø75-0.2(ø55)ø960ø97 -0.015(ø75)11Fixture forShippingVacuum3-M4 depth11(for Shipping)PCD67 0.1Motor cableSensor 12-M8, depth 20P. C. D 190.5 30 pitch32626419ø378ø247.6ø255 h776 1 40 43ø29847ø35 troughø238164ø1186-ø11 trough, ø17.5 spot facing, depth 15P. C. D 352, 60 pitchø300 SP-250M102-ø8, ø9 motor cable8-8

Bearing type Canon Air Bearing AB36RV Canon Air Bearing AB50RV Canon Air Bearing AB50LRV Canon Air Bearing AB250R Rotation speed Max 15,000rpm Max 22,000rpm Max 10,000rpm 500 2,500rpm Encoder pulse 2,048 2,048 83,328 1,024 Jitter 0.