CMOS Based Terahertz Instrumentation For Imaging And Spectroscopy

CMOS based terahertz instrumentation for imaging andspectroscopyCitation for published version (APA):Matters - Kammerer, M. (2014). CMOS based terahertz instrumentation for imaging and spectroscopy. InProceedings of the International conference on Technology and instrumentation in particle physics (TIPP 2014),02-06 June 2014, Amsterdam, The NetherlandsDocument status and date:Published: 01/01/2014Document Version:Accepted manuscript including changes made at the peer-review stagePlease check the document version of this publication: A submitted manuscript is the version of the article upon submission and before peer-review. There can beimportant differences between the submitted version and the official published version of record. Peopleinterested in the research are advised to contact the author for the final version of the publication, or visit theDOI to the publisher's website. The final author version and the galley proof are versions of the publication after peer review. The final published version features the final layout of the paper including the volume, issue and pagenumbers.Link to publicationGeneral rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright ownersand it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. Users may download and print one copy of any publication from the public portal for the purpose of private study or research. You may not further distribute the material or use it for any profit-making activity or commercial gain You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the “Taverne” license above, pleasefollow below link for the End User Agreement:www.tue.nl/taverneTake down policyIf you believe that this document breaches copyright please contact us at:openaccess@tue.nlproviding details and we will investigate your claim.Download date: 08. Jun. 2022

CMOS based terahertzinstrumentation for imaging andspectroscopyTIPP, 2nd of June 2014Dr. Marion Matters-KammererElectrical EngineeringCenter of Wireless Technology Eindhoven

Overview2IntroductionTerahertz unique propertiesTechnology evolutionTerahertz roadmap initiativeMiniaturized terahertz systems for imaging and spectroscopyNonlinear mixing in CMOS technologyTerahertz imaging cameraSpectroscopy system3D microsystem integrationFree space network analyzer for application testingConclusions

THz radiation: Unique properties1 THz 1000 GHz3 THz radiation can penetrate through non-polar materials (e.g. plastics, wood, clothing) THz imaging has sub-mm resolution THz spectroscopy identifies specific materials (e.g. explosives) THz radiation is non-ionizing (and therefore safer than X-ray) THz radiation is strongly absorbed polar materials (e.g water) Enabler for extreme high data rate communication Applications in the THz range continue to increase rapidly

Terahertz characterization techniques4Terahertz imagingCW or pulsed systemsIntensityonlyIntensityandphaseAmplitude and phaseimagingTerahertz tomographyPulsed systemsTerahertz spectroscopyCW or pulsed systemsIntensityonlyIntensityandphaseBroadband detectionTransmission or reflection measurements are both valuable

Professional and consumer applications5Market tionresearchConsumerApplications 10 990-?1st technology switch:Specialized equipmentMedium quantitiesHigh margins20132nd technology switch:Standard technologiesHigh quantitiesLower marginsFutureMarketintroduction

Terahertz for large science6SRON: Dutch space research organization:Terahertz research group in GroningenMiniaturized terahertz sensors for space applicationsPlasma physics research at TU/e:Experiments at ITERNuclear fusion experimentsTerahertz sensors for fusion controlTerahertz for particle physics:Let’s exchange ideas on thisNon-destructive testing of thin layers?Radiation sensors in the terahertz domain?Tokamak reactorHTSM roadmap “Advanced Instrumentation” mentions Terahertz as one of thekey new technologies, potential for funding of research projects.

CWT/e: Short range terahertz observation program7Center of Wireless technology Eindhoven (CWT/e) is an interface between:1) Users of Terahertz technology2) Terahertz research within TU/e3) New research results and industrial partnersResearch focus:1) CMOS integrated transmitter-receiver systems at mm-wave and terahertz2) Beam steering systems (2D and 3D imaging)3) Lab-building for mm-wave and terahertz measurementsTerahertz Applications:1) Industrial process control (non-destructive testing, inline process monitoring)2) Large volume consumer applications (e.g. mobile phone/tablet, 3D scanners)3) Medical applications (spectroscopy and imaging, minimal invasive surgery)4) Growing interest form large science applications (ITER, SRON)

Dutch terahertz roadmap initiative8Goal: Form strong networks on terahertz applications and technologieswith research institutes and international companiesTU/e CWT/e is leading the initiativeInvolved research organizations (growing):TU EindhovenDutch Space Research Organization (SRON)TU DelftIn discussion with many companies Agriculture industryPackaging industry

Overview9IntroductionTerahertz unique propertiesTechnology evolutionTerahertz roadmap initiativeMiniaturized terahertz systems for imaging and spectroscopyNonlinear mixing in CMOS technologySpectroscopic imaging cameraSpectroscopy system3D microsystem integrationFree space network analyzer for application testingConclusions

Research on miniaturized THz systemsOptical setupsbased onfemtosecondlasersAll-electronic approach:CMOS based generationand detection of the THzsignalsHybrid approach:miniaturized/integratedopto-electronics sourcesand receiversMiniaturizedandintegratedTHz systemsNew THz applications10

Frequency limits of CMOS transistors11timeline

Terahertz generation and detection12SourcesOscillator basedfundamental oscillators: limited by fT and fmaxharmonic oscillators: filter out the base frequency and use the harmonicsMultiplier basedGenerate harmonics in a nonlinear deviceRequire a strong input signalReceivers“Traditional non-mixing” techniqueslimited by fT and fmaxMixing in Schottky diode based detectorscan work beyond the transistor frequency limitsMixing in FET detectorsbroadband direct conversion demonstratedpassive imaging detectors not sensitive enoughBolometers integrated into CMOS technologyRequire special postprocessing (etching of the Silicon)

Self-mixing in CMOS transistors13i ds t g ds v ds t v ds t w Coxide v gs t VTh v ds t L2 w2 Coxide v RF v RF VG VTh Lv ds t v RF t v gs t Vg v RF t v RF t VRF sin 2 fin t Linear term!Quadratic term!Ids contains signals at 0, fin and 2 fin .

2012: World’s first CMOS terahertz camera14H. M. Sherry, U. R. Pfeiffer, et al., University of Wuppertal32 by 32 pixels, differential source coupled FET direct conversion

Key specs of the CMOS terahertz camera15H.M. Sherry, U. R. Pfeiffer, University of Wuppertal, Germany

Schottky diodes in CMOS: cross section- Nonlinearity originates from the I(V) curve of the diode- Speed of the diode originates from the parasitics and diode size16

Schottky diodes in CMOS:Reverse bias diode model17

EU-project ULTRASystem overview18f 6 GHzf 6 GHztf 6 GHzttfTxantennaOscillatorf 6 rDifferentiatorAmplifierRXttf 6.001 GHzf 6.001 GHzf 6.001 GHzt

NLTL: Measurement ResultsEU-project ULTRA19Linear Tx LinedLinear Tx LineCd(V)Linear Tx LineCd(V)Cd(V)Input: SinusoidPin 18 dBm6 GHzL. Tripodi, X. Hu, R. Goetzen,M.K. Matters-Kammerer et al.,Broadband CMOS Millimeter-WaveFrequency Multiplier withVivaldi Antenna in 3-D Chip-ScalePackaging,Trans. on MTT, Vol. 60, no. 12,part 1, pp. 3761-3768, 2012

EU-project ULTRANonlinear transmission line transmitter20 THz CMOS integrated circuit Micro-machined external Vivaldiantenna Highly integrated transmitter 3D CSP-based THz packaging Bandwidth 6 GHz – 300 GHz Transmission and Reflection modesolutionsX. Hu, L. Tripodi, M.K. Matters-Kammerer et al.,65-nm CMOS Monolithically Integrated Subterahertz Transmitter,Electron Device Letters, pp. 1182-1184, Vol. 32, issue 9, 2011.

EU-project ULTRATerahertz imaging with NLTL source21Visible200 GHz imageProf. P. Haring-Bolivar

On-chip sub-THz generator and sampler22

Output spectrum of nonlinear transmission line23Input signal: f 20 GHz, 18 dBm

Hybrid integration concept24L. Tripodi , M. Matters-Kammerer, et al. Eurosensor 2012

Terahertz microsystem: Dynamic range25

Overview26IntroductionTerahertz unique propertiesTechnology evolutionTerahertz roadmap initiativeMiniaturized terahertz systems for imaging and spectroscopyNonlinear mixing in CMOS technologySpectroscopic imaging cameraSpectroscopy system3D microsystem integrationFree space network analyzer for application testingConclusions

270 GHz to 370 GHz free space network analyzer27

Free space Network analyzer2890 GHz to 120 GHz setupUp:Tripler antennaDown: downconcersionfor operation in WR 2.8

Amplitude images at 345 GHz29D 10,05mmMetal platewithholesD 6mmD 2,7mmD 3,5mmPlastic cardwithmetalribbonD 4,5mm

Publications30M. K. Matters-Kammerer et al., RF Characterization of Schottky Diodes in 65-nm CMOS,IEEE TRANSACTIONS ON ELECTRON DEVICES, Volume: 57 Issue: 5 Pages: 10631068 , May 2010.X. Hu, L. Tripodi, M.K. Matters-Kammerer, et al., 65-nm CMOS Monolithically IntegratedSubterahertz Transmitter , IEEE ELECTRON DEVICE LETTERS Volume: 32 Issue:9 Pages: 1182-1184 , Published: SEP 2011.L. Tripodi, X. Hu, R. Goetzen, et al., Broadband CMOS Millimeter-Wave FrequencyMultiplier with Vivaldi Antenna in 3-D Chip-Scale Packaging, Trans. MTT, Vol. 60, no. 12,part 1, pp. 3761-3768, 2012.L. Tripodi, M.K. Matters-Kammerer, 26th European Conference on Solid-StateTransducers (Eurosensors), Broadband terahertz and sub-terahertz CMOS modules forimaging and spectroscopy applications, Volume: 47 Pages: 1491-1497, Sep. 2012.L. Tripodi, M.K. Matters-Kammerer, et al., Extremely wideband CMOS circuits for futureTHz applications, Analog Circuit Design, ISBN 978-94-007-1926-2, Springer, 2012.

Conclusions31Focus on CMOS integration of terahertz circuitsExcellent contacts to companies in the Brainport area and abroadLeading the Dutch terahertz roadmap initiativeLong term view on terahertz integration in CMOS technologyCooperation opportunitiesJoint lab building and demonstrationsJoint research project proposals (Dutch and European)PhD and master projects/exchangesJoint professional educational program

2012: World's first CMOS terahertz camera 32 by 32 pixels, differential source coupled FET direct conversion H. M. Sherry, U. R. Pfeiffer, et al., University of Wuppertal . Transducers (Eurosensors), Broadband terahertz and sub-terahertz CMOS modules for imaging and spectroscopy applications, Volume: 47 Pages: 1491-1497, Sep. 2012. .